DE3573162D1 - Hermeticity testing method and system - Google Patents

Hermeticity testing method and system

Info

Publication number
DE3573162D1
DE3573162D1 DE8585304300T DE3573162T DE3573162D1 DE 3573162 D1 DE3573162 D1 DE 3573162D1 DE 8585304300 T DE8585304300 T DE 8585304300T DE 3573162 T DE3573162 T DE 3573162T DE 3573162 D1 DE3573162 D1 DE 3573162D1
Authority
DE
Germany
Prior art keywords
testing method
hermeticity testing
hermeticity
testing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8585304300T
Other languages
English (en)
Inventor
Edward Etess
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Web Tech Inc
Original Assignee
Web Tech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Web Tech Inc filed Critical Web Tech Inc
Application granted granted Critical
Publication of DE3573162D1 publication Critical patent/DE3573162D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
DE8585304300T 1984-06-21 1985-06-17 Hermeticity testing method and system Expired DE3573162D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/623,009 US4920785A (en) 1984-06-21 1984-06-21 Hermeticity testing method and system

Publications (1)

Publication Number Publication Date
DE3573162D1 true DE3573162D1 (en) 1989-10-26

Family

ID=24496412

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585304300T Expired DE3573162D1 (en) 1984-06-21 1985-06-17 Hermeticity testing method and system

Country Status (3)

Country Link
US (1) US4920785A (de)
EP (1) EP0168972B1 (de)
DE (1) DE3573162D1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345814A (en) * 1990-12-28 1994-09-13 Whirlpool Corporation Method and apparatus for testing vacuum insulation panel quality
US5361626A (en) * 1992-01-29 1994-11-08 United States Surgical Corporation Method and apparatus for detecting leaks in sealed packages
US5369983A (en) * 1992-04-17 1994-12-06 Minnesota Mining And Manufacturing Company Detection medium and method for use in hermetic seal testing
US5375456A (en) * 1993-11-18 1994-12-27 Trw Vehicle Safety Systems Inc. Leak testing apparatus and method
DE4415852A1 (de) * 1994-05-05 1995-11-09 Gerhart Schroff Verfahren und Anordnung zur Dichtheitsprüfung
US5535618A (en) * 1995-01-31 1996-07-16 The Quaker Oats Company Seal integrity evaluation method
AT1852U1 (de) * 1997-02-21 1997-12-29 Austria Mikrosysteme Int Verfahren zum überprüfen der dichtheit von gekapselten mikrosystemen
US6082184A (en) * 1997-05-27 2000-07-04 Martin Lehmann Method for leak testing and leak testing apparatus
WO1999019707A1 (en) * 1997-10-15 1999-04-22 Minnesota Mining And Manufacturing Company Use of hydrofluoroethers as test liquid in the testing of an electronic component
US5975151A (en) * 1998-08-06 1999-11-02 Ipg Corporation Charging a refrigerator with non-volatile liquid
US6330821B1 (en) * 2000-02-14 2001-12-18 The Goodyear Tire & Rubber Company Method of detecting expansion vessel leakage
US6530264B1 (en) 2000-11-16 2003-03-11 Autoliv Asp, Inc. Detection systems and methods
US6866089B2 (en) * 2002-07-02 2005-03-15 Carrier Corporation Leak detection with thermal imaging
US6763702B2 (en) * 2002-12-19 2004-07-20 Agilent Technologies, Inc. Method and apparatus for hermeticity determination and leak detection in semiconductor packaging
DE602004029226D1 (de) * 2003-10-10 2010-11-04 Greatbatch Ltd Leck-Prüfung von hermetischen Gehäusen für implantierbare Energiespeichern-Vorrichtungen
EP1533270A1 (de) * 2003-11-21 2005-05-25 Asulab S.A. Verfahren und Vorrichtung zur Dichtheitsprüfung einer hermetisch versiegelten MEMS Packung
US7299681B2 (en) * 2004-09-27 2007-11-27 Idc, Llc Method and system for detecting leak in electronic devices
TWM318123U (en) * 2007-01-05 2007-09-01 Smart Ant Telecom Co Ltd Gastightness examination apparatus
DE102013020388A1 (de) * 2012-12-13 2014-06-18 Tesat-Spacecom Gmbh & Co. Kg Verfahren zur Dichteprüfung eines Gehäuses
CN103207054B (zh) * 2013-04-25 2014-06-18 哈尔滨工业大学 高温结构密封性能地面模拟测试装置及测试方法
FR3068781A1 (fr) * 2017-07-06 2019-01-11 Ateq Procede de detection de fuite d'une piece creuse et installation pour la mise en œuvre d'un tel procede
US11885716B2 (en) * 2017-10-10 2024-01-30 Mitsubishi Electric Corporation Test method of a semiconductor device and manufacturing method of a semiconductor device
JP6381848B1 (ja) * 2018-06-06 2018-08-29 三菱電機株式会社 半導体装置の試験方法、および半導体装置の製造方法
CN109855811A (zh) * 2019-03-14 2019-06-07 中信戴卡股份有限公司 一种漏孔漏率检测装置及方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3091114A (en) * 1959-12-17 1963-05-28 Air Reduction Method and apparatus for testing sealed packages for leaks
US3416359A (en) * 1966-07-01 1968-12-17 Texas Instruments Inc Method and apparatus for testing hermetically sealed transistor devices
US3479862A (en) * 1967-03-24 1969-11-25 Westinghouse Electric Corp Hermeticity test for packaged electrical components
US3548636A (en) * 1968-09-30 1970-12-22 Nasa Method for detecting leaks in hermetically sealed containers
US3591944A (en) * 1969-03-03 1971-07-13 Safeway Stores Method and apparatus for detection of leaks in seals of packages
US3729983A (en) * 1970-08-27 1973-05-01 Inland Steel Co Leak tightness testing method and apparatus
US3675468A (en) * 1970-11-25 1972-07-11 Raytheon Co Leak testing apparatus and method
US3672207A (en) * 1971-01-04 1972-06-27 North American Rockwell Apparatus for verifying hermeticity of small electronic assemblies
US3762212A (en) * 1971-07-15 1973-10-02 Advanced Technologies Inc Leak testing apparatus and methods
US3738158A (en) * 1972-04-06 1973-06-12 Us Air Force Gross leak vacuum and pressure chamber assembly
US3902068A (en) * 1974-04-10 1975-08-26 Modern Controls Inc Method and apparatus for measuring the gas transmission through packaging materials
US4158960A (en) * 1978-05-04 1979-06-26 The United States Of America As Represented By The Secretary Of The Army Microcircuit fine leak test apparatus
US4282744A (en) * 1979-11-02 1981-08-11 Western Electric Co., Inc. Leak testing hermetically sealed electronic articles
JPS5779442A (en) * 1980-11-05 1982-05-18 Fuji Electric Co Ltd Measuring method of oxygen concentration in gas

Also Published As

Publication number Publication date
EP0168972A3 (en) 1987-01-21
EP0168972B1 (de) 1989-09-20
EP0168972A2 (de) 1986-01-22
US4920785A (en) 1990-05-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee