CN1992190B - Semiconductor process evaluation methods including variable ion implanting conditions - Google Patents
Semiconductor process evaluation methods including variable ion implanting conditions Download PDFInfo
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- CN1992190B CN1992190B CN2006101712831A CN200610171283A CN1992190B CN 1992190 B CN1992190 B CN 1992190B CN 2006101712831 A CN2006101712831 A CN 2006101712831A CN 200610171283 A CN200610171283 A CN 200610171283A CN 1992190 B CN1992190 B CN 1992190B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
Semiconductor process evaluation methods perform multiple scans of a test semiconductor substrate (e.g., test wafer) using ion beams under different ion implanting conditions. Parameters of the test semiconductor substrate that was scanned using the ion beams under different ion implanting conditions are then measured to conduct the semiconductor process evaluation.
Description
The application requires the priority of the korean patent application submitted on December 29th, 2005 10-2005-0133030 number, and its full content is hereby incorporated by.
Technical field
The present invention relates to a kind of method, semi-conductor device manufacturing method, more specifically, relate to semiconductor process evaluation methods.
Background technology
In semiconductor fabrication process, carry out multiple test process to find out expection or appropriate processing condition and/or determine whether the technology of carrying out is desirable under predetermined process conditions.In test process, can measure treated thickness of structure, resistance and/or particle.Like this, because wafer may be impaired in test process, so often exist test process can not be formed with situation about carrying out on the wafer of practical devices thereon.In this case, use independent blank wafer as testing wafer to be used to be evaluated at the technology of each wafer ad-hoc location.On the product wafer, carry out after the technology, can on testing wafer, carry out identical technology.In order to assess the result of product wafer, on testing wafer, carry out test process.
The number of handled testing wafer can increase along with the increase of the technology number of needs tests.Thereby the manufacturing cost of corresponding semiconductor chip can increase.Particularly, process comprises that the testing wafer of the series of process of ion implantation technology can not be utilized usually once more.
Summary of the invention
Semiconductor process evaluation methods according to certain embodiments of the invention utilizes ion beam to carry out the multiple scaaning of measuring semiconductor substrate (for example, testing wafer) under different ion implanting conditions.Measure the parameter of the described measuring semiconductor substrate that under different ion implanting conditions, utilizes ion-beam scanning then, thereby implement described semiconductor technology assessment.Therefore, according to some embodiment, utilize the different kinds of ions injection condition on single wafer, to form to be identified for a plurality of semiconductor tests (being also referred to as " unit device (unit devices) ") of process conditions of the best and/or expection of final products, this can be used in technological evaluation wafer decreased number or minimize, and can reduce/minimize assessed cost.
According to some embodiment of the present invention, semiconductor process evaluation methods is divided into the measuring semiconductor substrate a plurality of zones and utilizes the described zone of ion-beam scanning under different ion implanting conditions.Measurement utilizes the parameter in a plurality of zones of the described measuring semiconductor substrate of ion-beam scanning under different ion implanting conditions, thereby implements described semiconductor technology assessment.
In the state-variable of the groove orientation of described ion implanting conditions by comprising ion dose, dopant type, ion implantation energy, ion implantation angle and/or described measuring semiconductor substrate at least one differs from one another.
Can utilize electrostatic scanning method, mechanical scanning method and/or mixed sweep method to carry out scanning by ion implantation apparatus for described zone.
Can change described ion implanting conditions by changing ion dose, and in order to change described ion dose, described method can also be included in the sweep speed that changes described ion beam on the direction of described measuring semiconductor substrate.
The sweep length of the single pass of described ion beam can be greater than or less than the diameter of described measuring semiconductor substrate.
In other embodiments, can change described ion implanting conditions by changing ion dose, and in order to change described ion dose, described method can also comprise that speed change moves described measuring semiconductor substrate.Can on vertical and/or horizontal direction, carry out moving of described measuring semiconductor substrate.
Can be included in cutting for the scanning in described zone and be positioned under the state of primary importance and utilize the described measuring semiconductor substrate of described ion-beam scanning on the first direction of described measuring semiconductor substrate, to change described ion implanting conditions simultaneously, and be positioned in described cutting under the state of the second place and utilize the described measuring semiconductor substrate of described ion-beam scanning on the second direction of described measuring semiconductor substrate, to change described ion implanting conditions simultaneously.
For described cutting is moved to the described second place from described primary importance, can be with described measuring semiconductor substrate about being positioned at the rotating shaft rotation predetermined angular of described measuring semiconductor substrate center.
Alternatively, can change described ion implanting conditions by changing ion dose, and can be included in cutting for the scanning of described measuring semiconductor substrate and be positioned under the state of primary importance and utilize the described measuring semiconductor substrate of described ion-beam scanning on the first direction of described measuring semiconductor substrate, to change the sweep speed of described ion beam simultaneously, and be positioned in described cutting under the state of the second place and utilize the described measuring semiconductor substrate of described ion-beam scanning on the second direction of described measuring semiconductor substrate, to change the sweep speed of described ion beam simultaneously.For described cutting is moved to the described second place from described primary importance, can be with described measuring semiconductor substrate about being positioned at the rotating shaft rotation predetermined angular at described Semiconductor substrate center.
These methods can also comprise, after the described measuring semiconductor substrate of scanning, at least one zone of described measuring semiconductor substrate is divided into a plurality of subregions and forms different metal line layers on described subregion.
Described metal line layer can form word line, bit line, electrode for capacitors, fuse and/or conductive welding disk.When described metal line layer formed word line, described word line can have different width according to described subregion.
According to other embodiments of the invention, semiconductor process evaluation methods is included in and forms a plurality of different metal line layers on each zone of dividing of measuring semiconductor substrate, and at least one of the described zone of dividing is divided into a plurality of subregions and utilizes the described subregion of ion-beam scanning under different ion implanting conditions.。Measurement utilizes the parameter of described a plurality of subregions of the described measuring semiconductor substrate of described ion-beam scanning under different ion implanting conditions, thereby implements described semiconductor technology assessment.
Described metal line layer can form gate electrode layer, and the gate electrode layer in described zone can have different length each other.
By utilizing the scanning of described ion beam execution for subregion, can be by being formed for the ion implanted region territory of oxide-semiconductor control transistors threshold voltage in the described measuring semiconductor substrate of ion beam under gate electrode layer, described transistor forms by gate electrode layer, regions and source, shallow ion injection zone and/or lightly doped drain zone.
According to some embodiment of the present invention, because can on each zone of dividing of given testing semiconductor wafer, form the unit device that structure and/or process conditions differ from one another, so the kinds of processes assessment that can utilize a semiconductor wafer only or a spot of semiconductor wafer to carry out to be used to the kinds of processes of making semiconductor device makes the parameter evaluation cost reduce thus or minimizes.In addition, owing to can carry out various technological evaluations by simple method, so can shorten the turnaround time.
Description of drawings
By the detailed description of reference accompanying drawing to its exemplary embodiment, above and other feature of the present invention and advantage will become more obvious, wherein:
Fig. 1 is the flow chart according to the semiconductor process evaluation methods of certain embodiments of the invention;
Fig. 2 A to 2F illustrates the figure that the measuring semiconductor substrate can be divided into multiple shape according to certain embodiments of the invention;
Fig. 3 is the view according to the electrostatic scanning method of the embodiment of the invention;
Fig. 4 is the view according to the revision of the electrostatic scanning method of Fig. 3 of the embodiment of the invention;
Fig. 5 is the view according to the mechanical scanning method of other embodiments of the invention;
Fig. 6 A to 6C illustrates according to certain embodiments of the invention to utilize the electrostatic scanning method of Fig. 3 or 4 or the mechanical scanning method of Fig. 5 also to pass through the rotary test Semiconductor substrate, forms the precedence diagram of the technology in the zone of being divided on the measuring semiconductor substrate;
Fig. 7 A to 7C illustrates the figure that forms the example of metal line layer according to certain embodiments of the invention on the subregion that forms under the different ion implanting conditions;
Fig. 8 is the indicative flowchart according to the semiconductor process evaluation methods of other embodiments of the invention;
Fig. 9 A to 9C illustrates multiple zone that can be divided into according to certain embodiments of the invention measuring semiconductor substrate and the figure that forms multiple different metal line layer on the zone of being divided; And
Figure 10 is a form, shows condition that the method utilization according to Fig. 1 to 8 provides as example in Fig. 7 C forms the unit device on the measuring semiconductor substrate situation.
Embodiment
Hereinafter the present invention is done more fully and describe, exemplary embodiment of the present invention has been shown in the accompanying drawing with reference to accompanying drawing.Yet the present invention can implement with multiple different form, and should not be interpreted as only limiting to exemplary embodiment described herein.And it is in order to make the disclosure thorough and complete that these disclosed embodiment are provided, and scope of the present invention is fully conveyed to those skilled in the art.In the accompanying drawing, for exaggerating the size and the relative size in floor and district for the purpose of clear.Represent components identical with identical Reference numeral in the whole text.
Be to be understood that, when claim an element or one deck another element or layer " on ", when " being connected to " and/or " being coupled to " another element or layer, it can be directly, be connected to or be coupled on another element or the layer, perhaps can also have the element or the layer of insertion.On the contrary, when claiming that an element " directly exists ", when " being directly connected to " and/or " being directly coupled to " another element or layer are gone up, then not having insertion element or layer.As used herein, term " and/or " can comprise any of one or more listed relevant items and all combinations.
Though should be appreciated that and can use the term first, second, third, etc. to describe various elements, assembly, zone, layer and/or part here, these elements, assembly, zone, layer and/or part should not be subject to these terms.These terms only are used for an element, assembly, zone, layer and/or part and another zone, layer and/or zone that portion divided are not opened.For example, first element discussed below, assembly, zone, layer and/or part can be called second element, assembly, zone, layer and/or part without departing from the premise in the spirit of the present invention.
For ease of describing, can use herein such as " ... under ", " (lower) down ", " ... on ", " going up (upper) " or the like space relativity term with describe as shown in the figure element and/or the relation between parts and another (a bit) element and/or the parts.Should be appreciated that space relativity term is the different orientation that is used for summarizing use except that orientation shown in the accompanying drawing or the device in the operation.For example, if the device in the accompanying drawing turns, be described to " " other elements or parts " under " element will be oriented in other elements or parts " on ".Like this, exemplary term " ... under " just can contain on and under two kinds of orientations.Device can be taked other orientations (revolve turn 90 degrees or in other orientations), and space relativity descriptor used herein is done respective explanations.In addition, term " ... following " also represent one deck or the zone with respect to the relation between substrate and opposite side or the zone, as shown in the figure.
Terminology used here only is in order to describe specific embodiment, not really want to limit the present invention.As used herein, unless context has clearly statement in addition, otherwise singulative " " and " being somebody's turn to do " all are intended to comprise plural form simultaneously.Need further be understood that, term " comprises ", " comprising ", " containing " and/or " having " be when using in this manual, specify the existence of described characteristic, integral body, step, operation, element and/or assembly, but do not got rid of the existence or the increase of one or more other characteristics, integral body, step, operation, element, assembly and/or its combination.
Here describe exemplary embodiment of the present invention with reference to sectional view, these figure are the schematic diagram of idealized embodiment of the present invention (and intermediate structure).Thereby for instance, the variation of the illustration shape that is caused by manufacturing technology and/or tolerance is contingent.Therefore, unless clearly definition herein, exemplary embodiment disclosed in this invention should not be interpreted as the given shape in the zone that only limits to illustrate herein, but comprise by for example making the form variations that causes.For example, the zone that is injected into that is illustrated as rectangle typically will have the feature of circle or curve and/or have the gradient of implantation concentration rather than from being injected into the double variation of non-injection zone in its edge.Similarly, can cause certain injection by the buried region that inject to form in the zone between buried region and surface that injection takes place by it.Therefore, unless clearly definition herein, district shown in the drawings comes down to schematically, and their shape does not really want to show the accurate shape of device area, does not really want to limit the scope of the invention yet.
Following reference is described the present invention according to the block diagram of the embodiment of the invention and/or the schematic flow sheet of method and/or equipment (system).The combination that it should be understood that square frame in square frame in block diagram and/or the schematic flow sheet and block diagram and/or the schematic flow sheet can embody equipment/system's (structure), device (function) and/or the step (method) of the function/action that is used for being implemented in block diagram and/or flow chart element or square frame appointment.
Should also be noted that in some optional implementation the function/action of note can be with occurring in sequence beyond the order shown in the flow process in the square frame.For example, depend on the function/action that is comprised, be depicted as that two continuous square frames can be carried out in fact substantially simultaneously or all square frames can be carried out with opposite order sometimes.And the function of the given square frame of flow chart and/or block diagram can be divided into the function of two or more square frames of a plurality of square frames and/or flow chart and/or block diagram and can integrate at least in part.
Unless otherwise defined, all terms (comprising technical term and scientific terminology) that herein use all have the same implication of the those of ordinary skill institute common sense in the affiliated field of the present invention.Further should be understood that, such as defined term in the universaling dictionary, unless clearly define, otherwise should be interpreted as having and the corresponding to implication of they implications in the linguistic context of association area, and should not be interpreted as Utopian or excessive formal meaning herein.
Some embodiment of the present invention can come from following understanding, and promptly in the semiconductor process evaluation methods of routine, in order to assess ion implantation technology, one group of process conditions forms a unit device on a wafer by only using when handling wafer.Therefore, common employed wafer number is identical with the number of the group of the ion implanting conditions that will test.Use not ion implanting conditions on the same group and test described wafer for wafer.One of these conditions can be relevant with ion beam, if thereby ion beam under uniform condition or ion beam be launched in the fixed position then under the situation that wafer at the uniform velocity moves the uniform speed scanning wafer surface on wafer surface, inject ion.
And some embodiment of the present invention can come from following understanding, that is, when carrying out technological evaluation according to conventional methods, the number of testing wafer is along with the increase of the number of the actual wafer of manufacturing and employed ion implantation technology number and increase.In addition, when for combine with will be in ion implantation technology tested kinds of processes variable carry out technological evaluation such as the kinds of processes variable of other technologies of photoetching whole the time, the required wafer number of technological evaluation can the increase of index ground.Thereby the manufacturing cost of semiconductor chip can enlarge markedly.In addition, the required time of technological evaluation of carrying out testing wafer can increase, and this can reduce productivity ratio.
Obviously opposite with it, according to the semiconductor process evaluation methods of certain embodiments of the invention, under different ion implanting conditions, utilize ion beam to carry out the multiple scaaning of measuring semiconductor substrate (for example wafer).Measurement utilizes the parameter of the measuring semiconductor substrate of ion-beam scanning under the different ions injection condition, thereby implements the semiconductor technology assessment.Therefore, can use single test substrate or a spot of test substrate to test a large amount of different ion implanting conditions/parameters.
Fig. 1 is the flow chart according to the semiconductor process evaluation methods of certain embodiments of the invention.
With reference to Fig. 1, the ion-beam scanning measuring semiconductor substrate under the different ions injection condition or a plurality of zones of wafer (square frame 12).The measuring semiconductor substrate can be divided into a plurality of zones of multiple shape.Semiconductor substrate can comprise single-element and/or compound semiconductor substrate, such as monocrystalline substrate, and can comprise one or more epitaxial loayers and/or other conduction/insulating barriers on it.
Fig. 2 A to 2F is the figure that the example of shape that measuring semiconductor substrate 10 can be divided into is shown.
Fig. 2 A, 2B and 2C show that measuring semiconductor substrate 100 is divided into three zones and under three kinds of different ion implanting conditions A1, A2 and A3 by this trizonal example of ion-beam scanning.Fig. 2 D shows that measuring semiconductor substrate 100 is divided into four zones and the example by these four zones of ion-beam scanning under four kinds of different ion implanting conditions A1, A2, A3 and A4.Fig. 2 E shows that measuring semiconductor substrate 100 is divided into five zones and the example by these five zones of ion-beam scanning under five kinds of different ion implanting conditions A1, A2, A3, A4 and A5.Fig. 2 F shows that measuring semiconductor substrate 100 is divided into nine zones and the example by these nine zones of ion-beam scanning under nine kinds of different ion implanting conditions A1, A2, A3, A4, A5, A6, A7, A8 and A9.In Fig. 2 A to 2F, Reference numeral 100a represents cutting (notch).Relation between the position of cutting 100a and the zone of being divided is not limited to the example of Fig. 2 A to 2F.That is to say that cutting 100a can be formed on multiple position.In addition, the number in the zone of being divided and shape also are not limited to the example of Fig. 2 A to 2F.
Change ion implanting conditions A1 to A9 by at least one that changes in a plurality of state-variables of representing the ion implantation technology feature, such as ion dose, dopant type, ion implantation energy, ion implantation angle or the like.
For the zone of being divided of scintigram 2A to 2F, can use the different kinds of ions injection device that utilizes electrostatic scanning method, mechanical scanning method, mixed sweep method etc.
Fig. 3 is the view according to the electrostatic scanning method of the measuring semiconductor device of certain embodiments of the invention.In these electrostatic scanning methods, measuring semiconductor substrate 100 is fixed on the electrostatic chuck (not shown) that is installed on the driving shaft 102, and utilize ion beam 30 to repeat in X-direction, be the scanning on the horizontal direction, sweep test Semiconductor substrate thus 100.
With reference to Fig. 3, for at ion beam 30 area change ion dose of being divided according to Semiconductor substrate 100 when having the slit 42a sweep test Semiconductor substrate 100 of predetermined length La, can change the sweep speed of the ion beam of sweep test Semiconductor substrate 100.Represent to be used for variation by the arrow among Fig. 3 52,54 and 56 according to the sweep speed of the area change ion dose of being divided.Wherein the sweep speed of the thickness of each arrow and the corresponding regional intermediate ion bundle of dividing 30 is proportional.When the sweep speed of ion beam changed as shown in Figure 3, the ion dose that puts on the zone of being divided of measuring semiconductor substrate can change.
When ion beam 30 by slit 42a on X-direction during sweep test Semiconductor substrate 100, can be corresponding to the sweep length of the single pass of slit length La greater than the diameter of measuring semiconductor substrate 100.Yet, the invention is not restricted to these embodiment.That is to say that when ion beam 30 scanned divided regional, the sweep length of the single pass of ion beam 30 can be arranged to the diameter less than measuring semiconductor substrate 100.
Fig. 4 is the view according to the revision of the electrostatic scanning method of Fig. 3 of the embodiment of the invention.With reference to Fig. 4, use the ion implantation apparatus of the single pass length that ion beam 30 differently is set.That is, ion implantation apparatus comprises that its length L a is greater than the slit 42a of the diameter of measuring semiconductor substrate 100 and have respectively less than the single pass length L b of measuring semiconductor substrate 100 diameters and slit 42b and the 42c of Lc.
In Fig. 4, ion beam strides across length L b and the Lc sweep test Semiconductor substrate of each slit 42b and 42c.If desired, as shown in Figure 4, multiple slit 42a, 42b and the 42c of different scanning length L a, Lb and Lc can be set, wherein at least two kinds perhaps can be set.When ion beam by selectivity or when sequentially utilizing slit 42a, 42b and 42c sweep test Semiconductor substrate 100, ion can be injected in the expected areas of measuring semiconductor substrate with the width of expection.In addition, as shown in Figure 3, the ion beam that passes a plurality of slit 42a, 42b and 42c can be with different sweep speed sweep test Semiconductor substrate.That is, sweep speed can change on X-direction.When ion beam utilizes the ion injection method sweep test Semiconductor substrate 100 of Fig. 4, can effectively control scanning area, scanning position and/or the scanning width that Semiconductor substrate scans by slit that optionally utilize to be fit to and the position that changes slit.In this case, can utilize ion implantation apparatus with multiple slit.
Fig. 5 is the view according to the mechanical scanning method of the measuring semiconductor device of other embodiments of the invention.In this mechanical scanning method, the fixed-site of ion beam 30, and move or during rotation ion-beam scanning measuring semiconductor substrate 100 in X or Y direction (level or vertical direction) at measuring semiconductor substrate 100.
With reference to Fig. 5, for when the ion beam 30 sweep test Semiconductor substrate 100 according to the area change ion dose of being divided of measuring semiconductor substrate 100, can change measuring semiconductor substrate 100 for the relative position of ion beam 30 and can change the translational speed of measuring semiconductor substrate 100.By arrow 151,152,153,154,155 and 156 expressions for variation according to the speed that moves horizontally of the measuring semiconductor substrate 100 of the area change ion dose of being divided.By arrow 161,162,163,164,165 and 166 expressions for variation according to the vertical moving speed of the substrate of measuring semiconductor in vertical direction 100 of the area change ion dose of being divided.In Fig. 5, direction indicated by the arrow and translational speed can change according to the ion implanting conditions of expection.
In Fig. 5, the translational speed of the thickness of each arrow and measuring semiconductor substrate 100 is proportional.As shown in Figure 5, when the translational speed of measuring semiconductor substrate 100 changes, can apply different kinds of ions dosage by the zone of being divided of 30 pairs of measuring semiconductor substrates of ion beam.
When use has utilized ion implantation apparatus in conjunction with the mixed sweep method of the method for Fig. 3 and 5, can reach identical effect.In the ion implantation apparatus that utilizes the mixed sweep method, ion beam can first party in one plane moves up and measuring semiconductor substrate 100 can be on described plane moves up such as the second party that right angle and first direction intersect with an angle, in the meantime, ion-beam scanning measuring semiconductor substrate.
When the ion injection method that uses Fig. 3 and 5 or combine Fig. 3 and during the mixed sweep method of 5 ion injection method, can by in conjunction with the variation of ion-beam scanning speed on the rotation of measuring semiconductor substrate 100 and the predetermined direction and/or combine the rotation of measuring semiconductor substrate 100 and predetermined direction on the variation of translational speed of measuring semiconductor substrate 100, the zone of being divided of formation measuring semiconductor substrate under multiple different ions injection condition.
Fig. 6 A to 6C is the precedence diagram that technology is shown, and it utilizes the electrostatic scanning method of Fig. 3 or 4 or the mechanical scanning method of Fig. 5 also to pass through rotation Semiconductor substrate 100 according to certain embodiments of the invention, forms the zone of being divided on measuring semiconductor substrate 100.
With reference to Fig. 6 A, at first measuring semiconductor substrate 100 is divided into three zones and under three kinds of different ion implanting conditions A, B and C by these three zones of ion-beam scanning.Ion implanting conditions A, B and C differ from one another by at least one state-variable, and described state-variable is such as being ion dose, dopant type, ion implantation energy and/or ion implantation angle.Then, at arrow R
1On the represented direction measuring semiconductor substrate 100 revolved and turn 90 degrees.
With reference to Fig. 6 B, by being revolved, measuring semiconductor substrate 100 turn 90 degrees, and make cutting 100a move 90 along the clockwise direction of Fig. 6 B and spend to the position shown in Fig. 6 B.At this state, measuring semiconductor substrate 100 further is divided into three zones and under three kinds of different ion implanting conditions a, b and c by these three zones of ion-beam scanning.Ion implanting conditions a, b and c differ from one another by at least one state-variable, and described state-variable is such as being ion dose, dopant type, ion implantation energy and/or ion implantation angle.Therefore, each in three zones that are divided in Fig. 6 A further is divided into three zones.As a result, be formed on nine zones that are scanned under the different ions injection condition on the measuring semiconductor substrate 100.Then, at arrow R
2On the represented direction measuring semiconductor substrate 100 revolved and turn 90 degrees.
With reference to Fig. 6 C, by being revolved, measuring semiconductor substrate 100 turn 90 degrees, and make cutting 100a move 90 along the clockwise direction of Fig. 6 C and spend to the position shown in Fig. 6 C.At this state, measuring semiconductor substrate 100 further is divided into three zones and under three kinds of different ion implanting conditions I, II and III by these three zones of ion-beam scanning.Ion implanting conditions I, II and III differ from one another by at least one state-variable, and described state-variable is such as being ion dose, dopant type, ion implantation energy and/or ion implantation angle.Thereby, be formed on nine zones that are scanned under the different ions injection condition on the measuring semiconductor substrate 100.
Relation between the position of cutting 100a and the zone of being divided is not limited to the example of Fig. 6 A to 6C.Can utilize the multiple direction of the location of cutting 100a to divide described zone.That is to say, can form cutting 100a in multiple position.In addition, the number in the zone of being divided and shape are not limited to the embodiment of Fig. 6 A to 6C.
Referring again to Fig. 1, after on measuring semiconductor substrate 100, forming a plurality of zones under the different ion implanting conditions (square frame 12), at least one zone of Semiconductor substrate 100 further is divided into a plurality of subregions (square frame 14).
Then, under different condition, on subregion, form a plurality of metal line layers, make each sub regions have different shape (square frame 16).
At last, measure a plurality of zones of the measuring semiconductor substrate 100 that under the different ions injection condition, utilizes ion-beam scanning and/or the parameter of subregion, thereby implement semiconductor technology assessment (square frame 18).Corresponding to a plurality of zones and/or subregion, can use multiple general measure technology for given measuring semiconductor substrate 100.The measuring technique of each parameter is well-known to those skilled in the art, need not to describe in detail herein.
Fig. 7 A to 7C illustrates the figure that forms the example of metal line layer according to certain embodiments of the invention on formed subregion under the different ions injection condition.
With reference to Fig. 7 A, corresponding to the example shown in Fig. 2 E, measuring semiconductor substrate 100 is divided into five zones and under five kinds of different ion implanting conditions A1, A2, A3, A4 and A5 by these five zones of ion-beam scanning.Then, measuring semiconductor substrate 100 further is divided into three sub regions SUB-1, SUB-2 and SUB-3.Under three kinds of different etching condition P1, Q1 and R1, on three sub regions SUB-1, SUB-2 and SUB-3, form metal line layer respectively.
With reference to Fig. 7 B, also corresponding to the example shown in Fig. 2 E, measuring semiconductor substrate 100 is divided into five zones and under five kinds of different ion implanting conditions A1, A2, A3, A4 and A5 by these five zones of ion-beam scanning.Then, measuring semiconductor substrate 100 further is divided into three sub regions SUB-1, SUB-2 and SUB-3.Under three kinds of different etching condition P2, Q2 and R2, on three sub regions SUB-1, SUB-2 and SUB-3, form metal line layer respectively.
With reference to Fig. 7 C, corresponding to the example shown in Fig. 2 A, measuring semiconductor substrate 100 be divided into three zones and under three kinds of different ion implanting conditions A1, A2 and A3 by these three zones of ion-beam scanning.Then, measuring semiconductor substrate 100 further is divided into three sub regions SUB-1, SUB-2 and SUB-3.Under three kinds of different etching condition P3, Q3 and R3, on three sub regions SUB-1, SUB-2 and SUB-3, form metal line layer respectively.
In Fig. 7 A, 7B and 7C, the metal line layer that utilizes photoetching process to form under different condition can have different width.For example, metal line layer can be corresponding to the word line that is used for producing the semiconductor devices, bit line, electrode for capacitors, fuse and/or conductive welding disk.When metal line layer is when forming the word line of gate electrode, can use different etching conditions and make the gate electrode of each sub regions have different length.
In the method for Fig. 1, on measuring semiconductor substrate 100, forming a plurality of zones (square frame 12) afterwards under the different ions injection condition, at least one zone of measuring semiconductor substrate 100 further is divided into subregion, on described subregion, forms different metal line layers then.Yet, the invention is not restricted to Fig. 1 technology this order.For example, can after forming metal line layer, carry out ion implantation technology.
Fig. 8 is the indicative flowchart of other embodiment of the present invention.Except at first under the multiple different etching condition in forming on the measuring semiconductor substrate the metal line layer, these embodiment and Fig. 1 are similar.
Form respectively and have difform a plurality of metal line layer each other the measuring semiconductor substrate is divided into a plurality of zones (square frame 82).
Fig. 9 A to 9C illustrates multiple zone that can be divided into according to certain embodiments of the invention measuring semiconductor substrate and the figure that forms multiple different metal line layer on the zone of being divided.With reference to Fig. 9 A to 9C, measuring semiconductor substrate 100 is divided into a plurality of zoness of different and on the zone of being divided, forms multiple different metal line layer.
With reference to Fig. 9 A, measuring semiconductor substrate 100 is divided into three zones and utilizes different etching condition P1, Q1 on these three zones, to form three kinds of different metal line layers with R1.With reference to Fig. 9 B, measuring semiconductor substrate 100 is divided into three zones and utilizes different etching condition P2, Q2 on these three zones, to form three kinds of different metal line layers with R2.With reference to Fig. 9 C, measuring semiconductor substrate 100 is divided into four zones and utilizes different etching condition P3, Q3, R3 and S3 on these four zones, to form four kinds of different metal line layers.
Then, in the zone of being divided at least one is divided into a plurality of subregions (square frame 84).In order to achieve this end, example that can application drawing 2A to 2F.
Then, under different ion implanting conditions by ion-beam scanning subregion (square frame 86).In this, can utilize the multiple combination of the ion implanting conditions similar to the example shown in Fig. 3 to 5 and Fig. 6 A to 6C.
For example, the metal line layer of square frame 82 can be corresponding to gate electrode layer, ion implanted region territory, regions and source, shallow ion injection zone and/or lightly doped drain zone, and can form under gate electrode layer by the ion-beam scanning of carrying out in square frame 86.Alternatively, can come doping metals line layer with ionic impurity by the ion-beam scanning of in square frame 86, carrying out.
Thereby, the zone that forms by the whole bag of tricks in the square frame 82 can be combined with the subregion that forms by the whole bag of tricks in the square frame 86, on measuring semiconductor substrate 100, form multiple unit device.Measurement parameter in square frame 88 then.
Figure 10 is a form, shows the situation that forms the unit device in Fig. 7 C according to the condition that provides as example referring to figs. 1 to 8 described method utilizations on the measuring semiconductor substrate.
With reference to Figure 10, can notice that nine wafers that are used for nine kinds of different conditions traditionally prepare nine unit devices.Yet in certain embodiments of the present invention, utilize nine kinds of different preparation conditions, only use a wafer to prepare nine unit devices.
In the above description, use the process conditions that ion implanting conditions, etching condition and combination thereof are used as being used for manufacturer's device.Yet, the invention is not restricted to this situation.That is to say that those of ordinary skills it should be understood that and can only utilize a wafer, the various combinations of various other conditions and different condition are used for manufacturer's device.
According to some embodiment of the present invention, owing to can on each zone of dividing of a testing semiconductor wafer, form the unit device that has different structure each other and utilize different condition to form, so the kinds of processes assessment that can utilize a testing semiconductor wafer only or a spot of testing semiconductor wafer to carry out to carry out for the kinds of processes that is used for producing the semiconductor devices makes assessed cost reduce thus or minimizes.In addition, owing to can carry out various technological evaluations by simple method, so can shorten the turnaround time.In addition, owing to can easily carry out the kinds of processes assessment, so can improve technological evaluation efficient and/or precision.Thereby, can more easily realize the production in enormous quantities of the product of latest development.
In drawing and description, embodiments of the invention are disclosed, although used specific term, they only use under common and descriptive meaning, and are not to be the purpose that is in restriction, scope of the present invention is described by claim.
Claims (34)
1. semiconductor process evaluation methods comprises:
The measuring semiconductor substrate is divided into a plurality of zones;
Under different ion implanting conditions, utilize the described zone of ion-beam scanning;
At least one zone of described measuring semiconductor substrate is divided into a plurality of subregions;
On described subregion, form different metal line layers; And
Measurement utilizes described ion-beam scanning and has the parameter in described a plurality of zones of the described measuring semiconductor substrate of described different metal line layer under different ion implanting conditions, thereby implements described semiconductor technology assessment.
2. at least one in the state-variable of method according to claim 1, the wherein said ion implanting conditions groove orientation by comprising ion dose, dopant type, ion implantation energy, ion implantation angle and/or described measuring semiconductor substrate differs from one another.
3. method according to claim 1 wherein utilizes electrostatic scanning method, mechanical scanning method and/or mixed sweep method to carry out scanning for described zone by ion implantation apparatus.
4. method according to claim 1, wherein change described ion implanting conditions by changing ion dose, and in order to change described ion dose, described method also is included in the sweep speed that changes described ion beam on the direction of described measuring semiconductor substrate.
5. method according to claim 1, the sweep length of the single pass of wherein said ion beam is greater than the diameter of described measuring semiconductor substrate.
6. method according to claim 1, the sweep length of the single pass of wherein said ion beam is less than the diameter of described measuring semiconductor substrate.
7. method according to claim 1 wherein change described ion implanting conditions by changing ion dose, and in order to change described ion dose, described method comprises that also speed change moves described measuring semiconductor substrate.
8. method according to claim 7 is wherein carried out moving of described measuring semiconductor substrate in vertical direction.
9. method according to claim 7 is wherein carried out moving of described measuring semiconductor substrate in the horizontal direction.
10. method according to claim 1, wherein the scanning for described zone comprises:
Be positioned in cutting under the state of primary importance, utilize the described measuring semiconductor substrate of described ion-beam scanning on the first direction of described measuring semiconductor substrate, to change described ion implanting conditions simultaneously; And
Be positioned in described cutting under the state of the second place, utilize the described measuring semiconductor substrate of described ion-beam scanning on the second direction of described measuring semiconductor substrate, to change described ion implanting conditions simultaneously.
11. method according to claim 10 wherein for described cutting is moved to the described second place from described primary importance, is rotated predetermined angular with described measuring semiconductor substrate about the rotating shaft that is positioned at described measuring semiconductor substrate center.
12. method according to claim 1 wherein changes described ion implanting conditions by changing ion dose, and wherein comprises for the scanning of described measuring semiconductor substrate:
Be positioned in cutting under the state of primary importance, utilize the described measuring semiconductor substrate of described ion-beam scanning on the first direction of described measuring semiconductor substrate, to change the sweep speed of described ion beam simultaneously; And
Be positioned in described cutting under the state of the second place, utilize the described measuring semiconductor substrate of described ion-beam scanning on the second direction of described measuring semiconductor substrate, to change the sweep speed of described ion beam simultaneously.
13. method according to claim 12 wherein for described cutting is moved to the described second place from described primary importance, is rotated predetermined angular with described measuring semiconductor substrate about the rotating shaft that is positioned at described Semiconductor substrate center.
14. method according to claim 1, wherein said metal line layer forms word line, bit line, electrode for capacitors, fuse and/or conductive welding disk.
15. method according to claim 14, wherein said metal line layer forms described word line, and described word line has different width according to described subregion.
16. a semiconductor process evaluation methods comprises:
On each zone of dividing of measuring semiconductor substrate, form a plurality of different metal line layers;
At least one of the described zone of dividing is divided into a plurality of subregions;
Under different ion implanting conditions, utilize the described subregion of ion-beam scanning;
Measurement utilizes the parameter of a plurality of subregions of the described measuring semiconductor substrate of described ion-beam scanning under different ion implanting conditions, thereby implements described semiconductor technology assessment.
17. method according to claim 16, wherein said metal line layer forms gate electrode layer, and the gate electrode layer in described zone has different length each other.
18. method according to claim 16, wherein by utilizing the scanning of described ion beam execution for described subregion, by being formed for the ion implanted region territory of oxide-semiconductor control transistors threshold voltage in the measuring semiconductor substrate of described ion beam under described gate electrode layer, described transistor forms by described gate electrode layer, regions and source, shallow ion injection zone and/or lightly doped drain zone.
19. method according to claim 16 is wherein by utilizing the described subregion of described ion-beam scanning to utilize the ionic impurity described metal line layer that mixes.
20. at least one in the state-variable of method according to claim 16, the wherein said ion implanting conditions groove orientation by comprising ion dose, dopant type, ion implantation energy, ion implantation angle and/or described measuring semiconductor substrate differs from one another.
21. method according to claim 16 wherein utilizes electrostatic scanning method, mechanical scanning method and/or mixed sweep method to carry out scanning for described subregion by ion implantation apparatus.
22. method according to claim 16, wherein change described ion implanting conditions by changing ion dose, and in order to change described ion dose, described method also is included in the sweep speed that changes described ion beam on the direction of described measuring semiconductor substrate.
23. method according to claim 16, the sweep length of the single pass of wherein said ion beam is greater than the diameter of described measuring semiconductor substrate.
24. method according to claim 16, the sweep length of the single pass of wherein said ion beam is less than the diameter of described measuring semiconductor substrate.
25. method according to claim 16 wherein change described ion implanting conditions by changing ion dose, and in order to change described ion dose, described method comprises that also speed change moves described measuring semiconductor substrate.
26. method according to claim 25 is wherein carried out moving of described measuring semiconductor substrate in vertical direction.
27. method according to claim 25 is wherein carried out moving of described measuring semiconductor substrate in the horizontal direction.
28. method according to claim 16, wherein the scanning for described zone comprises:
Be positioned in cutting under the state of primary importance, utilize the described measuring semiconductor substrate of described ion-beam scanning on the first direction of described measuring semiconductor substrate, to change described ion implanting conditions simultaneously; And
Be positioned in described cutting under the state of the second place, utilize the described measuring semiconductor substrate of described ion-beam scanning on the second direction of described measuring semiconductor substrate, to change described ion implanting conditions simultaneously.
29. method according to claim 28 wherein for described cutting is moved to the described second place from described primary importance, is rotated predetermined angular with described measuring semiconductor substrate about the rotating shaft that is positioned at described measuring semiconductor substrate center.
30. method according to claim 16 wherein changes described ion implanting conditions by changing ion dose, and wherein comprises for the scanning of described measuring semiconductor substrate:
Be positioned in cutting under the state of primary importance, utilize the described measuring semiconductor substrate of described ion-beam scanning on the first direction of described measuring semiconductor substrate, to change the sweep speed of described ion beam simultaneously; And
Be positioned in described cutting under the state of the second place, utilize the described measuring semiconductor substrate of described ion-beam scanning on the second direction of described measuring semiconductor substrate, to change the sweep speed of described ion beam simultaneously.
31. method according to claim 30 wherein for described cutting is moved to the described second place from described primary importance, is rotated predetermined angular with described measuring semiconductor substrate about the rotating shaft that is positioned at described Semiconductor substrate center.
32. a semiconductor process evaluation methods comprises:
Under different ion implanting conditions, utilize ion beam to carry out the multiple scaaning of measuring semiconductor substrate;
Described measuring semiconductor substrate is divided into a plurality of subregions;
On described subregion, form different metal line layers; And
Measurement utilizes described ion-beam scanning and has the parameter of the described measuring semiconductor substrate of described different metal line layer under different ion implanting conditions, thereby implements described semiconductor technology assessment.
33. method according to claim 32, wherein said ion implanting conditions differs from one another by in the state-variable that comprises ion dose, dopant type, ion implantation energy, ion implantation angle and/or described measuring semiconductor substrate groove orientation at least one.
34. method according to claim 32, wherein said measuring semiconductor substrate is a testing semiconductor wafer.
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| KR1020050133030A KR100699889B1 (en) | 2005-12-29 | 2005-12-29 | Method of manufacturing semiconductor device including ion implanting under variable conditions |
| KR133030/05 | 2005-12-29 |
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| CN101393906B (en) * | 2007-09-17 | 2011-07-06 | 中芯国际集成电路制造(上海)有限公司 | Ion injection test body, ion injection region mask board and ion injection test method |
| US20090317937A1 (en) * | 2008-06-20 | 2009-12-24 | Atul Gupta | Maskless Doping Technique for Solar Cells |
| US20100050939A1 (en) * | 2008-08-26 | 2010-03-04 | Promos Technologies Inc. | Method for determining the performance of implanting apparatus |
| FR2941816B1 (en) * | 2009-02-05 | 2011-04-01 | Commissariat Energie Atomique | METHOD OF CHARACTERIZING A METHOD FOR ION IMPLANTATION |
| US8669539B2 (en) * | 2010-03-29 | 2014-03-11 | Advanced Ion Beam Technology, Inc. | Implant method and implanter by using a variable aperture |
| US20110278478A1 (en) * | 2010-05-17 | 2011-11-17 | Causon Ko-Chuan Jen | Method and implanter for implanting a workpiece |
| US9023722B2 (en) * | 2011-05-13 | 2015-05-05 | Varian Semiconductor Equipment Associates, Inc. | Compound semiconductor growth using ion implantation |
| JP5718169B2 (en) | 2011-06-14 | 2015-05-13 | 株式会社Ｓｅｎ | Ion implantation apparatus and ion implantation method |
| CN104022048A (en) * | 2013-03-01 | 2014-09-03 | 中芯国际集成电路制造(上海)有限公司 | Method for monitoring ion implantation angle |
| US9870788B2 (en) * | 2014-01-08 | 2018-01-16 | Western Digital (Fremont), Llc | Method of adjusting tilt using magnetic erase width feedback |
| CN104409378B (en) * | 2014-11-13 | 2017-05-17 | 昆山工研院新型平板显示技术中心有限公司 | Method for monitoring flat-panel display ion implantation device and jig used for the same |
| JP6509089B2 (en) * | 2015-09-30 | 2019-05-08 | 住友重機械イオンテクノロジー株式会社 | Ion implantation system |
| JP6644596B2 (en) * | 2016-03-18 | 2020-02-12 | 住友重機械イオンテクノロジー株式会社 | Ion implantation method and ion implantation apparatus |
| CN111785655A (en) * | 2020-07-27 | 2020-10-16 | 上海华力集成电路制造有限公司 | Online monitoring method and system for ion implantation process |
| CN112125298A (en) * | 2020-08-20 | 2020-12-25 | 中国科学院宁波材料技术与工程研究所 | Substrate rapid screening method for graphene with vertical structure |
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| JP2007184596A (en) | 2007-07-19 |
| KR100699889B1 (en) | 2007-03-28 |
| US20100279442A1 (en) | 2010-11-04 |
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| US7781234B2 (en) | 2010-08-24 |
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