DE10342331A1 - Method for measuring bending of beam in gas detector comprises directing light from optical fiber on to it and measuring signal produced by interference by reflected light, beam having coating which reacts with component in gas - Google Patents

Method for measuring bending of beam in gas detector comprises directing light from optical fiber on to it and measuring signal produced by interference by reflected light, beam having coating which reacts with component in gas Download PDF

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Publication number
DE10342331A1
DE10342331A1 DE2003142331 DE10342331A DE10342331A1 DE 10342331 A1 DE10342331 A1 DE 10342331A1 DE 2003142331 DE2003142331 DE 2003142331 DE 10342331 A DE10342331 A DE 10342331A DE 10342331 A1 DE10342331 A1 DE 10342331A1
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DE
Germany
Prior art keywords
gas
measuring
coating
reacts
interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE2003142331
Other languages
German (de)
Inventor
Hans-Achim Fus
Frank Saurenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Surface Imaging Systems S I S
Original Assignee
Surface Imaging Systems S I S
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Surface Imaging Systems S I S filed Critical Surface Imaging Systems S I S
Priority to DE2003142331 priority Critical patent/DE10342331A1/en
Publication of DE10342331A1 publication Critical patent/DE10342331A1/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means

Abstract

Method for measuring the bending of a beam (4) in a gas detector comprises directing light from an optical fiber (8) on to the surface of the beam and measuring the signal produced by interference between the incident and reflected light using a photodetector. The beam has a coating (5) on its lower surface which reacts with a component in the gas. A reference beam (7) with no coating is used to evaluate drift. An independent claim is included for apparatus for carrying out the method.
DE2003142331 2003-09-11 2003-09-11 Method for measuring bending of beam in gas detector comprises directing light from optical fiber on to it and measuring signal produced by interference by reflected light, beam having coating which reacts with component in gas Withdrawn DE10342331A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE2003142331 DE10342331A1 (en) 2003-09-11 2003-09-11 Method for measuring bending of beam in gas detector comprises directing light from optical fiber on to it and measuring signal produced by interference by reflected light, beam having coating which reacts with component in gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2003142331 DE10342331A1 (en) 2003-09-11 2003-09-11 Method for measuring bending of beam in gas detector comprises directing light from optical fiber on to it and measuring signal produced by interference by reflected light, beam having coating which reacts with component in gas

Publications (1)

Publication Number Publication Date
DE10342331A1 true DE10342331A1 (en) 2005-05-04

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DE2003142331 Withdrawn DE10342331A1 (en) 2003-09-11 2003-09-11 Method for measuring bending of beam in gas detector comprises directing light from optical fiber on to it and measuring signal produced by interference by reflected light, beam having coating which reacts with component in gas

Country Status (1)

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DE (1) DE10342331A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007061286A1 (en) * 2005-11-28 2007-05-31 Vereniging Voor Christelijk Hoger Onderwijs Wetenschappelijk Onderzoek En Patientenzorg Optical device comprising a cantilever and method of fabrication and use thereof
WO2010086798A1 (en) * 2009-01-27 2010-08-05 Insiava (Pty) Limited Microchip-based moems and waveguide device
CN107941716A (en) * 2017-12-29 2018-04-20 首都师范大学 Multi-core optical fiber resonator gas sensor
CN111527372A (en) * 2017-10-10 2020-08-11 斯特凡Tto有限公司 Detection of fields

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3970389A (en) * 1974-02-14 1976-07-20 Mendrin Michael J Variable frequency interferometer
DD261422A1 (en) * 1987-05-27 1988-10-26 Akad Wissenschaften Ddr ARRANGEMENT FOR INTERFEROMETIC QUALITY TESTING OF TECHNICAL SURFACES
DE69001386T2 (en) * 1989-05-16 1993-10-28 Ibm Highly sensitive position measuring method.
US6289717B1 (en) * 1999-03-30 2001-09-18 U. T. Battelle, Llc Micromechanical antibody sensor
US6305226B1 (en) * 1999-08-30 2001-10-23 Agere Systems Guardian Corp. Method and apparatus for imaging acoustic fields in high-frequency acoustic resonators

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3970389A (en) * 1974-02-14 1976-07-20 Mendrin Michael J Variable frequency interferometer
DD261422A1 (en) * 1987-05-27 1988-10-26 Akad Wissenschaften Ddr ARRANGEMENT FOR INTERFEROMETIC QUALITY TESTING OF TECHNICAL SURFACES
DE69001386T2 (en) * 1989-05-16 1993-10-28 Ibm Highly sensitive position measuring method.
US6289717B1 (en) * 1999-03-30 2001-09-18 U. T. Battelle, Llc Micromechanical antibody sensor
US6305226B1 (en) * 1999-08-30 2001-10-23 Agere Systems Guardian Corp. Method and apparatus for imaging acoustic fields in high-frequency acoustic resonators

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007061286A1 (en) * 2005-11-28 2007-05-31 Vereniging Voor Christelijk Hoger Onderwijs Wetenschappelijk Onderzoek En Patientenzorg Optical device comprising a cantilever and method of fabrication and use thereof
US7916306B2 (en) 2005-11-28 2011-03-29 Vereniging Voor Christelijk Hoger Onderwijs Wetenschappelijk Onderzoek En Patientenzorg Optical device comprising a cantilever and method of fabrication and use thereof
WO2010086798A1 (en) * 2009-01-27 2010-08-05 Insiava (Pty) Limited Microchip-based moems and waveguide device
US8395226B2 (en) 2009-01-27 2013-03-12 Insiava (Pty) Limited Microchip-based MOEMS and waveguide device
CN111527372A (en) * 2017-10-10 2020-08-11 斯特凡Tto有限公司 Detection of fields
CN107941716A (en) * 2017-12-29 2018-04-20 首都师范大学 Multi-core optical fiber resonator gas sensor
CN107941716B (en) * 2017-12-29 2024-01-02 首都师范大学 Multi-core optical fiber resonant cavity gas sensor

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