DE59703919D1 - Optische detektionsvorrichtung - Google Patents

Optische detektionsvorrichtung

Info

Publication number
DE59703919D1
DE59703919D1 DE59703919T DE59703919T DE59703919D1 DE 59703919 D1 DE59703919 D1 DE 59703919D1 DE 59703919 T DE59703919 T DE 59703919T DE 59703919 T DE59703919 T DE 59703919T DE 59703919 D1 DE59703919 D1 DE 59703919D1
Authority
DE
Germany
Prior art keywords
detection device
substrate
light source
measuring cell
emitting semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59703919T
Other languages
English (en)
Inventor
Ludwig Duveneck
Karlheinz Gulden
Ernst Kunz
Juergen Soechtig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zeptosens AG
Original Assignee
Zeptosens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeptosens AG filed Critical Zeptosens AG
Application granted granted Critical
Publication of DE59703919D1 publication Critical patent/DE59703919D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/648—Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/0068—Means for controlling the apparatus of the process
    • B01J2219/00702—Processes involving means for analysing and characterising the products
    • B01J2219/00707—Processes involving means for analysing and characterising the products separated from the reactor apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
DE59703919T 1996-08-16 1997-08-08 Optische detektionsvorrichtung Expired - Fee Related DE59703919D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH201796 1996-08-16
PCT/EP1997/004317 WO1998008077A1 (de) 1996-08-16 1997-08-08 Optische detektionsvorrichtung

Publications (1)

Publication Number Publication Date
DE59703919D1 true DE59703919D1 (de) 2001-08-02

Family

ID=4223963

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59703919T Expired - Fee Related DE59703919D1 (de) 1996-08-16 1997-08-08 Optische detektionsvorrichtung

Country Status (8)

Country Link
US (1) US6469785B1 (de)
EP (1) EP0918984B1 (de)
JP (1) JP2000516719A (de)
AT (1) ATE202630T1 (de)
AU (1) AU4379197A (de)
DE (1) DE59703919D1 (de)
DK (1) DK0918984T3 (de)
WO (1) WO1998008077A1 (de)

Families Citing this family (101)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6096496A (en) * 1997-06-19 2000-08-01 Frankel; Robert D. Supports incorporating vertical cavity emitting lasers and tracking apparatus for use in combinatorial synthesis
GB9816441D0 (en) * 1998-07-28 1998-09-23 Hartley Frank R Analysis of liquids
US7033840B1 (en) 1999-11-09 2006-04-25 Sri International Reaction calorimeter and differential scanning calorimeter for the high-throughput synthesis, screening and characterization of combinatorial libraries
US6602714B1 (en) 1999-11-09 2003-08-05 Sri International Viscosity and mass sensor for the high-throughput synthesis, screening and characterization of combinatorial libraries
JP2004505294A (ja) * 2000-07-21 2004-02-19 マイクロ　マネージド　フォトンズ　アクティーゼルスカブ 表面プラズモン・ポラリトン・バンドギャップ構造
TW548524B (en) * 2000-09-04 2003-08-21 Asm Lithography Bv Lithographic projection apparatus, device manufacturing method and device manufactured thereby
WO2002021110A1 (de) 2000-09-04 2002-03-14 Zeptosens Ag System und verfahren zur multianalytbestimmung
ATE386268T1 (de) 2000-09-05 2008-03-15 Bayer Technology Services Gmbh Verfahren zur abscheidung von mono- und mehrfachschichten von organophosphor- und - phosphonsäuren und deren salzen sowie deren verwendung
JP2002141556A (ja) 2000-09-12 2002-05-17 Lumileds Lighting Us Llc 改良された光抽出効果を有する発光ダイオード
US7053419B1 (en) 2000-09-12 2006-05-30 Lumileds Lighting U.S., Llc Light emitting diodes with improved light extraction efficiency
US7064355B2 (en) * 2000-09-12 2006-06-20 Lumileds Lighting U.S., Llc Light emitting diodes with improved light extraction efficiency
US6830940B1 (en) * 2000-11-16 2004-12-14 Optical Communication Products, Inc. Method and apparatus for performing whole wafer burn-in
WO2002040998A2 (de) * 2000-11-17 2002-05-23 Zeptosens Ag Kit und verfahren zur multianalytbestimmung
US6987613B2 (en) * 2001-03-30 2006-01-17 Lumileds Lighting U.S., Llc Forming an optical element on the surface of a light emitting device for improved light extraction
US6767733B1 (en) 2001-10-10 2004-07-27 Pritest, Inc. Portable biosensor apparatus with controlled flow
US20030077600A1 (en) * 2001-10-23 2003-04-24 Chi-Chan Chen Photovoltaic device to accelerate the interaction among biomolecules
US20040023236A1 (en) * 2001-10-26 2004-02-05 Potter Michael D. Chemical and biological hazard sensor system and methods thereof
US6868207B2 (en) * 2002-01-10 2005-03-15 Corona Optical Systems, Inc. Method to diffract and attenuate an optical signal
JP2003264334A (ja) * 2002-03-08 2003-09-19 Hitachi Ltd 半導体レーザ素子及び半導体レーザモジュール
EP1348757A1 (de) 2002-03-27 2003-10-01 Micronas GmbH Vorrichtung und Verfahren zur Detektion von zellulären Vorgängen mittels Lumineszenzmessungen
US20040060987A1 (en) * 2002-05-07 2004-04-01 Green Larry R. Digital image analysis method for enhanced and optimized signals in fluorophore detection
AU2003287236A1 (en) * 2002-10-31 2004-06-07 Luna Innovations, Inc. Fiber-optic flow cell and method relating thereto
CA2520862A1 (en) * 2003-03-31 2004-10-21 Zolo Technologies, Inc. Method and apparatus for the monitoring and control of combustion
US7009213B2 (en) * 2003-07-31 2006-03-07 Lumileds Lighting U.S., Llc Light emitting devices with improved light extraction efficiency
JP3824233B2 (ja) * 2003-09-01 2006-09-20 セイコーエプソン株式会社 バイオセンサ及びバイオセンサの製造方法
EP1699422A4 (de) 2003-12-31 2009-04-29 Univ South Carolina Dünnschichtige poröse optische sensoren für gase und andere flüssigkeiten
US8581308B2 (en) 2004-02-19 2013-11-12 Rochester Institute Of Technology High temperature embedded charge devices and methods thereof
US20070201136A1 (en) 2004-09-13 2007-08-30 University Of South Carolina Thin Film Interference Filter and Bootstrap Method for Interference Filter Thin Film Deposition Process Control
DE102004047078A1 (de) * 2004-09-29 2006-04-13 Robert Bosch Gmbh ATR-Photometer und Photometerarray
US7419839B2 (en) * 2004-11-12 2008-09-02 Philips Lumileds Lighting Company, Llc Bonding an optical element to a light emitting device
US7462502B2 (en) 2004-11-12 2008-12-09 Philips Lumileds Lighting Company, Llc Color control by alteration of wavelength converting element
JP4423421B2 (ja) 2004-12-01 2010-03-03 国立大学法人浜松医科大学 エバネッセントカテーテルシステム
US7697141B2 (en) * 2004-12-09 2010-04-13 Halliburton Energy Services, Inc. In situ optical computation fluid analysis system and method
US7483140B1 (en) 2004-12-10 2009-01-27 University Of Central Florida Research Foundation, Inc. Micro integrated planar optical waveguide type SPR sensor
EP1859255B1 (de) * 2005-02-18 2013-06-05 American Dye Source, Inc. Verfahren zur kodierung von materialien mit einem lumineszenz-tag und lesevorrichtung dafür
US20070097364A1 (en) * 2005-05-09 2007-05-03 The Trustees Of Columbia University In The City Of New York Active CMOS biosensor chip for fluorescent-based detection
US7738086B2 (en) * 2005-05-09 2010-06-15 The Trustees Of Columbia University In The City Of New York Active CMOS biosensor chip for fluorescent-based detection
US7518380B2 (en) * 2005-05-17 2009-04-14 Honeywell International Inc. Chemical impedance detectors for fluid analyzers
US7557925B2 (en) * 2005-08-15 2009-07-07 X-Rite, Inc. Optical instrument and parts thereof for optimally defining light pathways
US7298488B2 (en) * 2005-09-20 2007-11-20 National Taipei University Of Technology Surface-plasmon-resonance sensing technique using electro-optic modulation
CN1940529B (zh) * 2005-09-29 2010-09-01 株式会社东芝 光波导型生物化学传感器芯片及其制造方法
EP1949152A4 (de) * 2005-11-14 2014-02-05 Bayer Ip Gmbh Planare wellenleiter-erkennungschips und kammer zur ausführung von multiplex-pcr-tests
US20070166245A1 (en) 2005-11-28 2007-07-19 Leonard Mackles Propellant free foamable toothpaste composition
US8345234B2 (en) 2005-11-28 2013-01-01 Halliburton Energy Services, Inc. Self calibration methods for optical analysis system
EP1955046A1 (de) * 2005-11-28 2008-08-13 University of South Carolina Verfahren zur beobachtung mit hoher geschwindigkeit aufgrund der verwendung multivariater optischer elemente
WO2007064575A1 (en) 2005-11-28 2007-06-07 Ometric Corporation Optical analysis system and method for real time multivariate optical computing
TWI284734B (en) * 2005-12-20 2007-08-01 Nat Univ Chung Cheng Sensing apparatus containing noble metal and sensing system and method thereof
US20070196863A1 (en) * 2006-02-17 2007-08-23 Hanson Technologies, Inc. Prion protein detection
US9528939B2 (en) 2006-03-10 2016-12-27 Indx Lifecare, Inc. Waveguide-based optical scanning systems
US8288157B2 (en) 2007-09-12 2012-10-16 Plc Diagnostics, Inc. Waveguide-based optical scanning systems
US9976192B2 (en) 2006-03-10 2018-05-22 Ldip, Llc Waveguide-based detection system with scanning light source
US9423397B2 (en) 2006-03-10 2016-08-23 Indx Lifecare, Inc. Waveguide-based detection system with scanning light source
SE529711C2 (sv) * 2006-03-22 2007-11-06 Aamic Ab Fluorescensläsare
WO2008002903A2 (en) 2006-06-26 2008-01-03 University Of South Carolina Data validation and classification in optical analysis systems
US9182282B2 (en) 2006-11-02 2015-11-10 Halliburton Energy Services, Inc. Multi-analyte optical computing system
JP5238171B2 (ja) * 2007-03-14 2013-07-17 株式会社東芝 光導波路型抗体チップ
US8184295B2 (en) 2007-03-30 2012-05-22 Halliburton Energy Services, Inc. Tablet analysis and measurement system
EP2140238B1 (de) 2007-03-30 2020-11-11 Ometric Corporation Messsysteme und -verfahren für inline-verfahren
US8213006B2 (en) * 2007-03-30 2012-07-03 Halliburton Energy Services, Inc. Multi-analyte optical computing system
DE102007033124B4 (de) * 2007-07-16 2012-12-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur optischen Detektion von Substanzen in einem flüssigen oder gasförmigen Medium
US20090075843A1 (en) * 2007-09-14 2009-03-19 Iii-N Technology, Inc. Biological Sensor System
US20090124024A1 (en) 2007-11-07 2009-05-14 Shingo Kasai Optical-waveguide sensor chip, method of manufacturing the same, method of measuring substance, substance-measuring kit and optical-waveguide sensor
JP5424610B2 (ja) * 2007-11-07 2014-02-26 株式会社東芝 光導波路型センサチップ、光導波路型センサチップの製造方法、物質の測定方法、物質測定用キットおよび光導波路型センサ
US8283633B2 (en) 2007-11-30 2012-10-09 Halliburton Energy Services, Inc. Tuning D* with modified thermal detectors
GB0723893D0 (en) * 2007-12-06 2008-01-16 Univ Cardiff Analysis device and analysis techniques
US8212213B2 (en) 2008-04-07 2012-07-03 Halliburton Energy Services, Inc. Chemically-selective detector and methods relating thereto
EP2110694B1 (de) * 2008-04-18 2013-08-14 Sony DADC Austria AG Verfahren zur Herstellung eines optischen Wellenleiters, optischer Wellenleiter und Sensoranordnung
GB2461026B (en) 2008-06-16 2011-03-09 Plc Diagnostics Inc System and method for nucleic acids sequencing by phased synthesis
BRPI0910377A2 (pt) * 2008-07-15 2015-10-06 Isiqiri Interface Tech Gmbh "área de comando baseada em sinais ópticos para um equipamento de processamento de dados e processo para a operação de uma área de comando baseada em sinai ópticos para um equipamento de processamento de dados"
DK2376840T3 (en) 2009-01-09 2019-02-04 John Zink Co Llc METHOD AND APPARATUS FOR MONITORING OF COMBUSTION PROPERTIES IN THE INTERIOR OF A HEAT WATER COOKER
AU2010241641B2 (en) 2009-04-29 2015-05-14 Ldip, Llc Waveguide-based detection system with scanning light source
EP2375242A1 (de) 2010-04-06 2011-10-12 FOM Institute for Atomic and Moleculair Physics Integrierte Vorrichtung zum Abtasten von Plasmonennanokavitäten
US20130142477A1 (en) * 2010-06-17 2013-06-06 Optisense B.V. Integrated optical waveguide evanscent field sensor
DE102010038186A1 (de) * 2010-10-14 2012-04-19 Sick Ag Optoelektronischer Sensor mit Linienanordnung von Einzelemittern
EP2694949A1 (de) 2011-04-05 2014-02-12 Integrated Plasmonics Corporation Integrierte plasmonischer sensor und vorrichtung
JP5969811B2 (ja) * 2011-05-09 2016-08-17 アイメックＩｍｅｃ シリコン・フォトニクスプラットフォーム上でのフォトニックデバイスの共集積化方法
US8906320B1 (en) 2012-04-16 2014-12-09 Illumina, Inc. Biosensors for biological or chemical analysis and systems and methods for same
CN104471376B (zh) 2012-04-19 2017-05-17 佐勒技术公司 结合有可转向可调谐二极管激光吸收光谱仪的炉内回反射器
JP6278625B2 (ja) * 2012-07-30 2018-02-14 キヤノン株式会社 測色装置及びそれを備える画像形成装置
EP2808056B1 (de) * 2013-05-29 2020-04-15 Imec VZW Optische stimulationsvorrichtung
US9823539B2 (en) * 2013-06-26 2017-11-21 Empire Technology Development Llc Methods and systems for forming optical modulators using micro-contact lithography
JP6672149B2 (ja) 2013-12-10 2020-03-25 イラミーナ インコーポレーテッド 生物学的または化学的な分析のためのバイオセンサおよびその製造方法
DE102014200627B4 (de) * 2014-01-15 2018-01-18 Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt Detektoranordnung und Spektroskop
US10018566B2 (en) 2014-02-28 2018-07-10 Ldip, Llc Partially encapsulated waveguide based sensing chips, systems and methods of use
CN107003234B (zh) * 2014-07-29 2020-01-21 Ldip有限责任公司 部分封装的基于波导的感测芯片、系统和使用方法
WO2016138427A1 (en) 2015-02-27 2016-09-01 Indx Lifecare, Inc. Waveguide-based detection system with scanning light source
EP3321663B1 (de) * 2015-07-07 2021-03-24 Furuno Electric Co., Ltd. Messchip, messvorrichtung und messverfahren
US9735305B2 (en) * 2015-09-21 2017-08-15 International Business Machines Corporation Monolithically integrated fluorescence on-chip sensor
JP7034087B2 (ja) * 2016-12-09 2022-03-11 大塚製薬株式会社 測定装置、測定異常検知方法、およびプログラム
US11371931B2 (en) * 2017-01-31 2022-06-28 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Methods and instruments for measuring samples in a well plate
WO2019044418A1 (ja) * 2017-08-31 2019-03-07 古野電気株式会社 測定用チップ、測定装置、および測定方法
JP7083481B2 (ja) * 2017-12-22 2022-06-13 国立研究開発法人宇宙航空研究開発機構 多層断熱材、宇宙機、損傷診断装置、及び被検出物の検出方法
JP6849829B2 (ja) 2017-12-26 2021-03-31 イラミーナ インコーポレーテッド センサシステム
JP2019134019A (ja) * 2018-01-30 2019-08-08 セイコーエプソン株式会社 発光装置
DE102018102059B4 (de) 2018-01-30 2020-10-22 Gottfried Wilhelm Leibniz Universität Hannover Verfahren und Vorrichtung zum Bestimmen einer Konzentration
CH714677A2 (de) * 2018-02-23 2019-08-30 Hapa Ag Aushärtekammer für Druckerzeugnisse.
US11125689B2 (en) * 2018-07-13 2021-09-21 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Highly stable semiconductor lasers and sensors for III-V and silicon photonic integrated circuits
DE102018122510A1 (de) * 2018-09-14 2020-03-19 Endress+Hauser Conducta Gmbh+Co. Kg Optischer Sensor
WO2020232581A1 (en) 2019-05-17 2020-11-26 Genesense Technology Limited Analytical system for molecule detection and sensing
TWI822221B (zh) * 2022-08-02 2023-11-11 友達光電股份有限公司 微流體檢測裝置
CN117147441B (zh) * 2023-07-18 2024-04-12 镭友芯科技(苏州)有限公司 一种气体探测器及制备方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0244394B1 (de) * 1986-04-23 1992-06-17 AVL Medical Instruments AG Sensorelement zur Bestimmung von Stoffkonzentrationen
US4949350A (en) 1989-07-17 1990-08-14 Bell Communications Research, Inc. Surface emitting semiconductor laser
US5082629A (en) * 1989-12-29 1992-01-21 The Board Of The University Of Washington Thin-film spectroscopic sensor
EP0445488B1 (de) 1990-03-08 1994-06-01 International Business Machines Corporation Halbleiterlaseranordnung
US5073041A (en) 1990-11-13 1991-12-17 Bell Communications Research, Inc. Integrated assembly comprising vertical cavity surface-emitting laser array with Fresnel microlenses
DE4207431A1 (de) * 1992-03-09 1993-09-23 Laumann Medizintech Gmbh Sensoranordnung, insbesondere zur untersuchung von biologischen und technischen strukturen
JP3212681B2 (ja) * 1992-04-08 2001-09-25 泰彦 荒川 物質識別方法とそれを用いたセンシング部および半導体レーザ式物質識別センサ
US5565978A (en) * 1993-04-15 1996-10-15 Japan Energy Corporation Total-reflection type refractive index sensor
JPH08170942A (ja) * 1994-12-19 1996-07-02 Hoechst Japan Ltd 有機ガス種別判別装置
US5557627A (en) * 1995-05-19 1996-09-17 Sandia Corporation Visible-wavelength semiconductor lasers and arrays
US5694215A (en) * 1996-03-04 1997-12-02 Carver; David R. Optical array and processing electronics and method therefor for use in spectroscopy
US5867266A (en) * 1996-04-17 1999-02-02 Cornell Research Foundation, Inc. Multiple optical channels for chemical analysis

Also Published As

Publication number Publication date
EP0918984A1 (de) 1999-06-02
ATE202630T1 (de) 2001-07-15
JP2000516719A (ja) 2000-12-12
WO1998008077A1 (de) 1998-02-26
EP0918984B1 (de) 2001-06-27
AU4379197A (en) 1998-03-06
DK0918984T3 (da) 2001-10-22
US6469785B1 (en) 2002-10-22

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