DE3817035C1 - Micromechanical switch for optical fibres - Google Patents

Micromechanical switch for optical fibres

Info

Publication number
DE3817035C1
DE3817035C1 DE19883817035 DE3817035A DE3817035C1 DE 3817035 C1 DE3817035 C1 DE 3817035C1 DE 19883817035 DE19883817035 DE 19883817035 DE 3817035 A DE3817035 A DE 3817035A DE 3817035 C1 DE3817035 C1 DE 3817035C1
Authority
DE
Germany
Prior art keywords
rocker
switch according
optical
substrate
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19883817035
Other languages
German (de)
Inventor
Helmut Dipl.-Phys. Dr. 8130 Starnberg De Seidel
Peter Dr. 8059 Langenpreising De Deimel
Helmut 8080 Fuerstenfeldbruck De Riedel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airbus Defence and Space GmbH
Original Assignee
Messerschmitt Bolkow Blohm AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Messerschmitt Bolkow Blohm AG filed Critical Messerschmitt Bolkow Blohm AG
Priority to DE19883817035 priority Critical patent/DE3817035C1/en
Application granted granted Critical
Publication of DE3817035C1 publication Critical patent/DE3817035C1/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G02B6/3504—Rotating, tilting or pivoting the waveguides, or with the waveguides describing a curved path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12145—Switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/1215—Splitter
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/3552—1x1 switch, e.g. on/off switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force

Abstract

Micromechanically produced optical switch for optical fibres, integratable, in particular in "single-chip" design and electrically, magnetically, or mechanically controllable.

Description

Die Erfindung betrifft einen mikromechanischen Schalter für Lichtwellenleiter.The invention relates to a micromechanical switch for Optical fiber.

Es sind optische Schalter bekannt, welche elektrisch steuerbare Teile aufweisen entweder mit einem Schaltmittelteil, wie Wippe oder daß der Lichtwellenleiter beweglich gelagert ist (vgl. US-PS 46 26 066, DE-OS 33 38 051, EP 02 56 348 A1).Optical switches are known which have electrically controllable parts have either a switching middle part, such as a rocker or that Optical fiber is movably mounted (see. US-PS 46 26 066, DE-OS 33 38 051, EP 02 56 348 A1).

Die bekannten optischen Schalter haben eine solche Baugröße, daß sie für integrierte Bauelemente, insbesondere in der "single chip"-Technologie nicht geeignet sind.The known optical switches have a size that they for integrated components, especially in "single chip" technology are not suitable.

In der Optik gibt es verschiedene Möglichkeiten, Lichtwellenleiter auf Halbleitersubstraten zu integrieren. So können z. B. Wellenleiter ein­ diffundiert werden (LiNb3) oder aus aufgebondeten Glasschichten her­ ausgeätzt werden. Auf diese Weise können einfache Verzweiger oder Kopp­ ler gebaut werden. Ein Problem stellt allerdings die Herstellung von elektrisch steuerbaren Schaltelementen für Lichtwellenleiter in minia­ turisierter Form dar.In optics, there are various options for integrating optical fibers on semiconductor substrates. So z. B. waveguides can be diffused (LiNb 3 ) or etched out of bonded glass layers. In this way simple branching devices or couplers can be built. One problem, however, is the production of electrically controllable switching elements for optical fibers in miniaturized form.

Aufgabe der Erfindung ist ein mikromechanisch herstellbares Schaltele­ ment für integrierbare Lichtwellenleiter zu schaffen, das einfach im Aufbau und zugleich effektiv ist.The object of the invention is a micro-mechanically producible Schaltele to create for integrable fiber optic cables that is easy in the Structure and effective at the same time.

Gelöst wird diese Aufgabe gemäß dem Hauptanspruch. Aus- und Weiterbil­ dungen der Erfindung sind weiteren Ansprüchen zu entnehmen.This task is solved according to the main claim. Training and further education Further claims can be found in the invention.

Ausführungsbeispiele der Erfindung sind in den Zeichnungen rein schematisch dargestellt und werden anschließend erläutert, ohne daß die Erfindung hierauf beschränkt wäre. Es zeigtEmbodiments of the invention are in the drawings shown purely schematically and are subsequently explained without the invention would be limited to this. It shows

Fig. 1 einen Querschnitt durch einen optischen Schalter im EIN-Zustand; Fig. 1 is a cross-sectional view of an optical switch in the ON state;

Fig. 2 eine Draufsicht auf Fig. 1; Fig. 2 is a plan view of Fig. 1;

Fig. 3 einen Querschnitt ähnlich Fig. 1 im AUS-Zustand; Fig. 3 is a cross-section similar to Figure 1 in the OFF state.

Fig. 4 eine Anwendung als optischer Multiplexer (Array). Fig. 4 shows an application as an optical multiplexer (array).

Ein Ausführungsbeispiel des vorgeschlagenen Schaltelements ist in Fig. 1 und 2 dargestellt. Kernstück des Bauelementes ist eine aus einem Sub­ strat 1 freigeätzte Wippe 2, die an Torsionsbalken 3 gelagert ist. Diese Wippe trägt einen Lichtwellenleiter 4, der entweder aus einer aufge­ brachten Glasfaser oder aus einem anodisch aufgebondeten und freige­ ätzten Stück Glas besteht. In der Grundstellung des Schalters EIN fluch­ tet dieser Wellenleiter mit zwei weiteren Wellenleitern 5, die auf dem Substrat aufgebracht sind. Wippe, Torsionsbalken und Substrat werden aus einem einkristallinen, elektrisch leitenden Material hergestellt. Im besonderen kommt hierfür Silizium in Frage. Die oben geschilderte Ein­ heit wird mit einer Grundplatte 6 verbunden, in der sich eine Vertiefung 7 befindet. Diese Grundplatte kann z. B. aus Glas bestehen, das dann mittels anodischer Verbindungstechnik mit Silizium verbunden werden kann. Auf der Grundplatte befinden sich zwei einzeln ansteuerbare Elek­ troden 8, 9, die zur elektrostatischen Auslenkung der Wippen 2 dienen in die Stellung AUS gemäß Fig. 3 und vice versa. Eine Elektrode 8 befin­ det sich in der Vertiefung der Grundplatte, die andere 9 unteralb des anderen Endes der Wippe 2. Die mikromechanischen Herstellungstechnolo­ gien sind an sich bekannt. Bevorzugt werden einkristalline Substrate, inbesondere Silizium-Substrate, aus denen monolithisch herausgearbeitet wird.An embodiment of the proposed switching element is shown in FIGS. 1 and 2. Is the core of the device one of a sub strate 1 etched free rocker 2 which is mounted on torsion bars. 3 This rocker carries an optical waveguide 4 , which consists either of a glass fiber brought up or from an anodically bonded and clear etched piece of glass. In the basic position of the switch ON, this waveguide is aligned with two further waveguides 5 which are applied to the substrate. The rocker, torsion bar and substrate are made from a single-crystalline, electrically conductive material. Silicon is particularly suitable for this. The unit described above is connected to a base plate 6 , in which there is a recess 7 . This base plate can, for. B. consist of glass, which can then be connected by means of anodic connection technology with silicon. On the base plate are two individually controllable elec trodes 8, 9 , which serve for the electrostatic deflection of the rockers 2 in the OFF position according to FIG. 3 and vice versa. One electrode 8 is located in the depression of the base plate, the other 9 below the other end of the rocker 2 . The micromechanical manufacturing technologies are known per se. Single-crystalline substrates, in particular silicon substrates, are preferred, from which the work is carried out monolithically.

Das hier vorgeschlagene Schaltelement kann sehr klein aufgebaut werden und ist auch in einem komplexen Mikrosystem integrierbar. Ferner können mehrere solcher Schaltelemente auf einem Substrat (als single chip) mit­ einander integriert werden. Auf diese Weise können z. B. auch optische Arrays/Multiplexelemente realisiert werden, siehe Fig. 4, ohne auf diese Anwendung beschränkt zu sein. The switching element proposed here can be made very small and can also be integrated in a complex microsystem. Furthermore, several such switching elements can be integrated with one another on a substrate (as a single chip). In this way, e.g. For example, optical arrays / multiplex elements can also be implemented, see FIG. 4, without being restricted to this application.

Abwandlungen der beschriebenen und dargestellten Ausführungsbeispiele können selbstverständlich vom Fachmann vorgenommen werden, ohne den Rah­ men der Erfindung, insbesondere wie in den Ansprüchen gekennzeichnet, zu verlassen.Modifications to the described and illustrated exemplary embodiments can of course be done by a specialist without the frame men of the invention, in particular as characterized in the claims leave.

Die Abwandlungsmöglichkeiten beziehen sich auch auf die Materialien, die bearbeitet werden und deren Bearbeitungsverfahren, soweit für die Zwecke/Ziele der Erfindung geeignet.The possible modifications also refer to the materials that are processed and their processing methods, as far as for the Purposes / purposes of the invention suitable.

Die elektrischen, magnetischen oder mechanischen Ansteuermöglichkeiten sollten auf das schnelle Erreichen definierter Endstellungen (z. B. EIN/AUS) beschränkt bleiben. Dabei können auch Umschalter (zwischen mehreren Stellungen) zur Anwendung kommen und die Art und Weise der Bewegung (Richtung) der Wippe kann rechts oder links durch Anstoßen (Druck) oder Zug (Hub) erfolgen. Die Lichtwellenleiter müssen (in Stel­ lung EIN) möglichst exakt fluchten und die Verluste beim Einkoppeln müs­ sen so klein wie möglich gehalten werden.The electrical, magnetic or mechanical control options should quickly reach defined end positions (e.g. ON / OFF) remain limited. Switchers (between multiple positions) and the manner of Movement (direction) of the rocker can be bumped to the right or left (Push) or pull (stroke). The optical fibers must (in Stel ON) must be aligned as precisely as possible and the losses during coupling must must be kept as small as possible.

Claims (8)

1. Mikromechanischer Schalter für Lichtwellenleiter mit einer elek­ trisch, magnetisch oder mechanisch ansteuerbaren Wippe, dadurch gekenn­ zeichnet, daß
  • - die Wippe (2) mittels Torsiosbalken (3) an einem Substrat (1) gela­ gert ist, wobei die Wippe (2) und die Torsionsbalken (3) monolitisch aus dem Substrat (1) herausgearbeitet sind,
  • - und daß die Wippe (2) ein ihrer Länge angepaßtes Lichtwellenleiter­ stück (4) trägt, das den Lichtweg zwischen zwei an den gegenüberlie­ genden Seiten der Wippe angrenzenden Lichtwellenleiters (5) schaltet.
1. Micromechanical switch for optical fibers with an elec trically, magnetically or mechanically controllable rocker, characterized in that
  • - The rocker ( 2 ) by means of torsion bars ( 3 ) on a substrate ( 1 ) is gela, the rocker ( 2 ) and the torsion bars ( 3 ) are worked out monolithically from the substrate ( 1 ),
  • - And that the rocker ( 2 ) has a length adapted to the optical waveguide piece ( 4 ), which switches the light path between two adjacent to the opposite sides of the rocker optical waveguide ( 5 ).
2. Schalter nach Anspruch 1, dadurch gekennzeichnet, daß er als optischer EIN/AUS-Schalter oder Unterbrecher ausgebildet ist.2. Switch according to claim 1, characterized in that it as optical ON / OFF switch or breaker is formed. 3. Schalter nach einem der vorhergehenden Ansprüche, dadurch ge­ kennzeichnet, daß er mehrere Wippen (2) auf einem Substrat (1) inte­ griert enthält.3. Switch according to one of the preceding claims, characterized in that it contains a plurality of rockers ( 2 ) inte grated on a substrate ( 1 ). 4. Schalter nach Anspruch 3, dadurch gekennzeichnet, daß er als Fotokoppler oder optischer Multiplexer ausgebildet ist.4. Switch according to claim 3, characterized in that it as Photocoupler or optical multiplexer is formed. 5. Schalter nach einem der vorhergehenden Ansprüche, dadurch ge­ kennzeichnet, daß er aus einem einkristallinen Silizium-Substrat (1) herausgearbeitet ist.5. Switch according to one of the preceding claims, characterized in that it is worked out from a single-crystalline silicon substrate ( 1 ). 6. Schalter nach einem der vorhergehenden Ansprüche, dadurch ge­ kennzeichnet, daß das auf der Wippe (2) durch anodisches Bonden aufge­ brachte Lichtwellenleiterstück (4) aus einer Glasfaser oder einem Glas­ körper einschließlich Quarzglas, wie auch die Lichtwellenleiter (5), be­ steht. 6. Switch according to one of the preceding claims, characterized in that the on the rocker ( 2 ) brought up by anodic bonding optical fiber piece ( 4 ) made of a glass fiber or a glass body including quartz glass, as well as the optical fiber ( 5 ), be . 7. Schalter nach einem der vorhergehenden Ansprüche, dadurch ge­ kennzeichnet, daß das Substrat (1) mit einer Grundplatte (6) durch einen anodischen Bondprozeß verbunden ist, in der sich eine Vertiefung (7) auf einer Seite des Torsionsbalkens (3) befindet.7. Switch according to one of the preceding claims, characterized in that the substrate ( 1 ) is connected to a base plate ( 6 ) by an anodic bonding process, in which there is a recess ( 7 ) on one side of the torsion bar ( 3 ). 8. Schalter nach Anspruch 7, dadurch gekennzeichnet, daß die Wippe (2) elektrostatisch auslenkbar ist mittels zweier einzeln ansteuerbarer Elektroden (8, 9), die jeweils auf gegenüberliegenden Seiten des Tor­ sionsbalkens (3) angeordnet und auf der Grundplatte (6) aufgebracht sind.8. Switch according to claim 7, characterized in that the rocker ( 2 ) can be deflected electrostatically by means of two individually controllable electrodes ( 8, 9 ), each arranged on opposite sides of the gate beam ( 3 ) and applied to the base plate ( 6 ) are.
DE19883817035 1988-05-19 1988-05-19 Micromechanical switch for optical fibres Expired DE3817035C1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19883817035 DE3817035C1 (en) 1988-05-19 1988-05-19 Micromechanical switch for optical fibres

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
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DE3817035C1 true DE3817035C1 (en) 1989-08-17

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0510628A1 (en) * 1991-04-26 1992-10-28 Texas Instruments Incorporated Optical crossbar switch
EP0510629A1 (en) * 1991-04-26 1992-10-28 Texas Instruments Incorporated Deformable mirror shutter device
EP1023765A1 (en) * 1997-10-15 2000-08-02 Reliance Electric Industrial Company Method and apparatus for reducing power loss in power conversion circuitry
EP1033601A1 (en) * 1999-03-04 2000-09-06 Japan Aviation Electronics Industry, Limited Optical switch and method of making the same
WO2002025351A2 (en) * 2000-09-19 2002-03-28 Newport Opticom, Inc. An optical switching system that uses movable microstructures to switch optical signals in three dimensions
WO2002025350A2 (en) * 2000-09-19 2002-03-28 Newport Opticom, Inc. Method and apparatus for switching optical signals using rotatable optically transmissive microstructure
WO2002025352A2 (en) * 2000-09-19 2002-03-28 Newport Opticom, Inc. Optical switching element having movable optically transmissive microstructure
WO2003067303A2 (en) * 2002-02-08 2003-08-14 Newport Opticom, Inc. Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials
US6990264B2 (en) 2000-09-19 2006-01-24 Telkamp Arthur R 1×N or N×1 optical switch having a plurality of movable light guiding microstructures
US7003188B2 (en) 2001-04-17 2006-02-21 Ying Wen Hsu Low loss optical switching system
US7062130B2 (en) 2003-05-01 2006-06-13 Arthur Telkamp Low-loss optical waveguide crossovers using an out-of-plane waveguide

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3338051A1 (en) * 1983-10-20 1985-05-02 Standard Elektrik Lorenz Ag, 7000 Stuttgart Electrically controlled optical switch
US4626066A (en) * 1983-12-30 1986-12-02 At&T Bell Laboratories Optical coupling device utilizing a mirror and cantilevered arm
EP0256348A1 (en) * 1986-07-24 1988-02-24 Alcatel Cit Mechanical switch for optical fibers

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3338051A1 (en) * 1983-10-20 1985-05-02 Standard Elektrik Lorenz Ag, 7000 Stuttgart Electrically controlled optical switch
US4626066A (en) * 1983-12-30 1986-12-02 At&T Bell Laboratories Optical coupling device utilizing a mirror and cantilevered arm
EP0256348A1 (en) * 1986-07-24 1988-02-24 Alcatel Cit Mechanical switch for optical fibers

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0510628A1 (en) * 1991-04-26 1992-10-28 Texas Instruments Incorporated Optical crossbar switch
EP0510629A1 (en) * 1991-04-26 1992-10-28 Texas Instruments Incorporated Deformable mirror shutter device
US5226099A (en) * 1991-04-26 1993-07-06 Texas Instruments Incorporated Digital micromirror shutter device
EP1023765A1 (en) * 1997-10-15 2000-08-02 Reliance Electric Industrial Company Method and apparatus for reducing power loss in power conversion circuitry
EP1023765A4 (en) * 1997-10-15 2001-07-18 Reliance Electric Ind Co Method and apparatus for reducing power loss in power conversion circuitry
EP1033601A1 (en) * 1999-03-04 2000-09-06 Japan Aviation Electronics Industry, Limited Optical switch and method of making the same
WO2002025352A2 (en) * 2000-09-19 2002-03-28 Newport Opticom, Inc. Optical switching element having movable optically transmissive microstructure
WO2002025350A2 (en) * 2000-09-19 2002-03-28 Newport Opticom, Inc. Method and apparatus for switching optical signals using rotatable optically transmissive microstructure
WO2002025351A2 (en) * 2000-09-19 2002-03-28 Newport Opticom, Inc. An optical switching system that uses movable microstructures to switch optical signals in three dimensions
WO2002025351A3 (en) * 2000-09-19 2003-07-10 Newport Opticom Inc An optical switching system that uses movable microstructures to switch optical signals in three dimensions
WO2002025352A3 (en) * 2000-09-19 2003-08-28 Newport Opticom Inc Optical switching element having movable optically transmissive microstructure
WO2002025350A3 (en) * 2000-09-19 2003-09-25 Newport Opticom Inc Method and apparatus for switching optical signals using rotatable optically transmissive microstructure
US6807331B2 (en) 2000-09-19 2004-10-19 Newport Opticom, Inc. Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials
US6990264B2 (en) 2000-09-19 2006-01-24 Telkamp Arthur R 1×N or N×1 optical switch having a plurality of movable light guiding microstructures
US7003188B2 (en) 2001-04-17 2006-02-21 Ying Wen Hsu Low loss optical switching system
WO2003067303A2 (en) * 2002-02-08 2003-08-14 Newport Opticom, Inc. Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials
WO2003067303A3 (en) * 2002-02-08 2004-01-22 Newport Opticom Inc Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials
US7062130B2 (en) 2003-05-01 2006-06-13 Arthur Telkamp Low-loss optical waveguide crossovers using an out-of-plane waveguide
US7215854B2 (en) 2003-05-01 2007-05-08 Gemfire Corporation Low-loss optical waveguide crossovers using an out-of-plane waveguide

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Owner name: DEUTSCHE AEROSPACE AG, 8000 MUENCHEN, DE

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Owner name: DAIMLER-BENZ AEROSPACE AKTIENGESELLSCHAFT, 80804 M

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