CN1868613B - Ultrasonic washing apparatus - Google Patents
Ultrasonic washing apparatus Download PDFInfo
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- CN1868613B CN1868613B CN 200610089927 CN200610089927A CN1868613B CN 1868613 B CN1868613 B CN 1868613B CN 200610089927 CN200610089927 CN 200610089927 CN 200610089927 A CN200610089927 A CN 200610089927A CN 1868613 B CN1868613 B CN 1868613B
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Abstract
A rod horn of an ultrasonic transmitting medium includes an expanded portion in one end and an inclined plane as a face irradiating ultrasonic waves, an ultrasonic vibrator or vibrators is attached to the expanded portion, the inclined plane of the rod horn is provided by holding a slight gap opposite to a washing body, washing liquid is flowed into the gap in the side of the inclined plane and the washing body is washed by the ultrasonic wave and the washing liquid.
Description
Technical field
The present invention relates to a kind of ultrasonic cleaning equipment that can clean the plane and have the face of curvature.
Background technology
In the past, a kind of ultrasonic wave base plate cleaning device has been proposed, the parallel surface of wedge-shaped member is supported on the surface that is cleaned substrate abreast, only become minute angle ground to form upper surface with the parallel surface of wedge-shaped member, and the back side of the end of connection parallel surface and the end of upper surface and upper surface are 50 degree～80 degree and tilt, be bonded with tabular ultrasonic oscillator on this back side, apply vibration output from oscillator to this ultrasonic oscillator, and be provided with the cleaning solution supplying device that is connected with nozzle, this nozzle is to the parallel surface of wedge-shaped member and be cleaned and supply with cleaning fluid between the substrate surface.
In the existing ultrasonic wave base plate cleaning device that constitutes like this, mobile wedge-shaped member or be cleaned in the substrate any, via nozzle from the cleaning solution supplying device to the parallel surface of wedge-shaped member be cleaned between the surface of substrate and supply with cleaning fluid 6, and when the ultrasonic oscillator that is bonded in the wedge-shaped member back side applies vibration output, parallel surface by wedge-shaped member is delivered to the cleaning fluid that is cleaned substrate surface to the ultrasonic wave that ultrasonic oscillator produces from the back side of wedge-shaped member, and the ultrasonic vibration cleaning that comes by this transmissions is cleaned the surface of substrate.
Like this, existing ultrasonic wave base plate cleaning device constitutes: the parallel surface by wedge-shaped member is delivered to the cleaning fluid that is cleaned substrate surface to the ultrasonic wave that ultrasonic oscillator produces from the back side of wedge-shaped member, clean the surface that is cleaned substrate by the ultrasonic vibration that this transmission comes, usually make the hyperacoustic converged position (focus) that sends from ultrasonic oscillator aim at position by the parallel surface of the wedge-shaped member of the shape of ultrasonic oscillator and frequency of ultrasonic decision, therefore, may produce following problem: ultrasonic wave is assembled in the semiconductor substrate irradiation to granular gradually, destroys fine pattern on the semiconductor substrate etc. on the contrary.And, in order to radiate uniform ultrasonic vibration from parallel surface, proposed to be provided with the scheme of through hole, thereby but had the problem that residual cleaning fluid in the complex structure of wedge-shaped member and the through hole or dirt become the generation reason of particle in the side of wedge-shaped member.
Summary of the invention
Therefore, the 1st purpose of the present invention provide a kind of be constructed such that be cleaned substrate can be because of the impaired ultrasonic cleaning equipment of ultrasonic wave.
The 2nd purpose of the present invention provides the ultrasonic cleaning equipment that the ultrasonic wave that produces on a kind of inclined plane of bar-shaped transfer body can disperse equably.
In order to realize above-mentioned and other purposes of the present invention, ultrasonic cleaning equipment of the present invention, it is characterized in that, comprise: as the bar-shaped transfer body of ultrasonic wave disseminule, it has at one end the inclined plane that forms as the ultrasonic wave radiation face, be formed on the bulge of the other end and be installed in ultrasonic oscillator on this bulge; The oscillator box of installing in the mode that covers above-mentioned ultrasonic oscillator; And run through the end of this oscillator box, the cable that is connected with above-mentioned ultrasonic oscillator, it is relative and keep minim gap the above-mentioned inclined plane of above-mentioned bar-shaped transfer body to be installed as and to be cleaned body, flow into cleaning fluid from the sidepiece on above-mentioned inclined plane, clean the above-mentioned body that is cleaned.
Description of drawings
Fig. 1 is the perspective view of existing ultrasonic wave base plate cleaning device.
Fig. 2 is the side view of the ultrasonic cleaning equipment of Fig. 1.
The side view of the ultrasonic cleaning equipment of Fig. 3 embodiments of the invention.
Fig. 4 is the vertical view of the ultrasonic cleaning equipment of Fig. 3.
Fig. 5 is that the ultrasonic wave of other embodiment of the present invention cleans the side view with oscillator.
Fig. 6 is that the ultrasonic wave of other embodiment of the present invention cleans the side view with oscillator.
Fig. 7 is that the ultrasonic wave of other embodiment of the present invention cleans the side view with oscillator.
Fig. 8 is the figure that is used to illustrate from hyperacoustic action of a ultrasonic oscillator irradiation of the bar-shaped transfer body (horn) of Fig. 7.
Fig. 9 is that the ultrasonic wave of other embodiment of the present invention cleans the side view with oscillator.
Figure 10 is the figure that is used to illustrate from hyperacoustic action of the ultrasonic oscillator irradiation of the bar-shaped transfer body of Fig. 9.
Figure 11 is that the ultrasonic wave of other embodiment of the present invention cleans the side view with oscillator.
Figure 12 is mounted in the vertical view of the ultrasonic wave cleaning of the present invention of Figure 11 with the ultrasonic oscillator on the oscillator.
Figure 13 is the figure that is used to illustrate from hyperacoustic action of a ultrasonic oscillator irradiation of the bar-shaped transfer body of Figure 11.
Figure 14 is the figure that is used to illustrate from hyperacoustic action of another ultrasonic oscillator irradiation of the bar-shaped transfer body of Figure 11.
Figure 15 is mounted in the vertical view of ultrasonic wave cleaning of the present invention with other ultrasonic oscillators on the oscillator.
The specific embodiment
In the past, a kind of ultrasonic wave base plate cleaning device has been proposed as shown in Figure 1, the parallel surface 1a of its wedge-shaped member 1 is supported on the surface that is cleaned substrate 2 abreast, only be minute angle ground formation upper surface 1b with the parallel surface 1a of wedge-shaped member 1, and the back side 1c of the end of connection parallel surface 1a and the end of upper surface 1b and upper surface 1b are 50 degree～80 degree and tilt, be bonded with tabular ultrasonic oscillator 3 on the 1c of this back side, from oscillator 4 will vibrate output be applied on this ultrasonic oscillator 3, and be provided with the cleaning solution supplying device 5 that is connected with nozzle 5a, this nozzle 5a is to the parallel surface 1a of wedge-shaped member 1 and be cleaned and supply with cleaning fluid 6 between substrate 2 surfaces.
In the existing ultrasonic wave base plate cleaning device that constitutes like this, mobile wedge-shaped member 1 or be cleaned in the substrate 2 any, via nozzle 5a from cleaning solution supplying device 5 to the parallel surface 1a of wedge-shaped member 1 be cleaned between the surface of substrate 2 and supply with cleaning fluid 6, and, when applying vibration output from the ultrasonic oscillator 3 of oscillator 4 on the back side 1c that is bonded in wedge-shaped member 1, the ultrasonic wave that ultrasonic oscillator 3 produces is delivered to the cleaning fluid 6 that is cleaned substrate 2 surfaces from the back side 1c of the wedge-shaped member 1 parallel surface 1a by wedge-shaped member 1, and the ultrasonic vibration cleaning that comes by this transmissions is cleaned the surface of substrate 2.
Like this, in existing ultrasonic wave base plate cleaning device, usually make the hyperacoustic converged position (focus) that sends from ultrasonic oscillator 3, aligning is by the position of the parallel surface 1a of the wedge-shaped member 1 of the shape of ultrasonic oscillator 3 and frequency of ultrasonic decision, therefore, may produce following problem: ultrasonic wave is assembled in the semiconductor substrate irradiation to granular gradually, destroys fine pattern on the semiconductor substrate etc. on the contrary.And, in order to radiate uniform ultrasonic vibration, proposed to be provided with the scheme of through hole, but had residual cleaning fluid in the complex structure of wedge-shaped member 1a and the through hole or dirt and become the problem of the reason that produces particle in the side of wedge-shaped member 1a from parallel surface 1a.
Fig. 3 is the side view of the ultrasonic cleaning equipment of embodiments of the invention, Fig. 4 is the vertical view of the ultrasonic cleaning equipment of Fig. 3, on position away from the focal position of bar-shaped transfer body 7, cut off an end of this bar-shaped transfer body 7 at a slant and form inclined plane 7a, the other end of bar-shaped transfer body 7 constitutes bulge 7b, on this bulge 7b ultrasonic oscillator 8 is installed, oscillator box 9 is fixed on by screw 11 via liner 10 in the mode that covers this ultrasonic oscillator 8 on bar-shaped 7 the bulge 7b, cable 12 runs through the end of oscillator box 9, and the cord 12a of cable 12 is connected with ultrasonic oscillator 8.
In the ultrasonic cleaning equipment of the present embodiment that constitutes like this, the inclined plane 7a of bar-shaped transfer body 7 is cleaned body with substrate etc. separates the relative installation in minim gap ground, the inclined plane 7a of bar-shaped transfer body 7 and be cleaned between the minim gap of body and flow into cleaning fluid, and never illustrated oscillator is when ultrasonic oscillator 8 applies in the vibration output, be delivered on the inclined plane 7a of bar-shaped transfer body 7 from the ultrasonic wave of ultrasonic oscillator 8 irradiations, can clean attached to dirt that is cleaned the surface or dirt by flowing into it from this inclined plane 7a and being cleaned cleaning fluid between the body.
And, the inclined plane 7a that is formed on these bar-shaped transfer body 7 one ends is along with cutting off the angle difference, the size of ultrasonic irradiation face is also different, therefore, the cut-out angle of inclined plane 7a that can be by bar-shaped transfer body 7 forms suitable size and is cleaned body or the large-area body that is cleaned with corresponding small size, and, if near the 7a of the inclined plane of bar-shaped transfer body 7 nozzle of integrally formed supply cleaning fluid, then have and can clean the advantage that is cleaned body that is in the narrow gap.
Fig. 5 is the side view of the ultrasonic cleaning equipment of other embodiment of the present invention, end at bar-shaped transfer body 7 constitutes bulge 7b, on this bulge 7b ultrasonic oscillator 8 is installed, begin to leave a little formation line part 7d from the connecting portion 7c of this bulge 7b and bar-shaped transfer body 7, begin to form arc sections 7e from this line part 7d to position away from hyperacoustic focus of shining by this ultrasonic oscillator, this arc sections 7e is constituted as to begin diameter from the connecting portion of above-mentioned mounting end and narrow down gradually earlier, gradually the shape that the centre that broadens again is thin, begin to form again line part 7f from this arc sections 7e, cut off an end of bar-shaped transfer body 7 at a slant at this line part 7f, form inclined plane 7a.
In the ultrasonic cleaning equipment of the present embodiment that constitutes like this, reflect at the arc sections 7e of the thin shape in centre from the ultrasonic wave A of ultrasonic oscillator 8 irradiations, a part of A1 of ultrasonic wave A shines directly into inclined plane 7a, other part A 2 of ultrasonic wave A are shining inclined plane 7a after the reflection on the relative side, thus, be not concentrated in the middle body of inclined plane 7a from the ultrasonic wave A of ultrasonic oscillator 8 irradiations, and can scatter, therefore can further reduce ultrasonic wave in the middle body generation of inclined plane 7a, improve the hyperacoustic uniformity on the inclined plane, do not have thus and can produce the advantage of damaging being cleaned body.
Like this, in the ultrasonic cleaning equipment of present embodiment, be cleaned the inclined plane 7a that body separates the bar-shaped transfer body 7 of the relative installation in minim gap ground with substrate etc., at the inclined plane of bar-shaped transfer body 7 7a be cleaned between the minim gap of body and flow into cleaning fluid, and never illustrated oscillator is when ultrasonic oscillator 8 applies vibration output, be delivered on the inclined plane 7a of bar-shaped transfer body 7 from the ultrasonic wave of ultrasonic oscillator 8 irradiations, can clean attached to dirt that is cleaned the surface or dirt by flowing into it from this inclined plane 7a and being cleaned cleaning fluid between body.
Fig. 6 is the side view of the ultrasonic cleaning equipment of other embodiment of the present invention, the 7th, bar-shaped transfer body, 7b are that bulge, 7c are connecting portions, the 8th, ultrasonic oscillator, these structures are identical with the structure of the foregoing description, therefore omit its explanation, but the expansion inclined plane 7g that in the present embodiment, bar-shaped transfer body 7 forms from connecting portion 7c to front end, diameter constitutes gradually with increasing.
In the present embodiment that constitutes like this, reflect in the side of the diameter increase of bar-shaped transfer body 7 from the ultrasonic wave B of ultrasonic oscillator 8 irradiations, thus, a part of B1 of ultrasonic wave B shines after reflection on the part nearer apart from the connecting portion 7c of bar-shaped transfer body 7 and enlarges inclined plane 7g, and, other parts B2 of ultrasonic wave B is reflecting apart from enlarging on the nearer part of inclined plane 7g on the side of distance enlarged-diameter, shine and enlarge on the 7g of inclined plane, therefore, be not concentrated in the middle body that enlarges inclined plane 7g from the ultrasonic wave B of ultrasonic oscillator 8 irradiations, and can scatter, therefore can further reduce the ultrasonic wave that produces at the middle body that enlarges inclined plane 7g, improve the hyperacoustic uniformity that enlarges on the 7g of inclined plane, do not have thus and can produce the advantage of damaging being cleaned body.
In addition, in the above-described embodiments, on bar-shaped transfer body 7, form the arc sections 7e of the thin shape in centre or form expansion inclined plane 7g in the end of bar-shaped transfer body 7, but also can on bar-shaped transfer body 7, form arc sections 7e in the lump and enlarge rake 7g, also can further reduce the ultrasonic wave that the middle body on the inclined plane produces, improve the hyperacoustic uniformity on the inclined plane, do not have thus and can produce the advantage of damaging being cleaned body.
Fig. 7 is the side view of the ultrasonic cleaning equipment of other embodiment of the present invention.One end of bar-shaped transfer body 7 forms bulge 7b, on this bulge 7b ultrasonic oscillator 8 is installed, on position away from the focal position of bar-shaped transfer body 7, cut off an end of this bar-shaped transfer body 7 at a slant, form inclined plane 7a, form hollow bulb 7h on the appropriate location on the central shaft between the ultrasonic oscillator 8 of bar-shaped transfer body 7 and the inclined plane 7a, bar-shaped transfer body 7.
In the ultrasonic cleaning equipment of the present embodiment that constitutes like this, ultrasonic wave from ultrasonic oscillator 8 irradiations, as shown in Figure 8, do not run into hollow bulb, shine on the 7a of inclined plane from the ultrasonic wave C1 and the C2 linearity of ultrasonic oscillator 8 irradiations, reflect at the hollow bulb 7h of bar-shaped transfer body 7 from the ultrasonic wave C3 of the part radiation of the central part that leaves ultrasonic oscillator 8 a little, and on the side of bar-shaped transfer body 7, reflect, then shine the end of inclined plane 7a, and, a part of ultrasonic wave C4 at the ultrasonic wave C3 of hollow bulb 7h reflection reflects to top from hollow bulb 7h, shine on the bulge 7b of bar-shaped transfer body 7, from the ultrasonic wave C5 of ultrasonic oscillator 8 than the part radiation at center, C6 reflects near the side the hollow bulb 7h of bar-shaped transfer body 7, then shine on the 7a of inclined plane, disperse to be radiated on the 7a of inclined plane in the above-described manner from the ultrasonic wave C1～C6 of ultrasonic oscillator 8 radiation, therefore can further reduce ultrasonic wave in the middle body generation of inclined plane 7a, improve the hyperacoustic uniformity on the 7a of inclined plane, do not have thus and can produce the advantage of damaging being cleaned body.
Like this, in the ultrasonic cleaning equipment of present embodiment, be cleaned the inclined plane 7a that body separates the bar-shaped transfer body 7 of the relative installation in minim gap ground with substrate etc., at the inclined plane of bar-shaped transfer body 7 7a be cleaned between the minim gap of body and flow into cleaning fluid, and never illustrated oscillator is when a plurality of ultrasonic oscillators 8 apply vibration output respectively, be delivered on the inclined plane 7a of bar-shaped transfer body 7 from the ultrasonic wave of ultrasonic oscillator 8 irradiations, can clean attached to dirt that is cleaned the surface or dirt by flowing into it from this inclined plane 7a and being cleaned cleaning fluid between the body.
In addition, in the above-described embodiments, the hollow bulb that is formed in the bar-shaped transfer body 7 can be spherical hollow bulb, also can be the ellipticity hollow bulb.
Fig. 9 is the side view of the ultrasonic cleaning equipment of other embodiment of the present invention, end at bar-shaped transfer body 7 constitutes bulge 7b, in this bulge 7b, bury lens 7j underground, ultrasonic oscillator 8 is installed in the upper end, on position away from the focal position of bar-shaped transfer body 7, cut off an end of this bar-shaped transfer body 7 at a slant, form inclined plane 7a.
In the ultrasonic cleaning equipment of the present embodiment that constitutes like this, ultrasonic wave from the irradiation of the central portion of ultrasonic oscillator 8, as shown in figure 10, be divided into ultrasonic wave D1 and D2 via lens 7j, disperse to be radiated on the inclined plane 7a of bar-shaped transfer body 7, therefore, can further reduce ultrasonic wave in the middle body generation of inclined plane 7a, improve the hyperacoustic uniformity on the 7a of inclined plane, do not have thus and can produce the advantage of damaging being cleaned body.
At this, when the velocity of sound that the velocity of sound of lens 7j is made as C1, bar-shaped transfer body 7 is made as C2, according to snell law (Snell ' s law), C1/Sin θ 1=C2/Sin θ 2, the refraction angle of the bar-shaped transfer body from lens 7j to the ultrasonic wave propagation medium is θ 2=Sin
-1(C2/C1 * Sin θ 1), therefore be quartzy, C2=6000m/s by the bar-shaped transfer body 7 of establishing the ultrasonic wave propagation medium, lens 7j is low expansion ceramic, C1=5600m/s, make the velocity of sound of lens 7j less than the velocity of sound of bar-shaped transfer body 7, thereby ultrasonic wave is littler than the refraction angle to the incidence angle of lens 7j from ultrasonic oscillator 8, therefore the ultrasonic wave from ultrasonic oscillator 8 spreads in bar-shaped radiation 7 laterally, ultrasonic wave D1, D2 from ultrasonic oscillator 8 radiation shine on the 7a of inclined plane towards the outside of bar-shaped projectile 7 on the emitting surface 7m of lens 7j.
Therefore, in the ultrasonic cleaning equipment of the present embodiment that constitutes like this, be cleaned the inclined plane 7a that body separates the bar-shaped transfer body 7 of the relative installation in minim gap ground with substrate etc., at the inclined plane of bar-shaped transfer body 7 7a be cleaned between the minim gap of body and flow into cleaning fluid, and never illustrated oscillator is when a plurality of ultrasonic oscillators 8 apply vibration output respectively, be delivered on the inclined plane 7a of bar-shaped transfer body 7 from the ultrasonic wave of ultrasonic oscillator 8 irradiations, can clean attached to dirt that is cleaned the surface or dirt by flowing into it from this inclined plane 7a and being cleaned cleaning fluid between the body.
In addition, in the above-described embodiments, the emitting surface 7m that is embedded in the lens 7j in the bar-shaped transfer body 7 forms the obtuse angle, but also can form circular-arc.
Figure 11 is the side view of the ultrasonic cleaning equipment of other embodiment of the present invention, end at bar-shaped transfer body 7 constitutes bulge 7b, a plurality of rectangular ultrasonic oscillator 8a, 8b, 8c, 8d shown in Figure 12 are installed on this bulge 7b, begin to leave a little formation line part 7d from the connecting portion 7c of this bulge 7b and bar-shaped transfer body 7, on the position of the focal position of bar-shaped transfer body 7 away from this, cut off an end of this bar-shaped transfer body 7 at a slant, form inclined plane 7a.
In the ultrasonic cleaning equipment of the present embodiment that constitutes like this, in a plurality of ultrasonic oscillator 8a～8b, be divided into as shown in figure 13: shine ultrasonic wave E1 on the 7a of inclined plane from ultrasonic oscillator 8a straight line from the ultrasonic wave of ultrasonic oscillator 8a irradiation; Begin in the offside reflection of bar-shaped transfer body 7 and shine ultrasonic wave E2 on the 7a of inclined plane from ultrasonic oscillator 8a; And the ultrasonic wave E3 that shines bulge 7b inside from ultrasonic oscillator 8a, thereby be not concentrated in a position on inclined plane and can scatter, and, be divided into as shown in figure 14 from the ultrasonic wave of ultrasonic oscillator 8b irradiation: shine ultrasonic wave F1 on the 7a of inclined plane from ultrasonic oscillator 8b straight line; Begin in the offside reflection of bar-shaped transfer body 7 and shine ultrasonic wave F2 on the 7a of inclined plane from ultrasonic oscillator 8b; And the ultrasonic wave F3 that shines bulge 7b inside from ultrasonic oscillator 8b, can further reduce ultrasonic wave in the middle body generation of inclined plane 7a, improve the hyperacoustic uniformity on the 7a of inclined plane, do not have thus and can produce the advantage of damaging being cleaned body.
In the ultrasonic cleaning equipment of present embodiment, like this, be cleaned the inclined plane 7a that body separates the bar-shaped transfer body 7 of the relative installation in minim gap ground with substrate etc., at the inclined plane of bar-shaped transfer body 7 7a be cleaned between the minim gap of body and flow into cleaning fluid, and never illustrated oscillator is when a plurality of ultrasonic oscillators 8 apply vibration output respectively, be delivered on the inclined plane 7a of bar-shaped transfer body 7 from the ultrasonic wave of ultrasonic oscillator 8 irradiations, can clean attached to dirt that is cleaned the surface or dirt by flowing into it from this inclined plane 7a and being cleaned cleaning fluid between the body.
In addition, in the above-described embodiments, on the bulge 7b of bar-shaped transfer body 7, a plurality of ultrasonic oscillator 8a～8d are constituted rectangle, as shown in figure 15, also a plurality of ultrasonic oscillator 8e, 8f, 8g can be constituted concentric circles.
Claims (12)
1. a ultrasonic cleaning equipment is characterized in that,
Comprise: as the bar-shaped transfer body of ultrasonic wave disseminule, it has the inclined plane that at one end forms as the ultrasonic wave radiation face, be formed on the bulge of the other end, with the ultrasonic oscillator that is installed on this bulge, the central shaft of above-mentioned bar-shaped transfer body and ultrasonic wave inclined plane are that the angle of emitting surface is 100 degree～170 degree, this bar-shaped transfer body forms following mode, promptly, make what ratio was exported by above-mentioned ultrasonic oscillator, the position that the hyperacoustic initial converged position of propagating in above-mentioned bar-shaped transfer body is long becomes the intersection point of the central point on the central shaft of above-mentioned bar-shaped transfer body and above-mentioned inclined plane;
The oscillator box of installing in the mode that covers above-mentioned ultrasonic oscillator; And
Run through the end of this oscillator box, the cable that is connected with above-mentioned ultrasonic oscillator,
The above-mentioned inclined plane of above-mentioned bar-shaped transfer body is installed as and is cleaned the relative and maintenance minim gap of body, and the sidepiece inflow cleaning fluid from above-mentioned inclined plane cleans the above-mentioned body that is cleaned.
2. ultrasonic cleaning equipment according to claim 1 is characterized in that, above-mentioned bar-shaped transfer body is made of quartz.
3. ultrasonic cleaning equipment according to claim 1, it is characterized in that, be provided with arc sections on the position away from hyperacoustic focus of being shone by above-mentioned ultrasonic oscillator, this arc sections is to be constituted as from the connecting portion of above-mentioned mounting end to begin the thin shape in centre that diameter narrows down gradually, broadens gradually.
4. ultrasonic cleaning equipment according to claim 1 is characterized in that, constitutes the connecting portion from above-mentioned bar-shaped transfer body, and the diameter of pars intermedia broadens so that the inclined plane enlarges gradually gradually to the inclined plane.
5. ultrasonic cleaning equipment according to claim 1 is characterized in that, is provided with the bulge that is formed on above-mentioned bar-shaped transfer body and the hollow bulb on the central shaft between the inclined plane.
6. ultrasonic cleaning equipment according to claim 5 is characterized in that, the above-mentioned hollow bulb that is formed in the above-mentioned bar-shaped transfer body is an orbicule.
7. ultrasonic cleaning equipment according to claim 5 is characterized in that, the above-mentioned hollow bulb that is formed in the above-mentioned bar-shaped transfer body is an ellipsoid.
8. ultrasonic cleaning equipment according to claim 1 is characterized in that, is embedded with lens in described bulge.
9. ultrasonic cleaning equipment according to claim 8 is characterized in that said lens is made of low expansion ceramic.
10. ultrasonic cleaning equipment according to claim 1 is characterized in that, a plurality of ultrasonic oscillators are installed in above-mentioned bulge.
11. ultrasonic cleaning equipment according to claim 10 is characterized in that, above-mentioned a plurality of ultrasonic oscillators are rectangular plates.
12. ultrasonic cleaning equipment according to claim 10 is characterized in that, above-mentioned a plurality of ultrasonic oscillators are concentric circles.
Applications Claiming Priority (15)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005153364A JP4324653B2 (en) | 2005-05-26 | 2005-05-26 | Ultrasonic cleaning equipment |
| JP2005-153364 | 2005-05-26 | ||
| JP2005153364 | 2005-05-26 | ||
| JP2005364579 | 2005-12-19 | ||
| JP2005-364579 | 2005-12-19 | ||
| JP2005364579A JP4862172B2 (en) | 2005-12-19 | 2005-12-19 | Ultrasonic cleaning vibrator |
| JP2006-034190 | 2006-02-10 | ||
| JP2006034191A JP2007209928A (en) | 2006-02-10 | 2006-02-10 | Vibrator for ultrasonic cleaning |
| JP2006-034191 | 2006-02-10 | ||
| JP2006034191 | 2006-02-10 | ||
| JP2006034190 | 2006-02-10 | ||
| JP2006034190A JP2007209927A (en) | 2006-02-10 | 2006-02-10 | Vibrator for ultrasonic cleaning |
| JP2006041620 | 2006-02-17 | ||
| JP2006-041620 | 2006-02-17 | ||
| JP2006041620A JP2007216179A (en) | 2006-02-17 | 2006-02-17 | Ultrasonic cleaning oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1868613A CN1868613A (en) | 2006-11-29 |
| CN1868613B true CN1868613B (en) | 2013-07-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200610089927 Active CN1868613B (en) | 2005-05-26 | 2006-05-26 | Ultrasonic washing apparatus |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4324653B2 (en) |
| CN (1) | CN1868613B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7958899B2 (en) | 2007-08-21 | 2011-06-14 | Dainippon Screen Mfg. Co., Ltd. | Substrate cleaning apparatus and substrate cleaning method |
| CN101804407A (en) * | 2010-04-19 | 2010-08-18 | 姚建梁 | Basal-plate ultrasonic cleaner |
| CN102327883B (en) * | 2011-10-10 | 2013-12-18 | 北京七星华创电子股份有限公司 | Megasonic cleaning head and megasonic cleaning system provided with same |
| CN102950512B (en) * | 2012-12-07 | 2015-09-23 | 韩连江 | A kind of mechanism changing ultrasonic wave conduction orientation |
| JP7280688B2 (en) | 2018-11-15 | 2023-05-24 | 積水化学工業株式会社 | Flexible split tube for underground cable |
| CN114012995B (en) * | 2021-11-05 | 2024-04-19 | 惠州市鑫瑞宝源医疗科技有限公司 | Ultrasonic water cutting port and cleaning integrated device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4834124A (en) * | 1987-01-09 | 1989-05-30 | Honda Electronics Co., Ltd. | Ultrasonic cleaning device |
| CN1453827A (en) * | 2002-04-25 | 2003-11-05 | 三星电子株式会社 | Chip cleaning system |
-
2005
- 2005-05-26 JP JP2005153364A patent/JP4324653B2/en active Active
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2006
- 2006-05-26 CN CN 200610089927 patent/CN1868613B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4834124A (en) * | 1987-01-09 | 1989-05-30 | Honda Electronics Co., Ltd. | Ultrasonic cleaning device |
| CN1453827A (en) * | 2002-04-25 | 2003-11-05 | 三星电子株式会社 | Chip cleaning system |
Non-Patent Citations (4)
| Title |
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| JP特开2003-163195A 2003.06.06 |
| JP特开2004-356590A 2004.12.16 |
| JP特开2004-356592A 2004.12.16 |
| JP特开平6-218337A 1994.08.09 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006326486A (en) | 2006-12-07 |
| JP4324653B2 (en) | 2009-09-02 |
| CN1868613A (en) | 2006-11-29 |
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