DE60002345D1 - Billige taktsteuervorrichtung für ein hochgenaues multimodal-halbleiterprüfgerät - Google Patents
Billige taktsteuervorrichtung für ein hochgenaues multimodal-halbleiterprüfgerätInfo
- Publication number
- DE60002345D1 DE60002345D1 DE60002345T DE60002345T DE60002345D1 DE 60002345 D1 DE60002345 D1 DE 60002345D1 DE 60002345 T DE60002345 T DE 60002345T DE 60002345 T DE60002345 T DE 60002345T DE 60002345 D1 DE60002345 D1 DE 60002345D1
- Authority
- DE
- Germany
- Prior art keywords
- multimodal
- precision
- clock control
- semiconductor test
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
- G01R31/31922—Timing generation or clock distribution
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/3193—Tester hardware, i.e. output processing circuits with comparison between actual response and known fault free response
- G01R31/31937—Timing aspects, e.g. measuring propagation delay
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Tests Of Electronic Circuits (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/360,215 US6553529B1 (en) | 1999-07-23 | 1999-07-23 | Low cost timing system for highly accurate multi-modal semiconductor testing |
US360215 | 1999-07-23 | ||
PCT/US2000/018432 WO2001007925A1 (en) | 1999-07-23 | 2000-07-05 | Low cost timing system for highly accurate multi-modal semiconductor testing |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60002345D1 true DE60002345D1 (de) | 2003-05-28 |
DE60002345T2 DE60002345T2 (de) | 2004-02-12 |
Family
ID=23417069
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60002345T Expired - Fee Related DE60002345T2 (de) | 1999-07-23 | 2000-07-05 | Billige taktsteuervorrichtung für ein hochgenaues multimodal-halbleiterprüfgerät |
Country Status (7)
Country | Link |
---|---|
US (1) | US6553529B1 (de) |
EP (1) | EP1204876B1 (de) |
JP (1) | JP4684508B2 (de) |
DE (1) | DE60002345T2 (de) |
MY (1) | MY125089A (de) |
TW (1) | TW555996B (de) |
WO (1) | WO2001007925A1 (de) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6978410B1 (en) * | 1999-09-25 | 2005-12-20 | Advantest Corp. | Test language conversion method |
JP2002214307A (ja) * | 2001-01-24 | 2002-07-31 | Sony Corp | 半導体試験装置及びその半導体試験方法 |
US8166361B2 (en) * | 2001-09-28 | 2012-04-24 | Rambus Inc. | Integrated circuit testing module configured for set-up and hold time testing |
US8286046B2 (en) | 2001-09-28 | 2012-10-09 | Rambus Inc. | Integrated circuit testing module including signal shaping interface |
US8001439B2 (en) | 2001-09-28 | 2011-08-16 | Rambus Inc. | Integrated circuit testing module including signal shaping interface |
JP4006260B2 (ja) * | 2002-04-26 | 2007-11-14 | 株式会社アドバンテスト | 半導体試験装置 |
US7117410B2 (en) | 2002-12-20 | 2006-10-03 | Teradyne, Inc. | Distributed failure analysis memory for automatic test equipment |
EP1517152B1 (de) * | 2003-09-17 | 2008-10-29 | Verigy (Singapore) Pte. Ltd. | Kanal mit verschiedenen Taktregionen |
WO2005079534A2 (en) * | 2004-02-19 | 2005-09-01 | Georgia Tech Research Corporation | Systems and methods for parallel communication |
DE602004021178D1 (de) * | 2004-06-24 | 2009-07-02 | Verigy Pte Ltd Singapore | Taktsynthese pro Stift |
JP4599945B2 (ja) * | 2004-08-31 | 2010-12-15 | 横河電機株式会社 | Icテスタ |
US7454681B2 (en) * | 2004-11-22 | 2008-11-18 | Teradyne, Inc. | Automatic test system with synchronized instruments |
US7319936B2 (en) * | 2004-11-22 | 2008-01-15 | Teradyne, Inc. | Instrument with interface for synchronization in automatic test equipment |
US7272756B2 (en) * | 2005-05-03 | 2007-09-18 | Agere Systems Inc. | Exploitive test pattern apparatus and method |
US7447965B2 (en) * | 2005-05-03 | 2008-11-04 | Agere Systems Inc. | Offset test pattern apparatus and method |
US7281181B2 (en) * | 2005-06-27 | 2007-10-09 | Verigy (Singapore) Pte. Ltd. | Systems, methods and computer programs for calibrating an automated circuit test system |
US7779311B2 (en) * | 2005-10-24 | 2010-08-17 | Rambus Inc. | Testing and recovery in a multilayer device |
JP4704184B2 (ja) * | 2005-10-27 | 2011-06-15 | 株式会社アドバンテスト | 試験装置及び試験方法 |
US7650555B2 (en) * | 2006-07-27 | 2010-01-19 | International Business Machines Corporation | Method and apparatus for characterizing components of a device under test using on-chip trace logic analyzer |
KR100736673B1 (ko) * | 2006-08-01 | 2007-07-06 | 주식회사 유니테스트 | 반도체 소자 테스트 장치 |
US7561027B2 (en) * | 2006-10-26 | 2009-07-14 | Hewlett-Packard Development Company, L.P. | Sensing device |
JP2010078536A (ja) * | 2008-09-29 | 2010-04-08 | Yokogawa Electric Corp | ピン接続算出装置 |
KR102087603B1 (ko) | 2013-10-07 | 2020-03-11 | 삼성전자주식회사 | 메모리 테스트 장치 및 이의 동작 방법 |
US9279857B2 (en) | 2013-11-19 | 2016-03-08 | Teradyne, Inc. | Automated test system with edge steering |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61140877A (ja) * | 1984-12-14 | 1986-06-27 | Anritsu Corp | デ−タ発生器 |
US4931723A (en) * | 1985-12-18 | 1990-06-05 | Schlumberger Technologies, Inc. | Automatic test system having a "true tester-per-pin" architecture |
USRE36063E (en) | 1987-02-09 | 1999-01-26 | Teradyne, Inc. | Timing generator with edge generators, utilizing programmable delays, providing synchronized timing signals at non-integer multiples of a clock signal |
US5321702A (en) * | 1989-10-11 | 1994-06-14 | Teradyne, Inc. | High speed timing generator |
CA2127192C (en) | 1993-07-01 | 1999-09-07 | Alan Brent Hussey | Shaping ate bursts, particularly in gallium arsenide |
KR100393317B1 (ko) * | 1994-02-15 | 2003-10-23 | 람버스 인코포레이티드 | 지연동기루프 |
US5544175A (en) | 1994-03-15 | 1996-08-06 | Hewlett-Packard Company | Method and apparatus for the capturing and characterization of high-speed digital information |
US5570383A (en) | 1994-08-15 | 1996-10-29 | Teradyne, Inc. | Timing hazard detector accelerator |
US6032282A (en) * | 1994-09-19 | 2000-02-29 | Advantest Corp. | Timing edge forming circuit for IC test system |
US5566188A (en) | 1995-03-29 | 1996-10-15 | Teradyne, Inc. | Low cost timing generator for automatic test equipment operating at high data rates |
US6469493B1 (en) * | 1995-08-01 | 2002-10-22 | Teradyne, Inc. | Low cost CMOS tester with edge rate compensation |
DE69502827T2 (de) | 1995-08-10 | 1998-10-15 | Hewlett Packard Gmbh | Elektronischer Schaltungs- oder Kartenprüfer und Verfahren zur Prüfung einer elektronischen Vorrichtung |
US5889936A (en) * | 1995-11-22 | 1999-03-30 | Cypress Semiconductor Corporation | High speed asynchronous digital testing module |
US5689515A (en) | 1996-04-26 | 1997-11-18 | Teradyne, Inc. | High speed serial data pin for automatic test equipment |
JPH10239395A (ja) * | 1997-02-26 | 1998-09-11 | Advantest Corp | 半導体試験装置 |
JPH1138100A (ja) * | 1997-07-18 | 1999-02-12 | Advantest Corp | 半導体試験装置 |
US5854797A (en) * | 1997-08-05 | 1998-12-29 | Teradyne, Inc. | Tester with fast refire recovery time |
US5917834A (en) * | 1997-08-21 | 1999-06-29 | Credence Systems Corporation | Integrated circuit tester having multiple period generators |
US6115303A (en) * | 1998-10-09 | 2000-09-05 | Micron Technology, Inc. | Method and apparatus for testing memory devices |
US6092225A (en) * | 1999-01-29 | 2000-07-18 | Credence Systems Corporation | Algorithmic pattern generator for integrated circuit tester |
-
1999
- 1999-07-23 US US09/360,215 patent/US6553529B1/en not_active Expired - Lifetime
-
2000
- 2000-07-05 WO PCT/US2000/018432 patent/WO2001007925A1/en active IP Right Grant
- 2000-07-05 JP JP2001512302A patent/JP4684508B2/ja not_active Expired - Lifetime
- 2000-07-05 DE DE60002345T patent/DE60002345T2/de not_active Expired - Fee Related
- 2000-07-05 EP EP00945162A patent/EP1204876B1/de not_active Expired - Lifetime
- 2000-07-06 TW TW089113377A patent/TW555996B/zh not_active IP Right Cessation
- 2000-07-19 MY MYPI20003294 patent/MY125089A/en unknown
Also Published As
Publication number | Publication date |
---|---|
DE60002345T2 (de) | 2004-02-12 |
WO2001007925A1 (en) | 2001-02-01 |
MY125089A (en) | 2006-07-31 |
EP1204876A1 (de) | 2002-05-15 |
EP1204876B1 (de) | 2003-04-23 |
JP2003505697A (ja) | 2003-02-12 |
US6553529B1 (en) | 2003-04-22 |
JP4684508B2 (ja) | 2011-05-18 |
TW555996B (en) | 2003-10-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE60002345D1 (de) | Billige taktsteuervorrichtung für ein hochgenaues multimodal-halbleiterprüfgerät | |
DE69738595D1 (de) | Herstellungsmethode für ein Halbleiter-Bauteil | |
DE60037567D1 (de) | Betätigungsvorrichtung für ein Sitzelement | |
DE69832110D1 (de) | Herstellungsverfahren für eine Prüfnadel für Halbleitergeräte | |
DE50005160D1 (de) | Assistenzvorrichtung für ein fahrzeug | |
DE60129830D1 (de) | Ausgleichsvorrichtung für ein einspritzventil | |
DE60025683D1 (de) | Graphische Anzeigevorrichtung für ein Robotersystem | |
DE60036995D1 (de) | Kalibrierungssystem für ein Farberzeugungsgerät | |
DE60211401D1 (de) | Befestigungsvorrichtung für ein Implantat | |
DE69832324D1 (de) | Herstellungsverfahren für einen Halbleiter | |
DE50113957D1 (de) | Solareinrichtung für ein Fahrzeug | |
DE60228670D1 (de) | Messgerät für ein biomagnetisches Feld | |
DE50113992D1 (de) | Betätigungsvorrichtung für ein bewegliches element | |
DE60044043D1 (de) | Messsteuerung für ein Fahrzeug | |
ATA210799A (de) | Rückhaltevorrichtung für ein verbindungselement | |
DE60126887D1 (de) | Befestigungsstruktur für ein Sensorelement | |
DE69822963D1 (de) | Verbindungseinrichtung für ein Wegeventil | |
DE60037559D1 (de) | Herstellungsverfahren für ein Halbleiter-Bauelement | |
DE50300470D1 (de) | Montageeinrichtung für ein Riegelelement | |
DE69518684T2 (de) | Herstellungsverfahren für ein Feldeffekt-Halbleiterbauelement | |
DE50011735D1 (de) | Beleuchtungseinrichtung für ein DUV-Mikroskop | |
DE50209337D1 (de) | Haltevorrichtung für ein Kühlmodul | |
DE50014509D1 (de) | Kameraeinrichtung für ein Fahrzeug | |
DE60015027D1 (de) | Reinigungsgerät für ein Schmelzfixierelement | |
DE10294520B4 (de) | Steuerungssystem für eine Halbleiterherstellungsvorrichtung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |