DE60004317D1 - Salze von Sulfonium-Verbindungen - Google Patents

Salze von Sulfonium-Verbindungen

Info

Publication number
DE60004317D1
DE60004317D1 DE60004317T DE60004317T DE60004317D1 DE 60004317 D1 DE60004317 D1 DE 60004317D1 DE 60004317 T DE60004317 T DE 60004317T DE 60004317 T DE60004317 T DE 60004317T DE 60004317 D1 DE60004317 D1 DE 60004317D1
Authority
DE
Germany
Prior art keywords
salts
sulfonium compounds
sulfonium
compounds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60004317T
Other languages
English (en)
Other versions
DE60004317T2 (de
Inventor
Keiji Oono
Kazuhito Fukasawa
Kazunori Sakamoto
Fumiyoshi Urano
Motoshige Sumino
Shigeaki Imazeki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Wako Pure Chemical Corp
Original Assignee
Wako Pure Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wako Pure Chemical Industries Ltd filed Critical Wako Pure Chemical Industries Ltd
Publication of DE60004317D1 publication Critical patent/DE60004317D1/de
Application granted granted Critical
Publication of DE60004317T2 publication Critical patent/DE60004317T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C381/00—Compounds containing carbon and sulfur and having functional groups not covered by groups C07C301/00 - C07C337/00
    • C07C381/12—Sulfonium compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
DE60004317T 1999-12-27 2000-12-15 Salze von Sulfonium-Verbindungen Expired - Lifetime DE60004317T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP37065599 1999-12-27
JP37065599 1999-12-27
JP2000105789 2000-04-07
JP2000105789 2000-04-07
JP2000315061 2000-10-16
JP2000315061 2000-10-16

Publications (2)

Publication Number Publication Date
DE60004317D1 true DE60004317D1 (de) 2003-09-11
DE60004317T2 DE60004317T2 (de) 2004-06-03

Family

ID=27341808

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60004317T Expired - Lifetime DE60004317T2 (de) 1999-12-27 2000-12-15 Salze von Sulfonium-Verbindungen

Country Status (7)

Country Link
US (1) US6723483B1 (de)
EP (2) EP1238969A3 (de)
KR (1) KR100684084B1 (de)
CN (1) CN100486963C (de)
DE (1) DE60004317T2 (de)
SG (1) SG109439A1 (de)
TW (1) TW525038B (de)

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JP5124805B2 (ja) * 2006-06-27 2013-01-23 信越化学工業株式会社 光酸発生剤並びにこれを用いたレジスト材料及びパターン形成方法
JP5124806B2 (ja) * 2006-06-27 2013-01-23 信越化学工業株式会社 光酸発生剤並びにこれを用いたレジスト材料及びパターン形成方法
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JP5290183B2 (ja) * 2006-10-04 2013-09-18 チバ ホールディング インコーポレーテッド スルホニウム塩光開始剤
JP5019071B2 (ja) * 2007-09-05 2012-09-05 信越化学工業株式会社 新規光酸発生剤並びにこれを用いたレジスト材料及びパターン形成方法
JP5245956B2 (ja) * 2008-03-25 2013-07-24 信越化学工業株式会社 新規光酸発生剤並びにこれを用いたレジスト材料及びパターン形成方法
JP4569786B2 (ja) 2008-05-01 2010-10-27 信越化学工業株式会社 新規光酸発生剤並びにこれを用いたレジスト材料及びパターン形成方法
TWI400226B (zh) * 2008-10-17 2013-07-01 Shinetsu Chemical Co 具有聚合性陰離子之鹽及高分子化合物、光阻劑材料及圖案形成方法
JP4813537B2 (ja) 2008-11-07 2011-11-09 信越化学工業株式会社 熱酸発生剤を含有するレジスト下層材料、レジスト下層膜形成基板及びパターン形成方法
US20100136477A1 (en) * 2008-12-01 2010-06-03 Ng Edward W Photosensitive Composition
TWI417274B (zh) 2008-12-04 2013-12-01 Shinetsu Chemical Co 鹽、酸發生劑及使用其之抗蝕劑材料、空白光罩，及圖案形成方法
EP2199856B1 (de) * 2008-12-18 2013-08-07 Agfa Graphics N.V. Kationische strahlungshärtbare Zusammensetzungen
JP5368270B2 (ja) * 2009-02-19 2013-12-18 信越化学工業株式会社 新規スルホン酸塩及びその誘導体、光酸発生剤並びにこれを用いたレジスト材料及びパターン形成方法
JP5287552B2 (ja) * 2009-07-02 2013-09-11 信越化学工業株式会社 光酸発生剤並びにレジスト材料及びパターン形成方法
US8614047B2 (en) * 2011-08-26 2013-12-24 International Business Machines Corporation Photodecomposable bases and photoresist compositions
JP6244109B2 (ja) 2013-05-31 2017-12-06 東京応化工業株式会社 レジスト組成物、化合物、高分子化合物及びレジストパターン形成方法
TWI673258B (zh) * 2014-09-26 2019-10-01 日商東京應化工業股份有限公司 硫鎓鹽、光酸產生劑、及感光性組成物
WO2017154345A1 (ja) * 2016-03-07 2017-09-14 富士フイルム株式会社 感活性光線性又は感放射線性樹脂組成物、レジスト膜、パターン形成方法、電子デバイスの製造方法
JP6874634B2 (ja) * 2017-10-13 2021-05-19 信越化学工業株式会社 レジスト材料及びパターン形成方法
CN111018763B (zh) * 2018-10-09 2021-10-08 常州强力先端电子材料有限公司 一种双-三苯基硫鎓盐化合物及其应用
JP7389622B2 (ja) * 2018-11-20 2023-11-30 住友化学株式会社 塩、クエンチャー、レジスト組成物及びレジストパターンの製造方法
EP3909943A4 (de) * 2019-01-10 2022-10-12 San-Apro Ltd. Sulfoniumsalz, fotosäuregenerator, härtbare zusammensetzung und resistzusammensetzung

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Also Published As

Publication number Publication date
KR20010062717A (ko) 2001-07-07
EP1238969A3 (de) 2003-01-15
EP1113005B1 (de) 2003-08-06
EP1238969A2 (de) 2002-09-11
SG109439A1 (en) 2005-03-30
EP1113005A1 (de) 2001-07-04
CN100486963C (zh) 2009-05-13
TW525038B (en) 2003-03-21
CN1302799A (zh) 2001-07-11
US6723483B1 (en) 2004-04-20
KR100684084B1 (ko) 2007-02-16
DE60004317T2 (de) 2004-06-03

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