DE4309056B4 - Method and device for determining the distance and scattering intensity of scattering points - Google Patents
Method and device for determining the distance and scattering intensity of scattering points Download PDFInfo
- Publication number
- DE4309056B4 DE4309056B4 DE19934309056 DE4309056A DE4309056B4 DE 4309056 B4 DE4309056 B4 DE 4309056B4 DE 19934309056 DE19934309056 DE 19934309056 DE 4309056 A DE4309056 A DE 4309056A DE 4309056 B4 DE4309056 B4 DE 4309056B4
- Authority
- DE
- Germany
- Prior art keywords
- scattering
- points
- spectrum
- distance
- interferometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
- G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
- A61B5/0062—Arrangements for scanning
- A61B5/0066—Optical coherence imaging
Abstract
Description
Gegenstand der Patentanmeldung sind ein optisches Verfahren und eine Vorrichtung mit dem die Entfernung zu einem oder mehreren beleuchteten streuenden Objektpunkten mit hoher Genauigkeit bestimmt werden kann. Solche Verfahren sind wichtig für die automatisierte Vermessung von Objektoberflächen (Form-Messung). Das Verfahren und die Vorrichtung können aber auch eingesetzt werden, um Volumenstreuer zu vermessen, wenn Licht in das zu vermessende Objekt eindringen kann. Dies ist z.B. in der medizinischen Gewebediagnostik wichtig.object The patent application is an optical method and apparatus with the distance to one or more illuminated scattering Object points can be determined with high accuracy. Such Procedures are important for the automated measurement of object surfaces (shape measurement). The procedure and the device can but also used to measure volume spreaders, though Light can penetrate into the object to be measured. This is e.g. important in medical tissue diagnostics.
Es sind in der Literatur viele Abstandssensoren beschrieben (z. B. zusammefassend bei T. Strand, "Optics for Machine Vision", Proc. SPIE 456 (1984). Die meisten beruhen auf Triangulation mit strukturierter Beleuchtung, entweder inkohärent oder kohärent. Diese Methoden haben den Nachteil, daß abgeschattete Bereiche auftreten, durch den Triangulationswinkel. Von kohärenten Verfahren ist bekannt, daß die Tiefengenauigkeit durch die Beobachtungsapertur begrenzt ist (G. Häusler, „Physical Limits of 3D-Sensing" Proc. SPIE 1822 (1992)). Es sind auch einige Verfahren bekannt, die diese Beschränkung nicht haben (A. Fercher, et al "Rough surface interferometry with a tow-wavelength heterodyne speckle interferometer" Appl. Opt. 24 (1985) p. 2181, T. Dresel, G. Häusler, "Three- dimensional sensing of rough surfaces by coherence radar„, Appl. Opt. 31 (1992) p. 919).Many distance sensors are described in the literature (for example, T. Strand, "Optics for Machine Vision," Proc. SPIE 456 (1984).) Most are based on triangulation with structured illumination, either incoherent or coherent have the disadvantage that shaded areas occur due to the triangulation angle. "Coherent methods are known to limit the depth accuracy by the observation aperture (G. Häusler," Physical Limits of 3D Sensing "Proc. SPIE 1822 (1992)) Several methods are also known which do not have this limitation (A. Fercher, et al., "Rough surface interferometry with a tow-wavelength heterodyne speckle interferometer" Appl. Opt. 24 (1985) p.2181, T. Dresel, G. Häusler , "Three-dimensional sensing of rough surfaces by coherence radar " , Appl. Opt. 31 (1992) p. 919).
Eine medizinische Anwendung zur Gewebediagnostik im Volumen wurde beschrieben von D. Huang et al, "Micron resolution ranging of cornea Anterior chamber by optical reflectometry" Lasers in Surgery and medicine Vol 11, (1991) p. 419. Diese Methoden arbeiten nicht mit kohärentem Licht, erfordern aber komplizierte Heterodyn-Technologie oder mechanische Bewegung, um das Objekt in der Tiefe abzutasten.A medical application for tissue diagnostics in volume has been described by D. Huang et al, "Micron resolution ranging of cornea Anterior chamber by optical reflectometry "Lasers in surgery and medicine Vol 11, (1991) p. 419. These methods do not work with coherent Light, but require complicated heterodyne technology or mechanical Movement to scan the object in depth.
Gegenstand
der Anmeldung ein Verfahren und eine Vorrichtung, das ohne mechanische
Abtastung und ohne Heterodyn-Technologie auskommt. Es beruht auf
der Weißlichtinterferometrie,
wie in der Deutschen Patentschrift von G. Häusler "Verfahren und Einrichtung zur berührungslosen
Erfassung der Oberflächengestalt
von diffus streuenden Objekten" 4108944
(1991) beschrieben. Die Anordnung ist ein Interferometer. Zur Erklärung wird
ein Michelson-Interferometer benutzt, aber auch andere Interferometer
sind geeignet. Die Anordnung ist in
Das
Objekt
Aus dem Spektrum läßt sich nun die Entfernung eines oder mehrerer streuender Punkte ermitteln. Es läßt sich sogar die Intensitätsverteilung der Rückstreuung in einem Volumenstreuer ermitteln. Hierzu werden die sog. Müller'schen Streifen ausgewertet.Out the spectrum can be now determine the distance of one or more scattering points. It can be even the intensity distribution the backscatter in a volume spreader. For this purpose, the so-called Müller stripes are evaluated.
Zunächst wird
die Auswertung für
einen Objektpunkt, der in der Entfernung z gegenüber der Referenzebene
Das
Spektrum für
Bliesen Punkt hat eine Intensitätsverteilung
Dabei ist k die Wellenzahl im Spektrum, φ ist eine Zufallsphase, die darauf beruht, daß man Speckle beobachtet. φ hängt aber nur schwach von k ab und kann deshalb hier vernachlässigt werden.there k is the wavenumber in the spectrum, φ is a random phase, the based on that one speckle observed. φ hangs but only weakly from k and therefore can be neglected here.
Das Spektrum ist also mit der Ortsfrequenz "z„ moduliert. Die entstehenden hellen und dunklen Streifen bezeichnet man als Müller'sche Streifen. Man braucht also nur die Ortsfrequenz zu bestimmen, um die Entfernung des streuenden Punktes zu bestimmen. Dies ist aber bei rauhen Objekten nur möglich, wenn bestimmte Bedingungen eingehalten werden, die in der Deutschen Patentschrift 4108944 von G. Häusler beschrieben werden: es handelt sich hier nicht um ein konventionelles Interferometer mit spiegelnden Oberflächen, sondern in einem Arm befindet sich ein diffus streuendes Objekt. Daraus folgt: die Lichtquelle muß räumlich so kohärent sein, daß im rückgestreuten Licht Speckle entstehen. Denn nur dann ist Interferenz möglich. Denn nur innerhalb eines Speckles ist die Phase annähernd konstant. Weiterhin darf jede Photodiode des Empfängerarrays nicht größer als der Speckledurchmesser sein, da sonst kein oder nur geringer Interferenzkontrast sichtbar ist.The spectrum is thus modulated with the spatial frequency "z". The resulting light and dark stripes are called Muller's stripes. So you need to determine only the spatial frequency to determine the distance of the scattering point. That applies to rough objects only possible if certain conditions are met, which are described in the German patent specification 4108944 by G. Häusler: it is not a conventional interferometer with reflective surfaces, but in one arm there is a diffuse scattering object The light source must be so coherent in space that speckles are formed in the backscattered light, because only within a speckle the phase is approximately constant low interference contrast is visible.
Die Ermittlung der Frequenz "z" der Müller-Streifen erfolgt zweckmäßig durch Fourier-Transformation des Farbspektrums nach der Variablen k. Aber es ist auch eine direkte Bestimmung der Periodenlänge im Photodiodensignal möglich. Dies ist einfacher und schneller, wenn nur wenige Objektpunkte streuen.The determination of the frequency "z" of the Müller stripes is expediently carried out by Fourier transformation of the color spectrum according to the variable k. But it is also a direct determination of the period length in the photodiode signal possible. This is easier and faster if only a few object points sprinkle.
Ein enormer Vorteil des Verfahrens ist, daß die Genauigkeit der Ab standsbestimmung unabhängig von der Beobachtungsapertur ist. Dies ist nicht der Fall, bei rein kohärenten Methoden und bei fast allen kommerziellen Sensoren.One The enormous advantage of the method is that the accuracy of the Ab determination independently from the observation aperture. This is not the case when pure coherent Methods and in almost all commercial sensors.
Das
Verfahren kann auch die Entfernung vieler im Volumen liegender Punkte,
in verschiedenen Abständen
z, bestimmen, die jeweils mit der Intensität i(z) streuen. Auf der Photodiodenzeile
in der Spektralebene überlagern
sich die Signale aus der gesamten Tiefe. Deshalb sieht die Zeile
das Signal
Die „1„ im Integranden belastet die Dynamik des Empfängers, ist jedoch für die Messung unwesentlich. Im wesentlichen ist das Spektrum I(k) die Fouriertransformierte von i(z). Durch Fourier-Rück-Transformation des Signals nach k läßt sich i(z) rückgewinnen. Damit ist diese Methode eine echte tomographische Methode.The " 1 " in the integrand stresses the dynamics of the receiver, but is immaterial to the measurement. Essentially, the spectrum I (k) is the Fourier transform of i (z). By Fourier-back transformation of the signal to k, i (z) can be recovered. This makes this method a true tomographic method.
Das Signal-Rausch-Verhältnis ist günstig, weil das gesamte Signal der Photodiodenzeile nur nach einzelenen Frequenzen durchsucht wird, mit der Fourier-Transformation. Es sind keine mechanisch bewegten Teile nötig. Die Belichtungszeit kann kurz sein und damit biologische Aktivität oder Bewegung ausblenden.The Signal-to-noise ratio is cheap, because the entire signal of the photodiode array only to individual frequencies is searched with the Fourier transform. They are not mechanical moving parts needed. The exposure time can be short and thus biological activity or movement hide.
Sie ist anwendbar auf industrielle Objekte, z. B. Blick in durch scheinde Keramik, ebenso wie für biologische Objekte, z. B. Untersuchung auf subkutane Hautveränderungen, Brusttumore, etc.she is applicable to industrial objects, eg. B. Look in through Ceramics, as well as for biological objects, e.g. B. Examination for subcutaneous lesions, Breast tumors, etc.
Das Verfahren ist auch erweiterbar, durch "Lichtquellen„ in anderen Spektralbereichen, die das zu untersuchende Material durchdringen können. Z. B. Röntgenquellen, UV-Quellen, Infrarotquellen, Ultraschallquellen.The method can also be extended by "light sources " in other spectral regions that can penetrate the material under investigation, eg X-ray sources, UV sources, infrared sources, ultrasound sources.
Das
Verfahren läßt sich
sich nicht nur entlang einer Achse
Eine
weitere Modifikation ist in
Die
Dispersion bewirkt, daß das
Interferometer nur für
eine be stimmte Wellenzaha kO abgeglichen
ist, nämlich
für die
Wellenzahl, bei der die optische Weglänge im Referenzarm und im Objektarm gleich
ist. Das Spektrum I(k) hat folgenden Verlauf:
Der
Verlauf des Spektrums I(k,kO) ist in
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19934309056 DE4309056B4 (en) | 1993-03-20 | 1993-03-20 | Method and device for determining the distance and scattering intensity of scattering points |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19934309056 DE4309056B4 (en) | 1993-03-20 | 1993-03-20 | Method and device for determining the distance and scattering intensity of scattering points |
Publications (2)
Publication Number | Publication Date |
---|---|
DE4309056A1 DE4309056A1 (en) | 1994-09-22 |
DE4309056B4 true DE4309056B4 (en) | 2006-05-24 |
Family
ID=6483393
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19934309056 Expired - Lifetime DE4309056B4 (en) | 1993-03-20 | 1993-03-20 | Method and device for determining the distance and scattering intensity of scattering points |
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Country | Link |
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DE (1) | DE4309056B4 (en) |
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