DE59105407D1 - Belichtungsvorrichtung. - Google Patents

Belichtungsvorrichtung.

Info

Publication number
DE59105407D1
DE59105407D1 DE59105407T DE59105407T DE59105407D1 DE 59105407 D1 DE59105407 D1 DE 59105407D1 DE 59105407 T DE59105407 T DE 59105407T DE 59105407 T DE59105407 T DE 59105407T DE 59105407 D1 DE59105407 D1 DE 59105407D1
Authority
DE
Germany
Prior art keywords
exposure device
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59105407T
Other languages
English (en)
Inventor
Holger Vogt
Heinz Kueck
Guenther Hess
Andreas Gehner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Application granted granted Critical
Publication of DE59105407D1 publication Critical patent/DE59105407D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
DE59105407T 1991-10-30 1991-10-30 Belichtungsvorrichtung. Expired - Fee Related DE59105407D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/DE1991/000860 WO1993009472A1 (de) 1991-10-30 1991-10-30 Belichtungsvorrichtung
US08/211,973 US5495280A (en) 1991-10-30 1994-06-17 Illumination device using a pulsed laser source a Schlieren optical system, and a matrix addressable surface light modulator for producing images with undiffracted light

Publications (1)

Publication Number Publication Date
DE59105407D1 true DE59105407D1 (de) 1995-06-08

Family

ID=22789015

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59105407T Expired - Fee Related DE59105407D1 (de) 1991-10-30 1991-10-30 Belichtungsvorrichtung.

Country Status (5)

Country Link
US (1) US5495280A (de)
EP (1) EP0610184B1 (de)
JP (1) JPH0770469B2 (de)
DE (1) DE59105407D1 (de)
WO (1) WO1993009472A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629801A (en) * 1995-06-07 1997-05-13 Silicon Light Machines Diffraction grating light doubling collection system
DE19522936C2 (de) * 1995-06-23 1999-01-07 Fraunhofer Ges Forschung Vorrichtung zum Strukturieren einer photolithographischen Schicht
US6330376B1 (en) * 1997-12-19 2001-12-11 Intel Corporation Higher order rejection method and apparatus for optical modulator
SE519397C2 (sv) 1998-12-16 2003-02-25 Micronic Laser Systems Ab System och metod för mikrolitografiskt ritande av högprecisionsmönster
DE10046518A1 (de) * 2000-09-15 2002-04-04 Fraunhofer Ges Forschung Verfahren zur Verbesserung der Bildqualität und zur Erhöhung der Schreibgeschwindigkeit bei Belichtung lichtempfindlicher Schichten
US6477029B1 (en) 2000-09-27 2002-11-05 Eastman Kodak Company Deformable micro-actuator
US6352337B1 (en) 2000-11-08 2002-03-05 Eastman Kodak Company Assisted drop-on-demand inkjet printer using deformable micro-acuator
US6428146B1 (en) 2000-11-08 2002-08-06 Eastman Kodak Company Fluid pump, ink jet print head utilizing the same, and method of pumping fluid
US6498711B1 (en) 2000-11-08 2002-12-24 Eastman Kodak Company Deformable micro-actuator with grid electrode
US6626416B2 (en) 2000-12-12 2003-09-30 Eastman Kodak Company Electrostrictive valve for modulating a fluid flow
US6435840B1 (en) 2000-12-21 2002-08-20 Eastman Kodak Company Electrostrictive micro-pump
US6624880B2 (en) 2001-01-18 2003-09-23 Micronic Laser Systems Ab Method and apparatus for microlithography
US6785001B2 (en) 2001-08-21 2004-08-31 Silicon Light Machines, Inc. Method and apparatus for measuring wavelength jitter of light signal
US6819490B2 (en) 2001-09-10 2004-11-16 Micronic Laser Systems Ab Homogenization of a spatially coherent radiation beam and printing and inspection, respectively, of a pattern on a workpiece
KR20050044369A (ko) 2001-11-07 2005-05-12 어플라이드 머티어리얼스, 인코포레이티드 마스크없는 광자-전자 스팟-그리드 어레이 프린터
US6897941B2 (en) * 2001-11-07 2005-05-24 Applied Materials, Inc. Optical spot grid array printer
US6903859B2 (en) 2001-12-07 2005-06-07 Micronic Laser Systems Ab Homogenizer
US6839479B2 (en) 2002-05-29 2005-01-04 Silicon Light Machines Corporation Optical switch
US7046420B1 (en) 2003-02-28 2006-05-16 Silicon Light Machines Corporation MEM micro-structures and methods of making the same
JP4541010B2 (ja) * 2004-03-25 2010-09-08 財団法人国際科学振興財団 パターン露光装置および二次元光像発生装置
EP1612605A1 (de) * 2004-07-03 2006-01-04 Technomedica AG Laserbelichtung
US7800811B2 (en) 2005-05-13 2010-09-21 Nxp B.V. Spatial light modulator device, lithographic apparatus, display device, method of producing a light beam having a spatial light pattern and method of manufacturing a device
US8390781B2 (en) 2008-09-23 2013-03-05 Pinebrook Imaging Technology, Ltd. Optical imaging writer system
US8390786B2 (en) 2008-09-23 2013-03-05 Pinebrook Imaging Technology, Ltd. Optical imaging writer system
US8253923B1 (en) 2008-09-23 2012-08-28 Pinebrook Imaging Technology, Ltd. Optical imaging writer system
US8670106B2 (en) 2008-09-23 2014-03-11 Pinebrook Imaging, Inc. Optical imaging writer system
US8395752B2 (en) 2008-09-23 2013-03-12 Pinebrook Imaging Technology, Ltd. Optical imaging writer system
CN102914952A (zh) * 2011-08-04 2013-02-06 上海微电子装备有限公司 一种对准系统参考光栅位置调整装置及其调整方法
US9641826B1 (en) 2011-10-06 2017-05-02 Evans & Sutherland Computer Corporation System and method for displaying distant 3-D stereo on a dome surface

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3580126A (en) * 1968-10-29 1971-05-25 John F Forkner Light display instrument
US3930684A (en) * 1971-06-22 1976-01-06 Lasch Jr Cecil A Automatic wafer feeding and pre-alignment apparatus and method
US4728185A (en) * 1985-07-03 1988-03-01 Texas Instruments Incorporated Imaging system
US4675702A (en) * 1986-03-14 1987-06-23 Gerber Scientific Inc. Photoplotter using a light valve device and process for exposing graphics
DE59105735D1 (de) * 1990-05-02 1995-07-20 Fraunhofer Ges Forschung Belichtungsvorrichtung.

Also Published As

Publication number Publication date
JPH06503682A (ja) 1994-04-21
JPH0770469B2 (ja) 1995-07-31
US5495280A (en) 1996-02-27
WO1993009472A1 (de) 1993-05-13
EP0610184A1 (de) 1994-08-17
EP0610184B1 (de) 1995-05-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee