DE50002017D1 - Verfahren zur herstellung einer nanotube-schicht auf einem substrat - Google Patents

Verfahren zur herstellung einer nanotube-schicht auf einem substrat

Info

Publication number
DE50002017D1
DE50002017D1 DE50002017T DE50002017T DE50002017D1 DE 50002017 D1 DE50002017 D1 DE 50002017D1 DE 50002017 T DE50002017 T DE 50002017T DE 50002017 T DE50002017 T DE 50002017T DE 50002017 D1 DE50002017 D1 DE 50002017D1
Authority
DE
Germany
Prior art keywords
substrate
producing
nanotube layer
carbon
flushed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50002017T
Other languages
English (en)
Inventor
Klaus Mauthner
Xinhe Tang
Roland Haubner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electrovac AG
Original Assignee
Electrovac AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electrovac AG filed Critical Electrovac AG
Application granted granted Critical
Publication of DE50002017D1 publication Critical patent/DE50002017D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/102—Fullerene type base or coating
DE50002017T 1999-09-29 2000-08-03 Verfahren zur herstellung einer nanotube-schicht auf einem substrat Expired - Lifetime DE50002017D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT0166799A AT407754B (de) 1999-09-29 1999-09-29 Verfahren und vorrichtung zur herstellung einer nanotube-schicht auf einem substrat
PCT/AT2000/000213 WO2001023303A1 (de) 1999-09-29 2000-08-03 Verfahren zur herstellung einer nanotube-schicht auf einem substrat

Publications (1)

Publication Number Publication Date
DE50002017D1 true DE50002017D1 (de) 2003-06-05

Family

ID=3518390

Family Applications (1)

Application Number Title Priority Date Filing Date
DE50002017T Expired - Lifetime DE50002017D1 (de) 1999-09-29 2000-08-03 Verfahren zur herstellung einer nanotube-schicht auf einem substrat

Country Status (7)

Country Link
US (1) US7033650B2 (de)
EP (1) EP1227999B1 (de)
JP (1) JP4718742B2 (de)
AT (2) AT407754B (de)
AU (1) AU6548300A (de)
DE (1) DE50002017D1 (de)
WO (1) WO2001023303A1 (de)

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Also Published As

Publication number Publication date
EP1227999B1 (de) 2003-05-02
WO2001023303A1 (de) 2001-04-05
US7033650B2 (en) 2006-04-25
US20020102353A1 (en) 2002-08-01
ATE238968T1 (de) 2003-05-15
ATA166799A (de) 2000-10-15
JP4718742B2 (ja) 2011-07-06
AU6548300A (en) 2001-04-30
AT407754B (de) 2001-06-25
EP1227999A1 (de) 2002-08-07
JP2003510462A (ja) 2003-03-18

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