DE3565895D1 - Contactless eddy current testing method, and apparatus for carrying out this method - Google Patents

Contactless eddy current testing method, and apparatus for carrying out this method

Info

Publication number
DE3565895D1
DE3565895D1 DE8585402524T DE3565895T DE3565895D1 DE 3565895 D1 DE3565895 D1 DE 3565895D1 DE 8585402524 T DE8585402524 T DE 8585402524T DE 3565895 T DE3565895 T DE 3565895T DE 3565895 D1 DE3565895 D1 DE 3565895D1
Authority
DE
Germany
Prior art keywords
carrying
eddy current
current testing
testing method
contactless eddy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8585402524T
Other languages
English (en)
Inventor
Thierry Lonchampt
Gerard Yves Mangenet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Aircraft Engines SAS
Original Assignee
Societe Nationale dEtude et de Construction de Moteurs dAviation SNECMA
SNECMA SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9310756&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3565895(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Societe Nationale dEtude et de Construction de Moteurs dAviation SNECMA, SNECMA SAS filed Critical Societe Nationale dEtude et de Construction de Moteurs dAviation SNECMA
Application granted granted Critical
Publication of DE3565895D1 publication Critical patent/DE3565895D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G01N27/9046—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents by analysing electrical signals
    • G01N27/9053—Compensating for probe to workpiece spacing
DE8585402524T 1984-12-19 1985-12-18 Contactless eddy current testing method, and apparatus for carrying out this method Expired DE3565895D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8419409A FR2574938B1 (fr) 1984-12-19 1984-12-19 Methode de controle par courants de foucault sans contact et dispositif de mise en oeuvre

Publications (1)

Publication Number Publication Date
DE3565895D1 true DE3565895D1 (en) 1988-12-01

Family

ID=9310756

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585402524T Expired DE3565895D1 (en) 1984-12-19 1985-12-18 Contactless eddy current testing method, and apparatus for carrying out this method

Country Status (4)

Country Link
US (1) US4727322A (de)
EP (1) EP0187094B2 (de)
DE (1) DE3565895D1 (de)
FR (1) FR2574938B1 (de)

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EP0242492B1 (de) * 1985-12-28 1992-08-05 Yamaha Corporation Kontaktloser Markierungssensor
GB8622702D0 (en) * 1986-09-20 1986-10-29 Ford Motor Co Measuring coating thickness
US4849693A (en) * 1988-02-29 1989-07-18 Battelle Memorial Institute Automated measurement system employing eddy currents to adjust probe position and determine metal hardness
US5200704A (en) * 1991-02-28 1993-04-06 Westinghouse Electric Corp. System and method including a buried flexible sheet target impregnated with ferromagnetic particles and eddy current probe for determining proximity of a non-conductive underground structure
DE69222207T2 (de) * 1991-03-13 1998-03-05 Westinghouse Electric Corp Verfahren zur Feststellung des Verformungmasses in einem Material, in Reaktion auf eine zusammendrückende Kraft
US5223793A (en) * 1991-04-29 1993-06-29 Intex Inc. Apparatus for controlled rotation of a sphere or ball for inspecting or marking the surface with a predetermined pattern
US5394084A (en) * 1991-12-23 1995-02-28 The Boeing Company Method and apparatus for reducing errors in eddy-current conductivity measurements due to lift-off by interpolating between a plurality of reference conductivity measurements
US5420507A (en) * 1992-09-28 1995-05-30 Edward L. Laskowski Method and apparatus for sensing a target characteristic by measuring both impedance and resonant frequency of a tank circuit
US5552704A (en) * 1993-06-25 1996-09-03 Tencor Instruments Eddy current test method and apparatus for measuring conductance by determining intersection of lift-off and selected curves
US5541510A (en) * 1995-04-06 1996-07-30 Kaman Instrumentation Corporation Multi-Parameter eddy current measuring system with parameter compensation technical field
US6285183B1 (en) 1996-09-30 2001-09-04 Mcdonnell Douglas Corporation Method and system for measuring the volume loss of a metal substrate
DE19860487A1 (de) * 1998-12-28 2000-07-06 Siemens Ag Verfahren und Vorrichtung zur räumlichen Vermessung einer Inhomogenität an einer Oberfläche eines Kernreaktorbauteils und Anwendung des Verfahrens zur Vermessung einer elektrisch praktisch nicht leitenden Schicht
US6346807B1 (en) * 1999-10-22 2002-02-12 Bently Nevada Corporation Digital eddy current proximity system: apparatus and method
JP3758439B2 (ja) * 1999-12-20 2006-03-22 日本精工株式会社 曲面を有する被検査体の欠陥を曲面に沿って非接触で検出する方法
SE520322C2 (sv) * 2000-03-23 2003-06-24 Daprox Ab Sätt och anordning för avståndsbestämning mellan en stator och en denna motstående roterande rotor
TWI241398B (en) * 2000-03-28 2005-10-11 Toshiba Corp Eddy current loss measuring sensor, film thickness measuring device, film thickness measuring method and recording medium
US20030210041A1 (en) * 2000-04-07 2003-11-13 Le Cuong Duy Eddy current measuring system for monitoring and controlling a chemical vapor deposition (CVD) process
US6741076B2 (en) 2000-04-07 2004-05-25 Cuong Duy Le Eddy current measuring system for monitoring and controlling a CMP process
US6549006B2 (en) 2000-04-07 2003-04-15 Cuong Duy Le Eddy current measurements of thin-film metal coatings using a selectable calibration standard
US6407546B1 (en) * 2000-04-07 2002-06-18 Cuong Duy Le Non-contact technique for using an eddy current probe for measuring the thickness of metal layers disposed on semi-conductor wafer products
US6762604B2 (en) 2000-04-07 2004-07-13 Cuong Duy Le Standalone eddy current measuring system for thickness estimation of conductive films
US6593737B2 (en) 2000-08-24 2003-07-15 Shell Oil Company Method for measuring the wall thickness of an electrically conductive object
JP2002148012A (ja) * 2000-11-08 2002-05-22 Ulvac Japan Ltd 膜厚測定装置及び膜厚測定方法
US6933718B2 (en) * 2001-06-12 2005-08-23 The Boeing Company Quantification method and system for corrosion and damage assessment
GB0124910D0 (en) * 2001-10-17 2001-12-05 Accentus Plc Measurement of material properties
WO2003034054A2 (en) * 2001-10-17 2003-04-24 Aea Technology Plc Method and apparatus for measuring material properties and lift-off components of an object using a magnetic probe
US20040207395A1 (en) * 2002-04-08 2004-10-21 Moshe Sarfaty Eddy current-capacitance sensor for conducting film characterization
JP4451111B2 (ja) * 2003-10-20 2010-04-14 株式会社荏原製作所 渦電流センサ
US7295003B2 (en) * 2004-09-22 2007-11-13 The Boeing Company Non-destructive testing system and method utilizing a magnetic field to identify defects in a layer of a laminated material
US7830140B2 (en) * 2007-08-07 2010-11-09 General Electric Company Eddy current system and method for estimating material properties of parts
FI20085456L (fi) * 2008-05-15 2009-11-16 Valtion Teknillinen Menetelmä ja laitteisto sähköisen koodin tunnistamiseksi
GB0820930D0 (en) * 2008-11-17 2008-12-24 Dvs Techology Ltd Coating thickness measurement
US20130249540A1 (en) * 2012-03-22 2013-09-26 Olympus Ndt Inc. Eddy current array probe and method for lift-off compensation during operation without known lift references
US9335151B2 (en) 2012-10-26 2016-05-10 Applied Materials, Inc. Film measurement
CN106404899A (zh) * 2016-08-29 2017-02-15 爱德森（厦门）电子有限公司 一种涡流检测提离晃动补偿方法
CN116086300B (zh) * 2023-04-07 2023-06-09 苏州中科科仪技术发展有限公司 一种磁悬浮分子泵位移传感器的校准方法及其应用

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3358225A (en) * 1964-03-27 1967-12-12 Richard S Peugeot Lift-off compensation for eddy current testers
GB1130870A (en) * 1966-10-20 1968-10-16 Nat Res Dev Method and apparatus for detecting and measuring cracks in metal structures
US3718855A (en) * 1970-11-30 1973-02-27 R Cordova Eddy current flaw detection system
JPS5376926A (en) * 1976-12-21 1978-07-07 Nippon Kokan Kk Molten metal level monitor controller of continuous casting machine that use eddy flow system range finder for measurement of molten metal level
DE2815228C3 (de) * 1978-04-08 1980-11-27 Institut Dr. Friedrich Foerster Pruefgeraetebau, 7410 Reutlingen Prüfanordnung für die zerstörungsfreie Prüfung von metallischem Prüfgut
US4215310A (en) * 1978-07-10 1980-07-29 United States Steel Corporation Magnetic testing method and apparatus having provision for eliminating inaccuracies caused by gaps between probe and test piece
US4438754A (en) * 1979-08-14 1984-03-27 Shell Oil Company Method for sensing and remotely controlling a tool to workpiece spatial relationship
CA1158314A (en) * 1980-08-18 1983-12-06 Majesty (Her) In Right Of Canada As Represented By Atomic Energy Of Cana Da Limited Eddy current surface probe
JPS57178155A (en) * 1981-04-27 1982-11-02 Hitachi Ltd Eddy current test equipment
US4596953A (en) * 1982-04-14 1986-06-24 Daidotokushuko Kabushikikaisha Apparatus for scanning a material for detection of flaws and having material axis deviation detection
US4641092A (en) * 1982-07-08 1987-02-03 Sumitomo Metal Industries, Ltd. Rotary probe apparatus for detecting flaws in a test object
US4644274A (en) * 1983-04-01 1987-02-17 General Electric Company Apparatus for supporting an eddy current probe used to scan an irregular surface

Also Published As

Publication number Publication date
EP0187094A1 (de) 1986-07-09
EP0187094B1 (de) 1988-10-26
US4727322A (en) 1988-02-23
EP0187094B2 (de) 1992-05-13
FR2574938A1 (fr) 1986-06-20
FR2574938B1 (fr) 1986-12-26

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8339 Ceased/non-payment of the annual fee