DE3773988D1 - Thermisches abtastungsprofilgeraet und verfahren zur untersuchung von oberflaechenstrukturen. - Google Patents

Thermisches abtastungsprofilgeraet und verfahren zur untersuchung von oberflaechenstrukturen.

Info

Publication number
DE3773988D1
DE3773988D1 DE8787105367T DE3773988T DE3773988D1 DE 3773988 D1 DE3773988 D1 DE 3773988D1 DE 8787105367 T DE8787105367 T DE 8787105367T DE 3773988 T DE3773988 T DE 3773988T DE 3773988 D1 DE3773988 D1 DE 3773988D1
Authority
DE
Germany
Prior art keywords
scaning
profile
thermal
surface structures
examining surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787105367T
Other languages
English (en)
Inventor
Hermantha Kumar Wickramasinghe
Clayton Covey Williams
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3773988D1 publication Critical patent/DE3773988D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/58—SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/72—Investigating presence of flaws
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/867—Scanning thermal probe
DE8787105367T 1986-04-30 1987-04-10 Thermisches abtastungsprofilgeraet und verfahren zur untersuchung von oberflaechenstrukturen. Expired - Fee Related DE3773988D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/858,320 US4747698A (en) 1986-04-30 1986-04-30 Scanning thermal profiler

Publications (1)

Publication Number Publication Date
DE3773988D1 true DE3773988D1 (de) 1991-11-28

Family

ID=25328026

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787105367T Expired - Fee Related DE3773988D1 (de) 1986-04-30 1987-04-10 Thermisches abtastungsprofilgeraet und verfahren zur untersuchung von oberflaechenstrukturen.

Country Status (4)

Country Link
US (1) US4747698A (de)
EP (1) EP0245660B1 (de)
JP (1) JPH0781855B2 (de)
DE (1) DE3773988D1 (de)

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Also Published As

Publication number Publication date
JPH0781855B2 (ja) 1995-09-06
US4747698A (en) 1988-05-31
EP0245660A2 (de) 1987-11-19
EP0245660B1 (de) 1991-10-23
EP0245660A3 (en) 1989-11-15
JPS62261902A (ja) 1987-11-14

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