DE3889087T2 - Integrierter Tintenspritzdruckkopf und Verfahren zu dessen Herstellung. - Google Patents

Integrierter Tintenspritzdruckkopf und Verfahren zu dessen Herstellung.

Info

Publication number
DE3889087T2
DE3889087T2 DE3889087T DE3889087T DE3889087T2 DE 3889087 T2 DE3889087 T2 DE 3889087T2 DE 3889087 T DE3889087 T DE 3889087T DE 3889087 T DE3889087 T DE 3889087T DE 3889087 T2 DE3889087 T2 DE 3889087T2
Authority
DE
Germany
Prior art keywords
making
same
inkjet printhead
integrated inkjet
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3889087T
Other languages
English (en)
Other versions
DE3889087D1 (de
Inventor
Eldurkar V Bhaskar
Marzio A Leban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of DE3889087D1 publication Critical patent/DE3889087D1/de
Publication of DE3889087T2 publication Critical patent/DE3889087T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1625—Manufacturing processes electroforming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/1437—Back shooter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/223—Buried stripe structure
    • H01S5/2232—Buried stripe structure with inner confining structure between the active layer and the lower electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/227—Buried mesa structure ; Striped active layer
    • H01S5/2272—Buried mesa structure ; Striped active layer grown by a mask induced selective growth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/323—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/32308—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/3428—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers layer orientation perpendicular to the substrate
DE3889087T 1987-12-17 1988-10-20 Integrierter Tintenspritzdruckkopf und Verfahren zu dessen Herstellung. Expired - Fee Related DE3889087T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/134,135 US4847630A (en) 1987-12-17 1987-12-17 Integrated thermal ink jet printhead and method of manufacture

Publications (2)

Publication Number Publication Date
DE3889087D1 DE3889087D1 (de) 1994-05-19
DE3889087T2 true DE3889087T2 (de) 1994-11-03

Family

ID=22461917

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3889087T Expired - Fee Related DE3889087T2 (de) 1987-12-17 1988-10-20 Integrierter Tintenspritzdruckkopf und Verfahren zu dessen Herstellung.

Country Status (7)

Country Link
US (1) US4847630A (de)
EP (1) EP0321075B1 (de)
JP (1) JP2716174B2 (de)
KR (1) KR910007328B1 (de)
CA (1) CA1302160C (de)
DE (1) DE3889087T2 (de)
HK (1) HK127394A (de)

Families Citing this family (101)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5210549A (en) * 1988-06-17 1993-05-11 Canon Kabushiki Kaisha Ink jet recording head having resistor formed by oxidization
US5858197A (en) * 1988-06-17 1999-01-12 Canon Kabushiki Kaisha Process for manufacturing substrate for ink jet recording head using anodic oxidation
US5400063A (en) * 1988-12-14 1995-03-21 Mannesmann Aktiengesellschaft Method for optimizing a conductor-path layout for a print head of an ink printing device, and a conductor-path layout for such a print head
US4999650A (en) * 1989-12-18 1991-03-12 Eastman Kodak Company Bubble jet print head having improved multiplex actuation construction
US5016024A (en) * 1990-01-09 1991-05-14 Hewlett-Packard Company Integral ink jet print head
JPH0733091B2 (ja) * 1990-03-15 1995-04-12 日本電気株式会社 インクジェット記録方法及びそれを用いたインクジェットヘッド
DE59103819D1 (de) * 1990-05-21 1995-01-19 Eastman Kodak Co Tintenschreibkopf für eine nach dem thermalwandlerprinzip arbeitende flüssigkeitsstrahlaufzeichnungsvorrichtung und verfahren zu seiner herstellung.
US5305015A (en) * 1990-08-16 1994-04-19 Hewlett-Packard Company Laser ablated nozzle member for inkjet printhead
EP0471157B1 (de) * 1990-08-16 1995-08-09 Hewlett-Packard Company Photo-ablatierte Bauteile für Farbstrahldruckkopf
US5442384A (en) * 1990-08-16 1995-08-15 Hewlett-Packard Company Integrated nozzle member and tab circuit for inkjet printhead
US5469199A (en) * 1990-08-16 1995-11-21 Hewlett-Packard Company Wide inkjet printhead
US5291226A (en) * 1990-08-16 1994-03-01 Hewlett-Packard Company Nozzle member including ink flow channels
US5229785A (en) * 1990-11-08 1993-07-20 Hewlett-Packard Company Method of manufacture of a thermal inkjet thin film printhead having a plastic orifice plate
US6019457A (en) * 1991-01-30 2000-02-01 Canon Information Systems Research Australia Pty Ltd. Ink jet print device and print head or print apparatus using the same
EP0498293B1 (de) * 1991-01-30 1996-10-30 Canon Information Systems Research Australia Pty Ltd. Strahldrucker mit Bläschen für Bildaufzeichnungsvorrichtung
AU657931B2 (en) * 1991-01-30 1995-03-30 Canon Kabushiki Kaisha An integrally formed bubblejet print device
AU657930B2 (en) * 1991-01-30 1995-03-30 Canon Kabushiki Kaisha Nozzle structures for bubblejet print devices
US5815173A (en) * 1991-01-30 1998-09-29 Canon Kabushiki Kaisha Nozzle structures for bubblejet print devices
ATE144741T1 (de) * 1991-01-30 1996-11-15 Canon Information Syst Res Strahldrucker mit bläschen für bildaufzeichnungsvorrichtung
US5300959A (en) * 1992-04-02 1994-04-05 Hewlett-Packard Company Efficient conductor routing for inkjet printhead
US5278584A (en) * 1992-04-02 1994-01-11 Hewlett-Packard Company Ink delivery system for an inkjet printhead
US5648806A (en) * 1992-04-02 1997-07-15 Hewlett-Packard Company Stable substrate structure for a wide swath nozzle array in a high resolution inkjet printer
US5604519A (en) * 1992-04-02 1997-02-18 Hewlett-Packard Company Inkjet printhead architecture for high frequency operation
US5648805A (en) * 1992-04-02 1997-07-15 Hewlett-Packard Company Inkjet printhead architecture for high speed and high resolution printing
US5594481A (en) * 1992-04-02 1997-01-14 Hewlett-Packard Company Ink channel structure for inkjet printhead
US5297331A (en) * 1992-04-03 1994-03-29 Hewlett-Packard Company Method for aligning a substrate with respect to orifices in an inkjet printhead
US5563642A (en) * 1992-04-02 1996-10-08 Hewlett-Packard Company Inkjet printhead architecture for high speed ink firing chamber refill
US5450113A (en) * 1992-04-02 1995-09-12 Hewlett-Packard Company Inkjet printhead with improved seal arrangement
US5568171A (en) * 1992-04-02 1996-10-22 Hewlett-Packard Company Compact inkjet substrate with a minimal number of circuit interconnects located at the end thereof
US5420627A (en) * 1992-04-02 1995-05-30 Hewlett-Packard Company Inkjet printhead
US5638101A (en) * 1992-04-02 1997-06-10 Hewlett-Packard Company High density nozzle array for inkjet printhead
DE4214555C2 (de) * 1992-04-28 1996-04-25 Eastman Kodak Co Elektrothermischer Tintendruckkopf
US5598189A (en) * 1993-09-07 1997-01-28 Hewlett-Packard Company Bipolar integrated ink jet printhead driver
US5565900A (en) * 1994-02-04 1996-10-15 Hewlett-Packard Company Unit print head assembly for ink-jet printing
US6305786B1 (en) 1994-02-23 2001-10-23 Hewlett-Packard Company Unit print head assembly for an ink-jet printer
US5534901A (en) * 1994-06-06 1996-07-09 Xerox Corporation Ink jet printhead having a flat surface heater plate
US6003986A (en) * 1994-10-06 1999-12-21 Hewlett-Packard Co. Bubble tolerant manifold design for inkjet cartridge
US5736998A (en) * 1995-03-06 1998-04-07 Hewlett-Packard Company Inkjet cartridge design for facilitating the adhesive sealing of a printhead to an ink reservoir
US5852460A (en) * 1995-03-06 1998-12-22 Hewlett-Packard Company Inkjet print cartridge design to decrease deformation of the printhead when adhesively sealing the printhead to the print cartridge
US5905517A (en) * 1995-04-12 1999-05-18 Eastman Kodak Company Heater structure and fabrication process for monolithic print heads
WO1996032284A1 (en) * 1995-04-12 1996-10-17 Eastman Kodak Company Monolithic printing heads and manufacturing processes therefor
EP0772525A1 (de) * 1995-04-12 1997-05-14 Eastman Kodak Company Verfahren zum bauen und herstellen von thermisch aktivierten druckköpfen
AUPN234695A0 (en) * 1995-04-12 1995-05-04 Eastman Kodak Company Heater structure for monolithic lift print heads
US6183064B1 (en) 1995-08-28 2001-02-06 Lexmark International, Inc. Method for singulating and attaching nozzle plates to printheads
US6120131A (en) * 1995-08-28 2000-09-19 Lexmark International, Inc. Method of forming an inkjet printhead nozzle structure
US5909231A (en) * 1995-10-30 1999-06-01 Hewlett-Packard Co. Gas flush to eliminate residual bubbles
US5718044A (en) * 1995-11-28 1998-02-17 Hewlett-Packard Company Assembly of printing devices using thermo-compressive welding
US6758552B1 (en) 1995-12-06 2004-07-06 Hewlett-Packard Development Company Integrated thin-film drive head for thermal ink-jet printer
US6239820B1 (en) 1995-12-06 2001-05-29 Hewlett-Packard Company Thin-film printhead device for an ink-jet printer
US5883650A (en) * 1995-12-06 1999-03-16 Hewlett-Packard Company Thin-film printhead device for an ink-jet printer
US6113221A (en) * 1996-02-07 2000-09-05 Hewlett-Packard Company Method and apparatus for ink chamber evacuation
US6003977A (en) * 1996-02-07 1999-12-21 Hewlett-Packard Company Bubble valving for ink-jet printheads
US6000787A (en) 1996-02-07 1999-12-14 Hewlett-Packard Company Solid state ink jet print head
US6310639B1 (en) 1996-02-07 2001-10-30 Hewlett-Packard Co. Printer printhead
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
JPH11129483A (ja) * 1997-07-03 1999-05-18 Canon Inc 液体吐出ヘッド用オリフィスプレートの製造方法、オリフィスプレート、該オリフィスプレートを有する液体吐出ヘッド及び液体吐出ヘッドの製造方法
US5966154A (en) * 1997-10-17 1999-10-12 Eastman Kodak Company Graphic arts printing plate production by a continuous jet drop printing with asymmetric heating drop deflection
US6322201B1 (en) * 1997-10-22 2001-11-27 Hewlett-Packard Company Printhead with a fluid channel therethrough
US6303274B1 (en) 1998-03-02 2001-10-16 Hewlett-Packard Company Ink chamber and orifice shape variations in an ink-jet orifice plate
DE60033213T2 (de) * 1999-06-04 2007-10-25 Canon K.K. Flüssigkeitsausstosskopf und Flüssigkeitsausstossvorrichtung
US6132032A (en) * 1999-08-13 2000-10-17 Hewlett-Packard Company Thin-film print head for thermal ink-jet printers
US6986566B2 (en) 1999-12-22 2006-01-17 Eastman Kodak Company Liquid emission device
US6482574B1 (en) * 2000-04-20 2002-11-19 Hewlett-Packard Co. Droplet plate architecture in ink-jet printheads
KR100374788B1 (ko) 2000-04-26 2003-03-04 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드, 그 제조방법 및잉크 토출방법
EP1172212B1 (de) 2000-07-11 2007-02-28 Samsung Electronics Co., Ltd. Tintenstrahldruckkopf des mit Bläschen angetrieben Typs
KR100397604B1 (ko) 2000-07-18 2003-09-13 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드 및 그 제조방법
KR100413677B1 (ko) * 2000-07-24 2003-12-31 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드
KR100406939B1 (ko) 2000-07-25 2003-11-21 삼성전자주식회사 잉크젯 프린터 헤드
KR20020009281A (ko) * 2000-07-25 2002-02-01 윤종용 잉크젯 프린터 헤드
US6409318B1 (en) 2000-11-30 2002-06-25 Hewlett-Packard Company Firing chamber configuration in fluid ejection devices
US6675476B2 (en) * 2000-12-05 2004-01-13 Hewlett-Packard Development Company, L.P. Slotted substrates and techniques for forming same
DE60128781T2 (de) * 2000-12-15 2008-02-07 Samsung Electronics Co., Ltd., Suwon Mit Bläschen angetriebener Tintenstrahldruckkopf und dazugehöriges Hertsellungsverfahren
KR100506082B1 (ko) 2000-12-18 2005-08-04 삼성전자주식회사 반구형 잉크 챔버를 가진 잉크 젯 프린트 헤드의 제조 방법
KR100668294B1 (ko) 2001-01-08 2007-01-12 삼성전자주식회사 반구형 잉크 챔버를 가진 잉크 젯 프린트 헤드 및 그제조방법
US6471340B2 (en) * 2001-02-12 2002-10-29 Hewlett-Packard Company Inkjet printhead assembly
KR100552660B1 (ko) 2001-08-09 2006-02-20 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드
KR100429844B1 (ko) 2001-10-25 2004-05-03 삼성전자주식회사 일체형 잉크 젯 프린트헤드 및 그 제조방법
KR100552662B1 (ko) 2001-10-29 2006-02-20 삼성전자주식회사 다중 배열 구조를 가진 고밀도 잉크 젯 프린트 헤드
US7125731B2 (en) * 2001-10-31 2006-10-24 Hewlett-Packard Development Company, L.P. Drop generator for ultra-small droplets
US6627467B2 (en) 2001-10-31 2003-09-30 Hewlett-Packard Development Company, Lp. Fluid ejection device fabrication
KR100438709B1 (ko) 2001-12-18 2004-07-05 삼성전자주식회사 잉크 젯 프린트 헤드
US6747684B2 (en) 2002-04-10 2004-06-08 Hewlett-Packard Development Company, L.P. Laser triggered inkjet firing
US6871942B2 (en) * 2002-04-15 2005-03-29 Timothy R. Emery Bonding structure and method of making
US6705701B2 (en) * 2002-06-07 2004-03-16 Hewlett-Packard Development Company, L.P. Fluid ejection and scanning system with photosensor activation of ejection elements
US7083250B2 (en) * 2002-06-07 2006-08-01 Hewlett-Packard Development Company, L.P. Fluid ejection and scanning assembly with photosensor activation of ejection elements
US6799819B2 (en) 2002-06-07 2004-10-05 Hewlett-Packard Development Company, L.P. Photosensor activation of an ejection element of a fluid ejection device
US7104623B2 (en) * 2002-06-07 2006-09-12 Hewlett-Packard Development Company, L.P. Fluid ejection system with photosensor activation of ejection element
KR100428793B1 (ko) * 2002-06-26 2004-04-28 삼성전자주식회사 잉크젯 프린터 헤드 및 그 제조 방법
KR100499148B1 (ko) 2003-07-03 2005-07-04 삼성전자주식회사 잉크젯 프린트헤드
US7040016B2 (en) * 2003-10-22 2006-05-09 Hewlett-Packard Development Company, L.P. Method of fabricating a mandrel for electroformation of an orifice plate
US6857727B1 (en) * 2003-10-23 2005-02-22 Hewlett-Packard Development Company, L.P. Orifice plate and method of forming orifice plate for fluid ejection device
US7172269B2 (en) * 2003-11-13 2007-02-06 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Resistor shapes for heating devices on an integrated circuit
KR100537522B1 (ko) 2004-02-27 2005-12-19 삼성전자주식회사 압전 방식의 잉크젯 프린트헤드와 그 노즐 플레이트의제조 방법
US7569250B2 (en) * 2004-05-17 2009-08-04 Hewlett-Packard Development Company, L.P. Method, system, and apparatus for protective coating a flexible circuit
JP4274555B2 (ja) * 2004-07-16 2009-06-10 キヤノン株式会社 液体吐出素子基板の製造方法および液体吐出素子の製造方法
US7213908B2 (en) 2004-08-04 2007-05-08 Eastman Kodak Company Fluid ejector having an anisotropic surface chamber etch
KR101313946B1 (ko) * 2008-08-29 2013-10-01 캐논 가부시끼가이샤 액체 토출 헤드용 기판, 그 제조 방법 및 액체 토출 헤드
US8297742B2 (en) * 2010-03-19 2012-10-30 Fujifilm Corporation Bonded circuits and seals in a printing device
JP5350429B2 (ja) * 2011-02-10 2013-11-27 キヤノン株式会社 インクジェット記録ヘッドの製造方法
WO2020061508A1 (en) * 2018-09-21 2020-03-26 Fujifilm Dimatix, Inc. Internal print head flow features
US11161351B2 (en) * 2018-09-28 2021-11-02 Canon Kabushiki Kaisha Liquid ejection head

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4528577A (en) * 1982-11-23 1985-07-09 Hewlett-Packard Co. Ink jet orifice plate having integral separators
US4513298A (en) * 1983-05-25 1985-04-23 Hewlett-Packard Company Thermal ink jet printhead
US4535343A (en) * 1983-10-31 1985-08-13 Hewlett-Packard Company Thermal ink jet printhead with self-passivating elements
US4578687A (en) * 1984-03-09 1986-03-25 Hewlett Packard Company Ink jet printhead having hydraulically separated orifices
US4746935A (en) * 1985-11-22 1988-05-24 Hewlett-Packard Company Multitone ink jet printer and method of operation
US4716423A (en) * 1985-11-22 1987-12-29 Hewlett-Packard Company Barrier layer and orifice plate for thermal ink jet print head assembly and method of manufacture
US4680859A (en) * 1985-12-06 1987-07-21 Hewlett-Packard Company Thermal ink jet print head method of manufacture

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KR890009620A (ko) 1989-08-03
HK127394A (en) 1994-11-25
US4847630A (en) 1989-07-11
EP0321075A2 (de) 1989-06-21
CA1302160C (en) 1992-06-02
JP2716174B2 (ja) 1998-02-18
EP0321075B1 (de) 1994-04-13
DE3889087D1 (de) 1994-05-19
JPH022010A (ja) 1990-01-08
EP0321075A3 (en) 1990-10-17
KR910007328B1 (ko) 1991-09-25

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