DE60016761D1 - Interferometrische konfokale nahfeld-abtastmikroskopie - Google Patents

Interferometrische konfokale nahfeld-abtastmikroskopie

Info

Publication number
DE60016761D1
DE60016761D1 DE60016761T DE60016761T DE60016761D1 DE 60016761 D1 DE60016761 D1 DE 60016761D1 DE 60016761 T DE60016761 T DE 60016761T DE 60016761 T DE60016761 T DE 60016761T DE 60016761 D1 DE60016761 D1 DE 60016761D1
Authority
DE
Germany
Prior art keywords
interferometric
confocus
near field
mask
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60016761T
Other languages
English (en)
Other versions
DE60016761T2 (de
Inventor
Allen Hill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zetetic Institute
Original Assignee
Zetetic Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Institute filed Critical Zetetic Institute
Priority claimed from PCT/US2000/021090 external-priority patent/WO2001009662A2/en
Publication of DE60016761D1 publication Critical patent/DE60016761D1/de
Application granted granted Critical
Publication of DE60016761T2 publication Critical patent/DE60016761T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/0045—Recording
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0068—Optical details of the image generation arrangements using polarisation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10532—Heads
    • G11B11/10534—Heads for recording by magnetising, demagnetising or transfer of magnetisation, by radiation, e.g. for thermomagnetic recording
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10532—Heads
    • G11B11/10541—Heads for reproducing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/005—Reproducing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1356—Double or multiple prisms, i.e. having two or more prisms in cooperation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B7/1374—Objective lenses
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1381—Non-lens elements for altering the properties of the beam, e.g. knife edges, slits, filters or stops
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/1055—Disposition or mounting of transducers relative to record carriers
    • G11B11/1058—Flying heads
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B2007/13727—Compound lenses, i.e. two or more lenses co-operating to perform a function, e.g. compound objective lens including a solid immersion lens, positive and negative lenses either bonded together or with adjustable spacing
DE60016761T 1999-08-02 2000-08-02 Interferometrische konfokale nahfeld-abtastmikroskopie Expired - Fee Related DE60016761T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US14719699P 1999-08-02 1999-08-02
US147196P 1999-08-02
US22120000P 2000-07-27 2000-07-27
US221200P 2000-07-27
PCT/US2000/021090 WO2001009662A2 (en) 1999-08-02 2000-08-02 Scanning interferometric near-field confocal microscopy

Publications (2)

Publication Number Publication Date
DE60016761D1 true DE60016761D1 (de) 2005-01-20
DE60016761T2 DE60016761T2 (de) 2005-12-15

Family

ID=26844679

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60016761T Expired - Fee Related DE60016761T2 (de) 1999-08-02 2000-08-02 Interferometrische konfokale nahfeld-abtastmikroskopie

Country Status (5)

Country Link
US (3) US6606159B1 (de)
EP (1) EP1203257B1 (de)
AT (1) ATE285081T1 (de)
DE (1) DE60016761T2 (de)
TW (2) TW579435B (de)

Families Citing this family (101)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100701763B1 (ko) * 2002-09-24 2007-03-29 주식회사 케이티 단거리무선통신망을 이용한 버스 내 승객을 위한 정류소도착소요시간 안내 방법
US6403124B1 (en) * 1997-04-16 2002-06-11 Sigma-Tau Industrie Farmaceutiche Riunite S.P.A. Storage and maintenance of blood products including red blood cells and platelets
US7541201B2 (en) 2000-08-30 2009-06-02 Kla-Tencor Technologies Corporation Apparatus and methods for determining overlay of structures having rotational or mirror symmetry
US7317531B2 (en) 2002-12-05 2008-01-08 Kla-Tencor Technologies Corporation Apparatus and methods for detecting overlay errors using scatterometry
JP2002134396A (ja) * 2000-10-25 2002-05-10 Sony Corp 半導体装置の製造方法および半導体パターン自動調節装置
DE10156506C1 (de) * 2001-11-16 2003-05-22 Leica Microsystems Verfahren zur Erzeugung eines mehrfarbigen Bildes und Mikroskop
US7177236B2 (en) * 2001-12-13 2007-02-13 Mems Optical, Inc. Optical disc head including a bowtie grating antenna and slider for optical focusing, and method for making
KR20030056573A (ko) * 2001-12-28 2003-07-04 한국전자통신연구원 고체 결상 렌즈의 경사각 측정 장치
US6691052B1 (en) * 2002-01-30 2004-02-10 Kla-Tencor Corporation Apparatus and methods for generating an inspection reference pattern
JP3932944B2 (ja) * 2002-03-27 2007-06-20 日本電気株式会社 光学素子およびそれを用いた光ヘッド
US7123035B2 (en) * 2002-04-10 2006-10-17 Credence Systems Corporation Optics landing system and method therefor
US7042577B1 (en) * 2002-07-16 2006-05-09 Actinix Architectures for high-resolution photomask phase metrology
US7274462B2 (en) * 2002-09-09 2007-09-25 Zygo Corporation In SITU measurement and compensation of errors due to imperfections in interferometer optics in displacement measuring interferometry systems
US7619562B2 (en) * 2002-09-30 2009-11-17 Nanosys, Inc. Phased array systems
US7440105B2 (en) 2002-12-05 2008-10-21 Kla-Tencor Technologies Corporation Continuously varying offset mark and methods of determining overlay
US7084983B2 (en) * 2003-01-27 2006-08-01 Zetetic Institute Interferometric confocal microscopy incorporating a pinhole array beam-splitter
EP1588120A4 (de) * 2003-01-27 2006-12-20 Zetetic Inst Interferometrische konfokalmikroskopie mit einem pihnole-array-strahlteiler
KR20050098268A (ko) * 2003-01-27 2005-10-11 제테틱 인스티튜트 트렌치의 특성을 측정하는 간섭 공초점 현미경에 사용되는누설 유도파 모드
US7164480B2 (en) * 2003-02-04 2007-01-16 Zetetic Institute Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopy
US7263259B2 (en) * 2003-02-07 2007-08-28 Zetetic Institute Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavities
JP3787123B2 (ja) * 2003-02-13 2006-06-21 株式会社東芝 検査方法、プロセッサ及び半導体装置の製造方法
WO2004072695A2 (en) * 2003-02-13 2004-08-26 Zetetic Institute Transverse differential interferometric confocal microscopy
US7133139B2 (en) * 2003-02-19 2006-11-07 Zetetic Institute Longitudinal differential interferometric confocal microscopy
WO2004074881A2 (en) * 2003-02-19 2004-09-02 Zetetic Institute Method and apparatus for dark field interferometric confocal microscopy
JP2004259328A (ja) * 2003-02-24 2004-09-16 Pioneer Electronic Corp 光ピックアップ並びにこれを備えた情報再生装置
EP1609019A2 (de) 2003-04-01 2005-12-28 Zetetic Institute Verfahren zum konstruieren eines katadioptrischen linsensystems
KR20050119672A (ko) * 2003-04-01 2005-12-21 제테틱 인스티튜트 간섭계 내에서 물체에 의해 산란/반사 또는 투과된 직교편광 빔의 필드의 결합 측정을 위한 장치 및 방법
EP1608933A4 (de) * 2003-04-03 2007-03-21 Zetetic Inst Vorrichtung und verfahren zur messung von feldern rückgestreuter und vorwärtsgestreuter bzw. reflektierter strahlen durch ein objekt bei der interferometrie
DE10324478B3 (de) * 2003-05-30 2004-12-09 Leica Microsystems Heidelberg Gmbh Vorrichtung zum Ermitteln der Lichtleistung eines Lichtstrahles und Scanmikroskop
WO2005008334A2 (en) 2003-07-07 2005-01-27 Zetetic Institute Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrology
US7324209B2 (en) * 2003-07-07 2008-01-29 Zetetic Institute Apparatus and method for ellipsometric measurements with high spatial resolution
US7355722B2 (en) * 2003-09-10 2008-04-08 Zetetic Institute Catoptric and catadioptric imaging systems with adaptive catoptric surfaces
US20050111007A1 (en) * 2003-09-26 2005-05-26 Zetetic Institute Catoptric and catadioptric imaging system with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces
NL1024404C2 (nl) * 2003-09-30 2005-03-31 Univ Delft Tech Optische microscoop en werkwijze voor het vormen van een optisch beeld.
US7312877B2 (en) * 2003-10-01 2007-12-25 Zetetic Institute Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy
DE10348250A1 (de) * 2003-10-16 2005-05-12 Bosch Gmbh Robert Interferometrische Messvorrichtung
EP1721194A4 (de) * 2003-12-05 2010-01-13 Univ Pittsburgh Metallische nanooptische linsen und strahlformungseinrichtungen
TW200538703A (en) * 2004-05-06 2005-12-01 Zetetic Inst Apparatus and methods for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks
US7298496B2 (en) * 2004-05-21 2007-11-20 Zetetic Institute Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry
US7161680B2 (en) * 2004-08-16 2007-01-09 Zetetic Institute Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry
WO2006023612A2 (en) * 2004-08-19 2006-03-02 Zetetic Institute Sub-nanometer overlay, critical dimension, and lithography tool projection optic metrology systems based on measurement of exposure induced changes in photoresist on wafers
US7145663B2 (en) * 2004-09-20 2006-12-05 Zetetic Institute Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfaces
JP4423168B2 (ja) * 2004-11-02 2010-03-03 株式会社ミツトヨ 表面性状測定装置
US20060091334A1 (en) * 2004-11-03 2006-05-04 Jan-Peter Urbach Con-focal imaging system and method using destructive interference to enhance image contrast of light scattering objects on a sample surface
CN1310023C (zh) * 2004-11-10 2007-04-11 哈尔滨工业大学 三差动共焦显微三维超分辨成像方法
US7642096B2 (en) * 2004-12-20 2010-01-05 Massachusetts Institute Of Technology Liquid expansion thermometer and microcalorimeter
US7085450B2 (en) * 2004-12-22 2006-08-01 3M Innovative Properties Company Fabrication of structures in an optical substrate
WO2006084230A2 (en) * 2005-02-04 2006-08-10 Massachusetts Institute Of Technology Phase-shift masked zone plate array lithography
US7339682B2 (en) * 2005-02-25 2008-03-04 Verity Instruments, Inc. Heterodyne reflectometer for film thickness monitoring and method for implementing
WO2007008265A2 (en) * 2005-04-11 2007-01-18 Zetetic Institute Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry
US7969650B2 (en) * 2005-04-28 2011-06-28 The Board Of Trustees Of The University Of Illinois Multiplex near-field microscopy with diffractive elements
US7428058B2 (en) * 2005-05-18 2008-09-23 Zetetic Institute Apparatus and method for in situ and ex situ measurements of optical system flare
JP4538388B2 (ja) * 2005-07-21 2010-09-08 株式会社ミツトヨ 位相シフト干渉計
WO2007016682A2 (en) * 2005-08-02 2007-02-08 Kla-Tencor Technologies Corporation Systems configured to generate output corresponding to defects on a specimen
US7405832B2 (en) * 2005-08-08 2008-07-29 Zetetic Institute Apparatus and methods for reduction and compensation of effects of vibrations and of environmental effects in wavefront interferometry
US7808023B2 (en) * 2005-08-24 2010-10-05 Aptina Imaging Corporation Method and apparatus providing integrated color pixel with buried sub-wavelength gratings in solid state imagers
WO2007025147A2 (en) * 2005-08-26 2007-03-01 Zetetic Institute Apparatus and method for measurement and compensation of atmospheric turbulence effects in wavefront interferometry
WO2007059249A2 (en) * 2005-11-15 2007-05-24 Zetetic Institute Interferometer with coherent artifact reduction plus vibration and enviromental compensation
US7799491B2 (en) * 2006-04-07 2010-09-21 Aptina Imaging Corp. Color filter array and imaging device containing such color filter array and method of fabrication
US20080204580A1 (en) * 2007-02-28 2008-08-28 Micron Technology, Inc. Method, apparatus and system providing imaging device with color filter array
GB2451442B (en) * 2007-07-30 2013-03-06 Lein Applied Diagnostics Ltd Optical measurement apparatus and method therefor
EP2110076A1 (de) * 2008-02-19 2009-10-21 Helmholtz Zentrum München Deutsches Forschungszentrum für Gesundheit und Umwelt (GmbH) Verfahren und Vorrichtung zur Nahfeld-Doppelwellen-Modalitätsbildgebung
WO2010009747A1 (en) 2008-07-25 2010-01-28 Helmholtz Zentrum München Deutsches Forschungszentrum Für Gesundheit Und Umwelt (Gmbh) Quantitative multi-spectral opto-acoustic tomography (msot) of tissue biomarkers
WO2011000389A1 (en) 2009-06-29 2011-01-06 Helmholtz Zentrum München Deutsches Forschungszentrum Für Gesundheit Und Umwelt (Gmbh) Thermoacoustic imaging with quantitative extraction of absorption map
DE102009025562A1 (de) * 2008-10-20 2010-04-29 Siemens Aktiengesellschaft Verfahren zum optischen Untersuchen von Schichten
EP2389606B1 (de) * 2009-01-24 2019-08-28 Ecole Polytechnique Federale De Lausanne (EPFL) EPFL-TTO Hochauflösende mikroskopie- und photolithographievorrichtungen mit fokussierenden mikrospiegeln
WO2010096593A2 (en) * 2009-02-18 2010-08-26 Northwestern University Beam pen lithography
WO2010126790A1 (en) * 2009-04-27 2010-11-04 The Arizona Board Of Regents On Behalf Of The University Of Arizona A novel multi-point scan architecture
US20110010678A1 (en) * 2009-07-09 2011-01-13 Greyson Gilson Method and Apparatus for Reference Distribution Aerial Image Formation Using Non-Laser Radiation
EP2459987A1 (de) 2009-07-27 2012-06-06 Helmholtz Zentrum München Deutsches Forschungszentrum für Gesundheit und Umwelt (GmbH) Bildgebungsvorrichtung und verfahren zur optoakustischen bildgebung von kleintieren
US9304308B2 (en) 2009-12-09 2016-04-05 Advanced Micro Devices, Inc. Laser scanning module including an optical isolator
EP2339581A1 (de) * 2009-12-21 2011-06-29 Thomson Licensing Verfahren und Vorrichtung zum Lesen aus einem optischen Nahfeldaufzeichnungsmedium und Nahfeldlinse für die Vorrichtung
TWI404894B (zh) * 2009-12-22 2013-08-11 Ind Tech Res Inst 照明系統
TWI407078B (zh) * 2010-06-08 2013-09-01 Chung Shan Inst Of Science Micro - lens array surface profile detection system and its detection method
NL2007177A (en) 2010-09-13 2012-03-14 Asml Netherlands Bv Alignment measurement system, lithographic apparatus, and a method to determine alignment of in a lithographic apparatus.
DE102011013613A1 (de) * 2010-10-01 2012-04-05 Carl Zeiss Microimaging Gmbh Mikroskop und Mikroskopierverfahren
US8982355B2 (en) * 2010-12-09 2015-03-17 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Smart optical material characterization system and method
CN102175143B (zh) * 2011-02-21 2012-11-28 哈尔滨工业大学 基于柱透镜光路的线扫描差动共焦测量装置
US20120314200A1 (en) * 2011-06-09 2012-12-13 Ophir Eyal Coupled multi-wavelength confocal systems for distance measurements
WO2013048671A1 (en) * 2011-09-30 2013-04-04 Los Alamos National Security, Llc Polarization tracking system for free-space optical communication, including quantum communication
JP5992990B2 (ja) * 2012-02-22 2016-09-14 株式会社エス・テイ・ジャパン Ａｔｒ測定用の対物光学系およびａｔｒ測定装置
EP2885886B1 (de) 2012-08-17 2019-02-13 Triad National Security, LLC Quantenkommunikationssystem mit integrierten fotonischen bauelementen
CN104603667B (zh) * 2012-08-24 2017-12-08 超威半导体公司 包括光学隔离器的激光扫描模块
SG11201503354XA (en) 2012-10-29 2015-06-29 Univ Northwestern Heat actuated and projected lithography systems and methods
EP2742854B1 (de) 2012-12-11 2021-03-10 iThera Medical GmbH Tragbare Vorrichtung und Verfahren für tomographische optoakustische Bildgebung eines Objekts
TWI456161B (zh) * 2012-12-21 2014-10-11 Univ Nan Kai Technology 以光學平衡偵測為基礎之二維表面輪廓量測干涉儀架構
EP2754388B1 (de) 2013-01-15 2020-09-09 Helmholtz Zentrum München Deutsches Forschungszentrum für Gesundheit und Umwelt GmbH System und Verfahren zur optoakustischen Abbildung eines Objekts mit verbesserter Qualität und hoher Rate
EP3467518B1 (de) * 2013-03-15 2024-01-03 Bruker Nano, Inc. Chemische nanoidentifizierung einer probe mittels normalisierter nahfeldspektroskopie
US9696264B2 (en) 2013-04-03 2017-07-04 Kla-Tencor Corporation Apparatus and methods for determining defect depths in vertical stack memory
EP3138098A4 (de) * 2014-04-29 2017-12-13 Akonia Holographics, LLC Verfahren und vorrichtung für kohärente holographische datenkanäle
KR102242559B1 (ko) * 2014-12-01 2021-04-20 삼성전자주식회사 광학 검사 장치
WO2016156516A2 (en) 2015-03-31 2016-10-06 Samantree Medical Sa Systems and methods for in-operating-theatre imaging of fresh tissue resected during surgery for pathology assessment
US10451412B2 (en) 2016-04-22 2019-10-22 Kla-Tencor Corporation Apparatus and methods for detecting overlay errors using scatterometry
CN106842535B (zh) * 2017-01-13 2019-10-29 清华大学 基于光流的相位显微成像系统及其方法
EP3388779A1 (de) * 2017-04-11 2018-10-17 Université de Strasbourg Optisches fernfeld messsystem und -verfahren mit superauflösung im nanometerbereich
US10539776B2 (en) 2017-10-31 2020-01-21 Samantree Medical Sa Imaging systems with micro optical element arrays and methods of specimen imaging
US10928621B2 (en) 2017-10-31 2021-02-23 Samantree Medical Sa Sample dishes for use in microscopy and methods of their use
US11747603B2 (en) 2017-10-31 2023-09-05 Samantree Medical Sa Imaging systems with micro optical element arrays and methods of specimen imaging
US20210025951A1 (en) * 2019-07-24 2021-01-28 Kla Corporation Systems and Methods for MOKE Metrology with Consistent MRAM Die Orientation
CN113624156A (zh) * 2020-05-09 2021-11-09 深圳中科飞测科技有限公司 测量系统和方法
CN112484647B (zh) * 2020-11-18 2022-06-10 北京华卓精科科技股份有限公司 干涉仪位移测量系统及方法

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4659429A (en) 1983-08-03 1987-04-21 Cornell Research Foundation, Inc. Method and apparatus for production and use of nanometer scale light beams
US4681451A (en) 1986-02-28 1987-07-21 Polaroid Corporation Optical proximity imaging method and apparatus
US5105403A (en) 1988-01-27 1992-04-14 Hitachi, Ltd. Optical information reading apparatus with waveguide and diffraction grating
US5105408A (en) 1988-05-12 1992-04-14 Digital Equipment Corporation Optical head with flying lens
DE69022318T2 (de) 1989-07-19 1996-05-15 Matsushita Electric Ind Co Ltd Fliegender optischer Kopf.
US5150338A (en) * 1989-08-10 1992-09-22 Hewlett-Packard Company Optical disk reading and writing system having magnetic write head mounted on an air-bearing slider
JP2626115B2 (ja) 1990-01-10 1997-07-02 松下電器産業株式会社 光学ヘッド
US5004307A (en) 1990-04-12 1991-04-02 The Board Of Trustees Of The Leland Stanford Junior University Near field and solid immersion optical microscope
US5241364A (en) * 1990-10-19 1993-08-31 Fuji Photo Film Co., Ltd. Confocal scanning type of phase contrast microscope and scanning microscope
US5121256A (en) 1991-03-14 1992-06-09 The Board Of Trustees Of The Leland Stanford Junior University Lithography system employing a solid immersion lens
US5125750A (en) 1991-03-14 1992-06-30 The Board Of Trustees Of The Leland Stanford Junior University Optical recording system employing a solid immersion lens
JPH0573980A (ja) 1991-09-12 1993-03-26 Ricoh Co Ltd 光デイスクドライブ装置の光ヘツド
JP2922698B2 (ja) 1991-12-25 1999-07-26 京セラ株式会社 光ヘッド用スライダー
JP3135389B2 (ja) 1992-10-23 2001-02-13 松下電器産業株式会社 情報再生方法、情報記録再生方法、情報再生装置、記録媒体及び光ヘッド
US5349443A (en) 1992-11-25 1994-09-20 Polaroid Corporation Flexible transducers for photon tunneling microscopes and methods for making and using same
US5442443A (en) 1993-04-08 1995-08-15 Polaroid Corporation Stereoscopic photon tunneling microscope
JP3303436B2 (ja) 1993-05-14 2002-07-22 キヤノン株式会社 投影露光装置及び半導体素子の製造方法
EP0722574B1 (de) 1993-10-04 1998-09-09 International Business Machines Corporation Optisches nahfeldmikroskop
US5371588A (en) 1993-11-10 1994-12-06 University Of Maryland, College Park Surface profile and material mapper using a driver to displace the sample in X-Y-Z directions
US5497359A (en) 1994-08-30 1996-03-05 National Business Machines Corporation Optical disk data storage system with radiation-transparent air-bearing slider
DE69625292T2 (de) 1995-08-04 2003-09-04 Ibm Interferometrischer Nahfeldapparat und Verfahren
US5602820A (en) 1995-08-24 1997-02-11 International Business Machines Corporation Method and apparatus for mass data storage
US5737084A (en) * 1995-09-29 1998-04-07 Takaoka Electric Mtg. Co., Ltd. Three-dimensional shape measuring apparatus
JPH09210629A (ja) 1996-02-02 1997-08-12 Canon Inc 面位置検出装置及びそれを用いたデバイスの製造方法
US5602643A (en) 1996-02-07 1997-02-11 Wyko Corporation Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface
US5689480A (en) 1996-08-13 1997-11-18 The Board Of Trustees Of The Leland Stanford Junior University Magneto-optic recording system employing near field optics
US5666197A (en) 1996-08-21 1997-09-09 Polaroid Corporation Apparatus and methods employing phase control and analysis of evanescent illumination for imaging and metrology of subwavelength lateral surface topography
US5760901A (en) 1997-01-28 1998-06-02 Zetetic Institute Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation
US5883872A (en) 1997-05-29 1999-03-16 The Board Of Trustees Of The Leland Stanford Junior University Near field magneto-optical recording system employing slit illumination
US6154326A (en) * 1998-03-19 2000-11-28 Fuji Xerox Co., Ltd. Optical head, disk apparatus, method for manufacturing optical head, and optical element
US6249352B1 (en) * 1999-09-30 2001-06-19 Trw Inc. Lateral shearing interferometer system with masked interference pattern
JP2004505312A (ja) * 2000-07-27 2004-02-19 ゼテティック・インスティチュート 近距離場顕微鏡検査におけるサブ波長アパチャ・アレイの位置および方向の制御
JP2004505314A (ja) * 2000-07-27 2004-02-19 ゼテティック・インスティチュート バックグラウンド振幅が減衰および補償された走査干渉近距離場共焦点顕微鏡検査

Also Published As

Publication number Publication date
EP1203257B1 (de) 2004-12-15
TW200300030A (en) 2003-05-01
EP1203257A2 (de) 2002-05-08
DE60016761T2 (de) 2005-12-15
US6445453B1 (en) 2002-09-03
US6606159B1 (en) 2003-08-12
ATE285081T1 (de) 2005-01-15
US6753968B2 (en) 2004-06-22
TW558642B (en) 2003-10-21
US20030147083A1 (en) 2003-08-07
TW579435B (en) 2004-03-11

Similar Documents

Publication Publication Date Title
DE60016761D1 (de) Interferometrische konfokale nahfeld-abtastmikroskopie
DK1066507T3 (da) Detektering af et stof gennem brydningsindeksændring
ATE27489T1 (de) Faseroptische messeinrichtung.
ATE217081T1 (de) Integriert-optischer,interferometrischer sensor
GB9915082D0 (en) Optical fibre probe
US20080094608A1 (en) Laser velocimetry system
ES2025340B3 (es) Giroscopio de fibras.
Spajer et al. Application of intermodal interference to fibre sensors
DE69502729T2 (de) Optische interferometrische stromfühler und strommessverfahren
JPH05302976A (ja) 距離測定装置
WO2001009662A3 (en) Scanning interferometric near-field confocal microscopy
ATE119666T1 (de) Photometrische messeinrichtung.
CA2368320A1 (en) Instrument for measuring physical property of sample
WO2004029543A3 (de) Interferometrische messeinrichtung
ATE105402T1 (de) Positionsmesseinrichtung.
ATE93621T1 (de) Integriert-optische sensoreinrichtung.
Gidon et al. Vibration sensor using planar integrated interferometric circuit on oxidised silicon substrate
SU1677686A1 (ru) Волоконный ответвитель
Casalicchio et al. Non-contact low-cost fiber distance sensor with compensation of target reflectivity
JPS5690227A (en) Optical fiber temperature detector
SU1515106A1 (ru) Устройство дл контрол плотности трикотажного полотна
JPH0990140A (ja) ２入力ファイバおよび２入力ファイバ型受光装置
WO1982004311A1 (en) Fiber optic interferometer
US20050127279A1 (en) Multiplexed fiber optic sensor system
JPH0269688A (ja) 磁界センサ

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee