DE60014615D1 - Verfahren zur herstellung eines thermisch biegbaren betätigungselements - Google Patents

Verfahren zur herstellung eines thermisch biegbaren betätigungselements

Info

Publication number
DE60014615D1
DE60014615D1 DE60014615T DE60014615T DE60014615D1 DE 60014615 D1 DE60014615 D1 DE 60014615D1 DE 60014615 T DE60014615 T DE 60014615T DE 60014615 T DE60014615 T DE 60014615T DE 60014615 D1 DE60014615 D1 DE 60014615D1
Authority
DE
Germany
Prior art keywords
layer
etching
substrate
bend actuator
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60014615T
Other languages
English (en)
Inventor
Kia Silverbrook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silverbrook Research Pty Ltd
Original Assignee
Silverbrook Research Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Application granted granted Critical
Publication of DE60014615D1 publication Critical patent/DE60014615D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1648—Production of print heads with thermal bend detached actuators
DE60014615T 1999-03-16 2000-03-10 Verfahren zur herstellung eines thermisch biegbaren betätigungselements Expired - Lifetime DE60014615D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPP9223A AUPP922399A0 (en) 1999-03-16 1999-03-16 A method and apparatus (ij46p2)
PCT/AU2000/000172 WO2000055089A1 (en) 1999-03-16 2000-03-10 A method of manufacturing a thermal bend actuator

Publications (1)

Publication Number Publication Date
DE60014615D1 true DE60014615D1 (de) 2004-11-11

Family

ID=3813419

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60014615T Expired - Lifetime DE60014615D1 (de) 1999-03-16 2000-03-10 Verfahren zur herstellung eines thermisch biegbaren betätigungselements

Country Status (7)

Country Link
US (1) US6426014B1 (de)
EP (1) EP1171378B1 (de)
JP (1) JP4711514B2 (de)
AT (1) ATE278636T1 (de)
AU (1) AUPP922399A0 (de)
DE (1) DE60014615D1 (de)
WO (1) WO2000055089A1 (de)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7303254B2 (en) 1997-07-15 2007-12-04 Silverbrook Research Pty Ltd Print assembly for a wide format pagewidth printer
US6855264B1 (en) 1997-07-15 2005-02-15 Kia Silverbrook Method of manufacture of an ink jet printer having a thermal actuator comprising an external coil spring
US6540332B2 (en) 1997-07-15 2003-04-01 Silverbrook Research Pty Ltd Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead
US7465030B2 (en) 1997-07-15 2008-12-16 Silverbrook Research Pty Ltd Nozzle arrangement with a magnetic field generator
US6648453B2 (en) 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
US7468139B2 (en) 1997-07-15 2008-12-23 Silverbrook Research Pty Ltd Method of depositing heater material over a photoresist scaffold
US7008046B2 (en) 1997-07-15 2006-03-07 Silverbrook Research Pty Ltd Micro-electromechanical liquid ejection device
US7891767B2 (en) 1997-07-15 2011-02-22 Silverbrook Research Pty Ltd Modular self-capping wide format print assembly
US7337532B2 (en) 1997-07-15 2008-03-04 Silverbrook Research Pty Ltd Method of manufacturing micro-electromechanical device having motion-transmitting structure
US6682174B2 (en) 1998-03-25 2004-01-27 Silverbrook Research Pty Ltd Ink jet nozzle arrangement configuration
US7195339B2 (en) 1997-07-15 2007-03-27 Silverbrook Research Pty Ltd Ink jet nozzle assembly with a thermal bend actuator
US7131715B2 (en) 1997-07-15 2006-11-07 Silverbrook Research Pty Ltd Printhead chip that incorporates micro-mechanical lever mechanisms
AUPP398798A0 (en) 1998-06-09 1998-07-02 Silverbrook Research Pty Ltd Image creation method and apparatus (ij43)
US6712453B2 (en) 1997-07-15 2004-03-30 Silverbrook Research Pty Ltd. Ink jet nozzle rim
US6679584B2 (en) 1997-07-15 2004-01-20 Silverbrook Research Pty Ltd. High volume pagewidth printing
US6857724B2 (en) 1997-07-15 2005-02-22 Silverbrook Research Pty Ltd Print assembly for a wide format pagewidth printer
US7556356B1 (en) 1997-07-15 2009-07-07 Silverbrook Research Pty Ltd Inkjet printhead integrated circuit with ink spread prevention
US6935724B2 (en) 1997-07-15 2005-08-30 Silverbrook Research Pty Ltd Ink jet nozzle having actuator with anchor positioned between nozzle chamber and actuator connection point
US6623108B2 (en) 1998-10-16 2003-09-23 Silverbrook Research Pty Ltd Ink jet printhead having thermal bend actuator heating element electrically isolated from nozzle chamber ink
DE60031658D1 (de) * 1999-02-15 2006-12-14 Silverbrook Res Pty Ltd Thermisch biegender aktor und schaufelstruktur für tintenstrahldüse
AUPP993199A0 (en) * 1999-04-22 1999-05-20 Silverbrook Research Pty Ltd A micromechanical device and method (ij46p2a)
AUPQ130799A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V13)
JP3548536B2 (ja) * 2000-02-15 2004-07-28 キヤノン株式会社 液体吐出ヘッドの製造方法
US7095309B1 (en) * 2000-10-20 2006-08-22 Silverbrook Research Pty Ltd Thermoelastic actuator design
US6352337B1 (en) * 2000-11-08 2002-03-05 Eastman Kodak Company Assisted drop-on-demand inkjet printer using deformable micro-acuator
US6561627B2 (en) * 2000-11-30 2003-05-13 Eastman Kodak Company Thermal actuator
GB0106343D0 (en) 2001-03-14 2001-05-02 Avecia Ltd Compounds compositions and processes
JP2004126503A (ja) * 2002-03-28 2004-04-22 Nikon Corp マイクロアクチュエータ及びこれを用いた光スイッチ
GB0207655D0 (en) 2002-04-02 2002-05-15 Avecia Ltd Compositions and processes
US20040257417A1 (en) 2003-04-28 2004-12-23 Christian Jackson Inkjet printing method
US7682012B2 (en) 2003-12-29 2010-03-23 E. I. Du Pont De Nemours And Company Inkjet printing method and apparatus
GB0401540D0 (en) 2004-01-23 2004-02-25 Avecia Ltd Process
US7404849B2 (en) * 2004-04-21 2008-07-29 E. I. Du Pont De Nemours And Company Inkjet ink set for improved color reproduction
US7905589B2 (en) 2004-05-13 2011-03-15 E. I. Du Pont De Nemours And Company Inkjet printing with pigmented inks
US7399351B2 (en) * 2004-06-25 2008-07-15 Ei Du Pont De Nemours And Company Pigmented inkjet ink and ink set
US7384465B2 (en) * 2004-06-25 2008-06-10 E.I. Du Pont De Nemours & Co. Pigmented blue inkjet ink color reproduction
EP1800334A4 (de) * 2004-10-08 2012-07-04 Silverbrook Res Pty Ltd Verfahren zur entfernung einer polymerbeschichtung von einem geätzten graben
US20060087531A1 (en) * 2004-10-25 2006-04-27 Eiseman Michael J Inkjet printing apparatus
WO2008109910A1 (en) * 2007-03-12 2008-09-18 Silverbrook Research Pty Ltd Method of fabricating printhead having hydrophobic ink ejection face
GB0719083D0 (en) 2007-09-29 2007-11-07 Fujifilm Corp Magenta dyes and inks for use in ink-jet printing
US8012363B2 (en) * 2007-11-29 2011-09-06 Silverbrook Research Pty Ltd Metal film protection during printhead fabrication with minimum number of MEMS processing steps
MX2011001544A (es) 2008-08-22 2011-03-15 Fujifilm Imaging Colorants Ltd Azaftalocianinas y su uso en impresion de inyeccion de tinta.
SG172119A1 (en) * 2008-12-15 2011-07-28 Linde Ag Enhancement of dry etch of high aspect ratio features using fluorine
GB201021603D0 (en) 2010-12-21 2011-02-02 Fujifilm Imaging Colorants Ltd Inks & printing process

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US4997521A (en) * 1987-05-20 1991-03-05 Massachusetts Institute Of Technology Electrostatic micromotor
GB8921722D0 (en) * 1989-09-26 1989-11-08 British Telecomm Micromechanical switch
US5058856A (en) * 1991-05-08 1991-10-22 Hewlett-Packard Company Thermally-actuated microminiature valve
JPH07314673A (ja) * 1994-05-27 1995-12-05 Sharp Corp インクジェットヘッド
US5529279A (en) * 1994-08-24 1996-06-25 Hewlett-Packard Company Thermal isolation structures for microactuators
US5838351A (en) * 1995-10-26 1998-11-17 Hewlett-Packard Company Valve assembly for controlling fluid flow within an ink-jet pen
JP3160754B2 (ja) * 1996-03-04 2001-04-25 シャープ株式会社 インクジェットヘッド
KR0185329B1 (ko) * 1996-03-27 1999-05-15 이형도 기록액의 운동 관성을 이용한 기록 장치
JP3514407B2 (ja) * 1996-08-28 2004-03-31 株式会社リコー インクジェットヘッド及びインクジェット記録装置
ATE355972T1 (de) * 1997-07-15 2007-03-15 Silverbrook Res Pty Ltd Tintenstrahldüse mit elektromagnetisch aktiviertem tintenkolben
ATE358019T1 (de) * 1997-07-15 2007-04-15 Silverbrook Res Pty Ltd Tintenstrahldüsenanordnung mit paddeln als teil der wandung
AUPO793797A0 (en) * 1997-07-15 1997-08-07 Silverbrook Research Pty Ltd A method of manufacture of an image creation apparatus (IJM03)
DE60031658D1 (de) * 1999-02-15 2006-12-14 Silverbrook Res Pty Ltd Thermisch biegender aktor und schaufelstruktur für tintenstrahldüse

Also Published As

Publication number Publication date
US6426014B1 (en) 2002-07-30
JP4711514B2 (ja) 2011-06-29
EP1171378A4 (de) 2002-05-02
ATE278636T1 (de) 2004-10-15
JP2002538981A (ja) 2002-11-19
AUPP922399A0 (en) 1999-04-15
WO2000055089A1 (en) 2000-09-21
EP1171378B1 (de) 2004-10-06
EP1171378A1 (de) 2002-01-16

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Legal Events

Date Code Title Description
8332 No legal effect for de