DE3575635D1 - Kuehlungssystem fuer integrierte schaltungschips. - Google Patents

Kuehlungssystem fuer integrierte schaltungschips.

Info

Publication number
DE3575635D1
DE3575635D1 DE8585107734T DE3575635T DE3575635D1 DE 3575635 D1 DE3575635 D1 DE 3575635D1 DE 8585107734 T DE8585107734 T DE 8585107734T DE 3575635 T DE3575635 T DE 3575635T DE 3575635 D1 DE3575635 D1 DE 3575635D1
Authority
DE
Germany
Prior art keywords
integrated circuit
cooling system
circuit chips
chips
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8585107734T
Other languages
English (en)
Inventor
Dean Eric Eastman
Jerome Michael Eldridge
Kurt Edward Petersen
Graham Olive
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3575635D1 publication Critical patent/DE3575635D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/433—Auxiliary members in containers characterised by their shape, e.g. pistons
    • H01L23/4332—Bellows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
    • F28F9/02—Header boxes; End plates
    • F28F9/026—Header boxes; End plates with static flow control means, e.g. with means for uniformly distributing heat exchange media into conduits
    • F28F9/0278—Header boxes; End plates with static flow control means, e.g. with means for uniformly distributing heat exchange media into conduits in the form of stacked distribution plates or perforated plates arranged over end plates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3011—Impedance
DE8585107734T 1984-07-12 1985-06-24 Kuehlungssystem fuer integrierte schaltungschips. Expired - Fee Related DE3575635D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/630,031 US4561040A (en) 1984-07-12 1984-07-12 Cooling system for VLSI circuit chips

Publications (1)

Publication Number Publication Date
DE3575635D1 true DE3575635D1 (de) 1990-03-01

Family

ID=24525479

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585107734T Expired - Fee Related DE3575635D1 (de) 1984-07-12 1985-06-24 Kuehlungssystem fuer integrierte schaltungschips.

Country Status (4)

Country Link
US (1) US4561040A (de)
EP (1) EP0168677B1 (de)
JP (1) JPS6132449A (de)
DE (1) DE3575635D1 (de)

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Also Published As

Publication number Publication date
JPS6132449A (ja) 1986-02-15
EP0168677A3 (en) 1987-04-01
US4561040A (en) 1985-12-24
EP0168677B1 (de) 1990-01-24
JPH0334229B2 (de) 1991-05-21
EP0168677A2 (de) 1986-01-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee