DE404295T1 - Kondensatoren fuer integrierte schaltungen. - Google Patents

Kondensatoren fuer integrierte schaltungen.

Info

Publication number
DE404295T1
DE404295T1 DE199090303064T DE90303064T DE404295T1 DE 404295 T1 DE404295 T1 DE 404295T1 DE 199090303064 T DE199090303064 T DE 199090303064T DE 90303064 T DE90303064 T DE 90303064T DE 404295 T1 DE404295 T1 DE 404295T1
Authority
DE
Germany
Prior art keywords
capacitors
integrated circuits
circuits
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE199090303064T
Other languages
English (en)
Inventor
William L. Colorado Springs Colorado 80906 Us Larson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RAMTRON CORP COLORADO SPRINGS COL US
Original Assignee
RAMTRON CORP COLORADO SPRINGS COL US
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RAMTRON CORP COLORADO SPRINGS COL US filed Critical RAMTRON CORP COLORADO SPRINGS COL US
Publication of DE404295T1 publication Critical patent/DE404295T1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type
DE199090303064T 1989-06-20 1990-03-21 Kondensatoren fuer integrierte schaltungen. Pending DE404295T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/368,668 US5005102A (en) 1989-06-20 1989-06-20 Multilayer electrodes for integrated circuit capacitors

Publications (1)

Publication Number Publication Date
DE404295T1 true DE404295T1 (de) 1991-11-28

Family

ID=23452232

Family Applications (2)

Application Number Title Priority Date Filing Date
DE199090303064T Pending DE404295T1 (de) 1989-06-20 1990-03-21 Kondensatoren fuer integrierte schaltungen.
DE69030843T Expired - Fee Related DE69030843T2 (de) 1989-06-20 1990-03-21 Verfahren zum Herstellen von Kondensatoren für integrierte Schaltungen

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69030843T Expired - Fee Related DE69030843T2 (de) 1989-06-20 1990-03-21 Verfahren zum Herstellen von Kondensatoren für integrierte Schaltungen

Country Status (5)

Country Link
US (1) US5005102A (de)
EP (1) EP0404295B1 (de)
JP (1) JP2825606B2 (de)
AU (1) AU640934B2 (de)
DE (2) DE404295T1 (de)

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US5164808A (en) * 1991-08-09 1992-11-17 Radiant Technologies Platinum electrode structure for use in conjunction with ferroelectric materials
US5262662A (en) * 1991-10-31 1993-11-16 Micron Technology, Inc. Storage node capacitor having tungsten and etched tin storage node capacitor plate
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Also Published As

Publication number Publication date
DE69030843T2 (de) 1997-09-18
AU640934B2 (en) 1993-09-09
US5005102A (en) 1991-04-02
EP0404295A1 (de) 1990-12-27
JP2825606B2 (ja) 1998-11-18
EP0404295B1 (de) 1997-06-04
DE69030843D1 (de) 1997-07-10
AU5761490A (en) 1991-01-31
JPH03204967A (ja) 1991-09-06

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