DE3008441A1 - Physical quantity sensor for e.g. pressure or force - has protective housing and membrane in contact with deformable sensor substrate - Google Patents

Physical quantity sensor for e.g. pressure or force - has protective housing and membrane in contact with deformable sensor substrate

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Publication number
DE3008441A1
DE3008441A1 DE19803008441 DE3008441A DE3008441A1 DE 3008441 A1 DE3008441 A1 DE 3008441A1 DE 19803008441 DE19803008441 DE 19803008441 DE 3008441 A DE3008441 A DE 3008441A DE 3008441 A1 DE3008441 A1 DE 3008441A1
Authority
DE
Germany
Prior art keywords
sensor
membrane
sensor element
housing
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19803008441
Other languages
German (de)
Inventor
Eberhard Dipl.-Phys. Dr. Günzel
Kurt 8000 München Kaufmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19803008441 priority Critical patent/DE3008441A1/en
Publication of DE3008441A1 publication Critical patent/DE3008441A1/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/02—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using mechanical means
    • G01D5/06—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using mechanical means acting through a wall or enclosure, e.g. by bellows, by magnetic coupling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
    • G01F1/28—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow by drag-force, e.g. vane type or impact flowmeter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
    • G01L1/2231—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being disc- or ring-shaped, adapted for measuring a force along a single direction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges

Abstract

The pressure force or acceleration transducer consists of a sensor element mounted upon a mechanically deformable substrate. It is an economically manufactured, sensitive device which does not suffer from the long-term stability limitations conventionally associated with integrated semiconductor sensor circuits with piezoresistive elements caused by humidity and corrosive gases or vapours. The sensor element (1) is mounted inside a housing (6) which is hermetically sealed by a membrane (8) in contact with the deformable substrate (3). The sensor element may be a strain gauge or an integrated semiconducting circuit with a piezoresistive element. The deformable substrate (3) may be a steel spring. Alternatively, the sensor element and substrate may be a flexible silicon strip. The sensor and substrate assembly is attached to the housing using a slotted metal ring (4) and threaded ring (5).

Description

Sensor zur Druck- Kraft- bzw. BeschleuniggBgs-MessungSensor for pressure, force or accelerationBgs measurement

Die Erfindung betrifft einen Sensor, insbesondere zur Druck-, Kraft- bzw. Beschleunigungs-Messung, welcher aus einem auf einer mechanisch verformbaren Unterlage angeordneten Sensorelement besteht.The invention relates to a sensor, in particular for pressure, force or acceleration measurement, which consists of a mechanically deformable Base arranged sensor element consists.

Ein derartiger Sensor ist aus der DE-OS 27 14 644 bekannt. Beim bekannten Sensor besteht das Sensorelement aus einer integrierten Halbleiterschaltung mit einem piezoresistiven Element, wobei diese Schaltung beispielsweise durch Kleben auf der verformbaren Unterlage befestigt ist. Die Schwierigkeiten, die bei der Anwendung eines derartigen Sensors auftreten können, bestehen darin, daß sowohl die Chip-Oberfläche als auch der Kleber durch atmosphärische Einflüsse, wie beispielsweise Feuchtigkeit und korrosive Gase bzw. Dämpfe beeinflußt werden können. Dadurch wird in unerwünschter Weise die Langzeitstabilität derartiger Sensoren verschlechtert.Such a sensor is known from DE-OS 27 14 644. At the known The sensor element consists of an integrated semiconductor circuit with the sensor a piezoresistive element, this circuit for example by gluing is attached to the deformable substrate. The difficulties encountered in applying such a sensor can occur in that both the chip surface as well as the adhesive due to atmospheric influences, such as moisture and corrosive gases or vapors can be influenced. This turns into undesirable Way, the long-term stability of such sensors deteriorates.

Aufgabe der Erfindung ist es daher, ein Sensorelement anzugeben, bei dem die vorstehend aufgezeigten Schwierigkeiten umgangen werden, welches kostengUnstig herzustellen ist, und bei dem die Empfindlichkeit der Anordnung nicht wesentlich herabgesetzt ist.The object of the invention is therefore to specify a sensor element in which circumvents the difficulties outlined above, which is inexpensive is to be produced, and in which the sensitivity of the arrangement is not essential is reduced.

Diese Aufgabe wird mit einem Sensor der eingangs genannten Art erfindungsgemäß dadurch gelost, daß das Sensorelement in einem Gehäuse angeordnet ist, daß das Gehäuse durch eine Membran hermetisch verschlossen ist, und daß.die Membran an der verformbaren Unterlage anliegt.This object is achieved according to the invention with a sensor of the type mentioned at the beginning solved in that the sensor element is arranged in a housing that the casing is hermetically sealed by a membrane, and dass.die membrane on the deformable Underlay.

Das Sensorelement kann in bekannter Weise aus einem Dehnungsmeßstreifen oder aus einem Silizium-Biegestreifen oder aus einer integrierten Halbleiterschaltung mit einem piezoresistiven Element bestehen.The sensor element can consist of a strain gauge in a known manner or from a flexible silicon strip or from an integrated semiconductor circuit with a piezoresistive element.

Vorteilhafterweise besteht die verformbare Unterlage aus einer Stahlfeder, die vorzugsweise durch einen Metallring mit Nut und einen Gewindering am Gehäuse fixiert ist.The deformable base advantageously consists of a steel spring, preferably by a metal ring with a groove and a threaded ring on the housing is fixed.

Gemäß einer Weiterbildung kann zur Kraftmessung ein um eine Achse drehbarer Hebel am Gehäuse angeordnet sein, dessen eines Ende auf die Membran einwirkt.According to a further development, a force measurement can be performed around an axis rotatable lever be arranged on the housing, one end of which acts on the membrane.

Die Vorteile des erfindungsgemäßen Sensors werden an Hand von Ausführngsbeispielen erläutert.The advantages of the sensor according to the invention are illustrated using exemplary embodiments explained.

In der dazugehörenden Zeichnung zeigen: Fig. 1 einen Sensor zur Druckmessung und Fig. 2 einen Sensor zur Kraftmessung.The accompanying drawings show: FIG. 1 a sensor for measuring pressure and FIG. 2 shows a sensor for measuring force.

In der Fig. 1 ist ein Schnitt durch einen Sensor zur Druckmessung dargestellt. Das Sensorelement 1, welches aus einem Halbleiter-Chip mit integriertem piezoresistiven Element besteht, welcher an einer Kunststoffolie 2 befestigt ist, ist auf eine Stahlfeder 3 aufgeklebt.In Fig. 1 is a section through a sensor for pressure measurement shown. The sensor element 1, which consists of a semiconductor chip with an integrated piezoresistive element, which is attached to a plastic film 2, is glued to a steel spring 3.

Diese Anordnung ist mittels eines Metallringes mit Nut 4 und eines Gewinderinges 5 in einem zylindrischen oder quaderförmigen Metallgehäuse 6 angeordnet. Die Nut in dem Metallring 4 bewirkt, daß die Stahlfeder 3 etwas Spiel hat und somit Unterschiede im thermischen Ausdehnungskoeffizienten zwischen Stahlfeder 3 und Gehäuse 6 nicht zur Auswirkung gelangen. Das Gehäuse weist an der einen Seite eine kreisrunde Öffnung 7 auf, welche durch eine aufgelötete oder aufgeschweißte Metall-Membran 8 verschlossen ist. An der Membran 8 liegt die Stahlfeder 3 an, wobei zweckmäßigerweise der thermische Ausdehnungskoeffizient der Stahlfeder 3 in der Nähe des-Wenigen des Halbleiter-Chips 1 sein soll. Auf der Kunststoffolie 2 sind die elektrischen Anschlüsse 9 für das in den Halbleiter-Chip 1 integrierte piezoresistive Element angeordnet. Diese elektrischen Anschlüsse 9 sind mit DurchdUhrungen 10 verbunden, die elektrisch isoliert durch eine das Gehäuse 6 auf der anderen Seite z.B.This arrangement is by means of a metal ring with groove 4 and one Threaded ring 5 arranged in a cylindrical or cuboid metal housing 6. The groove in the metal ring 4 causes the steel spring 3 something game and therefore has differences in the coefficient of thermal expansion between steel springs 3 and housing 6 do not have any effect. The housing faces on one side a circular opening 7, which by a soldered or welded Metal membrane 8 is closed. The steel spring 3 rests on the membrane 8, wherein expediently the coefficient of thermal expansion of the steel spring 3 in the Close to the few of the semiconductor chip 1 should be. On the plastic film 2 are the electrical connections 9 for the piezoresistive integrated in the semiconductor chip 1 Element arranged. These electrical connections 9 are connected to feedthroughs 10, which is electrically isolated by a housing 6 on the other side e.g.

durch Lötung verschließende Abschlußscheibe 11 geführt sind. Mit Hilfe der Durchführungen 10 kann die Piezo-Schaltung elektrisch kontaktiert werden. Ein von außen auf die Membran 8 in Pfeilrichtung wirkender hydrostatischer Druck hat eine Verbiegung der Stahlfeder 3 zur Folge, wodurch eine Änderung des elektrischen Ausgangssignals am Piezo-Chip 1 bewirkt wird. Der hermetisch verschlossene Innenraum 12 des Gehäuses 6 kann für bestimmte Anwendungsfälle auch evakuiert bzw. mit einem Schutzgas wie beispielsweise Stickstoff gefüllt sein.are guided by soldering sealing cover plate 11. With help of the feedthroughs 10, the piezo circuit can be electrically contacted. A has hydrostatic pressure acting from the outside on the membrane 8 in the direction of the arrow a bending of the steel spring 3 result, whereby a change in the electrical Output signal on the piezo chip 1 is effected. The hermetically sealed interior 12 of the housing 6 can also be evacuated or with a Protective gas such as nitrogen must be filled.

Anstelle des der Stahlfeder 3 mit aufgeklebtem Sensorelement 1 kann auch ein Silizium-Biegestreifen verwendet werden.Instead of the steel spring 3 with a glued-on sensor element 1 can a flexible silicon strip can also be used.

In der Fig. 2 ist ein Schnitt durch einen Sensor zur Kraft-Messung dargestellt. Der Sensor ist dabei ähnlich wie der Sensor gemäß Fig. 1 aufgebaut, wobei gleiche Bezugszeichen für die gleichen Elemente verwendet worden sind. Dabei ist das Gehäuse 6 derart ausgebildet, daß in ihm ein um eine Achse 13 drehbarer Hebel 14 angeordnet ist. Das eine Ende 15 des Hebels 14 drückt bei Einwirkung einer Kraft in Pfeilrichtung auf die Membran 8 und bewirkt somit eine Verbiegung der Stahlfeder 3. Die Kraft kann dabei beispielsweise durch Auftreffen eines strömenden Mediums hervorgerufen werden (Strömungsmessung) ferner können Beschleunigungskräfte an einer trägen Masse (Beschleunigungsmessung) oder Gewichtskräfte (Gewichtsmessung) bestimmt werden.In Fig. 2 is a section through a sensor for force measurement shown. The sensor is constructed similarly to the sensor according to FIG. 1, the same reference numerals having been used for the same elements. Included the housing 6 is designed in such a way that that in it one around an axis 13 rotatable lever 14 is arranged. One end 15 of the lever 14 presses Action of a force in the direction of the arrow on the membrane 8 and thus causes a Bending of the steel spring 3. The force can be caused, for example, by impact of a flowing medium can be caused (flow measurement) and acceleration forces on an inert mass (acceleration measurement) or weight forces (weight measurement) to be determined.

Bei den in den Figuren dargestellten AusfEhrungsbeispielen dient die Membran 8 nur dem Feuchte- und Korrosionsschutz und weist eine geringe Biegesteifigkeit auf, damit die Kraft möglichst vollständig auf die Stahlfeder übertragen wird. Für bestimmte Anwendungen kann die Membran 8 auch kreisförmig gewellt sein. Dabei ist jedoch wichtig, daß auch im mechanisch unbelasteten Zustand der mittlere Bereich der Membran 8 am mittleren Bereich der Stahlfeder 3 anliegt.In the exemplary embodiments shown in the figures, the Membrane 8 only protects against moisture and corrosion and has a low flexural rigidity so that the force is transferred as completely as possible to the steel spring. For In certain applications, the membrane 8 can also be corrugated in a circular manner. It is However, it is important that the middle area is also in the mechanically unloaded state the membrane 8 rests against the central area of the steel spring 3.

Wie bereits vorstehend aufgezeigt, kann für bestimmte Anwendungsfälle das Gehäuse vor dem Verschließen evakuiert werden. Dies ist besonders empfehlenswert, wenn die Messungen in einem so großen Temperaturbereich vorgenommen werden, daß sich die Druckänderungen des Gases im Innern des Gehäuses störend bemerkbar machen. Für die Evakuierung können zweckmäßigerweise eine oder mehrere der Durchführungen 10 als Röhrchen ausgebildet sein, durch die die Anschlußdrähte 9 hindurchgeführt werden und die nach dem Evakuieren mit Lötzinn verschlossen werden.As already shown above, for certain applications the housing must be evacuated before closing. This is particularly recommended if the measurements are made in such a wide temperature range that the pressure changes of the gas inside the housing are noticeable. One or more of the bushings can expediently be used for evacuation 10 be designed as a tube through which the connecting wires 9 passed and which are sealed with solder after evacuation.

7 Patentansprüche, 2 Figuren.7 claims, 2 figures.

Claims (7)

PatentansqrUche QchSensor, insbesondere zur Druck-, Kraft- bzw. Beschleunigungs-Messung, welcher aus einem auf einer mechanisch verformbaren Unterlage angeordneten Sensorelement besteht, d a d u r c h g e k e n n -z e i c h n e t , daß das Sensorelement (1) in einem Gehäuse (6) angeordnet ist, daß das Gehäuse (6) durch eine Membran (8) hermetisch verschlossen ist, und daß die Membran (8) an der verformbaren Unterlage (3) anliegt. Patent claims QchSensor, in particular for pressure, force or acceleration measurement, which consists of a sensor element arranged on a mechanically deformable base exists that the sensor element (1) is arranged in a housing (6) that the housing (6) through a membrane (8) is hermetically sealed, and that the membrane (8) on the deformable base (3) is present. 2. Sensor nach Anspruch 1, d a d u r c h g e k e n n z e i c h n e t , daß das Sensorelement (1) aus einem Dehnungsmeßstreifen besteht. 2. Sensor according to claim 1, d a d u r c h g e k e n n z e i c h n e t that the sensor element (1) consists of a strain gauge. 3. Sensor nach Anspruch 1, d a d u r c h g e k e n n z e i c h n e t , daß das Sensorelement (1) aus einer integrierten Halbleiterschaltung mit einem piezoresistiven Element besteht. 3. Sensor according to claim 1, d a d u r c h g e k e n n z e i c h n e t that the sensor element (1) consists of an integrated semiconductor circuit with a piezoresistive element. 4. Sensor nach einem oder mehreren der AnsprUche 1 bis 3, d a d u r c h g e k e n n z e i c h n e t daß die verformbare Unterlage (3) aus einer Stahlfeder besteht. 4. Sensor according to one or more of claims 1 to 3, d a d u r c h g e k e nn n n e i c h n e t that the deformable base (3) consists of a steel spring consists. 5. Sensor nach Anspruch 1, d a d u r c h g e k e n n z e i c h n e t , daß das Sensorelement (1) und die verformbare Unterlage (3) aus einem Silizium-Biegestreifen bestehen. 5. Sensor according to claim 1, d a d u r c h g e k e n n z e i c h n e t that the sensor element (1) and the deformable base (3) made of a flexible silicon strip exist. 6. Sensor nach Anspruch 4 oder 52 d a d u r c h g e k e n n z e i c h n e t , daß die Stahlfeder (3) bzw. der Silizium-Biegestreifen durch einen Metallring (4) mit Nut und einen Gewindering (5) am Gehäuse (6) fixiert ist.6. Sensor according to claim 4 or 52 d a d u r c h g e k e n n z e i c h n e t that the steel spring (3) or the flexible silicon strip through a metal ring (4) is fixed with a groove and a threaded ring (5) on the housing (6). 7. Sensor nach einem oder mehreren der Anspruche 1 bis 6, d a d u r c h g e k e n n z e i c h n e t daß zur Eraft- bzw. Beschleunigungs-Messung ein um eine Achse (13) drehbarer Hebel (14) am Gehäuse (6) angeordnet ist, dessen eines Ende (15) auf die Membran (8) einwirkt.7. Sensor according to one or more of claims 1 to 6, d a d u r c h g e k e n n n n z e i n e t that for the force or acceleration measurement about an axis (13) rotatable lever (14) is arranged on the housing (6), one of which The end (15) acts on the membrane (8).
DE19803008441 1980-03-05 1980-03-05 Physical quantity sensor for e.g. pressure or force - has protective housing and membrane in contact with deformable sensor substrate Withdrawn DE3008441A1 (en)

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Application Number Priority Date Filing Date Title
DE19803008441 DE3008441A1 (en) 1980-03-05 1980-03-05 Physical quantity sensor for e.g. pressure or force - has protective housing and membrane in contact with deformable sensor substrate

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Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2535060A1 (en) * 1982-10-22 1984-04-27 Antivols Simplex Sa Piezoelectric detector
DE3313261A1 (en) * 1983-04-13 1984-10-25 Ermeto Armaturen Gmbh, 4800 Bielefeld SENSOR
DE3313260A1 (en) * 1983-04-13 1984-10-25 Ermeto Armaturen Gmbh, 4800 Bielefeld Sensor
EP0136701A2 (en) * 1983-10-05 1985-04-10 Dierks & Söhne GmbH & Co. KG Measuring device
EP0239703A1 (en) * 1986-01-07 1987-10-07 THORN EMI plc Force-sensitive flow sensor
DE3801828A1 (en) * 1987-01-26 1988-08-04 Tdk Corp DISPLACEMENT SENSOR
US4773269A (en) * 1986-07-28 1988-09-27 Rosemount Inc. Media isolated differential pressure sensors
EP0312605A1 (en) * 1987-04-24 1989-04-26 Enplas Laboratories, Inc. Detector for force, acceleration and magnetism using resistor element
EP0333872A1 (en) * 1987-09-18 1989-09-27 Wacoh Corporation Gripper for a robot
WO1989010287A1 (en) * 1988-04-20 1989-11-02 Alfred Teves Gmbh Process for operating a master cylinder
DE4106442A1 (en) * 1990-02-28 1991-09-19 Atsugi Unisia Corp SENSOR ARRANGEMENT IN A VIBRATION-INSULATING DEVICE
DE4117462A1 (en) * 1990-05-28 1991-12-05 Atsugi Unisia Corp LOAD SENSOR
US5263375A (en) * 1987-09-18 1993-11-23 Wacoh Corporation Contact detector using resistance elements and its application
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
EP0949484A1 (en) * 1998-04-07 1999-10-13 SPANNER-POLLUX GmbH Flowmeter
US6282956B1 (en) 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2535060A1 (en) * 1982-10-22 1984-04-27 Antivols Simplex Sa Piezoelectric detector
DE3313261A1 (en) * 1983-04-13 1984-10-25 Ermeto Armaturen Gmbh, 4800 Bielefeld SENSOR
DE3313260A1 (en) * 1983-04-13 1984-10-25 Ermeto Armaturen Gmbh, 4800 Bielefeld Sensor
EP0136701A2 (en) * 1983-10-05 1985-04-10 Dierks & Söhne GmbH & Co. KG Measuring device
EP0136701A3 (en) * 1983-10-05 1986-12-03 Dierks & Söhne GmbH & Co. KG Measuring device
EP0239703A1 (en) * 1986-01-07 1987-10-07 THORN EMI plc Force-sensitive flow sensor
AU577210B2 (en) * 1986-01-07 1988-09-15 Thorn Emi Plc Improvements in or relating to flow sensors
US4773269A (en) * 1986-07-28 1988-09-27 Rosemount Inc. Media isolated differential pressure sensors
DE3801828A1 (en) * 1987-01-26 1988-08-04 Tdk Corp DISPLACEMENT SENSOR
EP0625701A1 (en) * 1987-04-24 1994-11-23 Enplas Laboratories, Inc. Force detector using piezoresistive elements
EP0312605A4 (en) * 1987-04-24 1992-06-17 Kabushiki Kaisha Nexy Kenkyusho Detector for force, acceleration and magnetism using resistor element
EP0312605A1 (en) * 1987-04-24 1989-04-26 Enplas Laboratories, Inc. Detector for force, acceleration and magnetism using resistor element
EP0333872B1 (en) * 1987-09-18 1995-08-23 Wacoh Corporation Gripper for a robot
US5263375A (en) * 1987-09-18 1993-11-23 Wacoh Corporation Contact detector using resistance elements and its application
EP0333872A1 (en) * 1987-09-18 1989-09-27 Wacoh Corporation Gripper for a robot
WO1989010287A1 (en) * 1988-04-20 1989-11-02 Alfred Teves Gmbh Process for operating a master cylinder
DE4106442A1 (en) * 1990-02-28 1991-09-19 Atsugi Unisia Corp SENSOR ARRANGEMENT IN A VIBRATION-INSULATING DEVICE
DE4117462A1 (en) * 1990-05-28 1991-12-05 Atsugi Unisia Corp LOAD SENSOR
US6158291A (en) * 1990-10-12 2000-12-12 Okada; Kazuhiro Force detector and acceleration detector
US6477903B2 (en) 1990-10-12 2002-11-12 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US7360455B2 (en) 1990-10-12 2008-04-22 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US6053057A (en) * 1990-10-12 2000-04-25 Okada; Kazuhiro Force detector
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US7152485B2 (en) 1990-10-12 2006-12-26 Kazuhiro Okada Acceleration detector
US6779408B2 (en) 1990-10-12 2004-08-24 Kazuhiro Okada Force detector
US5811693A (en) * 1990-10-12 1998-09-22 Okada; Kazuhiro Force detector and acceleration detector and method of manufacturing the same
US6716253B2 (en) 1990-10-12 2004-04-06 Kazuhiro Okada Force detector
US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US6941810B2 (en) 1993-03-30 2005-09-13 Kazuhiro Okada Angular velocity sensor
US7059188B2 (en) 1993-03-30 2006-06-13 Kazuhiro Okada Angular velocity sensor
US7900513B2 (en) 1993-03-30 2011-03-08 Kazuhiro Okada Multi-axial angular velocity sensor
US6865943B2 (en) 1994-12-29 2005-03-15 Kazuhiro Okada Angular velocity sensor
US6282956B1 (en) 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
EP0949484A1 (en) * 1998-04-07 1999-10-13 SPANNER-POLLUX GmbH Flowmeter

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