DE1621347A1 - Multi-layer arrangement, in particular consisting of vapor-deposited layers - Google Patents

Multi-layer arrangement, in particular consisting of vapor-deposited layers

Info

Publication number
DE1621347A1
DE1621347A1 DE19671621347 DE1621347A DE1621347A1 DE 1621347 A1 DE1621347 A1 DE 1621347A1 DE 19671621347 DE19671621347 DE 19671621347 DE 1621347 A DE1621347 A DE 1621347A DE 1621347 A1 DE1621347 A1 DE 1621347A1
Authority
DE
Germany
Prior art keywords
layers
layer
vapor
layer arrangement
particular consisting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19671621347
Other languages
German (de)
Inventor
Alfred Haselbauer
Gerhard Dipl-Phys Ulbricht
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of DE1621347A1 publication Critical patent/DE1621347A1/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3605—Coatings of the type glass/metal/inorganic compound
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3615—Coatings of the type glass/metal/other inorganic layers, at least one layer being non-metallic
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3694—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer having a composition gradient through its thickness
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Description

Mehrlagige Schichtanordnung, insbesondere aus Aufdampfschichten: bestehend. Vorliegende Erfindung-, bezieht sich auf eine mehrlagig,e Schicht- anordnung, insbesondere aus Aufdampfschichteri bestehend, auf einer Unterlage, bei der dLe einzelnen Schichten aus Stoffen mit verschiedenen Wirmeausdehn ingskoeffzienten bestehen. für 7iel==,ti@@ren drln@s@@.°rc:c>1:, z. .(3s durch IIerstellung eines klei-- rua@ ft:ir@:;.-Lr@:*@3ei.ders.@=incl@@.=@ °@cm mlrr.;@eZe@it@°oxi.i;@schexi -@ä:@h@lrungen, itr# FIeraUe1.Luxisc3-Lner gen K"zp?zL-tät oder Ton rntztrri@@,ir@ @r»:n Schichtopetchern :tot es crwünsciit, zdB. schr groß- aui' nie La:-L1Lejtdhf:eri Schichten herzuste1- len. Es iiat sich gezeigt, daß eine Herstellung großflächiger lsolier:73chicliten auf metallischen Schichten infolge der.stark voneinander abweichenden thermischen Ausdehnungskoeffzzienten der schichten nicht möglich war. Bei dem gebräuchlichen sukzessiven aufbringen, z .B. durch Aufdampfen von Isolier- und Metallschichten, ist es nur möglich, relativ kleine Flüchen, z . E. von der Größe von 1 miä, welche außerdem eine Dicke von höchstens wenigen 1000 X besitzen dürfen, herzustellen. Grö:3e.-re Flüchen zeigen die typische Erscheinung des Abblätterns der aufgebrachten Schiehten.Darizber hinaus hat sich gezeigt, daß auch kleinere flachen, z.B. von der Größenordnung 0,1 mm; Ab-. blCi.-tterurrgaerscheitiungen zeigen können, <<renn die Isoliert3criieht nicht wie bei einem Kondensator zwischen IWe2 Metallschichten eingeschlossen ist. Es ist bekannt, Isolierschichten, z.B. aus Siliciitii#monoxid, auf Unterlagen, z.B. durch Aufdampfen im Hoohviaitutim herzustellen. Auf diese ;`leise werden z.B. Schutzschichten att£itiuele.:. nienten oder mikroelektronischen Schaltungen oder d@ieI:i.e@ehtrika von Kondensatoren hergestellt. Die Erfindung stellt sich die Aufgabe,- die: Herstellung iibere:inande:r:il.egender großflächiger und Sollichter mit unterschiedlichen therriiisaheri t:.iE:riten zu gewii.lirloisten. Es sollen Loollerochlohten von der ' mehrerer 100 mm und stellt werden können, wobei metallische Schichten und. Isoliersich gegebenenfalls abwechseln. . Zur hÖsung dieser.Aufgabe wird gemt_iß der Erfindung vorgeschlagen, daß innerhalb eine>, Grenzbereiches zwischen zwei benaehbarten Schich'en ein kontiruierlicrier @ Ubergang der beiden Schichtstoffe besteht. Zur Herstellung der erfindungsgemtlWen Anordnung wird auf eine Unterlage eine Schicht aufgedampft. Noch während de:; Aufdampfen:N der ersten Schicht wird eine weitere Verdampferquelle fir die darauffolgende Schicht eingeschaltet, an.-schließend nach einer Zeit gemeinsamen. Aufdampfexis die erste %erdaiupfungsquelle abgeschaltet und dann nur noch das Material der zweiten Schicht auf die Anordnung aufgedampft. Nach Erreichen der gew;inschten Dicke der zweiten Schicht wird die zweite Verdampferquelle abgeschaltet. Durch das zeitweilige geaneinsäme Aufdampfen wird erreicht, daß an der Grenze der beiden Schichten kein abrupter ;;bergan g, sondern ein weicher, ko:itnuierlicher Obergang entsteht, welcher eine starke innere Verankerung der beiden Schichten in einem gemeinsamen Grenzbereich be;virkt, so dah fei thermii-,chen Beanspruchungen die Gefahr des ibplatzens der Schichten voneinander praktisch ausgeschaltet ;vird. An einem ausf;:llrungsbeispiel soll die Erfindung anhand der, Figur näher erläutert werden. Auf ein Glassubstrat 1 wird z.H. eine metallische Schicht 2, beispielsweise aus Gold, Kupfer oder Aluminium, sufgsJampft.° -Zur besseren Haftung dieser Schicht auf dem Glas kann vorher noch eine Haftschicht, z.B. durch Aufetäuben von Chrom, aufdas Substrat.aufgebracht werden. Ist die gewünschte Dicke der Schicht 2, z.B. wenige 1000 X, erreicht, so wird noch während des Verdampfens des Schichtmaterials 2 eine weitere Verdampferquelle, z.B. für Siliciummoncxid, eingeschaltet. Während des gemeinsamen Verdampfens der beiden Materialien entsteht die @.bergangsschicht 3 mit einer Dicke von etwa 50 - 100, in der die beiden Materialien mit einem bestimmten P,tischungsverhältnis enthalten sind, welches durch die Temperatur der Vordampferquellen und die 1iolekulargewichte der Partner bestimmt wird. Nach Abschalten der Verdampferquelle für die Schicht 2 wird nur noch aus der anderen Verdampferquelle ,gedampft, so daß die Schicht 4 entsteht, welche beliebig dick gemacht ,erden kann. Die Schichten 2 und 4 können einen stark voneinander abweichenden thevmischen Ausdehnungskoeffizienten besitzen, da sie durch die `bergangsschicht 3 miteinander verankert sind. -Auf die gleiche reise kann eine Vielzahl von Schichten mit unterschiedlichen thermischen Ausdehnungskoeffizienten übereinander angebracht werden.Multi-layer arrangement of layers, in particular of vapor-deposited layers: consisting. The present invention relates to a multilayer, e layer arrangement, in particular consisting of vapor-deposition layers a base in which the individual layers of fabric exist with different thermal expansion coefficients. for 7iel ==, ti @@ ren drln @ s @@. ° rc: c> 1 :, z. . (3s by creating a small rua @ ft: ir @:; .- Lr @: * @ 3ei.ders. @ = incl @@. = @ ° @ cm mlrr.; @ eZe @ it @ ° oxi.i; @schexi - @ ä: @ h @ lrungen, itr # FIeraUe1.Luxisc3-Lner gen K "zp? zL-ity or tone rntztrri @@, ir @ @r »: n shift opetchers: dead it crwünsciit, zdB. schr capital aui 'nie La: -L1Lejtdhf: eri layers to be produced- len. It has been shown that the production of large-area insulation on metallic layers was not possible due to the widely differing thermal expansion coefficients of the layers. With the usual successive application, e .g. by vapor deposition of insulating and metal layers, it is only possible to use relatively small curses, e.g. E. of the size of 1 mi, which may also have a thickness of at most a few 1000 X, to produce. Larger 3-right curses show the typical appearance of flaking of the applied layer. In addition, it has been shown that smaller flat curses, for example of the order of 0.1 mm; Away-. BlCi.-tterurrgaerscheitiungen can show, << because the insulation does not look like a capacitor is enclosed between IWe2 metal layers. It is known to produce insulating layers, for example made of silicon monoxide, on substrates, for example by vapor deposition in a high-quality manner. Protective layers, for example, are attached to these; `quietly.:. nient or microelectronic circuits or d @ ieI: ie @ ehtrika made of capacitors. The invention sets itself the task of: producing over: inande: r: il.egender large-area and target lights with different thermal protection: .iE: rites to wii.lirloisten. It should mm Loollerochlohten of the '100 and a plurality of sets may be, said metallic layers and. Take turns insulating if necessary. . To solve this problem, it is proposed according to the invention that a continuous transition of the two laminates should exist within a border area between two adjacent layers. To produce the arrangement according to the invention, a layer is vapor-deposited onto a base. While de :; Vapor deposition: In the first layer, a further evaporation source is switched on for the following layer, then common after a period of time. Aufdampfexis switched off the first source of earth evaporation and then only the material of the second layer is evaporated onto the arrangement. After the desired thickness of the second layer has been reached, the second evaporator source is switched off. The temporary joint evaporation ensures that at the boundary of the two layers there is no abrupt, uphill, but rather a soft, coherent transition, which brings about a strong inner anchoring of the two layers in a common border area, so there In the event of thermal stresses, the risk of the layers bursting from one another is practically eliminated; Using an exemplary embodiment, the invention will be explained in more detail with reference to the figure. For example, a metallic layer 2, for example made of gold, copper or aluminum, is vapor-deposited onto a glass substrate 1. For better adhesion of this layer to the glass, an adhesive layer can be applied to the substrate beforehand, for example by dusting chrome. If the desired thickness of the layer 2, for example a few 1000 Ω, is reached, a further evaporation source, for example for silicon monoxide, is switched on while the layer material 2 is being evaporated. During the joint evaporation of the two materials, the transition layer 3 is formed with a thickness of about 50-100, in which the two materials are contained with a certain mixing ratio, which is determined by the temperature of the pre-evaporation sources and the molecular weights of the partners. After the evaporation source for layer 2 has been switched off, only the other evaporation source is used to vaporize, so that layer 4 is created, which can be made as thick as desired, and ground. The layers 2 and 4 can have thermal expansion coefficients that differ greatly from one another, since they are anchored to one another by the transition layer 3. -A large number of layers with different thermal expansion coefficients can be applied one on top of the other on the same journey.

Claims (1)

P@a@t@e n-t@a n'sip_r@ü_e@h-e 1. -_. liehrlagige Schichtanordnung, insbesondere aus Aufdamgfschichten bestehend, auf einer Unterlage, bei der die einzelnen Schichten aus Stoffen mit verschiedenen ,.liäxmeausdehnungskoeffzienten bestehen, dadurch gekennzeichnet, daß innerhalb eines Grenzbereiches (3) zwischen zwei benachbarten' Schichten 2 und ein kontinuierlicher Itbergang der beiden Schichtstoffe besteht., 2. Verfahren zur Herstellung einer mehrlagigen Schichtanordnung, bei dem Schichten aus verschiedenen Stoffen übereinander auf- gedampft werden, nach Anspruch 1, dadurch gekennzeichnet, daß noch wahrend des Aufdampfens der vorhergehenden Schicht' der Stoff der, darauffolgenden Schicht mtaufgedampft wird.
P @ a @ t @ e nt @ a n'sip_r @ ü_e @ he 1. -_. Laying-layer arrangement, in particular consisting of damping layers, on a base, in which the individual layers consist of materials with different ., 2. Process for the production of a multi-layer arrangement, when layers of different fabrics are stacked on top of each other are steamed according to claim 1, characterized in that during the vapor deposition of the previous layer The fabric of the next layer is vapor-deposited.
DE19671621347 1967-10-25 1967-10-25 Multi-layer arrangement, in particular consisting of vapor-deposited layers Pending DE1621347A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0112559 1967-10-25

Publications (1)

Publication Number Publication Date
DE1621347A1 true DE1621347A1 (en) 1971-06-03

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2491956A1 (en) * 1980-09-09 1982-04-16 Westinghouse Electric Corp
EP0221492A2 (en) * 1985-11-04 1987-05-13 Asulab S.A. Article coated with a wear-resistant film of a precious metal
WO1999008972A1 (en) * 1997-08-13 1999-02-25 Glaverbel Glass-based copper-mirrors
EP1174397A3 (en) * 2000-07-10 2002-03-13 Guardian Industries Corp. Heat-treatable low-E coated articles and methods of making same
US6445503B1 (en) 2000-07-10 2002-09-03 Guardian Industries Corp. High durable, low-E, heat treatable layer coating system
US7005190B2 (en) 2002-12-20 2006-02-28 Guardian Industries Corp. Heat treatable coated article with reduced color shift at high viewing angles
EP1787965A3 (en) * 2000-07-10 2007-07-04 Guardian, Industries Corp. Heat treatable low-e coated articles and methods of making same

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2491956A1 (en) * 1980-09-09 1982-04-16 Westinghouse Electric Corp
CH657954GA3 (en) * 1980-09-09 1986-10-15
EP0221492A2 (en) * 1985-11-04 1987-05-13 Asulab S.A. Article coated with a wear-resistant film of a precious metal
EP0221492A3 (en) * 1985-11-04 1988-04-13 Asulab S.A. Article coated with a wear-resistant film of a precious metal
WO1999008972A1 (en) * 1997-08-13 1999-02-25 Glaverbel Glass-based copper-mirrors
US6576349B2 (en) 2000-07-10 2003-06-10 Guardian Industries Corp. Heat treatable low-E coated articles and methods of making same
WO2002004375A3 (en) * 2000-07-10 2002-04-25 Guardian Industries Heat treatable low-E coated articles and methods of making same
US6445503B1 (en) 2000-07-10 2002-09-03 Guardian Industries Corp. High durable, low-E, heat treatable layer coating system
EP1174397A3 (en) * 2000-07-10 2002-03-13 Guardian Industries Corp. Heat-treatable low-E coated articles and methods of making same
US6686050B2 (en) 2000-07-10 2004-02-03 Guardian Industries Corp. Heat treatable low-E coated articles and methods of making same
US6723211B2 (en) 2000-07-10 2004-04-20 Guardian Industries Corp Method of making coated articles with contact layer that is more oxidized further from IR reflecting layer
EP1787965A3 (en) * 2000-07-10 2007-07-04 Guardian, Industries Corp. Heat treatable low-e coated articles and methods of making same
US7300701B2 (en) 2000-07-10 2007-11-27 Guardian Industries Corp. High durable, low-e, heat treatable layer coating system
US7314668B2 (en) 2000-07-10 2008-01-01 Guardian Industries Corp. Low-E coated articles having zirconium inclusive dielectric layer
US8173263B2 (en) 2000-07-10 2012-05-08 Guardian Industries Corp. Heat treatable low-E coated articles and methods of making same
US7005190B2 (en) 2002-12-20 2006-02-28 Guardian Industries Corp. Heat treatable coated article with reduced color shift at high viewing angles

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