DE3683284D1 - Ofen zum einbrennen integrierter schaltungen. - Google Patents

Ofen zum einbrennen integrierter schaltungen.

Info

Publication number
DE3683284D1
DE3683284D1 DE8686905874T DE3683284T DE3683284D1 DE 3683284 D1 DE3683284 D1 DE 3683284D1 DE 8686905874 T DE8686905874 T DE 8686905874T DE 3683284 T DE3683284 T DE 3683284T DE 3683284 D1 DE3683284 D1 DE 3683284D1
Authority
DE
Germany
Prior art keywords
burning
oven
integrated circuits
circuits
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686905874T
Other languages
English (en)
Inventor
William Rignall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHARETREE SYSTEMS Ltd
Original Assignee
SHARETREE SYSTEMS Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB8523419A external-priority patent/GB2180959B/en
Priority claimed from GB08523418A external-priority patent/GB2181227B/en
Application filed by SHARETREE SYSTEMS Ltd filed Critical SHARETREE SYSTEMS Ltd
Application granted granted Critical
Publication of DE3683284D1 publication Critical patent/DE3683284D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2862—Chambers or ovens; Tanks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/3077—Arrangements for treating electronic components, e.g. semiconductors
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1917—Control of temperature characterised by the use of electric means using digital means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
DE8686905874T 1985-09-23 1986-09-23 Ofen zum einbrennen integrierter schaltungen. Expired - Fee Related DE3683284D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB8523419A GB2180959B (en) 1985-09-23 1985-09-23 Apparatus for the burn-in of integrated circuits
GB08523418A GB2181227B (en) 1985-09-23 1985-09-23 An oven for the burn-in of integrated circuits
PCT/GB1986/000570 WO1987001813A1 (en) 1985-09-23 1986-09-23 An oven for the burn-in of integrated circuits

Publications (1)

Publication Number Publication Date
DE3683284D1 true DE3683284D1 (de) 1992-02-13

Family

ID=26289799

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686905874T Expired - Fee Related DE3683284D1 (de) 1985-09-23 1986-09-23 Ofen zum einbrennen integrierter schaltungen.

Country Status (4)

Country Link
US (1) US4881591A (de)
EP (1) EP0238598B1 (de)
DE (1) DE3683284D1 (de)
WO (1) WO1987001813A1 (de)

Families Citing this family (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2633400B1 (fr) * 1988-06-24 1990-11-09 Labo Electronique Physique Systeme de controle automatique de circuits integres
EP0363098B1 (de) * 1988-10-03 1995-04-05 Canon Kabushiki Kaisha Vorrichtung zum Regeln der Temperatur
US5646540A (en) * 1989-04-19 1997-07-08 Interuniversitair Micro-Elektronic Centrum Vzw Apparatus and method for measuring electromagnetic ageing parameter of a circuit element and predicting its values
US5151871A (en) * 1989-06-16 1992-09-29 Tokyo Electron Limited Method for heat-processing semiconductor device and apparatus for the same
US4982347A (en) * 1989-06-22 1991-01-01 Unisys Corporation Process and apparatus for producing temperature profiles in a workpiece as it passes through a belt furnace
FR2665047B1 (fr) * 1990-07-23 1993-05-21 Froilabo Etude de deverminage de modules electroniques.
JPH04104074A (ja) * 1990-08-22 1992-04-06 Mitsubishi Electric Corp 電子基板検査装置
US5148003A (en) * 1990-11-28 1992-09-15 International Business Machines Corporation Modular test oven
DE4041027C1 (de) * 1990-12-20 1992-06-25 Siemens Nixdorf Informationssysteme Ag, 4790 Paderborn, De
US5166607A (en) * 1991-05-31 1992-11-24 Vlsi Technology, Inc. Method and apparatus to heat the surface of a semiconductor die in a device during burn-in while withdrawing heat from device leads
US6998860B1 (en) 1991-06-04 2006-02-14 Micron Technology, Inc. Method for burn-in testing semiconductor dice
CA2073916A1 (en) * 1991-07-19 1993-01-20 Tatsuya Hashinaga Burn-in apparatus and method
CA2073899A1 (en) * 1991-07-19 1993-01-20 Tatsuya Hashinaga Burn-in apparatus and method
CA2073896A1 (en) * 1991-07-19 1993-01-20 Tatsuya Hashinaga Burn-in apparatus and method
CA2073886A1 (en) * 1991-07-19 1993-01-20 Tatsuya Hashinaga Burn-in apparatus and method
JP2862154B2 (ja) * 1991-07-22 1999-02-24 富士通株式会社 バーンイン装置
US5541524A (en) * 1991-08-23 1996-07-30 Nchip, Inc. Burn-in technologies for unpackaged integrated circuits
US5515910A (en) * 1993-05-03 1996-05-14 Micro Control System Apparatus for burn-in of high power semiconductor devices
JP2546172B2 (ja) * 1993-11-04 1996-10-23 日本電気株式会社 高速バス装置
JP2962129B2 (ja) * 1993-12-29 1999-10-12 日本電気株式会社 半導体試験装置
DE19631340C2 (de) * 1995-08-04 2000-11-30 Advantest Corp Anordnung zum Testen von ICs
US5778692A (en) * 1996-08-20 1998-07-14 International Business Machines Corporation Allocation of compressors to cooling chambers
US6489793B2 (en) 1996-10-21 2002-12-03 Delta Design, Inc. Temperature control of electronic devices using power following feedback
US6476627B1 (en) * 1996-10-21 2002-11-05 Delta Design, Inc. Method and apparatus for temperature control of a device during testing
US5903163A (en) * 1996-12-24 1999-05-11 Micron Technology, Inc. Apparatus and method of controlling the environmental temperature near semiconductor devices under test
US6005404A (en) * 1997-04-30 1999-12-21 Rpi, Inc. Environmental test apparatus with partition-isolated thermal chamber
JPH11126743A (ja) * 1997-10-24 1999-05-11 Tokyo Electron Ltd 処理装置
JP4703850B2 (ja) * 1998-07-14 2011-06-15 デルタ・デザイン・インコーポレイテッド 電力追従帰還作用を利用した電子装置の温度制御
WO2000004396A1 (en) 1998-07-14 2000-01-27 Schlumberger Technologies, Inc. Apparatus, method and system of liquid-based, wide range, fast response temperature cycling control of electronic devices
US6518782B1 (en) 2000-08-29 2003-02-11 Delta Design, Inc. Active power monitoring using externally located current sensors
US6761192B2 (en) 2002-09-19 2004-07-13 Swiftflo, Llc Assembly for automatic vehicle fueling
US7078247B2 (en) * 2003-06-06 2006-07-18 International Business Machines Corporation Early detection of contact liner integrity by chemical reaction
US7265561B2 (en) * 2003-09-30 2007-09-04 International Business Machines Corporation Device burn in utilizing voltage control
US20050127931A1 (en) * 2003-12-11 2005-06-16 Karlinsey Robert L.Jr. Variable temperature test cell and associated method
US8549912B2 (en) 2007-12-18 2013-10-08 Teradyne, Inc. Disk drive transport, clamping and testing
US7996174B2 (en) 2007-12-18 2011-08-09 Teradyne, Inc. Disk drive testing
US8041449B2 (en) 2008-04-17 2011-10-18 Teradyne, Inc. Bulk feeding disk drives to disk drive testing systems
US8102173B2 (en) 2008-04-17 2012-01-24 Teradyne, Inc. Thermal control system for test slot of test rack for disk drive testing system with thermoelectric device and a cooling conduit
US8238099B2 (en) 2008-04-17 2012-08-07 Teradyne, Inc. Enclosed operating area for disk drive testing systems
US20090262455A1 (en) 2008-04-17 2009-10-22 Teradyne, Inc. Temperature Control Within Disk Drive Testing Systems
US7945424B2 (en) 2008-04-17 2011-05-17 Teradyne, Inc. Disk drive emulator and method of use thereof
US8305751B2 (en) 2008-04-17 2012-11-06 Teradyne, Inc. Vibration isolation within disk drive testing systems
US8160739B2 (en) 2008-04-17 2012-04-17 Teradyne, Inc. Transferring storage devices within storage device testing systems
US8095234B2 (en) 2008-04-17 2012-01-10 Teradyne, Inc. Transferring disk drives within disk drive testing systems
US7848106B2 (en) 2008-04-17 2010-12-07 Teradyne, Inc. Temperature control within disk drive testing systems
US8117480B2 (en) 2008-04-17 2012-02-14 Teradyne, Inc. Dependent temperature control within disk drive testing systems
WO2009148942A2 (en) 2008-06-03 2009-12-10 Teradyne, Inc. Processing storage devices
US8008934B2 (en) * 2009-06-10 2011-08-30 Freescale Semiconductor, Inc. Burn-in system for electronic devices
US8687356B2 (en) 2010-02-02 2014-04-01 Teradyne, Inc. Storage device testing system cooling
US8466699B2 (en) 2009-07-15 2013-06-18 Teradyne, Inc. Heating storage devices in a testing system
US8628239B2 (en) 2009-07-15 2014-01-14 Teradyne, Inc. Storage device temperature sensing
US8547123B2 (en) 2009-07-15 2013-10-01 Teradyne, Inc. Storage device testing system with a conductive heating assembly
US7920380B2 (en) 2009-07-15 2011-04-05 Teradyne, Inc. Test slot cooling system for a storage device testing system
US8116079B2 (en) 2009-07-15 2012-02-14 Teradyne, Inc. Storage device testing system cooling
US7995349B2 (en) 2009-07-15 2011-08-09 Teradyne, Inc. Storage device temperature sensing
US9779780B2 (en) 2010-06-17 2017-10-03 Teradyne, Inc. Damping vibrations within storage device testing systems
US8687349B2 (en) 2010-07-21 2014-04-01 Teradyne, Inc. Bulk transfer of storage devices using manual loading
US9001456B2 (en) 2010-08-31 2015-04-07 Teradyne, Inc. Engaging test slots
US9459312B2 (en) 2013-04-10 2016-10-04 Teradyne, Inc. Electronic assembly test system
CN105606990A (zh) * 2015-11-24 2016-05-25 北京新润泰思特测控技术有限公司 老炼试验箱
US11226390B2 (en) 2017-08-28 2022-01-18 Teradyne, Inc. Calibration process for an automated test system
US10725091B2 (en) 2017-08-28 2020-07-28 Teradyne, Inc. Automated test system having multiple stages
US10845410B2 (en) 2017-08-28 2020-11-24 Teradyne, Inc. Automated test system having orthogonal robots
US10948534B2 (en) 2017-08-28 2021-03-16 Teradyne, Inc. Automated test system employing robotics
US10983145B2 (en) 2018-04-24 2021-04-20 Teradyne, Inc. System for testing devices inside of carriers
US10775408B2 (en) 2018-08-20 2020-09-15 Teradyne, Inc. System for testing devices inside of carriers
US11754596B2 (en) 2020-10-22 2023-09-12 Teradyne, Inc. Test site configuration in an automated test system
US11953519B2 (en) 2020-10-22 2024-04-09 Teradyne, Inc. Modular automated test system
US11899042B2 (en) 2020-10-22 2024-02-13 Teradyne, Inc. Automated test system
US11754622B2 (en) 2020-10-22 2023-09-12 Teradyne, Inc. Thermal control system for an automated test system
US11867749B2 (en) 2020-10-22 2024-01-09 Teradyne, Inc. Vision system for an automated test system
TWI797824B (zh) * 2021-09-17 2023-04-01 致茂電子股份有限公司 壓測頭之快速拆裝組件及具備該組件之電子元件測試設備

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3143167A (en) * 1961-05-19 1964-08-04 Tung Sol Electric Inc Temperature controlled enclosure for testing purposes
US3360032A (en) * 1965-09-20 1967-12-26 Globe Union Inc Temperature controlling system
US3724536A (en) * 1970-08-14 1973-04-03 Gen Instrument Corp Heating and cooling device
US3842346A (en) * 1972-12-20 1974-10-15 C Bobbitt Continuity testing of solid state circuitry during temperature cycling
US4145620A (en) * 1977-10-05 1979-03-20 Serel Corporation Modular dynamic burn-in apparatus
DE3037192A1 (de) * 1980-10-02 1982-05-06 Licentia Gmbh Testverfahren fuer halbleiteranordnungen
DE3263256D1 (en) * 1981-07-08 1985-05-30 Fujitsu Ltd Device for testing semiconductor devices at a high temperature
JPS58155375A (ja) * 1982-03-11 1983-09-16 Nec Ic Microcomput Syst Ltd 半導体装置の電圧印加高温連続試験法
US4573011A (en) * 1983-05-20 1986-02-25 Nouvas Manufacturing Technology Company Method and apparatus for testing electro-mechanical devices
US4572283A (en) * 1984-08-31 1986-02-25 Wehr Corporation Environmental test chamber
GB8425299D0 (en) * 1984-10-06 1984-11-14 Young D N Heating oven
JPS6189570A (ja) * 1984-10-08 1986-05-07 Toshiba Corp 半導体装置用バ−ンイン装置
US4734872A (en) * 1985-04-30 1988-03-29 Temptronic Corporation Temperature control for device under test

Also Published As

Publication number Publication date
EP0238598B1 (de) 1992-01-02
WO1987001813A1 (en) 1987-03-26
US4881591A (en) 1989-11-21
EP0238598A1 (de) 1987-09-30

Similar Documents

Publication Publication Date Title
DE3683284D1 (de) Ofen zum einbrennen integrierter schaltungen.
DE68906913T2 (de) Bauteil zum Aufladen.
DE3689538D1 (de) Integrierte Schaltung und Optimierungsverfahren dafür.
DE3686519D1 (de) Schaltungsanordnung zum abaendern des dynamikbereiches mit serien- oder parallelschaltungen.
ATE118528T1 (de) Brennstoffabrikate.
DE3579977D1 (de) Methode zum entwurf logisch integrierter schaltungen.
DE68921666D1 (de) Anordnung zum Löten von gedruckten Schaltungen.
DE3668129D1 (de) Xy-tisch.
DE68920219T2 (de) Temperaturkompensierte bipolare Schaltungen.
DE3775757D1 (de) Brennervorrichtung zum zuenden von staubkohle.
ES543713A0 (es) Dispositivo ignitor
DE3688564D1 (de) Sequentielle logische schaltung.
DE3787838D1 (de) Schaltungen mit mehreren gesteuerten Verstärkerelementen.
DE3382183D1 (de) Monolithische integrierte mikrowellenschaltung und verfahren zum auswaehlen derselben.
DE3686874T2 (de) Automatische vorrichtungen zum einstellen von schaltungen.
DE3683242D1 (de) Doppelredundante fehlermaskierende logische schaltungen.
DE3483319D1 (de) Integrierter schaltkreis zur zuendsteuerung mit einrichtung zum schutz gegen einstreurung von ladungstraegern in das substrat.
DE68915284D1 (de) Testen von schaltungen.
DE3684998D1 (de) Logisch arithmetische schaltung.
DE3762375D1 (de) Anzuendbauteil.
DE3687785T2 (de) Integrierte schaltungen.
FI851580L (fi) Anordning foer alstrande av en roerlig straole av het gas.
NO874629D0 (no) Fremgangsmaate for sanering en broenn.
FI874474A (fi) Anordning foer dosering av gas in i en vaetska.
DE3576847D1 (de) Verbrennungsvorrichtung.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee