DE3060643D1 - Apparatus for determining the thickness, moisture content or other parameter of a film or coating - Google Patents

Apparatus for determining the thickness, moisture content or other parameter of a film or coating

Info

Publication number
DE3060643D1
DE3060643D1 DE8080301006T DE3060643T DE3060643D1 DE 3060643 D1 DE3060643 D1 DE 3060643D1 DE 8080301006 T DE8080301006 T DE 8080301006T DE 3060643 T DE3060643 T DE 3060643T DE 3060643 D1 DE3060643 D1 DE 3060643D1
Authority
DE
Germany
Prior art keywords
parameter
coating
film
determining
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8080301006T
Other languages
English (en)
Inventor
Roger Foers Edgar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NDC Technologies Ltd
Original Assignee
Infrared Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infrared Engineering Ltd filed Critical Infrared Engineering Ltd
Application granted granted Critical
Publication of DE3060643D1 publication Critical patent/DE3060643D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
DE8080301006T 1979-04-09 1980-03-31 Apparatus for determining the thickness, moisture content or other parameter of a film or coating Expired DE3060643D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB7912398 1979-04-09
GB7929736A GB2046432B (en) 1979-04-09 1979-08-28 Apparatus for determining the thickness moisture content or other parameter of a film or coating

Publications (1)

Publication Number Publication Date
DE3060643D1 true DE3060643D1 (en) 1982-08-26

Family

ID=26271186

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8080301006T Expired DE3060643D1 (en) 1979-04-09 1980-03-31 Apparatus for determining the thickness, moisture content or other parameter of a film or coating

Country Status (4)

Country Link
US (1) US4320967A (de)
EP (1) EP0017461B1 (de)
DE (1) DE3060643D1 (de)
GB (1) GB2046432B (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3270551D1 (en) * 1981-03-16 1986-05-22 Energy Conversion Devices Inc Optical methods for controlling layer thickness
DE3234534C2 (de) * 1982-09-17 1986-09-11 Kievskoe naučno-proizvodstvennoe obiedinenie "Analitpribor", Kiev Anordnung zum Aufstäuben von optischen Filmschichten
GB8525906D0 (en) * 1985-10-21 1985-11-27 Nat Nuclear Corp Ltd Determination of heat transfer rates
GB8528448D0 (en) * 1985-11-19 1985-12-24 Infrared Eng Ltd Absorption gauge
US4789820A (en) * 1986-01-08 1988-12-06 Hercules Incorporated Apparatus and method for sensing multiple parameters of sheet material
DE3728705A1 (de) * 1987-08-28 1989-03-09 Agfa Gevaert Ag Vorrichtung zur ueberpruefung von beschichteten und unbeschichteten folien
DE3905658A1 (de) * 1989-02-24 1990-08-30 Hauni Werke Koerber & Co Kg Verfahren und vorrichtung zum messen der feuchte eines gutes
US5091647A (en) * 1990-12-24 1992-02-25 Ford Motor Company Method and apparatus for measuring the thickness of a layer on a substrate
US5541413A (en) * 1992-04-24 1996-07-30 Thiokol Corporation Acousto-optic tunable filter-based surface scanning system and process
US5406082A (en) * 1992-04-24 1995-04-11 Thiokol Corporation Surface inspection and characterization system and process
DE69330010T2 (de) * 1992-05-29 2001-09-13 Eastman Kodak Co Vorrichtung und Verfahren zur Beschichtungsdichteanalyse mittels Bildverarbeitung
US5426509A (en) * 1993-05-20 1995-06-20 Peplinski; Robert A. Device and method for detecting foreign material on a moving printed film web
US5436725A (en) * 1993-10-12 1995-07-25 Hughes Aircraft Company Cofocal optical system for thickness measurements of patterned wafers
DE19522188C2 (de) * 1995-06-19 1999-12-02 Optisense Ges Fuer Optische Pr Verfahren und Vorrichtung zur Bestimmung der Dicke und/oder des komplexen Brechungsindexes dünner Schichten und Verwendung zur Steuerung von Beschichtungsverfahren
DE19928171B4 (de) 1999-06-19 2011-01-05 Leybold Optics Gmbh Verfahren zur kontinuierlichen Bestimmung der optischen Schichtdicke von Beschichtungen
US8049172B2 (en) * 2000-11-24 2011-11-01 Microfluid Ab Radiometric measuring of thin fluid films
DE102005008889B4 (de) * 2005-02-26 2016-07-07 Leybold Optics Gmbh Optisches Monitoringsystem für Beschichtungsprozesse
JP2006300811A (ja) * 2005-04-22 2006-11-02 Hitachi Displays Ltd 薄膜の膜厚測定方法、多結晶半導体薄膜の形成方法、半導体デバイスの製造方法、およびその製造装置、並びに画像表示装置の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3455637A (en) * 1964-08-07 1969-07-15 Giannini Controls Corp Method and apparatus for measuring the opacity of sheet material
DE1598467B1 (de) * 1967-07-26 1972-03-16 Frieseke & Hoepfner Gmbh Geraet zur beruehrungslosen messung der feuchte oder der konzentration anderer substanzen in bewegten messguthaben
GB1302196A (de) * 1969-04-23 1973-01-04
US3641349A (en) * 1969-09-29 1972-02-08 Measurex Corp Method for measuring the amount of substance associated with a base material
DE2104916A1 (de) * 1971-02-03 1972-08-17 Visomat Geraete Gmbh Maschenweite-messvorrichtung fuer siebgewebe u.dgl.
SE355864B (de) * 1971-03-19 1973-05-07 Asea Ab
GB1382081A (en) * 1972-03-14 1975-01-29 Ici Ltd Transmission spectra
US3793524A (en) * 1972-09-05 1974-02-19 Measurex Corp Apparatus for measuring a characteristic of sheet materials
US3827808A (en) * 1973-05-09 1974-08-06 Industrial Nucleonics Corp Method and apparatus for measuring the opacity of sheet material in which the transmittance signal is compensated for the reflectivity of the material
US3901607A (en) * 1974-02-21 1975-08-26 Xerox Corp High aperture reflection photodetector apparatus
US3994593A (en) * 1974-10-07 1976-11-30 Olympus Optical Co., Ltd. Apparatus for automatic quantitative analysis of blood serum specimens by cataphoretic process
US4027161A (en) * 1976-04-05 1977-05-31 Industrial Nucleonics Corporation Minimizing wave interference effects on the measurement of thin films having specular surfaces using infrared radiation

Also Published As

Publication number Publication date
US4320967A (en) 1982-03-23
EP0017461A1 (de) 1980-10-15
GB2046432B (en) 1983-05-11
GB2046432A (en) 1980-11-12
EP0017461B1 (de) 1982-07-07

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee