DE10393504D2 - Verfahren zur örtlich hochaufgelösten, massenspektroskopischen Charakterisierung von Oberflächen mittels einer Rastersondentechnik - Google Patents

Verfahren zur örtlich hochaufgelösten, massenspektroskopischen Charakterisierung von Oberflächen mittels einer Rastersondentechnik

Info

Publication number
DE10393504D2
DE10393504D2 DE10393504T DE10393504T DE10393504D2 DE 10393504 D2 DE10393504 D2 DE 10393504D2 DE 10393504 T DE10393504 T DE 10393504T DE 10393504 T DE10393504 T DE 10393504T DE 10393504 D2 DE10393504 D2 DE 10393504D2
Authority
DE
Germany
Prior art keywords
resolution
mass spectroscopic
probe technique
optical near
spectroscopic characterization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10393504T
Other languages
English (en)
Inventor
Detlef Knebel
Matthias Amrein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JPK Instruments AG
Original Assignee
JPK Instruments AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JPK Instruments AG filed Critical JPK Instruments AG
Priority to DE10393504T priority Critical patent/DE10393504D2/de
Application granted granted Critical
Publication of DE10393504D2 publication Critical patent/DE10393504D2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/863—Atomic force probe
DE10393504T 2002-07-24 2003-07-24 Verfahren zur örtlich hochaufgelösten, massenspektroskopischen Charakterisierung von Oberflächen mittels einer Rastersondentechnik Expired - Fee Related DE10393504D2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE10393504T DE10393504D2 (de) 2002-07-24 2003-07-24 Verfahren zur örtlich hochaufgelösten, massenspektroskopischen Charakterisierung von Oberflächen mittels einer Rastersondentechnik

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10234507 2002-07-24
PCT/DE2003/002493 WO2004017019A1 (de) 2002-07-24 2003-07-24 Verfahren zur örtlich hochaufgelösten, massenspektroskopischen charakterisierung von oberflächen mittels einer rastersondentechnik
DE10393504T DE10393504D2 (de) 2002-07-24 2003-07-24 Verfahren zur örtlich hochaufgelösten, massenspektroskopischen Charakterisierung von Oberflächen mittels einer Rastersondentechnik

Publications (1)

Publication Number Publication Date
DE10393504D2 true DE10393504D2 (de) 2005-06-23

Family

ID=31724052

Family Applications (2)

Application Number Title Priority Date Filing Date
DE50311375T Expired - Fee Related DE50311375D1 (de) 2002-07-24 2003-07-24 Verfahren zur örtlich hochaufgelösten, massenspektroskopischen charakterisierung von oberflächen mittels einer rastersondentechnik
DE10393504T Expired - Fee Related DE10393504D2 (de) 2002-07-24 2003-07-24 Verfahren zur örtlich hochaufgelösten, massenspektroskopischen Charakterisierung von Oberflächen mittels einer Rastersondentechnik

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE50311375T Expired - Fee Related DE50311375D1 (de) 2002-07-24 2003-07-24 Verfahren zur örtlich hochaufgelösten, massenspektroskopischen charakterisierung von oberflächen mittels einer rastersondentechnik

Country Status (9)

Country Link
US (1) US7442922B2 (de)
EP (1) EP1523652B1 (de)
JP (1) JP2005534041A (de)
CN (1) CN1311221C (de)
AT (1) ATE427475T1 (de)
AU (1) AU2003260246A1 (de)
CA (1) CA2493212A1 (de)
DE (2) DE50311375D1 (de)
WO (1) WO2004017019A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006125984A (ja) 2004-10-28 2006-05-18 Japan Science & Technology Agency デイジー型カンチレバーホイールを有する計測装置
US7735146B2 (en) 2005-01-27 2010-06-08 The George Washington University Protein microscope
DE102006056929B4 (de) * 2006-12-04 2010-09-02 Bruker Daltonik Gmbh Massenspektrometrie mit Laser-Ablation
WO2009032904A1 (en) * 2007-09-05 2009-03-12 Government Of The United States Of America, Represented By The Secretary, Department Of Health And Human Services Probe and method for obtaining three-dimensional compositional maps of a biological sample
US7961313B2 (en) * 2008-08-11 2011-06-14 Ut-Battelle, Llc Photoacoustic point spectroscopy
US7924423B2 (en) * 2008-08-11 2011-04-12 Ut-Battelle, Llc Reverse photoacoustic standoff spectroscopy
US8194246B2 (en) * 2008-08-11 2012-06-05 UT-Battellle, LLC Photoacoustic microcantilevers
US20110231966A1 (en) * 2010-03-17 2011-09-22 Ali Passian Scanning probe microscopy with spectroscopic molecular recognition
US8448261B2 (en) * 2010-03-17 2013-05-21 University Of Tennessee Research Foundation Mode synthesizing atomic force microscopy and mode-synthesizing sensing
US8080796B1 (en) 2010-06-30 2011-12-20 Ut-Battelle, Llc Standoff spectroscopy using a conditioned target
US8519330B2 (en) * 2010-10-01 2013-08-27 Ut-Battelle, Llc Systems and methods for laser assisted sample transfer to solution for chemical analysis
CN102183679B (zh) * 2011-03-16 2012-12-19 中国科学院合肥物质科学研究院 原位准同步检测微纳结构物化特性的方法
CN102339721B (zh) * 2011-09-28 2014-03-12 厦门大学 近场针尖增强光致电离离子源
US9269557B2 (en) * 2012-09-07 2016-02-23 Canon Kabushiki Kaisha Ionization device, mass spectrometer including the ionization device, and image generation system including the ionization device
CN103207035B (zh) * 2013-05-14 2015-07-15 南京因艾生生物科技有限公司 一种用于测量分子间作用力的力谱仪
EP2824445B1 (de) * 2013-07-08 2016-03-02 Fei Company Mikroskopie mit geladenen teilchen kombiniert mit raman-spektroskopie
CN104697982B (zh) * 2015-03-17 2017-07-07 北京理工大学 高空间分辨激光差动共焦质谱显微成像方法与装置
CN106338546A (zh) * 2016-08-18 2017-01-18 东南大学 一种高空间分辨质谱成像装置
JP7031626B2 (ja) * 2019-03-13 2022-03-08 オムロン株式会社 センサヘッド
CN112816739A (zh) * 2019-11-18 2021-05-18 中国科学院大连化学物理研究所 一种扫描化学反应显微成像的方法及应用
CN112071737B (zh) * 2020-03-20 2024-04-16 昆山聂尔精密仪器有限公司 一种离子激发和离子选择信号的生成方法和装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69320753T2 (de) * 1992-11-06 1999-03-25 Hitachi Ltd Rasterabtastmikroskop und Verfahren zur Steuerfehlerkorrektur
US5278406A (en) * 1992-11-12 1994-01-11 Hamamatsu Photonics K.K. Apparatus for detecting information contained in electrons emitted from sample surface
JP3270165B2 (ja) * 1993-01-22 2002-04-02 セイコーインスツルメンツ株式会社 表面分析及び加工装置
US5444260A (en) * 1993-07-01 1995-08-22 Midwest Reasearch Institute Atomic-level imaging, processing and characterization of semiconductor surfaces
US5440124A (en) * 1994-07-08 1995-08-08 Wisconsin Alumni Research Foundation High mass resolution local-electrode atom probe
JPH0894646A (ja) * 1994-09-22 1996-04-12 Shimadzu Corp 表面分析装置
US6080586A (en) * 1996-04-05 2000-06-27 California Institute Of Technology Sub-micron chemical imaging with near-field laser desorption
US6405137B1 (en) * 1996-12-31 2002-06-11 Ta Instruments, Inc. Method and apparatus for performing chemical analysis using imaging by scanning thermal microscopy
GB9719697D0 (en) * 1997-09-16 1997-11-19 Isis Innovation Atom probe
US6466309B1 (en) * 1999-02-26 2002-10-15 California Institute Of Technology Method and apparatus for chemical and topographical microanalysis
JP2000283909A (ja) * 1999-03-30 2000-10-13 Jeol Ltd 表面観察装置
US6897015B2 (en) * 2000-03-07 2005-05-24 Bioforce Nanosciences, Inc. Device and method of use for detection and characterization of pathogens and biological materials
US6875981B2 (en) * 2001-03-26 2005-04-05 Kanazawa Institute Of Technology Scanning atom probe and analysis method utilizing scanning atom probe
US20030134273A1 (en) * 2001-07-17 2003-07-17 Eric Henderson Combined molecular binding detection through force microscopy and mass spectrometry
JP3902925B2 (ja) * 2001-07-31 2007-04-11 エスアイアイ・ナノテクノロジー株式会社 走査型アトムプローブ
US6566653B1 (en) * 2002-01-23 2003-05-20 International Business Machines Corporation Investigation device and method
US8093144B2 (en) * 2002-05-24 2012-01-10 Massachusetts Institute Of Technology Patterning of nanostructures
US6941033B2 (en) * 2002-06-25 2005-09-06 National Research Council Of Canada Method and device for manipulating microscopic quantities of material

Also Published As

Publication number Publication date
EP1523652A1 (de) 2005-04-20
EP1523652B1 (de) 2009-04-01
CN1685195A (zh) 2005-10-19
US7442922B2 (en) 2008-10-28
ATE427475T1 (de) 2009-04-15
US20060097164A1 (en) 2006-05-11
CN1311221C (zh) 2007-04-18
AU2003260246A1 (en) 2004-03-03
CA2493212A1 (en) 2004-02-26
WO2004017019A1 (de) 2004-02-26
JP2005534041A (ja) 2005-11-10
DE50311375D1 (de) 2009-05-14

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Legal Events

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8139 Disposal/non-payment of the annual fee