CN1994032A - 压印衬底的方法和设备 - Google Patents

压印衬底的方法和设备 Download PDF

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CN1994032A
CN1994032A CNA2005800265035A CN200580026503A CN1994032A CN 1994032 A CN1994032 A CN 1994032A CN A2005800265035 A CNA2005800265035 A CN A2005800265035A CN 200580026503 A CN200580026503 A CN 200580026503A CN 1994032 A CN1994032 A CN 1994032A
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sidewall
plate
microtool
substrate
forms
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T·比格斯
J·温里奇
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Intel Corp
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Abstract

一种压印衬底的方法和设备。本发明的一个实施例提供了一种在一个或两个板上具有侧壁的微型工具。侧壁有助于防止在微型工具板上或衬底上形成过多的电介质材料。对于本发明的一个实施例，每个微型工具板都具有在其上形成的侧壁。在施加压力时，侧壁彼此接触，因而减小了或消除了微型工具板的弯曲。

Description

压印衬底的方法和设备
技术领域
本发明的实施例总地涉及微电子器件制造，更具体地涉及压印衬底以制造这种器件的方法和设备。
背景技术
制造微电子器件的一个步骤为压印衬底。通常，在衬底核心的一侧或两侧具有电介质材料层，衬底核心可为金属或有机化合物。电介质材料可由热固化环氧树脂组成。电介质层可作为热固化环氧树脂平板敷覆，然后压印该电介质层以形成迹线。然后给迹线镀上导电材料(例如，铜)以形成微电子器件电路的导电迹线。随后形成层和相关的电子电路，以完成该器件。
通常，热固化环氧树脂层通过压印微型工具来压印。这种微型工具的传统设计具有许多由图1A-1C示出的不同缺点。
图1A示出了根据现有技术的微型工具。微型工具板105通常为具有分别为凸起部分106和凹陷部分107的薄金属板(例如，30密耳的镍板)。微型工具的凸起部分和凹陷部分为其特征，通常从顶到底约50-70微米。微型工具的每个板都通过真空装置(未示出)固定，并压入布置在衬底核心115上的热固化环氧树脂层110。环氧树脂层通常大约为40微米。通过应用压力，凹陷部分充满环氧树脂，凸起部分使环氧树脂移位。这种设计的一个缺点是环氧树脂材料不被容纳，即，没有措施来防止或限制环氧树脂以不希望的方式流动。当向微型工具盘施加压力时，允许环氧树脂材料流出。设备稍微的倾斜会导致环氧树脂以不希望的量和位置流动。环氧树脂材料的润湿性质使过多的材料沿着微型工具的边缘聚积，即，溢出的环氧树脂可能绕着板的边缘聚集而引起期望特征的变形。
并且，因为微型工具由薄板组成，所以当处于压力之下时，该薄板特别沿着具有较少环氧树脂材料提供阻力的外沿弯曲。该沿着边缘的向内弯曲引起环氧树脂层的厚度不均匀。这使得环氧树脂层在靠近边缘处比所期望的薄。
图1B示出了使用根据现有技术的微型工具形成的环氧树脂层。如图1B中所示，由于微型工具板的弯曲，靠近环氧树脂层110边缘的特征111变形。该弯曲可能会遍布，以致在衬底核心115中产生“陷窝”112。另外，凸起部分106用作微型工具的支脚，因而能够使衬底核心115产生陷窝。
通过计量材料量以限制溢出，在一定限度内解决了这个问题。这没有证明是非常有效的；当使用不足的环氧树脂量时，其结果为上述有缺陷的部分。当使用过多的环氧树脂量时，其过多的量沿着衬底的边缘形成，因而使得随后的平面化处理耗时更长。另外，其过多的材料不均匀，因此使得难以在随后的工序中保持真空。此外，其过多的材料使得衬底粘住微型工具板。移去衬底(例如，将其从板上撬开)会损坏板。
随着时间的过去，微型工具板沿着边缘反复的弯曲会引起边缘变得永久性变形。这种变形导致有缺陷的衬底特征，使其在板上难以保持真空。
图1C示出了根据现有技术的微型工具板的变形。如图1C中所示，板105在边缘120处变形。该变形是由于当压印其中的环氧树脂以非期望的量或位置流动的环氧树脂层时板的反复的弯曲而形成的。
附图说明
参考下面的描述和用来示出本发明实施例的附图，能够最佳地理解本发明。在附图中：
图1A示出了根据现有技术的微型工具；
图1B示出了使用根据现有技术的微型工具形成的环氧树脂层；
图1C示出了根据现有技术的微型工具板的变形；
图2示出了根据本发明一个实施例的微型工具；
图2A示出了根据本发明一个实施例的微型工具，其中两个板中的一个具有侧壁；
图3示出了根据本发明一个实施例的微型工具，其具有带侧壁的板，该侧壁形成为接触衬底核心；
图4示出了根据本发明一个实施例的微型工具，其具有在其中形成的一个或多个排气孔，以改善遍及由侧壁形成的容器的电介质材料的流动；
图4A为根据本发明一个实施例的微型工具板的俯视图，所述微型工具板具有在其中形成的排气道；和
图5示出了根据本发明一个实施例形成微型工具的工序。
具体实施方式
在下面的描述中，陈述了多个具体细节。但是，应当理解，没有这些具体细节，本发明的实施例也可实施。在其它的实例中，未详细示出公知的电路、结构和技术，以不模糊对本说明书的理解。
贯穿该说明书的对“一个实施例”或“实施例”的引用意味着在本发明至少一个实施例中包括结合该实施例描述的特定的特征、结构或特性。这样，在贯穿该说明书的不同位置出现的用语“在一个实施例中”或“在实施例中”不必全部指的是相同的实施例。另外，其特性的特征、结构或特性可以任意适当的方式在一个或多个实施例中组合。
此外，有创造性的方面少于单个公开的实施例中所有的特征。因此，说明书所附的权利要求据此清楚地并入该详细说明书中，每个权利要求基于其本身作为本发明的单独实施例。
图2示出了根据本发明一个实施例的微型工具。图2中示出的微型工具200包括分别在板205a和205b上的侧壁225a和225b。对于本发明的一个实施例，侧壁与板整体地形成，并且以与板相同的材料制成，可为镍或镍合金。这些侧壁绕着微型工具板的压印图案(即，特征)形成容器。侧壁225a和225b的尺寸设定得适于衬底核心215的厚度，使得在板上施加压力时，压印图案向电介质层210中延伸进期望的量。电介质层210可由热固化环氧树脂、热塑性塑料或其它适合的材料组成。对于本发明的一个实施例，侧壁225a和225b中的每个延伸超过压印图案一个大致等于衬底核心215厚度一半的距离。
在板205a和205b上施加压力时，侧壁225a和225b彼此接触。因为侧壁提供了彼此相抵的阻力，所以施加的压力的量不象现有技术设计中那样重要。对于通常使用的压力，由于在侧壁225a和225b之间产生的阻力，所以各板的边缘不会弯曲。另外，在关闭或压印位置，微型工具200封住整个衬底，因此电介质材料不能在微型工具板的边缘上聚积，也不能沿着衬底的边缘形成过多的电介质材料。此外，由于电介质材料不能容易地流到不期望的位置，所以倾斜不会引起缺陷部分。
对于本发明的一个实施例，微型工具的侧壁定位使得在压印时，整个衬底密封在电介质材料中。该实施例会导致减少或消除衬底粘到微型工具上的可能性。
本发明的各种可选实施例减少或消除了微型工具板沿着边缘的弯曲、由于倾斜引起的电介质材料到不期望位置的流动、以及过多的电介质材料沿着衬底边缘的聚积，因此提供了具有大致为7微米的总厚度变动(TTV)的压印衬底。
在可选实施例中，只有其中一个微型工具板可包括侧壁。图2A示出了根据本发明一个实施例其中两个板中的一个具有侧壁的微型工具。图2A中所示的微型工具200A包括形成在下部板205b上的侧壁225。板205a不包括侧壁。对于该实施例，侧壁225的高度基于衬底核心215，使得在板上施加压力时，压印图案向电介质层210延伸进期望的量。
如上面参考图2所述，根据本发明一个实施例的微型工具具有在压印处理期间彼此接触的侧壁。对于该实施例，侧壁的高度在严格的公差范围内确定，以确保侧壁不阻止压印图案与电介质层正确地接触。
图3示出了根据本发明一个实施例的微型工具，其具有带侧壁的板，该侧壁用以接触衬底核心。图3所示的微型工具300包括分别在板305a和305b上的侧壁325a和325b。如图3中所示，在向板施加压力时，侧壁接触衬底核心315。每个侧壁325a和325b绕着各自微型工具板305a和305b的压印图案形成容器。
对于该实施例，不再必须基于衬底核心的厚度确定侧壁的高度。侧壁的高度而是大致等于特征尺寸。该实施例允许加工的简便性。但是，因为侧壁会与衬底核心相接触，所以在施加的压力上必须遵守更加严格的公差，以避免使衬底核心产生陷窝，或者损坏衬底核心的电路。
图4示出了根据本发明一个实施例的微型工具，其具有在其中形成的一个或多个排气道，以改善遍及由侧壁形成的容器的电介质材料的流动。如图4中所示，微型工具400具有在上部板405a中形成的排气道430。排气道可形成在板上的任意位置，并可另外地或替代地形成在下部板405b上。电介质材料流进由微型工具板形成的容器的某些区域可能性较小。例如，电介质材料流进容器的上角(即，由上部板侧壁形成的角)可能性较小。排气道有助于电介质材料从电介质层410流进容器中的该区域。此外，排气道允许其过多的电介质材料从容器溢出，从而不在衬底或微型工具板上聚积。
图4A为根据本发明一个实施例的微型工具板的俯视图，所述微型工具板具有在其中形成的排气道。
图5示出了根据本发明一个实施例形成微型工具的工序。图5中所示的工序500从操作505开始，该步骤中确定衬底的尺寸。其尺寸可包括衬底核心厚度，以及电介质层厚度和要压印在衬底上的特征的尺寸。
在操作510，基于衬底尺寸确定微型工具板的侧壁高度。例如，对于上面参考图2描述的微型工具，其中各侧壁会与相对的板上的侧壁相接触，使用衬底核心厚度以及特征尺寸来确定侧壁高度。对于该实施例，各板的侧壁高度大致等于特征高度与衬底核心厚度的一半相加之和。对于参考图3描述的微型工具，各板的侧壁高度大致等于特征高度。
在操作515，形成微型工具，其在至少一个绕着压印图案的板上具有所确定高度的侧壁。另外，微型工具的一个或两个板可具有在其中形成的排气道，以辅助电介质材料的流动，如上面参考图4和4A所描述的。
尽管已经根据几个实施例描述了本发明，但是本领域的技术人员会认识到本发明不限于描述的实施例，而是能够在所附权利要求的精神和范围内通过修改和替代予以实施。因此本说明书应看作是示意性的，而不是限制性的。

Claims (24)

1.一种设备，包括：
一个或多个板，每个板都具有在其上形成的相应的压印图案；以及
一个或多个侧壁，每个侧壁都环绕着各自板的相应的压印图案。
2.如权利要求1所述的设备，其中每个侧壁都与各自的板整体地形成。
3.如权利要求1所述的设备，其中每个板都为大致30密耳厚的金属板，该金属从主要包括镍和镍合金的组中选择。
4.如权利要求1所述的设备，其中至少一个板具有在其中形成的一个或多个排气道。
5.一种微型工具，包括：
上部板，具有在其上形成的第一压印图案，该上部板具有绕着第一压印图案的第一侧壁；以及
下部板，具有在其上形成的第二压印图案，该下部板具有绕着第二压印图案的第二侧壁。
6.如权利要求5所述的微型工具，其中在施加压力时，第一侧壁与第二侧壁相接触，使得第一侧壁有助于减小下部板的弯曲并且第二侧壁有助于减小上部板的弯曲。
7.如权利要求6所述的微型工具，其中与第二侧壁相接触的第一侧壁形成了衬底电介质材料的容器，使得减少了过多的电介质材料在衬底、上部板和下部板上的聚积。
8.如权利要求6所述的微型工具，其中第一侧壁和第二侧壁的高度基于要压印的衬底的衬底核心的厚度来确定。
9.如权利要求5所述的微型工具，其中各上部板和下部板都为大至30密耳厚的金属板，该金属从主要包括镍和镍合金的组中选择。
10.如权利要求5所述的微型工具，其中在施加压力时，第一侧壁与衬底核心的上表面相接触，第二侧壁与衬底核心的下表面相接触，使得衬底核心有助于减小下部板的弯曲和上部板的弯曲。
11.如权利要求10所述的微型工具，其中与衬底核心上表面接触的第一侧壁形成衬底电介质材料的容器，使得减小了过多的电介质材料在衬底和上部板上的聚积，并且与衬底核心下表面接触的第二侧壁形成衬底电介质材料的容器，使得减小了过多的电介质材料在衬底和下部板上的聚积。
12.如权利要求5所述的微型工具，其中上部板和下部板中的至少一个具有形成在其中的一个或多个排气道。
13.一种微型工具，包括：
板，具有形成在其上的相应的压印图案，该压印图案由形成在板上的侧壁围绕；以及
相对的板，具有形成在其上的相应的压印图案。
14.如权利要求13所述的微型工具，其中在施加压力时，侧壁与相对的板的表面相接触，使得与相对的板的表面相接触的侧壁有助于减小板和相对的板的弯曲。
15.如权利要求13所述的微型工具，其中与相对的板的表面相接触的侧壁形成衬底电介质材料的容器，使得减小了过多的电介质材料在衬底、上部板和下部板上的聚积。
16.如权利要求15所述的微型工具，其中板具有在其中形成的一个或多个排气道。
17.一种方法，包括：
确定衬底的一个或多个尺寸；
基于衬底的尺寸确定微型工具板的侧壁高度；和
形成具有一个或多个板的微型工具，每个板都具有形成在其上的相应的压印图案，至少一个板具有侧壁，每个侧壁都环绕着各自板的相应的压印图案。
18.如权利要求17所述的方法，还包括：
在微型工具的一个或多个板中形成排气道。
19.如权利要求17所述的方法，其中每个侧壁都与各自的板整体地形成。
20.如权利要求17所述的方法，其中每个板都为大约30密耳厚的金属板，该金属从主要包括镍和镍合金的组中选择。
21.如权利要求17所述的方法，还包括：
在微型工具的两个相对的板中的每一个上都形成侧壁，其中在施加压力时，各侧壁与相对的板的侧壁相接触，使得各板的侧壁有助于防止相对的板的弯曲。
22.如权利要求21所述的方法，其中彼此相接触的侧壁形成衬底电介质材料的容器，使得减小了过多的电介质材料在衬底和两个板中每一个上的聚积。
23.如权利要求17所述的方法，还包括：
在微型工具的一个或多个相应的板中的每一个上都形成侧壁，其中在施加压力时，各侧壁与衬底核心相接触，使得与衬底核心相接触的侧壁有助于防止相应的板的弯曲。
24.如权利要求17所述的方法，还包括：
使用微型工具压印衬底。
CNA2005800265035A 2004-08-05 2005-07-20 压印衬底的方法和设备 Pending CN1994032A (zh)

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