DE19607795A1 - Method for detecting ionising contaminants in electronic components - Google Patents
Method for detecting ionising contaminants in electronic componentsInfo
- Publication number
- DE19607795A1 DE19607795A1 DE1996107795 DE19607795A DE19607795A1 DE 19607795 A1 DE19607795 A1 DE 19607795A1 DE 1996107795 DE1996107795 DE 1996107795 DE 19607795 A DE19607795 A DE 19607795A DE 19607795 A1 DE19607795 A1 DE 19607795A1
- Authority
- DE
- Germany
- Prior art keywords
- liquid
- electronic component
- electronic
- conductivity
- contaminants
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/22—Measuring resistance of fluids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/24—Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Abstract
Description
Die Erfindung betrifft ein Verfahren zur Untersuchung ionischer Verunreini gungen im Innern gemoldeter elektronischer Bauelemente, bei dem der Nachweis der Verunreinigung durch Indikatoren erfolgt.The invention relates to a method for the investigation of ionic contaminants in the interior of molded electronic components, in which the Evidence of contamination is provided by indicators.
Bei elektronischen Bauelementen kann es zu Ausfällen kommen, deren Ursa chen u. a. darin liegen können, daß stark elektrolythaltige Bäder (Reini gungs-, Dekapier- oder Galvanikbäder) in die elektronischen Bauelemente eindringen und dort starke Korrosionen verursachen können.In the case of electronic components, failures can occur, the Ursa chen u. a. may be that baths with a high electrolyte content (Reini supply, decapitation or electroplating baths) in the electronic components penetrate and cause severe corrosion there.
Zum Nachweis dieser Verunreinigungen kann man, soweit saure oder basi sche Kontaminationen vorliegen, eine indikatorhaltige Lösung verwenden, in die das elektronische Bauelement eingebracht und in der durch Verfär bung die Verunreinigung angezeigt wird.To detect these impurities, one can, as far as acidic or basic contamination is present, use an indicator-containing solution, in which the electronic component is introduced and in which by discoloration the contamination is displayed.
Dieses Verfahren hat jedoch den Nachteil, daß es relativ unempfindlich ist und daß man neutrale Verunreinigungen nicht nachweisen kann.However, this method has the disadvantage that it is relatively insensitive and that neutral impurities cannot be detected.
Daher liegt der vorliegenden Erfindung die Aufgabe zugrunde, ein Verfah ren zum Nachweis von Verunreinigungen der eingangs beschriebenen Art anzugeben, durch das es möglich ist, geringste Mengen von Verunreinigun gen sicher nachweisen zu können.The present invention is therefore based on the object of a method for the detection of impurities of the type described in the introduction indicate by which it is possible to remove the smallest amounts of impurities to be able to prove it safely.
Diese Aufgabe wird erfindungsgemäß dadurch gelöst, daß als Indikations nachweis das elektronische Bauelement in einem eine Flüssigkeit enthalten den Behältnis auf eine Leitfähigkeitsänderung untersucht wird. This object is achieved in that as an indication Detect the electronic component contained in a liquid the container is examined for a change in conductivity.
In einer bevorzugten Ausgestaltung dieses Verfahrens wird das elektroni sche Bauelement in der Flüssigkeit unter Druckbeanspruchung mittels einer Preßvorrichtung geöffnet. Der Nachweis der Verunreinigung erfolgt durch Messen der Leitfähigkeitsänderung des entstehenden Elektrolyten, indem die Kontaminationen in dieser dissoziieren.In a preferred embodiment of this method, the electronic cal component in the liquid under pressure by means of a Press device opened. The contamination is verified by Measure the change in conductivity of the resulting electrolyte by the contaminations dissociate in this.
Das erfindungsgemäße Verfahren hat den wesentlichen Vorteil, daß eine Leitfähigkeitsänderung auch geringste Spuren von Verunreinigungen an zeigt, und daß diese Änderungen einfach und sicher meßbar sind. Obwohl durch dieses erfindungsgemäße Verfahren in erster Linie die relativen Leit fähigkeitsänderungen interessieren und meßbar sind, läßt diese Methode auch halbquantitative Aussagen zu, indem ein Kontaminationsfaktor wie z. B. Mol NaCl angebbar ist, bezogen auf die Oberfläche des elektronischen Bauelements und für Vergleichszwecke definiert werden kann.The process according to the invention has the essential advantage that a Conductivity change even the slightest trace of impurities shows, and that these changes can be measured easily and safely. Although by this method according to the invention primarily the relative guide Skill changes are of interest and are measurable, leaves this method also semi-quantitative statements by adding a contamination factor such as e.g. B. Mol NaCl can be specified, based on the surface of the electronic Component and can be defined for comparison purposes.
Weitere vorteilhafte Ausgestaltungen der Erfindung ergeben sich aus den Unteransprüchen.Further advantageous embodiments of the invention result from the Subclaims.
Eine Ausführungsbeispiel der Erfindung ist in den Figuren dargestellt.An embodiment of the invention is shown in the figures.
Es zeigen:Show it:
Fig. 1 eine Meßvorrichtung für das erfindungsgemäße Verfahren, Fig. 1 shows a measuring apparatus for the inventive method,
Fig. 2 einen typischen Verlauf einer gemessenen Leitfähigkeitsände rung nach dem erfindungsgemäßen Verfahren. Fig. 2 shows a typical course of a measured conductivity change according to the inventive method.
Die in Fig. 1 dargestellte Meßvorrichtung für das erfindungsgemäße Ver fahren zeigt mit dem Bezugszeichen 1 das zu untersuchende elektronische Bauelement. Dieses ist umgeben von einer Flüssigkeit 2, die sich in dem Be hältnis 3 befindet. Vorzugsweise verwendet man als Flüssigkeit 2 vollentsalz tes Wasser. Der Nachweis der zu messen den Verunreinigung im elektroni schen Bauelement 1 erfolgt, indem die Kontaminationen in der Flüssigkeit 2 dissoziieren und so Ionen bilden, die eine Änderung der Leitfähigkeit der Flüssigkeit 2 bewirken. Vorzugsweise wird das elektronische Bauelement 1 unter einer Druckbeanspruchung mittels der Preßvorrichtung 12 geöffnet, und zwar in der Flüssigkeit 2 bei fortlaufendem Meßvorgang. Die Öffnung der elektronischen Bauelemente 1 erfolgt dabei vorzugsweise längs seiner Streifen bzw. Nahtstellen. Zu diesem Zweck wird beispielsweise ein inte grierter gemoldeter elektronischer Schaltkreis an seiner Stirnfläche von der Preßvorrichtung 12 mit Druck beansprucht. Die Messung der Leitfähigkeits änderung erfolgt über die zwei Elektroden 4, 5, die in die Flüssigkeit 2 ein getaucht sind. Als bevorzugte Ausführungsform sind die Elektroden 4, 5 als Ringelektroden ausgebildet, in deren Zentrum sich das elektronische Bau element 1 befindet. Das elektronische Bauelement 1 wird in einem im Zen trum der Elektroden 4, 5 befindlichen Hohlzylinder 6 unter dem Druck des darin geführten Druckstempels 7 mit Druck beansprucht. Zum Durchmi schen der Flüssigkeit 2 ist die Umwälzpumpe 8 vorgesehen, die vorzugswei se außerhalb des Behälters 3 angebracht ist und über einen Zulauf und Ab lauf mit der Flüssigkeit 2 verbunden ist. Zur verbesserten Durchmischung der Flüssigkeit 2 und der darin dissoziierten Kontaminationen sind die Elek troden 4, 5 und der Hohlzylinder 6 mit den Durchbrüchen 9 versehen. Als Flüssigkeit 2 verwendet man vorzugsweise Flüssigkeiten mit einer Ausgangs leitfähigkeit von < 0,1 µs/cm. Die Leitfähigkeitsänderung wird über die elek tronische Meßeinrichtung 10 sowie die elektronische Anzeigeeinrichtung 11 ausgewertet. Als elektronische Anzeigeeinrichtung wird vorzugsweise eine elektronische Schreibvorrichtung verwendet. Die Kontaminationen sind in der Regel salzhaltige Verbindungen. Um auch geringe Kontaminationen, also geringste Leitfähigkeitsänderungen in stärker leitenden Medien (CO₂-halti ges Wasser) bestimmen zu können, wird ein Leitfähigkeitsmeßgerät (nicht dargestellt) mit Kompensationseinrichtung eingesetzt.The measuring device shown in FIG. 1 for the method according to the invention shows with reference number 1 the electronic component to be examined. This is surrounded by a liquid 2 , which is located in the loading 3 . Preferably, 2 demineralized water is used as the liquid. The detection of the contamination in the electronic component 1 is measured by dissociating the contaminants in the liquid 2 and thus forming ions which cause a change in the conductivity of the liquid 2 . Preferably, the electronic component 1 is opened under pressure by means of the pressing device 12 , specifically in the liquid 2 during a continuous measuring process. The electronic components 1 are preferably opened along its strips or seams. For this purpose, for example, an integrated molded electronic circuit is claimed on its end face by the pressing device 12 with pressure. The change in conductivity is measured via the two electrodes 4 , 5 which are immersed in the liquid 2 . As a preferred embodiment, the electrodes 4 , 5 are designed as ring electrodes, in the center of which the electronic construction element 1 is located. The electronic component 1 is in a Zen in the center of the electrodes 4 , 5 located hollow cylinder 6 under the pressure of the plunger 7 carried therein with pressure. For mixing the liquid 2's , the circulation pump 8 is provided, which is attached outside the container 3 and preferably is connected to the liquid 2 via an inlet and outlet. For improved mixing of the liquid 2 and the contaminations dissociated therein, the electrodes 4 , 5 and the hollow cylinder 6 are provided with the openings 9 . The liquid 2 used is preferably liquid with an initial conductivity of <0.1 µs / cm. The change in conductivity is evaluated via the electronic measuring device 10 and the electronic display device 11 . An electronic writing device is preferably used as the electronic display device. The contaminants are usually saline compounds. A conductivity measuring device (not shown) with a compensation device is used in order to be able to determine even minor contaminations, that is to say the smallest changes in conductivity in more conductive media (CO₂-containing water).
Fig. 2 zeigt den typischen Verlauf der Leitfähigkeitsänderung vor und nach dem Öffnen des verunreinigten elektronischen Bauelements in der Flüssig keit 2. Die Ordinate zeigt dabei die Leitfähigkeit und auf der Abszisse ist die Zeit aufgetragen. Fig. 2 shows the typical course of the change in conductivity before and after opening the contaminated electronic component in the liquid speed 2 . The ordinate shows the conductivity and the time is plotted on the abscissa.
Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE1996107795 DE19607795C2 (en) | 1996-03-01 | 1996-03-01 | Procedure for the investigation of ionic impurities inside molded electronic components |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE1996107795 DE19607795C2 (en) | 1996-03-01 | 1996-03-01 | Procedure for the investigation of ionic impurities inside molded electronic components |
Publications (2)
Publication Number | Publication Date |
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DE19607795A1 true DE19607795A1 (en) | 1997-09-04 |
DE19607795C2 DE19607795C2 (en) | 1999-09-02 |
Family
ID=7786859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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DE1996107795 Expired - Fee Related DE19607795C2 (en) | 1996-03-01 | 1996-03-01 | Procedure for the investigation of ionic impurities inside molded electronic components |
Country Status (1)
Country | Link |
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DE (1) | DE19607795C2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1160568A1 (en) * | 2000-05-31 | 2001-12-05 | DR.O.K. WACK CHEMIE GmbH | Method and composition for detecting acid residues on electronic components |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD98164A1 (en) * | 1972-07-14 | 1973-06-12 | ||
US3803489A (en) * | 1973-01-04 | 1974-04-09 | Bell Telephone Labor Inc | Liquid contacts for use in semiconductor doping profile analysis |
US4023931A (en) * | 1976-02-17 | 1977-05-17 | Kenco Alloy & Chemical Co. Inc. | Means and method for measuring levels of ionic contamination |
DE2938545A1 (en) * | 1979-09-24 | 1981-04-02 | Siemens AG, 1000 Berlin und 8000 München | Air monitor for electronic equipment installations - measures ph and conductivity values of distilled water following air washing process |
US5450744A (en) * | 1993-09-14 | 1995-09-19 | Senson Limited | Contamination monitoring system |
-
1996
- 1996-03-01 DE DE1996107795 patent/DE19607795C2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD98164A1 (en) * | 1972-07-14 | 1973-06-12 | ||
US3803489A (en) * | 1973-01-04 | 1974-04-09 | Bell Telephone Labor Inc | Liquid contacts for use in semiconductor doping profile analysis |
US4023931A (en) * | 1976-02-17 | 1977-05-17 | Kenco Alloy & Chemical Co. Inc. | Means and method for measuring levels of ionic contamination |
DE2938545A1 (en) * | 1979-09-24 | 1981-04-02 | Siemens AG, 1000 Berlin und 8000 München | Air monitor for electronic equipment installations - measures ph and conductivity values of distilled water following air washing process |
US5450744A (en) * | 1993-09-14 | 1995-09-19 | Senson Limited | Contamination monitoring system |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1160568A1 (en) * | 2000-05-31 | 2001-12-05 | DR.O.K. WACK CHEMIE GmbH | Method and composition for detecting acid residues on electronic components |
Also Published As
Publication number | Publication date |
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DE19607795C2 (en) | 1999-09-02 |
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Legal Events
Date | Code | Title | Description |
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OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
OP8 | Request for examination as to paragraph 44 patent law | ||
8127 | New person/name/address of the applicant |
Owner name: TEMIC SEMICONDUCTOR GMBH, 74072 HEILBRONN, DE |
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D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licenses declared (paragraph 23) | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: ATMEL GERMANY GMBH, 74072 HEILBRONN, DE |
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8327 | Change in the person/name/address of the patent owner |
Owner name: ATMEL AUTOMOTIVE GMBH, 74072 HEILBRONN, DE |
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8339 | Ceased/non-payment of the annual fee |