DE3779340D1 - Vorrichtung und methode zum optischen abbilden kurzer abstaende. - Google Patents

Vorrichtung und methode zum optischen abbilden kurzer abstaende.

Info

Publication number
DE3779340D1
DE3779340D1 DE8787102404T DE3779340T DE3779340D1 DE 3779340 D1 DE3779340 D1 DE 3779340D1 DE 8787102404 T DE8787102404 T DE 8787102404T DE 3779340 T DE3779340 T DE 3779340T DE 3779340 D1 DE3779340 D1 DE 3779340D1
Authority
DE
Germany
Prior art keywords
optical imaging
short distances
imaging short
distances
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787102404T
Other languages
English (en)
Inventor
John M Guerra
William T Plummer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Polaroid Corp
Original Assignee
Polaroid Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Polaroid Corp filed Critical Polaroid Corp
Application granted granted Critical
Publication of DE3779340D1 publication Critical patent/DE3779340D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60—Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
DE8787102404T 1986-02-28 1987-02-20 Vorrichtung und methode zum optischen abbilden kurzer abstaende. Expired - Fee Related DE3779340D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/834,532 US4681451A (en) 1986-02-28 1986-02-28 Optical proximity imaging method and apparatus

Publications (1)

Publication Number Publication Date
DE3779340D1 true DE3779340D1 (de) 1992-07-02

Family

ID=25267142

Family Applications (2)

Application Number Title Priority Date Filing Date
DE198787102404T Pending DE235696T1 (de) 1986-02-28 1987-02-20 Vorrichtung und methode zum optischen abbilden kurzer abstaende.
DE8787102404T Expired - Fee Related DE3779340D1 (de) 1986-02-28 1987-02-20 Vorrichtung und methode zum optischen abbilden kurzer abstaende.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE198787102404T Pending DE235696T1 (de) 1986-02-28 1987-02-20 Vorrichtung und methode zum optischen abbilden kurzer abstaende.

Country Status (5)

Country Link
US (1) US4681451A (de)
EP (1) EP0235696B1 (de)
JP (1) JPH0789048B2 (de)
CA (1) CA1275801C (de)
DE (2) DE235696T1 (de)

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JP2802825B2 (ja) * 1990-09-22 1998-09-24 大日本スクリーン製造 株式会社 半導体ウエハの電気測定装置
JP2578026B2 (ja) * 1991-04-30 1997-02-05 大日本スクリーン製造株式会社 光学測定装置
US5239183A (en) * 1991-04-30 1993-08-24 Dainippon Screen Mfg. Co., Ltd. Optical gap measuring device using frustrated internal reflection
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US5200609A (en) * 1991-08-27 1993-04-06 Sting Donald W Radiant energy spectroscopy system with diamond internal reflection element
US5257093A (en) * 1991-11-12 1993-10-26 Guziktechnical Enterprises, Inc. Apparatus for measuring nanometric distances employing frustrated total internal reflection
US5220408A (en) * 1991-12-10 1993-06-15 Guzik Technical Enterprises, Inc. Method and apparatus for calibration of optical flying-height testers
US5349443A (en) * 1992-11-25 1994-09-20 Polaroid Corporation Flexible transducers for photon tunneling microscopes and methods for making and using same
JP2802868B2 (ja) * 1992-12-22 1998-09-24 大日本スクリーン製造株式会社 半導体ウエハの非接触電気測定用センサおよびその製造方法、並びに、そのセンサを用いた測定方法
US5442443A (en) * 1993-04-08 1995-08-15 Polaroid Corporation Stereoscopic photon tunneling microscope
JPH06349920A (ja) * 1993-06-08 1994-12-22 Dainippon Screen Mfg Co Ltd 半導体ウェハの電荷量測定方法
JPH0712716A (ja) * 1993-06-29 1995-01-17 Atsuo Watanabe 赤外線吸収強化分光装置
US6337479B1 (en) 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
US6265711B1 (en) 1994-07-28 2001-07-24 General Nanotechnology L.L.C. Scanning probe microscope assembly and method for making spectrophotometric near-field optical and scanning measurements
JPH10506457A (ja) 1994-07-28 1998-06-23 ジェネラル ナノテクノロジー エルエルシー 走査型プローブ顕微鏡装置
US6339217B1 (en) 1995-07-28 2002-01-15 General Nanotechnology Llc Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements
US5751683A (en) 1995-07-24 1998-05-12 General Nanotechnology, L.L.C. Nanometer scale data storage device and associated positioning system
US5724134A (en) * 1995-11-13 1998-03-03 Zygo Corporation Calibration standard for optical gap measuring tools
US5715060A (en) * 1996-03-11 1998-02-03 Carnegie Mellon University Apparatus and method for measuring linear nanometric distances using evanescent radiation
US5724139A (en) * 1996-06-28 1998-03-03 Polaroid Corporation Dark field, photon tunneling imaging probes
US5796487A (en) * 1996-06-28 1998-08-18 Polaroid Corporation Dark field, photon tunneling imaging systems and methods for optical recording and retrieval
US5719677A (en) * 1996-06-28 1998-02-17 Polaroid Corporation Dark field, photon tunneling imaging systems and methods for measuring flying height of read/write heads
US5715059A (en) * 1996-06-28 1998-02-03 Polaroid Corporation Dark field, photon tunneling imaging systems and methods
US5774221A (en) * 1996-08-21 1998-06-30 Polaroid Corporation Apparatus and methods for providing phase controlled evanescent illumination
US5939709A (en) * 1997-06-19 1999-08-17 Ghislain; Lucien P. Scanning probe optical microscope using a solid immersion lens
US6141100A (en) * 1997-08-15 2000-10-31 Bio-Rad Laboratories, Inc. Imaging ATR spectrometer
US6923044B1 (en) 2001-03-08 2005-08-02 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US7196328B1 (en) 2001-03-08 2007-03-27 General Nanotechnology Llc Nanomachining method and apparatus
US6787768B1 (en) 2001-03-08 2004-09-07 General Nanotechnology Llc Method and apparatus for tool and tip design for nanomachining and measurement
US6752008B1 (en) 2001-03-08 2004-06-22 General Nanotechnology Llc Method and apparatus for scanning in scanning probe microscopy and presenting results
US6802646B1 (en) 2001-04-30 2004-10-12 General Nanotechnology Llc Low-friction moving interfaces in micromachines and nanomachines
EP1196939A4 (de) 1999-07-01 2002-09-18 Gen Nanotechnology Llc Vorrichtung und verfahren zur untersuchung und/oder veränderungsobjekt
TW558642B (en) 1999-08-02 2003-10-21 Zetetic Inst Scanning interferometric near-field confocal microscopy
US7158224B2 (en) * 2000-06-25 2007-01-02 Affymetrix, Inc. Optically active substrates
WO2002010828A2 (en) 2000-07-27 2002-02-07 Zetetic Institute Control of position and orientation of sub-wavelength aperture array in near-field microscopy
JP2004505313A (ja) 2000-07-27 2004-02-19 ゼテティック・インスティチュート 差分干渉走査型の近接場共焦点顕微鏡検査法
WO2002010832A2 (en) 2000-07-27 2002-02-07 Zetetic Institute Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation
AU2001279048A1 (en) 2000-07-27 2002-02-13 Zetetic Institute Multiple-source arrays with optical transmission enhanced by resonant cavities
US6931710B2 (en) 2001-01-30 2005-08-23 General Nanotechnology Llc Manufacturing of micro-objects such as miniature diamond tool tips
US7253407B1 (en) 2001-03-08 2007-08-07 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US7053369B1 (en) 2001-10-19 2006-05-30 Rave Llc Scan data collection for better overall data accuracy
US6813937B2 (en) 2001-11-28 2004-11-09 General Nanotechnology Llc Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
US20030232427A1 (en) * 2002-06-18 2003-12-18 Montagu Jean I. Optically active substrates for examination of biological materials
EP1539637A4 (de) 2002-09-09 2010-07-28 Gen Nanotechnology Llc Fluidzufuhr für rastertunnelmikroskopie
WO2005031427A1 (de) * 2003-09-25 2005-04-07 Leica Microsystems Cms Gmbh Verfahren zur probenuntersuchung und mikroskop mit evaneszenter probenbeleuchtung
JP4117353B2 (ja) 2003-11-05 2008-07-16 ナプソン株式会社 検査ヘッド用位置調整装置及び非接触型抵抗率測定装置
GB0608258D0 (en) * 2006-04-26 2006-06-07 Perkinelmer Singapore Pte Ltd Spectroscopy using attenuated total internal reflectance (ATR)
US8072577B2 (en) * 2006-06-05 2011-12-06 Macronix International Co., Ltd. Lithography systems and processes
WO2016065331A2 (en) * 2014-10-24 2016-04-28 Wavefront Technology, Inc. Optical products, masters for fabricating optical products, and methods for manufacturing masters and optical products
EP3795367A1 (de) 2015-07-13 2021-03-24 Wavefront Technology, Inc. Optische produkte
CN109070622B (zh) 2016-04-22 2021-12-03 伟福夫特科技公司 光学切换装置
WO2019077419A1 (en) 2017-10-20 2019-04-25 Wavefront Technology, Inc. OPTICAL SWITCH DEVICES
JP2020173207A (ja) * 2019-04-12 2020-10-22 株式会社ミツトヨ 形状測定機
EP3938216A4 (de) 2019-04-19 2022-12-07 Wavefront Technology, Inc. Optische schaltvorrichtungen
US11320117B2 (en) 2020-04-13 2022-05-03 Electronic Theatre Controls, Inc. Zoom mechanism for a light fixture

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DE885934C (de) * 1938-09-25 1953-08-10 Wolfram Dipl-Ing Dreyhaupt Optisches Oberflaechenpruefgeraet zum Pruefen von Oberflaechen mit hohem Guetegrad auf Traganteil
DE903378C (de) * 1942-10-17 1954-02-04 Wolfram Dreyhaupt Dipl Ing Oberflaechenpruefgeraet zur Feststellung der tragenden Flaeche
US2997922A (en) * 1958-04-24 1961-08-29 Edward K Kaprelian Light valve
US3338656A (en) * 1963-12-12 1967-08-29 Barnes Eng Co Frustrated internal reflection modulator and a method of making the same
DE2504199A1 (de) * 1975-02-01 1976-08-19 Springer Ag Verlag Axel Verfahren und vorrichtung zur ermittlung der oertlichen traganteilverteilung an materialoberflaechen
US3987668A (en) * 1975-11-17 1976-10-26 Popenoe Charles H Light reflective opti-mechanical displacement microindicator
DE2620914C3 (de) * 1976-05-12 1979-05-10 Messerschmitt-Boelkow-Blohm Gmbh, 8000 Muenchen Analoger Beschleunigungsmesser
US4032889A (en) * 1976-05-21 1977-06-28 International Business Machines Corporation Palm print identification
US4165155A (en) * 1978-03-27 1979-08-21 International Business Machines Corporation Amplitude modulation of light beam
US4286468A (en) * 1979-09-04 1981-09-01 The United States Of America As Represented By The Secretary Of The Navy Frustrated total internal reflection fiber-optic small-motion sensor for hydrophone use
DE2937484A1 (de) * 1979-09-17 1981-05-14 Siemens AG, 1000 Berlin und 8000 München Optische vorrichtung zum messen von druckdifferenzen mittels lichtintensitaetsaenderung
JPS5763408A (en) * 1980-10-03 1982-04-16 Hitachi Ltd Flatness detector
JPS582602A (ja) * 1981-06-29 1983-01-08 Shimadzu Corp 光学式変位検出器
US4490618A (en) * 1982-04-12 1984-12-25 Canadian Patents & Development Limited Optical system for analyzing the surface of a fibrous web
US4451123A (en) * 1982-12-20 1984-05-29 Gte Laboratories Incorporated High frequency light modulation device
JPS6011106A (ja) * 1983-06-30 1985-01-21 Matsushita Electric Ind Co Ltd 形状検出装置
JPS6055214A (ja) * 1983-09-06 1985-03-30 Ricoh Co Ltd 波面形状測定装置

Also Published As

Publication number Publication date
EP0235696A2 (de) 1987-09-09
DE235696T1 (de) 1988-01-14
CA1275801C (en) 1990-11-06
JPH0789048B2 (ja) 1995-09-27
JPS62225904A (ja) 1987-10-03
EP0235696A3 (en) 1989-05-03
US4681451A (en) 1987-07-21
EP0235696B1 (de) 1992-05-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee