DE29516768U1 - Dipped mirror lens - Google Patents

Dipped mirror lens

Info

Publication number
DE29516768U1
DE29516768U1 DE29516768U DE29516768U DE29516768U1 DE 29516768 U1 DE29516768 U1 DE 29516768U1 DE 29516768 U DE29516768 U DE 29516768U DE 29516768 U DE29516768 U DE 29516768U DE 29516768 U1 DE29516768 U1 DE 29516768U1
Authority
DE
Germany
Prior art keywords
dipped
mirror lens
mirror
lens
dipped mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29516768U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LINDENER WERNER
Original Assignee
LINDENER WERNER
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LINDENER WERNER filed Critical LINDENER WERNER
Priority to DE29516768U priority Critical patent/DE29516768U1/en
Publication of DE29516768U1 publication Critical patent/DE29516768U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0816—Catadioptric systems using two curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
DE29516768U 1995-10-24 1995-10-24 Dipped mirror lens Expired - Lifetime DE29516768U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE29516768U DE29516768U1 (en) 1995-10-24 1995-10-24 Dipped mirror lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE29516768U DE29516768U1 (en) 1995-10-24 1995-10-24 Dipped mirror lens

Publications (1)

Publication Number Publication Date
DE29516768U1 true DE29516768U1 (en) 1996-02-01

Family

ID=8014477

Family Applications (1)

Application Number Title Priority Date Filing Date
DE29516768U Expired - Lifetime DE29516768U1 (en) 1995-10-24 1995-10-24 Dipped mirror lens

Country Status (1)

Country Link
DE (1) DE29516768U1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0833180A2 (en) * 1996-09-26 1998-04-01 Carl Zeiss Catadioptric objective for microlithographic reduction
US6169627B1 (en) 1996-09-26 2001-01-02 Carl-Zeiss-Stiftung Catadioptric microlithographic reduction objective
US6631036B2 (en) 1996-09-26 2003-10-07 Carl-Zeiss-Stiftung Catadioptric objective
USRE42570E1 (en) 1996-09-26 2011-07-26 Carl Zeiss Smt Gmbh Catadioptric objective

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0833180A2 (en) * 1996-09-26 1998-04-01 Carl Zeiss Catadioptric objective for microlithographic reduction
EP0833180A3 (en) * 1996-09-26 1998-07-22 Carl Zeiss Catadioptric objective for microlithographic reduction
US6169627B1 (en) 1996-09-26 2001-01-02 Carl-Zeiss-Stiftung Catadioptric microlithographic reduction objective
US6631036B2 (en) 1996-09-26 2003-10-07 Carl-Zeiss-Stiftung Catadioptric objective
USRE42570E1 (en) 1996-09-26 2011-07-26 Carl Zeiss Smt Gmbh Catadioptric objective

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Legal Events

Date Code Title Description
R086 Non-binding declaration of licensing interest
R207 Utility model specification

Effective date: 19960314

R156 Lapse of ip right after 3 years

Effective date: 19990803