DE3485678D1 - Vakuum- und/oder elektrostatischer stiftkopf zum halten von halbleiterplaettchen oder anderen flachen elektrischen komponenten und verfahren zu seiner herstellung. - Google Patents

Vakuum- und/oder elektrostatischer stiftkopf zum halten von halbleiterplaettchen oder anderen flachen elektrischen komponenten und verfahren zu seiner herstellung.

Info

Publication number
DE3485678D1
DE3485678D1 DE8484107041T DE3485678T DE3485678D1 DE 3485678 D1 DE3485678 D1 DE 3485678D1 DE 8484107041 T DE8484107041 T DE 8484107041T DE 3485678 T DE3485678 T DE 3485678T DE 3485678 D1 DE3485678 D1 DE 3485678D1
Authority
DE
Germany
Prior art keywords
vacuum
production
electrical components
pen head
flat electrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8484107041T
Other languages
English (en)
Inventor
Vincent Dimilia
Juan Ramon Maldonado
James Louis Speidell
John Michael Warlaumont
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3485678D1 publication Critical patent/DE3485678D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S269/00—Work holders
    • Y10S269/902—Work holder member with v-shaped notch or groove
DE8484107041T 1983-06-30 1984-06-20 Vakuum- und/oder elektrostatischer stiftkopf zum halten von halbleiterplaettchen oder anderen flachen elektrischen komponenten und verfahren zu seiner herstellung. Expired - Fee Related DE3485678D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/509,738 US4551192A (en) 1983-06-30 1983-06-30 Electrostatic or vacuum pinchuck formed with microcircuit lithography

Publications (1)

Publication Number Publication Date
DE3485678D1 true DE3485678D1 (de) 1992-06-04

Family

ID=24027900

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484107041T Expired - Fee Related DE3485678D1 (de) 1983-06-30 1984-06-20 Vakuum- und/oder elektrostatischer stiftkopf zum halten von halbleiterplaettchen oder anderen flachen elektrischen komponenten und verfahren zu seiner herstellung.

Country Status (4)

Country Link
US (1) US4551192A (de)
EP (1) EP0134438B1 (de)
JP (1) JPS609626A (de)
DE (1) DE3485678D1 (de)

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EP0134438A3 (en) 1987-12-16
EP0134438A2 (de) 1985-03-20
JPS609626A (ja) 1985-01-18
US4551192A (en) 1985-11-05
JPH034341B2 (de) 1991-01-22

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