DE102006062019A1 - Method for production of thin film solar modules from hardened glass with multiple dimensions, involves using hardened glass as substrate for processing with semiconductor technology process - Google Patents

Abstract

The method involves using hardened glass, particularly toughened glass or heat strengthened glass, as substrate for processing with a semiconductor technology process, particularly with coating, corroding, photolithography, laser structuring, doping. The parts of the hardened glass are made into small parts by a separation step, in order to obtain desired dimensions of the solar module. The method includes coating glass in edges with aluminum or silver. The edge is sealed with silicone group, acryl group, butyl group, polysulfide group and elastomer.

Description

The The invention relates to a method for the production of mechanical stable thin-film photovoltaic solar modules using glass, in particular toughened glass and / or glass in the in the area of the edges the defects are minimized and / or glass, that in the area of the edges from damage, the stability impaired, protected.

Background of the invention

at PV solar modules based on glass come in the course of operating time including failure due to breakage of the glasses for example due to hailstones or due to tension due to faster Temperature changes. Thus, it is desirable to strive for stability to improve the glasses of the solar modules.

hardened (tempered) glass is used in many technical fields. One distinguishes between partially toughened glass (TVG, English: "hegt strengthend glass ") or fully tempered glass, for example Single pane tempered glass (ESG) or chemically tempered glass. In connection with the description of the present invention, the term "cured" as a generic term for these curing techniques used)

• – das Bruchrisiko reduziert ist,
• – ein günstigeres Verhältnis von Stabilität zu Gewicht erzielt werden kann und auch
• – das Verletzungsrisiko durch Glassplitter deutlich reduziert ist, da das gehärtete

The use of tempered glass in photovoltaic solar modules (PV modules) is desirable because

• - the risk of breakage is reduced,
• - A more favorable ratio of stability to weight can be achieved and also
• - The risk of injury from broken glass is significantly reduced since the hardened

Glass not so easy breaks and the fragments are not so sharp Have edges. This is especially true for building integration of photovoltaic modules is an important aspect.

One Disadvantage of tempered glass is that it is there Under tension, mechanically not without damage (with TVG or ESG the glass pane is destroyed, while with chemical hardening in the area of the cutting edge the Effect of curing is lost) can be post-processed can, that is a cutting and drilling holes with the usual glass processing techniques no longer unrestricted is possible. The glass elements must therefore be made to measure before curing be, resulting in a larger editing effort (Logistics) and therefore costly. to boot are the processing machines only for certain dimensions the glass panes optimized, and may differ Dimensions are not optimally utilized, which does not work optimal dimensions with additional costs must become.

It is the object of the present invention, a Production process for thin-film photovoltaic solar modules to provide, which with less processing and therefore inexpensive executable.

• – Verwenden von gehärtetem Glas als Substrat für die Bearbeitung mit wenigstens einem der in der Halbleiter-Technologie üblichen Prozesse, insbesondere mit Beschichtung (z. B. durch Sputtern, Aufdampfen, Sublimieren, chemische Abscheidung aus der Gasphase), Ätzen, Photolithographie, Laserstrukturierung, Dotieren

und

• – Teilen des gehärteten Glases durch wenigstens einen Trennschritt in kleinere Teile, um die gewünschten Abmessungen der Solarmodule zu erhalten.

This object is achieved by a manufacturing method for producing thin-film tempered glass solar modules having a variety of dimensions, comprising the steps of:

• Using tempered glass as a substrate for processing with at least one of the processes customary in semiconductor technology, in particular with coating (for example by sputtering, vapor deposition, sublimation, chemical vapor deposition), etching, photolithography, laser structuring, doping

and

• - Dividing the tempered glass by at least one separation step into smaller parts to obtain the desired dimensions of the solar modules.

The trend the processing costs per area decrease with the size the simultaneously machined surface. Thus, it is cheaper in machines optimized for large areas to process large glass surfaces in one operation, and then to separate the machined glass surfaces, as in for smaller areas optimized machines several to edit small glass surfaces.

• – zur Montage der fertigen Modulen
• – zur Befestigung von Zusatzaggregaten (z. B. Anschlussdose, Steuerelektronik)
• – zur Durchführung der elektrischen Anschlüsse.

A development of the method according to the invention provides that the hardened glass is provided with holes or cutouts. These holes and cutouts are used, among other things

• - for mounting the finished modules
• - for fastening additional units (eg junction box, control electronics)
• - To carry out the electrical connections.

• – Ätzen oder/und
• – Teilen mit einem Hochdruckflüssigkeitsstrahl oder/und
• – lokales Verhindern der Vorspannung oder Härtung oder/und
• – lokales Härten oder/und
• – Teilen der Gläser mit Hilfe eines Laserstrahls oder/und
• – eine Kombination dieser Techniken.

With regard to the above-mentioned separation step, according to the invention, it can be provided in detail that the cutting and / or the production of cut-outs and holes is made possible by one of the following techniques:

• - etching or / and
• - Sharing with a high pressure liquid jet and / or
• - local prevention of bias or hardening and / or
• - local hardening and / or
• - Divide the glasses by means of a laser beam and / or
• - a combination of these techniques.

at a development of the invention is provided that the glass is disturbed in areas where the hardening is, in particular on the edited in the context of sharing edges is cured again.

• – Verwenden von gehärtetem Glas als Substrat für die Bearbeitung mit wenigstens einem der in der Halbleiter-Technologie üblichen Prozessen (Beschichtung, Ätzen, Photolithographie, Laserstrukturierung, Dotierung, ...)

und

• – Zusammenfassung mehrerer kleinerer, nebeneinander liegender, gehärteter und auf die endgültigen Maße zugeschnittener Glassubstrate auf einem Substratträger damit sie in für großflächige Substrate optimierten Maschinen bearbeitet werden können.

The invention further relates to a manufacturing method for producing thin-film tempered glass solar modules, in particular partially tempered glass (TVG) or fully toughened glass (ESG), or chemically tempered glass) having a multiplicity of dimensions, comprising the steps:

• Use of tempered glass as a substrate for processing with at least one of the processes customary in semiconductor technology (coating, etching, photolithography, laser structuring, doping, etc.)

and

• - Summary of several smaller, adjacent, hardened and tailored to the final dimensions glass substrates on a substrate support so that they can be processed in optimized for large substrates substrates machines.

By the summary of several smaller substrates on one Substratäger it is possible this with for large substrates optimized machines cost-effective to edit.

Often Plasma processes are used to process the substrates like For example, PECVD (Plasma Enhanced Chemical Vapor Deposition) or Sputtering for coating. For example, amorphous silicon or microcrystalline silicon in the presence of a plasma faster and deposited at a lower temperature.

The Processing of several, side by side, insulating ones Substrates on a substrate support can be used in plasma processes Cause problems by building up inhomogeneities of the plasma potential in the area of the edges, where the individual substrates side by side lie.

In Further development of this method according to the invention can also be provided that in plasma processes measures to avoid too high inhomogeneities of the plasma potential be taken, such as a process chamber and the RF energy coupling symmetrical arrangement of simultaneously processed Substrates and / or equipotential bonding by contacting more conductive Layers on the substrates.

• – Verwenden von Glas als Substrat für die Bearbeitung mit den wenigstens einem der in der Halbleiter Technologie üblichen Prozess, insbesondere mit Beschichtung, Ätzen, Photolithographie, Laserstrukturierung, Dotierung

und

• – spezielle Verfahren um die Bindungsdefekte an den Kanten der verwendeten Gläser zu minimieren und/oder spezielle Verfahren um die Gläser im Bereich der Kanten vor Beschädigungen zu schützen, die die Stabilität der Gläser beinträchtigen.

The invention further relates to a production method for producing thin-film solar modules made of glass, comprising the steps:

• Use of glass as a substrate for processing with the at least one of the processes customary in semiconductor technology, in particular with coating, etching, photolithography, laser structuring, doping

and

• Special methods to minimize the bonding defects at the edges of the glasses used and / or special methods to protect the glasses in the area of the edges from damage which impair the stability of the glasses.

• – Trennen der Gläser durch Laserstrahl
• – sorgfältiges Säumen der Kanten der Gläser
• – Polieren der Kanten
• – Säurepolieren der Kanten
• – Abätzen von gestörten Schichten im Bereich der Kanten
• – Flammenpolieren der Kanten
• – Erhitzen der Gläser im Bereich der Kanten um Defekte auszuheilen
• – Erhitzen der Gläser im Bereich der Kanten und anschließende schnelle Abkühlung, so dass die Gläser im Bereich der Kante lokal vorgespannt sind.
• – chemisches Vorspannen der Gläser im Bereich der Kanten
• – Eine Kombination von mindestens zwei der genannten Verfahren

Methods according to the invention with which edges can be produced with the smallest possible defects are:

• - Separating the glasses by laser beam
• - careful seaming of the edges of the glasses
• - polishing the edges
• - acid polishing of the edges
• - Etching of disturbed layers near the edges
• - Flame polishing of the edges
• - Heating the glasses in the area of the edges to heal defects
• - Heating of the glasses in the area of the edges and subsequent rapid cooling, so that the glasses are locally biased in the region of the edge.
• - Chemical tempering of the glasses in the area of the edges
• - A combination of at least two of the said methods

• – Schutz der Glaskante vor Kontakt mit Feuchtigkeit und Wasserdampf
• – Abdeckung oder Beschichtung des Glases im Bereich der Kante mit einem feuchtigkeitsdichten Stoff
• – Abdeckung oder Beschichtung des Glases im Bereich der Kante mit einem wasserdampfdichten Stoff
• – Abdeckung oder Beschichtung des Glases im Bereich der Kante mit Metall (zum Beispiel Aluminium oder Silber)
• – Anbringung eines Kantenschutzprofils aus Metall oder Kunststoff
• – Versiegelung der Kante mit Silikon
• – Versiegelung der Kante mit Acryl
• – Versiegelung der Kante mit Butyl
• – Versiegelung der Kante mit Polysulfid
• – Versiegelung der Kante mit einem Elastomer
• – Eine Kombination von mindestens zwei der genannten Verfahren

Processes according to the invention with which the glass can be protected from damage in the region of the edges are:

• - Protection of the glass edge from contact with moisture and water vapor
• - Cover or coat the glass around the edge with a moisture-proof cloth
• - Cover or coat the glass in the area of the edge with a water-vapor-tight material
• Covering or coating the glass in the region of the edge with metal (for example aluminum or silver)
• - Attaching an edge protection profile made of metal or plastic
• - Seal the edge with silicone
• - Sealing the edge with acrylic
• - Seal the edge with butyl
• - Seal the edge with polysulfide
• - Seal the edge with an elastomer
• - A combination of at least two of the said methods

The The invention further relates to a device according to the invention Process produced photovoltaic module.

The Invention will be described below by way of example with reference to the accompanying Figures explained. They show:

1 the typical structure of a thin-film solar cell (Superstrate Design) (non-scale fair);

2 a possibility of symmetrical arrangement of two equal sized substrates on a rectangular substrate carrier

3 Possibility of symmetrical arrangement of four equal sized substrates on a rectangular substrate carrier

4 Possibility for equipotential bonding at the edges where the glaziers abut each other.

5 a sectional view too 4

Construction of thin-film PV cells / modules

1 shows an example of the typical structure of a thin-film solar cell (Superstrate Design) (not scale-fair).

Specify in detail in 1 the reference numbers used are as follows:

1

incident light

2

Front glass (Radiation window through which light enters; substrate at superstrate Design)

3

Interface between glass ( 2 ) and transparent conductive layer ( 4 )

4

transparent conductive layer (eg TCO: transparent conducting oxide)

5

light Absorbing semiconductor structure (consisting of several layers)

6

layer to improve the reflection

7

Back contact

8th

lamination

9

Back protection (eg glass, back glass)

In order to inexpensively produce PV thin film modules, according to the invention, for example, on a glass substrate ( 2 ) Solar cell structures of light-absorbing semiconductor layers ( 5 ), transparent conductive layers ( 4 ), metallic conductive layers ( 7 ) and optionally other functional layers and structures ( 3 . 6 ) built up. The light ( 1 ) enters through the glass pane ( 2 ), penetrates the front contact ( 4 ), which often consists of a transparent conductive oxide (also referred to as TCO) and strikes the light-absorbing semiconductor layer in which the light is converted into electrical current. About the back contact ( 7 ) and the front contact ( 4 ) the generated electricity is dissipated. In addition, the back contact may reflect the unconverted light back to the light-absorbing semiconductor layer again.

At shift ( 3 ) may be, for example, an interface layer for reducing the reflections that occur when the light ( 1 ) from the glass ( 2 ) to the transparent conductive layer. At shift ( 6 ) may be a layer for improving the reflection of the light that has not yet been converted into electrical current when passing through the semiconductor.

In order to protect these functional layers and structures from environmental influences, another material (eg glass again) is used as back protection ( 9 ) by means of a bonding layer ( 8th , usually EVA or PVB) laminated to the first glass with the functional layers and structures.

The cell does not have to be constructed starting from the front glass serving as the substrate (superstrate design), as indicated here, but it is also possible for the layer located under the rear side contact (FIG. 9 ) serve as a substrate for the construction of the overlying layers (substrate design). In this case, the connection layer shifts ( 8th , usually EVA or PVB) between layers 2 and 3 or between layers 3 and 4.

additionally There are a lot of variations for the structure of the cells. Essential feature of the considered here Cells and modules is made by machining glasses with the usual processes in semiconductor technology (Coating, etching, photolithography, laser structuring, Doping, ...) are produced.

Tempered glass as Substrate material for the application of the functional Layers and structures

When used as a substrate tempered glass (tempered or tempered or chemically hardened), the glass in the coating with the functional layers and structures (and possibly other necessary processes) usually has to be in the final length and width. As a result, depending on the size of the PV modules, considerable additional costs are to be expected, since the machines for the production of the functional layers and structures ( 3 ) are usually optimized for a particular substrate size and therefore for different substrate formats can not be optimally loaded and utilized. Since the production of the functional layers and structures with reactors for large glass substrates is considerably less expensive, it is desirable to produce these layers on the largest possible substrates, and then to cut the substrates according to the desired module size. However, this is precisely the case when using tempered glass as substrate ( 1 ) not possible without restrictions.

If built into the manufacturing process an unconventional process step which makes it possible the hardened glasses To share PV modules, especially in smaller formats in a variety of dimensions of tempered glass cheaper getting produced.

Enabling the sharing of tempered glass

One Splitting the tempered glasses can be done by the following techniques be enabled.

1. etching

The tempered glasses can be attached to the Be etched site.

2. Divide by high pressure liquid jet

The Parts of the glasses are made by a focused high pressure Liquid jet (mixture of water and optionally an etchant). The separation is done by a combination from physical action of the liquid jet and optionally chemical etching by the etchant.

3. Local prevention of hardening

At the To bias the glass are masked the places where the Glass should be separated later.

at a chemical hardening can the bodies which the glass should be separated later, for example masked by masking so that there is no cure here he follows.

4. Local hardening

When tempering the glass, not all the glass is biased. The places where the glass is to be separated later are not biased. The local hardening can be carried out, for example, by local chemical treatment (for example ion exchange in the case of the sodium atoms from the near-surface region of the glass by potassium atoms) or by local heating by laser with subsequent rapid cooling or by means of one of DE 102 06 082 described methods or a further development thereof.

5. The glasses are split with the help of a laser beam

The splitting of the glasses takes place with the aid of a laser beam, for example by laser beam fusion cutting, by laser beam scribing or by laser blasting. In question there are, inter alia, methods in which by laser beam and possibly subsequent cooling the glass is clamped and then broken, or methods in which by laser, the glass is strongly heated at the surface or in the depth or nearly melted and thereby the breakage of the glass is initiated. In question are also in DE 10 2004 014 276 respectively. DE 10 2004 014 277 described methods or further development thereof as well as combinations of the described methods.

6. A combination of those described under 1 ... 5 Methods.

Since in the region of the edges where the glass was cut for cutting (or in the production of holes and / or cutouts), the structure of the curing of the glass is disturbed, it may be advantageous that the glass to the machined (Scheid-) edges is hardened once again. This can be done, for example, by local chemical treatment or by local heating by laser to a temperature usual for tempering by tempering with subsequent rapid cooling or one of in DE 102 06 082 described methods or a further development thereof.

Tempered glass in PV solar modules

• – zur Montage der fertigen Modulen
• – zur Befestigung von Zusatzaggregaten (z. B. Anschlussdose)
• – zur Durchführung der elektrischen Anschlüsse.

In many cases, holes or cutouts are required for PV solar modules in the glasses z. B.

• - for mounting the finished modules
• - for fastening additional units (eg junction box)
• - To carry out the electrical connections.

If now hardened glasses need to be used these cutouts or holes even before hardening of the glass are introduced. Because this is outside the usual Production process for solar modules d. H. done offline, are thus a significant additional logistical effort Capacity and additional costs.

If these holes or cut-outs are made using any of the techniques described above with which tempered glass can be split, these processing steps may be "in-line". be done, which in turn can save costs.

Another possibility for producing solar modules using tempered glass in systems for large-scale processing provides that a plurality of smaller, juxtaposed, hardened glasses are processed simultaneously with a loading of the process chamber. For this purpose, a special substrate carrier is required, which is applied over the entire coating surface ( 20 ) several smaller hardened glass substrates ( 21 ) receives side by side without significant gaps. In plasma processes (eg PECVD), depending on the plasma energy coupling (eg with high frequency), it must be taken into account that this occurs homogeneously for all simultaneously processed substrates and that there is no unauthorized inhomogeneity of the plasma potential over the plasma Substrates come in particular in the region of the edges where the individual substrates lie next to each other. If necessary, measures for equipotential bonding must be made, and / or the symmetry of the arrangement of the individual substrates to be processed to be selected so that it coincides with the symmetry of the process chamber and / or energy coupling, and therefore at the edges where the glass substrates abut each other not too large inhomogeneities of the plasma potential occur. You may have to accept that then only 2 or 4 equal sized substrates can be processed simultaneously, as in 2 (2 substrates) and 3 (4 substrates) are shown. Another conceivable measure would be equipotential bonding by contacting conductive layers (such as TCO) on the substrates. This could be like in 4 and 5 shown an electrically conductive material ( 22 ) (eg a metal strip) a conductive connection between the conductive layers of two adjacent, on the substrate carrier ( 25 ) lying glasses. The conductive material ( 22 ) can be replaced by a holder ( 26 ) are held so that a reliable electrical connection between the conductive layers of the two glass panes is possible. The uncoated insulating substrate glass ( 24 ) and the associated conductive coating ( 23 ) (eg TCO) form the coated glass substrate ( 21 ).

About that In addition, it may be advantageous for Plasma Enhanced Chemical Vapor Deposition (PECVD) plasma generation takes place with the usual used frequencies below 300 MHz by microwaves (eg at 2.45 GHz). It has been found that in this type of production of Plasma near the substrate surface significantly less disturbing Potential inhomogeneities arise. additionally the generation of the plasma can be further from the substrate (more than 5 cm) be removed, which in turn the potential inhomogeneities be reduced near the substrate surface.

Glass would have basically starting from the atomic bond structure an extremely high strength, which, however, in practice due to Binding defects (eg microcracks) can not be realized. Particular attention is paid to the edges (lateral, the surfaces the glass pane limiting edge surfaces) of the glass to lay. Often the glass breaks away from the microcracks at the glass edges.

It It was found that the stability (bending strength) of Glasses with carefully edged edges, For example, carefully polished edges or fire polished Edges are much larger than those of glaziers without polished edges. It was also found that when cutting glass by laser (eg laser-induced voltage separation method or Full body cut or laser scribing) the bending strength of glass clearly is higher than for glasses conventionally through mechanical scribing and breaking were cut.

• – Trennen der Gläser durch Laserstrahl
• – Zuschneiden der Gläser durch Laserstrahl
• – sorgfältiges Säumen der Kanten der Gläser
• – Polieren der Kanten der Gläser
• – Flammenpolieren der Kanten der Gläser
• – Säurepolieren der Kanten
• – Abätzen von gestörten Schichten im Bereich der Kanten
• – Erhitzen der Gläser im Bereich der Kanten um Defekte auszuheilen
• – Erhitzen der Gläser im Bereich der Kanten und schnelle Abkühlung, so dass das Glas im Bereich der Kante lokal vorgespannt ist.
• – chemisches Vorspannen des Gläser im Bereich der Kanten
• – Eine Kombination von mindestens zwei der genannten Verfahren

Thus, the stability of the glasses used for the construction of the PV solar modules (flexural strength) can be improved by the following methods:

• - Separating the glasses by laser beam
• - Cutting the glasses by laser beam
• - careful seaming of the edges of the glasses
• - polishing the edges of the glasses
• - Flame polishing the edges of the glasses
• - acid polishing of the edges
• - Etching of disturbed layers near the edges
• - Heating the glasses in the area of the edges to heal defects
• - Heating of the glasses in the area of the edges and rapid cooling, so that the glass is locally biased in the area of the edge.
• - Chemical tempering of the glasses in the area of the edges
• - A combination of at least two of the said methods

• – Schutz der Glaskante vor Kontakt mit Feuchtigkeit und Wasserdampf
• – Abdeckung oder Beschichtung des Glases im Bereich der Kante mit einem feuchtigkeitsdichten Stoff
• – Abdeckung oder Beschichtung des Glases im Bereich der Kante mit einem wasserdampfdichten Stoff
• – Abdeckung oder Beschichtung des Glases im Bereich der Kante mit Metall (zum Beispiel Aluminium oder Silber)
• – Anbringung eines Kantenschutzprofils aus Metall oder Kunststoff
• – Versiegelung der Kante mit Silikon
• – Versiegelung der Kante mit Acryl
• – Versiegelung der Kante mit Butyl
• – Versiegelung der Kante mit Polysulfid
• – Versiegelung der Kante mit einem Elastomer
• – Eine Kombination von mindestens zwei der genannten Verfahren

Furthermore, it has been found that the growth of bonding defects at the glass edges and microcracks is accelerated over time, in particular by moisture, water vapor and mechanical damage. Thus, it is useful if the edges of the glasses are protected from mechanical damage and moisture and water vapor during operation of the modules. In particular, the following methods are suitable for protecting the edges from damage.

• - Protection of the glass edge from contact with moisture and water vapor
• - Cover or coat the glass in the area of the edge with a moisture-proof material
• - Cover or coat the glass in the area of the edge with a water-vapor-tight material
• Covering or coating the glass in the region of the edge with metal (for example aluminum or silver)
• - Attaching an edge protection profile made of metal or plastic
• - Seal the edge with silicone
• - Sealing the edge with acrylic
• - Seal the edge with butyl
• - Seal the edge with polysulfide
• - Seal the edge with an elastomer
• - A combination of at least two of the said methods

As with glass solar modules frequently two glass plates (eg like 1 shows ( 2 ) and ( 9 )) can be additionally useful if the edge protection is wholly or partially produced simultaneously for both glasses and protects the edges of both glasses.

QUOTES INCLUDE IN THE DESCRIPTION

This list The documents listed by the applicant have been automated generated and is solely for better information recorded by the reader. The list is not part of the German Patent or utility model application. The DPMA takes over no liability for any errors or omissions.

Cited patent literature

• - DE 10206082 [0042, 0044]
• - DE 102004014276 [0043]
• - DE 102004014277 [0043]

Claims (10)

Manufacturing process for the production of thin film Tempered glass solar modules with a variety of Dimensions comprising the steps: - Using tempered glass as a substrate for processing with the at least one of the usual in semiconductor technology Processes, in particular with coating, etching, photolithography, Laser structuring, doping, and - Share of the tempered glass by at least one separation step into smaller parts to the desired dimensions of the solar modules to obtain. Manufacturing method according to claim 1, characterized that the tempered glass with holes and / or cutouts is provided. Manufacturing method according to one of the claims 1 to 2, characterized in that the parts and / or the production of cutouts and holes by the following techniques allows: - etching or / and - Share with a high-pressure liquid jet and / or - local Preventing the preload or hardening and / or - local Hardening and / or - sharing the glasses with the help of a laser beam and / or - a combination at least two of these techniques. Manufacturing method according to one of the claims 1 to 3, characterized in that the glass in areas at which the curing is disturbed, in particular the edges worked in the course of sharing, hardened once again becomes. Manufacturing process for the production of thin film Tempered glass solar modules ("partly toughened" glass (TVG), "heat strengthened" glass, "fully tempered" Glass (tempered), tempered glass or chemically tempered glass Glass) characterized by a variety of dimensions, that - Tempered glass as a substrate for the processing with the usual semiconductor technology Processes (coating, etching, photolithography, laser structuring, etc.) is used and - several, smaller, juxtaposed without significant gaps hardened and to the final dimensions cut glass substrates combined on a substrate carrier They are optimized for large substrates Machines can be processed. Manufacturing method according to claim 5, characterized that in plasma processes, measures to prevent from high inhomogeneities of the plasma potential are taken as for example, one for building the chamber and for coupling the RF energy symmetrical arrangement of simultaneously processed Substrates and / or equipotential bonding by contacting more conductive Layers on the substrates. Manufacturing method according to claim 5, characterized that plasma enhanced chemical vapor deposition (PECVD) by the plasma Microwave is generated and / or the plasma generation more than 5 cm away from the substrate surface. Manufacturing process for the production of thin film Solar modules made of glass, comprising the steps: - Use of glass as a substrate for processing with the at least one of the usual processes in semiconductor technology, especially with coating, etching, photolithography, Laser structuring, doping, and - Application one of the following methods with those binding defects in the field the edges of the glasses used are minimized. • Disconnect the glasses by laser beam • careful Hemming the edges of the glasses • polishing the edges • Flame polishing of the edges • acid polishing the edges • Etching disturbed ones Layers around the edges • heating the glasses in the area of the edges to heal defects • heating the glasses in the area of the edges and subsequent quick cooling, leaving the glasses in the area the edges are biased locally. • chemical tempering the glasses in the area of the edges • A combination of at least two of the said methods A manufacturing method for producing thin-film solar modules made of glass, comprising the steps of: using glass as substrate for processing with the at least one of the processes customary in semiconductor technology, in particular with coating, etching, photolithography, laser structuring, doping, and application of one of the following methods to permanently protect the used glasses in the area of the edges from damages that impair the stability of the glasses: • Protection of the glass edges from contact with moisture and water vapor • cover or coat the glasses around the edges with a moisture-proof fabric • cover or coat the glass around the edge with a water vapor-proof fabric • cover or coat the glass near the edges with metal (eg aluminum or silver) • Attaching a metal or plastic edge protection profile • Sealing the edge with silicone • Sealing the edge with acrylic • Sealing the edge with butyl • Sealing the edge with polysulfide • Sealing the edge with an elastomer • A combination of at least two of the above methods Manufacturing process for the production of thin film Solar modules made of glass by a combination of the claims 1 with 9 methods mentioned.