DE3579497D1 - Verfahren und vorrichtung zur messung der dicke und zusammensetzungen einer geschichteten oder duennschichtigen probe. - Google Patents

Verfahren und vorrichtung zur messung der dicke und zusammensetzungen einer geschichteten oder duennschichtigen probe.

Info

Publication number
DE3579497D1
DE3579497D1 DE8585303510T DE3579497T DE3579497D1 DE 3579497 D1 DE3579497 D1 DE 3579497D1 DE 8585303510 T DE8585303510 T DE 8585303510T DE 3579497 T DE3579497 T DE 3579497T DE 3579497 D1 DE3579497 D1 DE 3579497D1
Authority
DE
Germany
Prior art keywords
layered
compositions
measuring
thickness
thick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585303510T
Other languages
English (en)
Inventor
Allan Rosencwaig
Jon Opsal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Therma Wave Inc
Original Assignee
Therma Wave Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Therma Wave Inc filed Critical Therma Wave Inc
Application granted granted Critical
Publication of DE3579497D1 publication Critical patent/DE3579497D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0658—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of emissivity or reradiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/72—Investigating presence of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/108—Miscellaneous
    • G01N2201/1087—Focussed scan beam, e.g. laser
DE8585303510T 1984-05-21 1985-05-20 Verfahren und vorrichtung zur messung der dicke und zusammensetzungen einer geschichteten oder duennschichtigen probe. Expired - Lifetime DE3579497D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/612,077 US4679946A (en) 1984-05-21 1984-05-21 Evaluating both thickness and compositional variables in a thin film sample

Publications (1)

Publication Number Publication Date
DE3579497D1 true DE3579497D1 (de) 1990-10-11

Family

ID=24451622

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585303510T Expired - Lifetime DE3579497D1 (de) 1984-05-21 1985-05-20 Verfahren und vorrichtung zur messung der dicke und zusammensetzungen einer geschichteten oder duennschichtigen probe.

Country Status (4)

Country Link
US (1) US4679946A (de)
EP (1) EP0163466B1 (de)
JP (1) JPH0684942B2 (de)
DE (1) DE3579497D1 (de)

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US6025918A (en) * 1998-07-07 2000-02-15 Brown University Research Foundation Apparatus and method for measurement of the mechanical properties and electromigration of thin films
US6038026A (en) * 1998-07-07 2000-03-14 Brown University Research Foundation Apparatus and method for the determination of grain size in thin films
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US6595685B2 (en) * 1998-10-13 2003-07-22 National Research Laboratory Of Metrology Method and apparatus for measuring thermophysical properties
DE19919961B4 (de) * 1999-04-30 2008-04-30 BSH Bosch und Siemens Hausgeräte GmbH Pyrometer mit Ausgleichsheizeinrichtung
US6268916B1 (en) 1999-05-11 2001-07-31 Kla-Tencor Corporation System for non-destructive measurement of samples
US6393915B1 (en) * 1999-07-29 2002-05-28 Koninklijke Philips Electronics N.V. Method and device for simultaneously measuring multiple properties of multilayer films
US6317216B1 (en) 1999-12-13 2001-11-13 Brown University Research Foundation Optical method for the determination of grain orientation in films
US6911349B2 (en) * 2001-02-16 2005-06-28 Boxer Cross Inc. Evaluating sidewall coverage in a semiconductor wafer
US6812717B2 (en) * 2001-03-05 2004-11-02 Boxer Cross, Inc Use of a coefficient of a power curve to evaluate a semiconductor wafer
DE10119599A1 (de) * 2001-04-21 2002-10-31 Bosch Gmbh Robert Verfahren zur Bestimmung von Temperaturen an Halbleiterbauelementen
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US7026175B2 (en) * 2004-03-29 2006-04-11 Applied Materials, Inc. High throughput measurement of via defects in interconnects
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US7404671B2 (en) * 2005-03-10 2008-07-29 Luna Innovations Incorporated Dynamic acoustic thermometer
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AR070418A1 (es) * 2009-02-12 2010-04-07 Consejo Nac Invest Cient Tec Metodo y aparato para determinar la dilatacion de un material mediante un dispositivo sensor de error de foco
US8692887B2 (en) * 2010-08-27 2014-04-08 General Electric Company Thermal imaging method and apparatus for evaluating coatings
US20120144642A1 (en) * 2010-12-10 2012-06-14 Robert Steinkraus Generating and Detecting Acoustic Resonance in Thin Films
FR2980846B1 (fr) * 2011-10-03 2014-05-30 Commissariat Energie Atomique Procede de determination sans contact de l'epaisseur d'un echantillon, systeme correspondant
JP6556236B2 (ja) * 2014-07-22 2019-08-07 アングストローム サイエンス，インコーポレーテッドＡｎｇｓｔｒｏｍ Ｓｃｉｅｎｃｅ，Ｉｎｃ． 走査型プローブ顕微鏡ヘッドの設計
JP7081143B2 (ja) * 2017-12-27 2022-06-07 セイコーエプソン株式会社 超音波装置、及び超音波測定方法
CN108303443B (zh) * 2018-01-09 2020-04-03 中国计量大学 一种薄片材料面向导热性能稳态测试方法
CN113281265B (zh) * 2021-05-31 2022-05-20 华中科技大学 一种适用于宽膜厚范围样品的激光超声测量系统及方法
CN113406009B (zh) * 2021-06-23 2023-07-04 电子科技大学 一种基于光声信号匹配滤波的金属材料热扩散率测量方法

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Also Published As

Publication number Publication date
JPH0684942B2 (ja) 1994-10-26
EP0163466B1 (de) 1990-09-05
US4679946A (en) 1987-07-14
EP0163466A2 (de) 1985-12-04
JPS60256038A (ja) 1985-12-17
EP0163466A3 (en) 1987-11-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: THERMA-WAVE, INC. (N.D.GES.D. STAATES DELAWARE), F

8328 Change in the person/name/address of the agent

Free format text: BLUMBACH, P., DIPL.-ING., 65193 WIESBADEN WESER, W., DIPL.-PHYS. DR.RER.NAT. KRAMER, R., DIPL.-ING., 81245 MUENCHEN ZWIRNER, G., DIPL.-ING. DIPL.-WIRTSCH.-ING., 65193 WIESBADEN HOFFMANN, E., DIPL.-ING., PAT.-ANWAELTE, 82166 GRAEFELFING

8328 Change in the person/name/address of the agent

Free format text: BLUMBACH, KRAMER & PARTNER, 65193 WIESBADEN

8339 Ceased/non-payment of the annual fee