DE556669T1 - Maskenausrichtung für Abstandslithographie unter Verwendung eines gespeicherten Videobildes. - Google Patents

Maskenausrichtung für Abstandslithographie unter Verwendung eines gespeicherten Videobildes.

Info

Publication number
DE556669T1
DE556669T1 DE0556669T DE93101829T DE556669T1 DE 556669 T1 DE556669 T1 DE 556669T1 DE 0556669 T DE0556669 T DE 0556669T DE 93101829 T DE93101829 T DE 93101829T DE 556669 T1 DE556669 T1 DE 556669T1
Authority
DE
Germany
Prior art keywords
image
stored
microscope
mask alignment
focal position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE0556669T
Other languages
English (en)
Inventor
Peter L Domenicali
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUESS KG KARL
Original Assignee
SUESS KG KARL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUESS KG KARL filed Critical SUESS KG KARL
Publication of DE556669T1 publication Critical patent/DE556669T1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7069—Alignment mark illumination, e.g. darkfield, dual focus
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • H04N7/181—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast for receiving images from a plurality of remote sources
DE0556669T 1992-02-07 1993-02-05 Maskenausrichtung für Abstandslithographie unter Verwendung eines gespeicherten Videobildes. Pending DE556669T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/832,413 US5204739A (en) 1992-02-07 1992-02-07 Proximity mask alignment using a stored video image

Publications (1)

Publication Number Publication Date
DE556669T1 true DE556669T1 (de) 1996-11-28

Family

ID=25261565

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69310231T Expired - Lifetime DE69310231T2 (de) 1992-02-07 1993-02-05 Maskenausrichtung für Abstandslithographie unter Verwendung eines gespeicherten Videobildes
DE0556669T Pending DE556669T1 (de) 1992-02-07 1993-02-05 Maskenausrichtung für Abstandslithographie unter Verwendung eines gespeicherten Videobildes.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69310231T Expired - Lifetime DE69310231T2 (de) 1992-02-07 1993-02-05 Maskenausrichtung für Abstandslithographie unter Verwendung eines gespeicherten Videobildes

Country Status (5)

Country Link
US (1) US5204739A (de)
EP (1) EP0556669B1 (de)
JP (1) JPH0629173A (de)
AT (1) ATE152528T1 (de)
DE (2) DE69310231T2 (de)

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Also Published As

Publication number Publication date
US5204739A (en) 1993-04-20
ATE152528T1 (de) 1997-05-15
JPH0629173A (ja) 1994-02-04
EP0556669B1 (de) 1997-05-02
EP0556669A1 (de) 1993-08-25
DE69310231D1 (de) 1997-06-05
DE69310231T2 (de) 1997-08-28

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