DE112005003862A5 - Verfahren und Vorrichtungen zum Bereitstellen von Stapelchipelementen - Google Patents
Verfahren und Vorrichtungen zum Bereitstellen von Stapelchipelementen Download PDFInfo
- Publication number
- DE112005003862A5 DE112005003862A5 DE112005003862.9T DE112005003862T DE112005003862A5 DE 112005003862 A5 DE112005003862 A5 DE 112005003862A5 DE 112005003862 T DE112005003862 T DE 112005003862T DE 112005003862 A5 DE112005003862 A5 DE 112005003862A5
- Authority
- DE
- Germany
- Prior art keywords
- methods
- stacked chip
- chip elements
- providing stacked
- providing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/10—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers
- H01L25/105—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being of a type provided for in group H01L27/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1017—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support
- H01L2225/1023—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support the support being an insulating substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1047—Details of electrical connections between containers
- H01L2225/1058—Bump or bump-like electrical connections, e.g. balls, pillars, posts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1532—Connection portion the connection portion being formed on the die mounting surface of the substrate
- H01L2924/1533—Connection portion the connection portion being formed on the die mounting surface of the substrate the connection portion being formed both on the die mounting surface of the substrate and outside the die mounting surface of the substrate
- H01L2924/15331—Connection portion the connection portion being formed on the die mounting surface of the substrate the connection portion being formed both on the die mounting surface of the substrate and outside the die mounting surface of the substrate being a ball array, e.g. BGA
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/917,142 US7187068B2 (en) | 2004-08-11 | 2004-08-11 | Methods and apparatuses for providing stacked-die devices |
US10/917,142 | 2004-08-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE112005003862A5 true DE112005003862A5 (de) | 2014-09-18 |
DE112005003862B4 DE112005003862B4 (de) | 2016-07-21 |
Family
ID=35355605
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE112005003862.9T Expired - Fee Related DE112005003862B4 (de) | 2004-08-11 | 2005-07-29 | Vorrichtung mit einer Schablone für einen Siebdruckprozess |
DE112005001949.7T Expired - Fee Related DE112005001949B4 (de) | 2004-08-11 | 2005-07-29 | Verfahren zum Bereitstellen von Stapelchipelementen |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE112005001949.7T Expired - Fee Related DE112005001949B4 (de) | 2004-08-11 | 2005-07-29 | Verfahren zum Bereitstellen von Stapelchipelementen |
Country Status (7)
Country | Link |
---|---|
US (2) | US7187068B2 (de) |
JP (1) | JP4610616B2 (de) |
CN (1) | CN101002319B (de) |
DE (2) | DE112005003862B4 (de) |
HK (1) | HK1109678A1 (de) |
TW (1) | TWI296151B (de) |
WO (1) | WO2006020438A1 (de) |
Families Citing this family (59)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6987314B1 (en) | 2004-06-08 | 2006-01-17 | Amkor Technology, Inc. | Stackable semiconductor package with solder on pads on which second semiconductor package is stacked |
US7875966B2 (en) * | 2005-02-14 | 2011-01-25 | Stats Chippac Ltd. | Stacked integrated circuit and package system |
US7265442B2 (en) * | 2005-03-21 | 2007-09-04 | Nokia Corporation | Stacked package integrated circuit |
US7628871B2 (en) * | 2005-08-12 | 2009-12-08 | Intel Corporation | Bulk metallic glass solder material |
US7675152B2 (en) * | 2005-09-01 | 2010-03-09 | Texas Instruments Incorporated | Package-on-package semiconductor assembly |
US20080054431A1 (en) * | 2006-08-31 | 2008-03-06 | Tingqing Wang | Embedded package in package |
TWI336502B (en) * | 2006-09-27 | 2011-01-21 | Advanced Semiconductor Eng | Semiconductor package and semiconductor device and the method of making the same |
JP2008235401A (ja) | 2007-03-19 | 2008-10-02 | Spansion Llc | 半導体装置及びその製造方法 |
TWI335070B (en) * | 2007-03-23 | 2010-12-21 | Advanced Semiconductor Eng | Semiconductor package and the method of making the same |
JP5081578B2 (ja) * | 2007-10-25 | 2012-11-28 | ローム株式会社 | 樹脂封止型半導体装置 |
US8049320B2 (en) * | 2008-02-19 | 2011-11-01 | Texas Instruments Incorporated | Integrated circuit stacked package precursors and stacked packaged devices and systems therefrom |
US7871861B2 (en) * | 2008-06-25 | 2011-01-18 | Stats Chippac Ltd. | Stacked integrated circuit package system with intra-stack encapsulation |
TWI473553B (zh) * | 2008-07-03 | 2015-02-11 | Advanced Semiconductor Eng | 晶片封裝結構 |
US20100101845A1 (en) * | 2008-10-27 | 2010-04-29 | Arata Kishi | Electronic Device and Manufacturing Method for Electronic Device |
TWI499024B (zh) * | 2009-01-07 | 2015-09-01 | Advanced Semiconductor Eng | 堆疊式多封裝構造裝置、半導體封裝構造及其製造方法 |
US20100171206A1 (en) * | 2009-01-07 | 2010-07-08 | Chi-Chih Chu | Package-on-Package Device, Semiconductor Package, and Method for Manufacturing The Same |
US8012797B2 (en) * | 2009-01-07 | 2011-09-06 | Advanced Semiconductor Engineering, Inc. | Method for forming stackable semiconductor device packages including openings with conductive bumps of specified geometries |
CN101894829B (zh) * | 2009-05-19 | 2012-06-27 | 国碁电子(中山)有限公司 | 堆叠式封装结构 |
US8125066B1 (en) * | 2009-07-13 | 2012-02-28 | Altera Corporation | Package on package configurations with embedded solder balls and interposal layer |
TWI469283B (zh) * | 2009-08-31 | 2015-01-11 | Advanced Semiconductor Eng | 封裝結構以及封裝製程 |
US7923304B2 (en) * | 2009-09-10 | 2011-04-12 | Stats Chippac Ltd. | Integrated circuit packaging system with conductive pillars and method of manufacture thereof |
US8198131B2 (en) * | 2009-11-18 | 2012-06-12 | Advanced Semiconductor Engineering, Inc. | Stackable semiconductor device packages |
TWI408785B (zh) * | 2009-12-31 | 2013-09-11 | Advanced Semiconductor Eng | 半導體封裝結構 |
US8569894B2 (en) | 2010-01-13 | 2013-10-29 | Advanced Semiconductor Engineering, Inc. | Semiconductor package with single sided substrate design and manufacturing methods thereof |
TWI419283B (zh) * | 2010-02-10 | 2013-12-11 | Advanced Semiconductor Eng | 封裝結構 |
TWI411075B (zh) | 2010-03-22 | 2013-10-01 | Advanced Semiconductor Eng | 半導體封裝件及其製造方法 |
US8278746B2 (en) | 2010-04-02 | 2012-10-02 | Advanced Semiconductor Engineering, Inc. | Semiconductor device packages including connecting elements |
US8624374B2 (en) | 2010-04-02 | 2014-01-07 | Advanced Semiconductor Engineering, Inc. | Semiconductor device packages with fan-out and with connecting elements for stacking and manufacturing methods thereof |
US8742603B2 (en) * | 2010-05-20 | 2014-06-03 | Qualcomm Incorporated | Process for improving package warpage and connection reliability through use of a backside mold configuration (BSMC) |
US9735113B2 (en) | 2010-05-24 | 2017-08-15 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming ultra thin multi-die face-to-face WLCSP |
US8039275B1 (en) * | 2010-06-02 | 2011-10-18 | Stats Chippac Ltd. | Integrated circuit packaging system with rounded interconnect and method of manufacture thereof |
US8754516B2 (en) * | 2010-08-26 | 2014-06-17 | Intel Corporation | Bumpless build-up layer package with pre-stacked microelectronic devices |
US8378477B2 (en) * | 2010-09-14 | 2013-02-19 | Stats Chippac Ltd. | Integrated circuit packaging system with film encapsulation and method of manufacture thereof |
TWI451546B (zh) | 2010-10-29 | 2014-09-01 | Advanced Semiconductor Eng | 堆疊式封裝結構、其封裝結構及封裝結構之製造方法 |
US8546193B2 (en) * | 2010-11-02 | 2013-10-01 | Stats Chippac, Ltd. | Semiconductor device and method of forming penetrable film encapsulant around semiconductor die and interconnect structure |
TWI445155B (zh) | 2011-01-06 | 2014-07-11 | Advanced Semiconductor Eng | 堆疊式封裝結構及其製造方法 |
US9171792B2 (en) | 2011-02-28 | 2015-10-27 | Advanced Semiconductor Engineering, Inc. | Semiconductor device packages having a side-by-side device arrangement and stacking functionality |
US8927391B2 (en) | 2011-05-27 | 2015-01-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package-on-package process for applying molding compound |
US8461676B2 (en) | 2011-09-09 | 2013-06-11 | Qualcomm Incorporated | Soldering relief method and semiconductor device employing same |
US9240387B2 (en) | 2011-10-12 | 2016-01-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer-level chip scale package with re-workable underfill |
US8664040B2 (en) * | 2011-12-20 | 2014-03-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Exposing connectors in packages through selective treatment |
US8987058B2 (en) | 2013-03-12 | 2015-03-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for wafer separation |
US9401308B2 (en) | 2013-03-12 | 2016-07-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Packaging devices, methods of manufacture thereof, and packaging methods |
US9257333B2 (en) | 2013-03-11 | 2016-02-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect structures and methods of forming same |
US9607921B2 (en) | 2012-01-12 | 2017-03-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package on package interconnect structure |
US9287143B2 (en) | 2012-01-12 | 2016-03-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus for package reinforcement using molding underfill |
US9368398B2 (en) | 2012-01-12 | 2016-06-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect structure and method of fabricating same |
US9437564B2 (en) | 2013-07-09 | 2016-09-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect structure and method of fabricating same |
US9263839B2 (en) | 2012-12-28 | 2016-02-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for an improved fine pitch joint |
US10015888B2 (en) | 2013-02-15 | 2018-07-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect joint protective layer apparatus and method |
US9589862B2 (en) | 2013-03-11 | 2017-03-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect structures and methods of forming same |
KR20130089473A (ko) * | 2012-02-02 | 2013-08-12 | 삼성전자주식회사 | 반도체 패키지 |
US9385006B2 (en) * | 2012-06-21 | 2016-07-05 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming an embedded SOP fan-out package |
KR101923535B1 (ko) | 2012-06-28 | 2018-12-03 | 삼성전자주식회사 | 패키지 온 패키지 장치 및 이의 제조 방법 |
US9082776B2 (en) | 2012-08-24 | 2015-07-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor package having protective layer with curved surface and method of manufacturing same |
TWI601252B (zh) * | 2015-05-22 | 2017-10-01 | 南茂科技股份有限公司 | 封裝結構的製作方法以及使用其所製得之封裝結構 |
US9892962B2 (en) | 2015-11-30 | 2018-02-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer level chip scale package interconnects and methods of manufacture thereof |
TWI622139B (zh) * | 2016-03-08 | 2018-04-21 | 恆勁科技股份有限公司 | 封裝基板 |
US9859253B1 (en) * | 2016-06-29 | 2018-01-02 | Intel Corporation | Integrated circuit package stack |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5040052A (en) * | 1987-12-28 | 1991-08-13 | Texas Instruments Incorporated | Compact silicon module for high density integrated circuits |
US5422435A (en) * | 1992-05-22 | 1995-06-06 | National Semiconductor Corporation | Stacked multi-chip modules and method of manufacturing |
JPH07335783A (ja) | 1994-06-13 | 1995-12-22 | Fujitsu Ltd | 半導体装置及び半導体装置ユニット |
US6194250B1 (en) * | 1998-09-14 | 2001-02-27 | Motorola, Inc. | Low-profile microelectronic package |
JP2000178414A (ja) * | 1998-12-16 | 2000-06-27 | Tokuyama Corp | 半導体封止材用球状シリカ |
JP3500995B2 (ja) * | 1998-12-18 | 2004-02-23 | 株式会社デンソー | 積層型回路モジュールの製造方法 |
TW434850B (en) * | 1998-12-31 | 2001-05-16 | World Wiser Electronics Inc | Packaging equipment and method for integrated circuit |
US6326555B1 (en) * | 1999-02-26 | 2001-12-04 | Fujitsu Limited | Method and structure of z-connected laminated substrate for high density electronic packaging |
JP3798597B2 (ja) * | 1999-11-30 | 2006-07-19 | 富士通株式会社 | 半導体装置 |
TW449689B (en) * | 1999-12-10 | 2001-08-11 | Via Tech Inc | Motherboard and computer system for flexible using SDRAM and DDRAM |
JP2001223227A (ja) * | 2000-02-08 | 2001-08-17 | Nitto Denko Corp | 半導体封止用樹脂組成物および半導体装置 |
JP3916854B2 (ja) * | 2000-06-28 | 2007-05-23 | シャープ株式会社 | 配線基板、半導体装置およびパッケージスタック半導体装置 |
TW461058B (en) | 2000-10-19 | 2001-10-21 | Siliconware Precision Industries Co Ltd | Stacked multi-chip package structure with integrated passive components |
JP3798620B2 (ja) * | 2000-12-04 | 2006-07-19 | 富士通株式会社 | 半導体装置の製造方法 |
US6414384B1 (en) * | 2000-12-22 | 2002-07-02 | Silicon Precision Industries Co., Ltd. | Package structure stacking chips on front surface and back surface of substrate |
US6448506B1 (en) * | 2000-12-28 | 2002-09-10 | Amkor Technology, Inc. | Semiconductor package and circuit board for making the package |
DE10110203B4 (de) * | 2001-03-02 | 2006-12-14 | Infineon Technologies Ag | Elektronisches Bauteil mit gestapelten Halbleiterchips und Verfahren zu seiner Herstellung |
US7034386B2 (en) * | 2001-03-26 | 2006-04-25 | Nec Corporation | Thin planar semiconductor device having electrodes on both surfaces and method of fabricating same |
JP4483136B2 (ja) * | 2001-06-20 | 2010-06-16 | ソニー株式会社 | 半導体デバイスの実装方法及び半導体装置の製造方法 |
US6730536B1 (en) * | 2001-06-28 | 2004-05-04 | Amkor Technology, Inc. | Pre-drilled image sensor package fabrication method |
JP3781998B2 (ja) * | 2001-10-30 | 2006-06-07 | シャープ株式会社 | 積層型半導体装置の製造方法 |
JP3972182B2 (ja) * | 2002-03-05 | 2007-09-05 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
US7053477B2 (en) * | 2002-10-08 | 2006-05-30 | Chippac, Inc. | Semiconductor multi-package module having inverted bump chip carrier second package |
JP2004327855A (ja) * | 2003-04-25 | 2004-11-18 | Nec Electronics Corp | 半導体装置およびその製造方法 |
US20040262728A1 (en) * | 2003-06-30 | 2004-12-30 | Sterrett Terry L. | Modular device assemblies |
US7345361B2 (en) * | 2003-12-04 | 2008-03-18 | Intel Corporation | Stackable integrated circuit packaging |
-
2004
- 2004-08-11 US US10/917,142 patent/US7187068B2/en active Active
-
2005
- 2005-07-27 TW TW094125491A patent/TWI296151B/zh active
- 2005-07-29 DE DE112005003862.9T patent/DE112005003862B4/de not_active Expired - Fee Related
- 2005-07-29 WO PCT/US2005/027103 patent/WO2006020438A1/en active Application Filing
- 2005-07-29 CN CN2005800269708A patent/CN101002319B/zh not_active Expired - Fee Related
- 2005-07-29 JP JP2007525653A patent/JP4610616B2/ja not_active Expired - Fee Related
- 2005-07-29 DE DE112005001949.7T patent/DE112005001949B4/de not_active Expired - Fee Related
- 2005-08-24 US US11/212,015 patent/US7867818B2/en active Active
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2008
- 2008-01-07 HK HK08100138.5A patent/HK1109678A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
WO2006020438A1 (en) | 2006-02-23 |
HK1109678A1 (en) | 2008-06-13 |
DE112005001949T5 (de) | 2007-05-31 |
TW200618253A (en) | 2006-06-01 |
CN101002319B (zh) | 2011-08-17 |
JP4610616B2 (ja) | 2011-01-12 |
JP2008510304A (ja) | 2008-04-03 |
DE112005003862B4 (de) | 2016-07-21 |
DE112005001949B4 (de) | 2014-11-27 |
TWI296151B (en) | 2008-04-21 |
CN101002319A (zh) | 2007-07-18 |
US20060033193A1 (en) | 2006-02-16 |
US20060035409A1 (en) | 2006-02-16 |
US7867818B2 (en) | 2011-01-11 |
US7187068B2 (en) | 2007-03-06 |
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