DE3563285D1 - Construction process of a semiconductor laser mirror by ion etching - Google Patents
Construction process of a semiconductor laser mirror by ion etchingInfo
- Publication number
- DE3563285D1 DE3563285D1 DE8585400624T DE3563285T DE3563285D1 DE 3563285 D1 DE3563285 D1 DE 3563285D1 DE 8585400624 T DE8585400624 T DE 8585400624T DE 3563285 T DE3563285 T DE 3563285T DE 3563285 D1 DE3563285 D1 DE 3563285D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor laser
- ion etching
- construction process
- laser mirror
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8405223A FR2562339B1 (fr) | 1984-04-03 | 1984-04-03 | Procede de realisation d'un miroir de laser a semi-conducteur, par usinage ionique |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3563285D1 true DE3563285D1 (en) | 1988-07-14 |
Family
ID=9302778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585400624T Expired DE3563285D1 (en) | 1984-04-03 | 1985-03-29 | Construction process of a semiconductor laser mirror by ion etching |
Country Status (6)
Country | Link |
---|---|
US (1) | US4865684A (de) |
EP (1) | EP0158565B1 (de) |
JP (1) | JPS61501739A (de) |
DE (1) | DE3563285D1 (de) |
FR (1) | FR2562339B1 (de) |
WO (1) | WO1985004529A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3738053A1 (de) * | 1987-11-09 | 1989-05-18 | Siemens Ag | Laseranordnung mit mindestens einem laserresonator und einem damit verkoppelten passiven resonator |
KR900009229B1 (ko) * | 1988-04-28 | 1990-12-24 | 한국 과학기술원 | 선택적 에피택시법에 의한 표면 방출형 AlGaAs/GaAs 반도체 레이저 다이오드의 제조방법 |
JP2991716B2 (ja) * | 1988-08-16 | 1999-12-20 | 三菱化学株式会社 | エッチトミラー型化合物半導体レーザー装置及び集積素子 |
US5259925A (en) * | 1992-06-05 | 1993-11-09 | Mcdonnell Douglas Corporation | Method of cleaning a plurality of semiconductor devices |
JPH0677181A (ja) * | 1992-08-26 | 1994-03-18 | Matsushita Electric Ind Co Ltd | 化合物半導体の微細構造形成方法 |
KR0178492B1 (ko) * | 1995-12-21 | 1999-04-15 | 양승택 | 기울어진 공진기로 편광특성이 제어된 표면방출 레이저 다이오드 제조방법 |
JPH09298339A (ja) * | 1996-04-30 | 1997-11-18 | Rohm Co Ltd | 半導体レーザの製法 |
US6781099B2 (en) * | 2001-03-12 | 2004-08-24 | Karl-Heinz Krah Gmbh | Electrofusion socket forming system |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4248688A (en) * | 1979-09-04 | 1981-02-03 | International Business Machines Corporation | Ion milling of thin metal films |
US4354898A (en) * | 1981-06-24 | 1982-10-19 | Bell Telephone Laboratories, Incorporated | Method of preferentially etching optically flat mirror facets in InGaAsP/InP heterostructures |
NL8104068A (nl) * | 1981-09-02 | 1983-04-05 | Philips Nv | Halfgeleiderlaser. |
DE3138704A1 (de) * | 1981-09-29 | 1983-04-21 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung von laserdioden-resonatorspiegeln |
FR2525033B1 (fr) * | 1982-04-08 | 1986-01-17 | Bouadma Noureddine | Laser a semi-conducteur a plusieurs longueurs d'onde independantes et son procede de realisation |
US4397711A (en) * | 1982-10-01 | 1983-08-09 | Bell Telephone Laboratories, Incorporated | Crystallographic etching of III-V semiconductor materials |
JPS59219974A (ja) * | 1983-05-27 | 1984-12-11 | Matsushita Electric Ind Co Ltd | 半導体レ−ザの製造方法 |
-
1984
- 1984-04-03 FR FR8405223A patent/FR2562339B1/fr not_active Expired
-
1985
- 1985-03-29 DE DE8585400624T patent/DE3563285D1/de not_active Expired
- 1985-03-29 EP EP85400624A patent/EP0158565B1/de not_active Expired
- 1985-04-01 JP JP60501611A patent/JPS61501739A/ja active Pending
- 1985-04-01 WO PCT/FR1985/000072 patent/WO1985004529A1/fr unknown
-
1988
- 1988-02-12 US US07/158,071 patent/US4865684A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2562339B1 (fr) | 1986-06-20 |
EP0158565A1 (de) | 1985-10-16 |
FR2562339A1 (fr) | 1985-10-04 |
EP0158565B1 (de) | 1988-06-08 |
JPS61501739A (ja) | 1986-08-14 |
US4865684A (en) | 1989-09-12 |
WO1985004529A1 (fr) | 1985-10-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |