DE3369576D1 - Stripping compositions and methods of stripping resists - Google Patents
Stripping compositions and methods of stripping resistsInfo
- Publication number
- DE3369576D1 DE3369576D1 DE8383108673T DE3369576T DE3369576D1 DE 3369576 D1 DE3369576 D1 DE 3369576D1 DE 8383108673 T DE8383108673 T DE 8383108673T DE 3369576 T DE3369576 T DE 3369576T DE 3369576 D1 DE3369576 D1 DE 3369576D1
- Authority
- DE
- Germany
- Prior art keywords
- stripping
- compositions
- methods
- resists
- stripping compositions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000203 mixture Substances 0.000 title abstract 5
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 abstract 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N anhydrous diethylene glycol Natural products OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 abstract 2
- -1 tetrahydrothiophene 1,1-dioxide compound Chemical class 0.000 abstract 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical group CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 abstract 1
- 239000002202 Polyethylene glycol Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229920001223 polyethylene glycol Polymers 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/413,995 US4403029A (en) | 1982-09-02 | 1982-09-02 | Stripping compositions and methods of stripping resists |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3369576D1 true DE3369576D1 (en) | 1987-03-05 |
Family
ID=23639517
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8383108673T Expired DE3369576D1 (en) | 1982-09-02 | 1983-09-02 | Stripping compositions and methods of stripping resists |
Country Status (12)
Country | Link |
---|---|
US (1) | US4403029A (de) |
EP (1) | EP0102628B1 (de) |
JP (1) | JPS5949538A (de) |
AT (1) | ATE25295T1 (de) |
AU (1) | AU555161B2 (de) |
CA (1) | CA1194764A (de) |
DE (1) | DE3369576D1 (de) |
HK (1) | HK33988A (de) |
IE (1) | IE54405B1 (de) |
IL (1) | IL69400A0 (de) |
SG (1) | SG17088G (de) |
ZA (1) | ZA835588B (de) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58223149A (ja) * | 1982-06-22 | 1983-12-24 | Toray Ind Inc | 感光性ポリイミド用現像液 |
US4491530A (en) * | 1983-05-20 | 1985-01-01 | Allied Corporation | Brown stain suppressing phenol free and chlorinated hydrocarbons free photoresist stripper |
US4828960A (en) * | 1985-01-07 | 1989-05-09 | Honeywell Inc. | Reflection limiting photoresist composition with two azo dyes |
US4617251A (en) * | 1985-04-11 | 1986-10-14 | Olin Hunt Specialty Products, Inc. | Stripping composition and method of using the same |
US4692398A (en) * | 1985-10-28 | 1987-09-08 | American Hoechst Corporation | Process of using photoresist treating composition containing a mixture of a hexa-alkyl disilazane, propylene glycol alkyl ether and propylene glycol alkyl ether acetate |
US4983490A (en) * | 1985-10-28 | 1991-01-08 | Hoechst Celanese Corporation | Photoresist treating composition consisting of a mixture of propylene glycol alkyl ether and propylene glycol alkyl ether acetate |
US4806458A (en) * | 1985-10-28 | 1989-02-21 | Hoechst Celanese Corporation | Composition containing a mixture of hexa-alkyl disilazane and propylene glycol alkyl ether and/or propylene glycol alkyl ether acetate |
IE59971B1 (en) * | 1986-11-10 | 1994-05-04 | Baker J T Inc | Stripping compositions and their use for stripping resists from substrates |
US4770713A (en) * | 1986-12-10 | 1988-09-13 | Advanced Chemical Technologies, Inc. | Stripping compositions containing an alkylamide and an alkanolamine and use thereof |
US4824763A (en) * | 1987-07-30 | 1989-04-25 | Ekc Technology, Inc. | Triamine positive photoresist stripping composition and prebaking process |
JPH02981A (ja) * | 1988-02-25 | 1990-01-05 | Hoya Corp | 感光性樹脂用剥離液及びこれを用いる感光性樹脂の剥離方法 |
US5166039A (en) * | 1988-02-25 | 1992-11-24 | Hoya Corporation | Peeling solution for photo- or electron beam-sensitive resin and process for peeling off said resin |
US20040018949A1 (en) * | 1990-11-05 | 2004-01-29 | Wai Mun Lee | Semiconductor process residue removal composition and process |
US5279771A (en) | 1990-11-05 | 1994-01-18 | Ekc Technology, Inc. | Stripping compositions comprising hydroxylamine and alkanolamine |
US7205265B2 (en) * | 1990-11-05 | 2007-04-17 | Ekc Technology, Inc. | Cleaning compositions and methods of use thereof |
US6001192A (en) * | 1992-06-02 | 1999-12-14 | Elf Atochem S.A. | Paint stripping composition |
FR2691713B1 (fr) * | 1992-06-02 | 1997-12-26 | Atochem Elf Sa | Composition pour decaper les peintures. |
US5308745A (en) * | 1992-11-06 | 1994-05-03 | J. T. Baker Inc. | Alkaline-containing photoresist stripping compositions producing reduced metal corrosion with cross-linked or hardened resist resins |
US7144849B2 (en) * | 1993-06-21 | 2006-12-05 | Ekc Technology, Inc. | Cleaning solutions including nucleophilic amine compound having reduction and oxidation potentials |
US5417802A (en) * | 1994-03-18 | 1995-05-23 | At&T Corp. | Integrated circuit manufacturing |
US5591702A (en) * | 1995-05-25 | 1997-01-07 | Henkel Corporation | Stripping compositions with mixtures or organic solvents and uses thereof |
US5817610A (en) * | 1996-09-06 | 1998-10-06 | Olin Microelectronic Chemicals, Inc. | Non-corrosive cleaning composition for removing plasma etching residues |
US5759973A (en) * | 1996-09-06 | 1998-06-02 | Olin Microelectronic Chemicals, Inc. | Photoresist stripping and cleaning compositions |
US5780406A (en) * | 1996-09-06 | 1998-07-14 | Honda; Kenji | Non-corrosive cleaning composition for removing plasma etching residues |
US6030932A (en) | 1996-09-06 | 2000-02-29 | Olin Microelectronic Chemicals | Cleaning composition and method for removing residues |
KR100271761B1 (ko) * | 1997-11-21 | 2000-12-01 | 윤종용 | 반도체장치 제조용 현상장치 및 그의 제어방법 |
US7579308B2 (en) * | 1998-07-06 | 2009-08-25 | Ekc/Dupont Electronics Technologies | Compositions and processes for photoresist stripping and residue removal in wafer level packaging |
US6368421B1 (en) | 1998-07-10 | 2002-04-09 | Clariant Finance (Bvi) Limited | Composition for stripping photoresist and organic materials from substrate surfaces |
US6413923B2 (en) * | 1999-11-15 | 2002-07-02 | Arch Specialty Chemicals, Inc. | Non-corrosive cleaning composition for removing plasma etching residues |
US7456140B2 (en) * | 2000-07-10 | 2008-11-25 | Ekc Technology, Inc. | Compositions for cleaning organic and plasma etched residues for semiconductor devices |
KR100764888B1 (ko) | 2000-07-10 | 2007-10-09 | 이케이씨 테크놀로지, 인코포레이티드 | 반도체 장치용의 유기 및 플라즈마 식각된 잔사의 세척을위한 조성물 |
CA2331439C (en) * | 2001-01-19 | 2007-01-02 | E.Q.U.I.P. International Inc. | Paint stripping composition and method of using the same |
US7543592B2 (en) * | 2001-12-04 | 2009-06-09 | Ekc Technology, Inc. | Compositions and processes for photoresist stripping and residue removal in wafer level packaging |
EP1468335A4 (de) * | 2002-01-11 | 2006-05-17 | Az Electronic Materials Usa | Reinigungsmittelzusammensetzung für einen positiv- oder negativ-fotoresist |
US20030171239A1 (en) * | 2002-01-28 | 2003-09-11 | Patel Bakul P. | Methods and compositions for chemically treating a substrate using foam technology |
WO2003091376A1 (en) * | 2002-04-24 | 2003-11-06 | Ekc Technology, Inc. | Oxalic acid as a cleaning product for aluminium, copper and dielectric surfaces |
US20050089489A1 (en) * | 2003-10-22 | 2005-04-28 | Carter Melvin K. | Composition for exfoliation agent effective in removing resist residues |
US20110146724A1 (en) * | 2009-12-19 | 2011-06-23 | Mr. WAI MUN LEE | Photoresist stripping solutions |
KR20220058069A (ko) | 2020-10-30 | 2022-05-09 | 주식회사 이엔에프테크놀로지 | 세정제 조성물 및 이를 이용한 세정방법 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2891849A (en) * | 1956-11-30 | 1959-06-23 | Eastman Kodak Co | Solvent composition |
US4165295A (en) * | 1976-10-04 | 1979-08-21 | Allied Chemical Corporation | Organic stripping compositions and method for using same |
US4304681A (en) * | 1980-09-15 | 1981-12-08 | Shipley Company, Inc. | Novel stripping composition for positive photoresists and method of using same |
US4395479A (en) * | 1981-09-23 | 1983-07-26 | J. T. Baker Chemical Company | Stripping compositions and methods of stripping resists |
-
1982
- 1982-09-02 US US06/413,995 patent/US4403029A/en not_active Expired - Lifetime
-
1983
- 1983-07-20 IE IE1699/83A patent/IE54405B1/en not_active IP Right Cessation
- 1983-07-20 CA CA000432806A patent/CA1194764A/en not_active Expired
- 1983-07-29 ZA ZA835588A patent/ZA835588B/xx unknown
- 1983-07-29 AU AU17441/83A patent/AU555161B2/en not_active Ceased
- 1983-08-02 IL IL69400A patent/IL69400A0/xx unknown
- 1983-08-10 JP JP58145127A patent/JPS5949538A/ja active Granted
- 1983-09-02 AT AT83108673T patent/ATE25295T1/de not_active IP Right Cessation
- 1983-09-02 EP EP83108673A patent/EP0102628B1/de not_active Expired
- 1983-09-02 DE DE8383108673T patent/DE3369576D1/de not_active Expired
-
1988
- 1988-03-08 SG SG170/88A patent/SG17088G/en unknown
- 1988-05-02 HK HK339/88A patent/HK33988A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
US4403029A (en) | 1983-09-06 |
ATE25295T1 (de) | 1987-02-15 |
IE831699L (en) | 1984-03-02 |
IE54405B1 (en) | 1989-09-27 |
HK33988A (en) | 1988-05-13 |
AU1744183A (en) | 1984-03-08 |
JPS5949538A (ja) | 1984-03-22 |
CA1194764A (en) | 1985-10-08 |
EP0102628A1 (de) | 1984-03-14 |
ZA835588B (en) | 1984-04-25 |
EP0102628B1 (de) | 1987-01-28 |
AU555161B2 (en) | 1986-09-11 |
JPH0143947B2 (de) | 1989-09-25 |
SG17088G (en) | 1988-09-30 |
IL69400A0 (en) | 1983-11-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |