DE3869060D1 - Xenon-kurzbogen-entlandungslampe. - Google Patents

Xenon-kurzbogen-entlandungslampe.

Info

Publication number
DE3869060D1
DE3869060D1 DE8888904211T DE3869060T DE3869060D1 DE 3869060 D1 DE3869060 D1 DE 3869060D1 DE 8888904211 T DE8888904211 T DE 8888904211T DE 3869060 T DE3869060 T DE 3869060T DE 3869060 D1 DE3869060 D1 DE 3869060D1
Authority
DE
Germany
Prior art keywords
discharge lamp
xenon
shortbow
cathode
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888904211T
Other languages
English (en)
Inventor
Manfred Neiger
Reiner Hoppstock
Bernd Kleiner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Noblelight GmbH
Original Assignee
Heraeus Instruments GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Instruments GmbH filed Critical Heraeus Instruments GmbH
Priority to DE8888904211T priority Critical patent/DE3869060D1/de
Application granted granted Critical
Publication of DE3869060D1 publication Critical patent/DE3869060D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/125—Selection of substances for gas fillings; Specified operating pressure or temperature having an halogenide as principal component
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
DE8888904211T 1987-05-16 1988-05-05 Xenon-kurzbogen-entlandungslampe. Expired - Lifetime DE3869060D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE8888904211T DE3869060D1 (de) 1987-05-16 1988-05-05 Xenon-kurzbogen-entlandungslampe.

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE3716485A DE3716485C1 (de) 1987-05-16 1987-05-16 Xenon-Kurzbogen-Entladungslampe
DE8888904211T DE3869060D1 (de) 1987-05-16 1988-05-05 Xenon-kurzbogen-entlandungslampe.
PCT/EP1988/000381 WO1988009565A1 (en) 1987-05-16 1988-05-05 Xenon short-arc discharge lamp

Publications (1)

Publication Number Publication Date
DE3869060D1 true DE3869060D1 (de) 1992-04-16

Family

ID=6327729

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3716485A Expired DE3716485C1 (de) 1987-05-16 1987-05-16 Xenon-Kurzbogen-Entladungslampe
DE8888904211T Expired - Lifetime DE3869060D1 (de) 1987-05-16 1988-05-05 Xenon-kurzbogen-entlandungslampe.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE3716485A Expired DE3716485C1 (de) 1987-05-16 1987-05-16 Xenon-Kurzbogen-Entladungslampe

Country Status (4)

Country Link
US (1) US4937496A (de)
EP (1) EP0314732B1 (de)
DE (2) DE3716485C1 (de)
WO (1) WO1988009565A1 (de)

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DE19714009A1 (de) * 1997-04-04 1998-10-08 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Gleichstrombogenlampe
US20060255741A1 (en) * 1997-06-06 2006-11-16 Harison Toshiba Lighting Corporation Lightening device for metal halide discharge lamp
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JPH1196969A (ja) * 1997-09-19 1999-04-09 Phoenix Denki Kk 直流点灯放電灯と該放電灯をリフレクタに装着した光源
JP3065581B2 (ja) * 1998-03-24 2000-07-17 ウシオ電機株式会社 ショートアーク型水銀ランプ、および紫外線発光装置
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KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
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US6794119B2 (en) 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
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US20060049762A1 (en) * 2004-09-03 2006-03-09 Koch Mark E Night-vision illumination lamp
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US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
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US7893919B2 (en) * 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7349136B2 (en) 2004-09-27 2008-03-25 Idc, Llc Method and device for a display having transparent components integrated therein
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7564612B2 (en) 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7554714B2 (en) 2004-09-27 2009-06-30 Idc, Llc Device and method for manipulation of thermal response in a modulator
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7553684B2 (en) 2004-09-27 2009-06-30 Idc, Llc Method of fabricating interferometric devices using lift-off processing techniques
US7327510B2 (en) * 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
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US7321456B2 (en) 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7161730B2 (en) 2004-09-27 2007-01-09 Idc, Llc System and method for providing thermal compensation for an interferometric modulator display
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US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
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US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
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US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
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EP0219915B1 (de) * 1985-10-21 1990-02-07 Koninklijke Philips Electronics N.V. Bestrahlungseinrichtung

Also Published As

Publication number Publication date
EP0314732B1 (de) 1992-03-11
DE3716485C1 (de) 1988-11-24
WO1988009565A1 (en) 1988-12-01
US4937496A (en) 1990-06-26
EP0314732A1 (de) 1989-05-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HERAEUS NOBLELIGHT GMBH, 63450 HANAU, DE

8339 Ceased/non-payment of the annual fee