CN202572113U - Silicon power electronic device angle lapping machine - Google Patents
Silicon power electronic device angle lapping machine Download PDFInfo
- Publication number
- CN202572113U CN202572113U CN 201220186218 CN201220186218U CN202572113U CN 202572113 U CN202572113 U CN 202572113U CN 201220186218 CN201220186218 CN 201220186218 CN 201220186218 U CN201220186218 U CN 201220186218U CN 202572113 U CN202572113 U CN 202572113U
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- head
- angle lap
- angle
- suction
- power electronic
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Abstract
The utility model relates to a silicon power electronic device angle lapping machine. The silicon power electronic device angle lapping machine comprises a rack, a slice suction head and an angle lapping head, a vacuum slice suction device, a slice suction head rotation driving device, an angle lapping head rotation driving device and a lapping slurry jetting device which are arranged on the rack, the slice suction head is connected with the slice suction head rotation driving device, an airflow channel is mounted in the slice suction head, one end of the airflow channel is communicated with a vacuum pump disposed in the vacuum slice suction device, the other end of the airflow channel opens to a suction surface of the slice suction head, the angle lapping head is connected with the angle lapping head rotation driving device, an inwards concave angle lapping surface in a spherical surface shape is arranged on the angle lapping head, the angle lapping surface in the spherical surface shape of the angle lapping head is installed with the suction surface of the slice suction head in a face-to-face mode, and a lapping slurry spray nozzle of the lapping slurry jetting device is directed to the angle lapping surface in the spherical surface shape of the angle lapping head. According to the silicon power electronic device angle lapping machine, a silicon slice is sucked through the slice suction head, the angle of the silicon slice is lapped by the angle lapping surface in the spherical surface shape, a lapping slurry is added, the slice suction head and the angle lapping head are in a differential speed co-rotation, the silicon slice breakage can be effectively reduced, and angle lapping quality and the rate of finished products can be improved.
Description
Technical field
The utility model relates to a kind of angle lap machine, relates in particular to a kind of silicon power electronic devices angle lap machine.
Background technology
The silicon power electronic devices, like devices such as IGCT, diodes, their chip form is generally circle; After technologies such as utilizing diffusion is accomplished the structure of inner PN junction; Because it will bear very high operating voltage, carry out angle lap to the end face of PN junction and handle, to increase the space charge sector width; Weaken electric field, improve the operating voltage and the reliability of device.Original common angle lap machine is just installed an angle lap head on motor shaft, the staff hold chip with it gently by on the angle lap head, carrying out angle lap owing to be manual operations,, bad during angle lap quality fashion so the angle lap quality follows staff's technical ability closely related.And general automatic angle lap machine only is fit to the chip that following molybdenum sheet is arranged is carried out angle lap; Silicon chip to there not being molybdenum sheet to support can't carry out angle lap, and reason is that silicon chip is a kind of very crisp material, and silicon chip can't be installed on the general automatic angle lap machine; Can not grind, broken once grinding.
Summary of the invention
The utility model mainly solves original employing manual operations and carries out angle lap; The angle lap quality is poorly the technical problem of control; Solve existing automatic angle lap machine simultaneously and only be fit to the chip that following molybdenum sheet is arranged is carried out angle lap, can't carry out angle lap to the silicon chip that does not have molybdenum sheet to support, once grinding broken technical problem; A kind of silicon power electronic devices angle lap machine is provided, and it can not damage silicon chip when silicon chip is installed, and also significantly reduces the fragmentation of silicon chip during angle lap, improves angle lap quality and yield rate, and automaticity is high.
The above-mentioned technical problem of the utility model mainly is able to solve through following technical proposals: the utility model comprises frame, inhales head and angle lap head; Described frame is provided with vacuum and inhales the sheet device, inhales head rotating driving device, angle lap head rotating driving device and lapping liquid injection apparatus; Inhaling head links to each other with suction head rotating driving device; Be provided with gas channel in the suction head, the vavuum pump that an end of gas channel and described vacuum are inhaled in the sheet device is communicated with, and the other end of gas channel is opened on the suction face of inhaling head; The angle lap head links to each other with angle lap head rotating driving device; Described angle lap head is provided with the sphere shape angle lap face of indent, and the sphere shape angle lap face of angle lap head is installed with the suction face of inhaling head face-to-face, and the lapping liquid nozzle of described lapping liquid injection apparatus points to the sphere shape angle lap face of angle lap head.The air that vacuum suction sheet device will be inhaled in the head gas channel is evacuated; Inhale head and hold silicon chip to be ground through this suction with its suction face, inhale the head rotating driving device and drive the rotation of suction head, angle lap head rotating driving device drives the rotation of angle lap head; Inhaling head then descends; Wait to grind silicon chip and contact the realization angle lap with sphere shape angle lap face, receive the control of lapping liquid injection apparatus during angle lap, the lapping liquid that flows out from the lapping liquid nozzle sprays to sphere shape angle lap face.The utility model holds the installation that silicon chip is accomplished silicon chip through inhaling head, guarantees that silicon chip can not adopt sphere shape angle lap to carry out angle lap in the face of silicon chip because of installation causes damage; With lapping liquid, when effectively avoiding angle lap silicon chip is caused damage again, reduce the fragmentation of silicon chip; Improve angle lap quality and yield rate; Need not manual operations carry out angle lap, accomplished automatically by machine, automaticity is high.
As preferably, described suction head rotating driving device comprises motor, this machine shaft with inhale head and link to each other.Starter motor, machine shaft drive inhales the head rotation.
As preferably; Described suction head are provided with contiguous block outward, are provided with cavity and path in the described contiguous block, and an end opening of path is inhaled the vavuum pump connection in the sheet device in a side of contiguous block and with described vacuum; The other end of path and cavity are communicated with; Gas channel in the described suction head comprises longitudinal channel and the transverse passage-way that is connected, and longitudinal channel links to each other with transverse passage-way and constitutes the T font, and an end opening of longitudinal channel is in the suction face of inhaling head; The both ends open of transverse passage-way is in the side of inhaling head and be positioned at described cavity, and the gas channel of inhaling in the head is communicated with through cavity, path and described vavuum pump successively.Simple in structure and ingenious, can easily the gas channel of inhaling in the head be evacuated, good sealing property is arranged again.
As preferably, be embedded with sealing ring and lower seal in the described contiguous block, last sealing ring and lower seal lay respectively at the above and below of cavity, and last sealing ring, lower seal are all being inhaled between head and the contiguous block.Improve contiguous block and inhale the seal degree that head are connected, prevent that outside air from flowing in the cavity of contiguous block, guarantee to inhale the vacuum in the head gas channel, thereby make the suction head can hold silicon chip to be ground securely.
As preferably, described frame is provided with pressure-regulating device, and pressure-regulating device links to each other with described suction head.When waiting to grind silicon chip and angle lap head and connecing the angle, the down position that its pressure size is inhaled head by pressure-regulating device control is regulated.Pressure-regulating device can realize that the pressure size when connecing the angle is determined by pull of steel wire by the steel wire rope that is connected on the frame.
As preferably, described angle lap head rotating driving device comprises motor and the angle lap head rotating shaft that links to each other with this motor, and the rotating shaft of angle lap head links to each other with the angle lap head.Motor-driven angle lap head rotating shaft rotation drives the rotation of angle lap head.
As preferably, the below of described angle lap head is provided with the lapping liquid collecting pit, the lapping liquid collecting pit through pipeline with provide the liquid storing barrel of lapping liquid to link to each other for described lapping liquid injection apparatus.The lapping liquid that sprays during angle lap flows to the lapping liquid collecting pit, flows to liquid storing barrel from the lapping liquid collecting pit through pipeline again, for reusing, forms the lapping liquid cyclic utilization system, avoids waste economical with materials.
As preferably, described suction head are identical with described angle lap head direction of rotation and rotary speed is different.When effectively avoiding angle lap silicon chip is caused damage, reduce the fragmentation of silicon chip, improve angle lap quality and yield rate.
As preferably, the rotating speed of described angle lap head is 260～360 rev/mins, and the rotating speed of inhaling head is 100 rev/mins.It is broken further to reduce silicon chip, improves angle lap quality and yield rate.
As preferably, the lapping liquid nozzle of described lapping liquid injection apparatus is positioned at the oblique upper of described angle lap head, and the angle of lapping liquid nozzle and horizontal direction is 30～60 degree.
The beneficial effect of the utility model is: it holds the installation that silicon chip is accomplished silicon chip through inhaling head, guarantees that silicon chip can not adopt sphere shape angle lap to carry out angle lap in the face of silicon chip because of installation causes damage; Again with lapping liquid, and inhale head and rotate in the same way, when effectively avoiding angle lap silicon chip is caused damage with angle lap head implementation differential; Reduce the fragmentation of silicon chip, improve angle lap quality and yield rate, need not manual operations carry out angle lap; Automatically accomplished by machine, automaticity is high.
Description of drawings
Fig. 1 is a kind of system syndeton sketch map of the utility model.
Fig. 2 is an a kind of axial sectional structure sketch map of inhaling the mounting structure of head and angle lap head in the utility model.
1. frames among the figure are 2. inhaled head, 3. angle lap head, 4. vacuum suction sheet device, 5. suction head rotating driving device, 6. angle lap head rotating driving device; 7. lapping liquid injection apparatus, 8. gas channel, 9. vavuum pump, 10. sphere shape angle lap face, 11. lapping liquid nozzles, 13. contiguous blocks; 14. cavity, 15. paths, sealing ring on 16., 17. lower seal, 18. pressure-regulating devices; 19. the rotating shaft of angle lap head, 20. lapping liquid collecting pits, 21. liquid storing barrels, 81. longitudinal channels, 82. transverse passage-ways.
The specific embodiment
Pass through embodiment below, and combine accompanying drawing, do further bright specifically the technical scheme of the utility model.
Embodiment: a kind of silicon power electronic devices angle lap machine of present embodiment; As shown in Figure 1; Comprise frame 1, inhale head 2 and angle lap head 3, vacuum is installed on the frame 1 inhales sheet device 4, inhale head rotating driving device 5, angle lap head rotating driving device 6, lapping liquid injection apparatus 7 and pressure-regulating device 18.Inhale head rotating driving device 5 and comprise motor; This machine shaft links to each other with an end of inhaling head 2, and the other end of inhaling head is suction face, and is as shown in Figure 2; Inhale the head 2 outer contiguous blocks 13 that are socketed with; Cavity 14 and path 15 are arranged in the contiguous block 13, and an end opening of path 15 is communicated with the other end of path 15 and cavity 14 connections in a side of contiguous block 13 and with vavuum pump 9 that vacuum is inhaled in the sheet device 4.Inhale in the head 2 gas channel 8 is arranged; Gas channel 8 comprises the longitudinal channel 81 and transverse passage-way 82 that is connected; Longitudinal channel 81 links to each other with transverse passage-way 82 and constitutes the T font; One end opening of longitudinal channel 81 is in the suction face of inhaling head 2, and the both ends open of transverse passage-way 82 is in the side of inhaling head 2 and be positioned at cavity 14, and the gas channel of inhaling in the head 28 is communicated with through cavity 14, path 15 and vavuum pump 9 successively.Be embedded with sealing ring 16 and lower seal 17 in the contiguous block 13, last sealing ring 16 and lower seal 17 lay respectively at the above and below of cavity 14, and last sealing ring 16, lower seal 17 are all between suction head 2 and contiguous block 13.Pressure-regulating device 18 links to each other with suction head 2.Angle lap head rotating driving device 6 comprises motor and the angle lap head rotating shaft 19 that links to each other with this motor; Angle lap head rotating shaft 19 links to each other with angle lap head 3; Angle lap head 3 is positioned at the below of inhaling head 2; Angle lap head 3 has the sphere shape angle lap face 10 of an indent, and the sphere shape angle lap face 10 of angle lap head 3 is face-to-face with the suction face of inhaling head 2.The lapping liquid nozzle 11 of lapping liquid injection apparatus 7 is positioned at the oblique upper of angle lap head 3, and lapping liquid nozzle 11 points to sphere shape angle lap face 10, and the angle of lapping liquid nozzle 11 and horizontal direction is 45 degree.There is a lapping liquid collecting pit 20 below of angle lap head 3, lapping liquid collecting pit 20 through pipeline with provide the liquid storing barrel 21 of lapping liquid to link to each other for lapping liquid injection apparatus 7.It is identical with angle lap head 3 direction of rotation and rotary speed is different to inhale head 2, and promptly both carry out differential and rotate in the same way, and in the present embodiment, the rotating speed of angle lap head 3 is 300 rev/mins, and the rotating speed of suction head 2 is 100 rev/mins.
The course of work: start vavuum pump, the gas channel of inhaling in the head is evacuated, hold silicon chip to be ground by inhaling head; Start and inhale head rotating driving device and angle lap head rotating driving device, make suction head and angle lap head make differential and rotate in the same way, under the control of pressure-regulating device; The suction head descend; Wait to grind silicon chip slowly near the sphere shape abradant surface of angle lap head, and under the control of pressure-regulating device, contact with sphere shape abradant surface, carry out automatic angle lap with certain pressure; Start the lapping liquid injection apparatus during grinding simultaneously, lapping liquid is ejected into the contact position of sphere shape abradant surface and silicon slice under test.The good back of mill is risen and is inhaled head, stops the vavuum pump operation, and pull of vacuum disappears, and takes off silicon chip.Accomplish an operation cycle.
Can adorn the matching unit that two covers, three covers or quadruplet are inhaled head and angle lap head on the frame, to improve angle lap efficient.When grinding the silicon chip of different-diameter, need be replaced with the suction head of corresponding diameter, prevent fragment to provide to exert pressure accordingly.
Claims (10)
1. silicon power electronic devices angle lap machine; It is characterized in that comprising frame (1), inhale head (2) and angle lap head (3); Described frame (1) is provided with vacuum and inhales sheet device (4), inhales head rotating driving devices (5), angle lap head rotating driving device (6) and lapping liquid injection apparatus (7); Inhaling head (2) links to each other with suction head rotating driving devices (5); Be provided with gas channel (8) in the suction head (2), the vavuum pump (9) that an end of gas channel (8) and described vacuum are inhaled in the sheet device (4) is communicated with, and the other end of gas channel (8) is opened on the suction face of inhaling head (2); Angle lap head (3) links to each other with angle lap head rotating driving device (6); Described angle lap head (3) is provided with the sphere shape angle lap face (10) of indent, and the suction face of the sphere shape angle lap face (10) of angle lap head (3) and suction head (2) is installed face-to-face, and the lapping liquid nozzle (11) of described lapping liquid injection apparatus (7) points to the sphere shape angle lap face (10) of angle lap head (3).
2. a kind of silicon power electronic devices angle lap machine according to claim 1 is characterized in that described suction head rotating driving device (5) comprises motor, and this machine shaft links to each other with suction head (2).
3. a kind of silicon power electronic devices angle lap machine according to claim 2; It is characterized in that the outer contiguous block (13) that is provided with of described suction head (2); Be provided with cavity (14) and path (15) in the described contiguous block (13); One end opening of path (15) is inhaled vavuum pump (9) connection in the sheet device (4) in a side of contiguous block (13) and with described vacuum; The other end of path (15) and cavity (14) are communicated with; Gas channel (8) in the described suction head (2) comprises longitudinal channel (81) and the transverse passage-way (82) that is connected, and longitudinal channel (81) links to each other with transverse passage-way (82) and constitutes the T font, and an end opening of longitudinal channel (81) is in the suction face of inhaling head (2); The both ends open of transverse passage-way (82) is in the side of inhaling head (2) and be positioned at described cavity (14), and the gas channel of inhaling in the head (2) (8) is communicated with through cavity (14), path (15) and described vavuum pump (9) successively.
4. a kind of silicon power electronic devices angle lap machine according to claim 3; It is characterized in that being embedded with in the described contiguous block (13) sealing ring (16) and lower seal (17); Last sealing ring (16) and lower seal (17) lay respectively at the above and below of cavity (14), and last sealing ring (16), lower seal (17) all are positioned at inhales between head (2) and the contiguous block (13).
5. according to claim 1 or 2 or 3 or 4 described a kind of silicon power electronic devices angle lap machines, it is characterized in that described frame (1) is provided with pressure-regulating device (18), pressure-regulating device (18) links to each other with described suction head (2).
6. a kind of silicon power electronic devices angle lap machine according to claim 1; It is characterized in that described angle lap head rotating driving device (6) comprises motor and the angle lap head rotating shaft (19) that links to each other with this motor, angle lap head rotating shaft (19) links to each other with angle lap head (3).
7. according to claim 1 or 6 described a kind of silicon power electronic devices angle lap machines; The below that it is characterized in that described angle lap head (3) is provided with lapping liquid collecting pit (20), lapping liquid collecting pit (20) through pipeline with provide the liquid storing barrel (21) of lapping liquid to link to each other for described lapping liquid injection apparatus (7).
8. according to claim 1 or 2 or 6 described a kind of silicon power electronic devices angle lap machines, it is characterized in that described suction head (2) are identical with described angle lap head (3) direction of rotation and rotary speed is different.
9. a kind of silicon power electronic devices angle lap machine according to claim 8, the rotating speed that it is characterized in that described angle lap head (3) is 260～360 rev/mins, the rotating speed of inhaling head (2) is 100 rev/mins.
10. according to claim 1 or 2 or 6 described a kind of silicon power electronic devices angle lap machines; It is characterized in that the lapping liquid nozzle (11) of described lapping liquid injection apparatus (7) is positioned at the oblique upper of described angle lap head (3), the angle of lapping liquid nozzle (11) and horizontal direction is 30～60 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220186218 CN202572113U (en) | 2012-04-27 | 2012-04-27 | Silicon power electronic device angle lapping machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220186218 CN202572113U (en) | 2012-04-27 | 2012-04-27 | Silicon power electronic device angle lapping machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202572113U true CN202572113U (en) | 2012-12-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220186218 Expired - Fee Related CN202572113U (en) | 2012-04-27 | 2012-04-27 | Silicon power electronic device angle lapping machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202572113U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103894921A (en) * | 2014-03-26 | 2014-07-02 | 广东工业大学 | Upper disc structure of high-precision single-sided grinding machine |
| CN112025540A (en) * | 2020-08-26 | 2020-12-04 | 江西昌河航空工业有限公司 | Spherical surface forming device and method based on grinding ball track |
-
2012
- 2012-04-27 CN CN 201220186218 patent/CN202572113U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103894921A (en) * | 2014-03-26 | 2014-07-02 | 广东工业大学 | Upper disc structure of high-precision single-sided grinding machine |
| CN112025540A (en) * | 2020-08-26 | 2020-12-04 | 江西昌河航空工业有限公司 | Spherical surface forming device and method based on grinding ball track |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121205 Termination date: 20140427 |