CN1755477B - Interferometric modulator array display device with integrated MEMS electrical switches, and method therefor - Google Patents
Interferometric modulator array display device with integrated MEMS electrical switches, and method therefor Download PDFInfo
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- CN1755477B CN1755477B CN 200510103444 CN200510103444A CN1755477B CN 1755477 B CN1755477 B CN 1755477B CN 200510103444 CN200510103444 CN 200510103444 CN 200510103444 A CN200510103444 A CN 200510103444A CN 1755477 B CN1755477 B CN 1755477B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
Abstract
An interferometric modulator array (45) is integrated with collapsible cavity MEMS electrical switches. The electrical switches may have a similar physical geometry to the display elements. The switches may form row or column select functions for the display.
Description
Technical field
The field of the invention relates to MEMS (micro electro mechanical system) (MEMS).
Background technology
MEMS (micro electro mechanical system) (MEMS) comprises micromechanical component, actuator and electron device.Micromechanical component can by use deposition, etching and or other can etch away the part of substrate and/or deposited material layer or add several layers and make with the micromachining method that forms electric installation and electromechanical assembly.One type MEMS device is called as interferometric modulator.As used herein, term interferometric modulator or interferometric light modulator are meant that a kind of principle by the use optical interference optionally absorbs and/or catoptrical device.In certain embodiments, a kind of interferometric modulator can comprise the pair of conductive plate, and one of them or two can be transparent in whole or in part and/or reflection, and can relative motion after using suitable electric signal.In a specific embodiment, plate can comprise and is deposited on resistant strata and another plate on the substrate and can comprises a metal film that separates with described resistant strata by an air gap.As describing in more detail herein, plate can change as inciding the optical interference of the light on the interferometric modulator about the position of another plate.Described device has the application of broad range, and in described technology, utilize and/or the feature of revising these types of devices make its feature can improve existing product and make be developed in the process of undeveloped new product still useful.
Summary of the invention
System of the present invention, method and apparatus all have some aspects, and which does not wherein have is to want speciality to be responsible for to it separately.Under situation about not limiting the scope of the invention, now with its more outstanding feature of brief discussion.After considering that this discusses content, and especially after reading title and being the part of " DetailedDescription of Certain Embodiments ", how the feature that we will understand this invention provides the advantage that is better than other display device.
In one embodiment, the present invention includes one and have MEMS display display device partly, described MEMS display part comprises several rows and some row MEMS display elements and forms a plurality of mems switches of the mems switch element of one or more extra row or column of being close to described display part.In certain embodiments, some in a plurality of mems switches is collapsible cavity mems switch and the deformable layer that comprises the voltage on terminal, electrode and response deformable layer and the described electrode.Mems switch can be formed on the glass substrate, and can partly form row or column selection circuit.In certain embodiments, described device can also comprise one with described display element form telecommunication processor and one with the memory storage of described processor formation telecommunication.Some embodiment among these embodiment can also comprise first controller that is configured to send to described display element at least one signal, with second controller that is configured to send at least a portion of described view data, or be configured to send the image source module of described view data to described processor to described first controller.Described image source module can comprise at least one in receiver, transceiver and the transmitter.It can also comprise the input media that is configured to receive the input data and transmits described input data to described processor.
In another embodiment, comprise that one is configured to the display device based on the data presentation image, described device comprises the member of at least a portion that is used for showing described image micro electronmechanically, and described display member comprises row and column; With the member that is used for data are switched to display member, described switching member comprises the one or more extra row or column of contiguous described display member.Described device display member can comprise the MEMS display part of the MEMS display element of several rows and some row.Described device switching member can comprise a plurality of mems switches of the mems switch element of the one or more extra row or column that forms contiguous described display part.Described display device can further comprise the member that is used to select the member of row or column and is used for data are switched to the row and column of selection.Described display device can comprise a controller that uses in selecting described row and column.Described switching member can comprise a plurality of a plurality of mems switches that form the mems switch element of one or more extra row or column of being close to described display part.
Show that in a display unit of mems switch of mems switch element that comprises the MEMS display part of some row and several rows MEMS display element and form one or more extra row or column of contiguous described display part the method for an image can comprise: the view data that is provided for showing at several rows and some row MEMS display elements; Use switch from the mems switch of one or more extra row to switch for the view data that shows and list the switching over of using from the mems switch of one or more extra row at one in delegation and be used for the view data that shows. In some display packing, switch view data and can be included in mobile deformable layer in the collapsible cavity, the voltage on described layer response layer and the electrode, wherein first and second terminals connect with substituting selecting property.
The method of making the MEMS display device is included in the mems switch that forms several rows and some row MEMS display elements on the substrate and form one or more row or column on described identical or different substrate, and wherein at least some are couple to display.The step that forms described display element and a plurality of mems switches of formation can comprise execution some common treatment step at least.MEMS display element and mems switch can also be formed on the common glass substrate.
Description of drawings
Fig. 1 is the isometric view of a part of describing an embodiment of an interferometric modulator display, and wherein the removable reflection horizon of first interferometric modulator is in the off-position and the removable reflection horizon of second interferometric modulator is in the actuated position;
Fig. 2 is the system block diagram that an embodiment of the electronic installation of having incorporated one 3 * 3 interferometric modulator displays into is described;
Fig. 3 is the figure of the voltage that applies of the removable mirror position contrast of an one exemplary embodiment of the interferometric modulator of Fig. 1;
Fig. 4 is the explanation that can be used to drive one group of row and column voltage of an interferometric modulator display;
Exemplary frame of display data in 3 * 3 interferometric modulator displays of Fig. 5 A key diagram 2;
Fig. 5 B explanation can be used to write the exemplary sequential chart of row and column signal of the frame of Fig. 5 A;
Fig. 6 A is the system block diagram of the embodiment of explanation display device;
Fig. 6 B is the system block diagram of the embodiment of explanation display device;
Fig. 7 A is the cross-sectional view of the device of Fig. 1;
Fig. 7 B is the cross-sectional view of the alternate embodiment of interferometric modulator;
Fig. 7 C is the cross-sectional view of another alternate embodiment of interferometric modulator;
Fig. 8 A and Fig. 8 B show the embodiment of mems switch;
Fig. 9 shows the embodiment of mems switch;
Figure 10 A and Figure 10 B show the circuit of the embodiment that the interferometric modulator array that uses mems switch is described;
Figure 11 A and Figure 11 B show the circuit of the embodiment that the interferometric modulator array that uses mems switch is described;
Figure 12 one uses the embodiment of phase inverter, AND and OR logic function of the mems switch of a type.
Embodiment
Following detailed description is at some specific embodiment of the present invention.Yet the present invention can embody with multitude of different ways.In this described, with reference to graphic, wherein same parts was represented by same numbers in the text.As apparent from following description content, described embodiment can implement in being configured to any device of display image, no matter it is (for example, video) or static (for example, rest image) of motion, and no matter it is text or illustrated.More particularly, expect that described embodiment can implement or be associated with multiple electronic installation in multiple electronic installation, described electronic installation such as (but being not limited to): mobile phone, wireless device, personal digital assistant (PDA), hand or portable computer, gps receiver/navigating instrument, video camera, the MP3 player, video camera (camcorder), game machine, wrist-watch, clock, counter, TV monitor, flat-panel monitor, computer monitor, automatic display (for example, mileometer display etc.), driving cabin controller and/or display, the camera view display (for example, rear view camera display in the vehicle), electronic photo, electronics billboard or label, projector, building structure, packing and the aesthetic structures image display of a jewelry (for example, about).The MEMS device of the structure of similar those structures described herein can also be used in the non-display application, such as in electric switchgear.
An interferometric modulator display embodiment who comprises interfere type MEMS display element has been described among Fig. 1.In these devices, pixel is bright or dark state.In bright (" opening " or " opening ") state, display element reflects most of incident visible light to the user.When in dark (" closing " or " closing ") state, display element reflects seldom incident visible light to the user.Decide according to embodiment, the light reflectance properties of " opening " and " pass " state can be put upside down.The MEMS pixel can be configured to mainly reflect under selected color, thereby allows the color except that black and white to show.
Fig. 1 is an isometric view of describing two neighbors in a series of pixels of visual displays, and wherein each pixel comprises a MEMS interferometric modulator.In certain embodiments, interferometric modulator display comprises the row/column array of these interferometric modulators.Each interferometric modulator comprises a pair of reflection horizon, and it can change and the distance that can control and locating at a distance of one each other, has at least one variable-sized resonance optical cavities with formation.In one embodiment, in the reflection horizon can move between the two positions.In primary importance (being called slack position herein), displaceable layers is located at a distance of relatively large distance with fixing partially reflecting layer.In the second place, the more closely adjacent partially reflecting layer of displaceable layers and locating.Decide position according to removable reflection horizon, disturbs longways or mutually from the incident light phase of described two-layer reflection with disappearing, thereby reflect fully or non-reflective state for each pixel produces one.
The described part of the pel array among Fig. 1 comprises two adjacent interferometric modulator 12a and 12b.Among the interferometric modulator 12a of on the left side, removable and high reflection layer 14a is illustrated as in a slack position, its with fixing partially reflecting layer 16a at a distance of a preset distance.Among the interferometric modulator 12b on the right, removable high reflection layer 14b is illustrated as one and activates in the position, its contiguous fixing partially reflecting layer 16b.
Fixed bed 16a, 16b be conduction, partially transparent and partial reflection, and can one or more each chromium and tin indium oxide be deposited on the transparent substrates 20 by (for example) and be made.Described layer is patterned into parallel strip, and can form column electrode in display device as described further below.Displaceable layers 14a, 14b can form the depositing metal layers (perpendicular to column electrode 16a, 16b) on the top that is deposited on pillar 18 and be deposited on the series of parallel bar of the intervention expendable material between the pillar 18.When expendable material was etched, deformable metal layers 14a, 14b separated with the metal level of fixing by defining gap 19.Highly conductive and reflecting material such as aluminium can be used for deformable layer, and these can form the row electrode in display device.
Owing to do not have the voltage that is applied, cavity 19 remains between a layer 14a, the 16a also, and deformable layer is in as in the illustrated mechanical relaxation state of the pixel 12a among Fig. 1.Yet when potential difference (PD) was applied to selected row and column, the capacitor that forms at the interface point place of the row and column electrode at respective pixel place became charged, and electrostatic force is got together electrode.If voltage is enough high, displaceable layers distortion and the extruding fixed bed (in this figure unaccounted dielectric substance can be deposited on fixed bed on to prevent short circuit and control separating distance) illustrated as the right pixels 12b among Fig. 1.No matter the polarity of the potential difference (PD) that is applied how, behavior is identical.In this way, can control reflection activates similar with employed actuating in other display technique to conventional LCD in many aspects to the row of non-reflective pixel state/row.
An exemplary method and system that is used for using the array of interferometric modulator of Fig. 2 to Fig. 5 B explanation in display application.
Fig. 2 is the system block diagram that an embodiment of the electronic installation that can incorporate each side of the present invention into is described.In an exemplary embodiment, electronic installation comprises processor 21, and it can be any general purpose single-chip or multicore sheet microprocessor, such as ARM, Pentium
, Pentium II
, Pentium III
, Pentium IV
, Pentium
Pro, 8051, MIPS
, Power PC
, ALPHA
, or any special-purpose microprocessor, such as digital signal processor, microcontroller or programmed grid array.As the convention in the affiliated field, described processor 21 can be configured to carry out one or more software modules.Except carrying out an operating system, described processor can be configured to carry out one or more software application, comprises web browser, phone application, e-mail program or any other software application.
In one embodiment, processor 21 also is configured to communicate by letter with an array controller 22.In one embodiment, described array control unit 22 comprises a horizontal drive circuit 24 and the column drive circuit 26 that signal is provided to display array or panel 30.Line 1-1 among Fig. 2 has showed the xsect of array illustrated in fig. 1.For the MEMS interferometric modulator, OK/the row actuation protocol can utilize the hysteresis property of these devices illustrated in fig. 3.It can need the potential difference (PD) of (for example) 10 volts to be deformed to actuating state to cause displaceable layers from relaxed state.Yet, when voltage when described value reduces, displaceable layers falls back to below 10 volts along with voltage drop and keeps its state.In the one exemplary embodiment of Fig. 3, displaceable layers is not exclusively lax to be fallen below 2 volts until voltage drop.Therefore, have a voltage range: for about 3 to 7V, wherein have the window of a voltage that is applied in example illustrated in fig. 3, in described window, described device is all stable in relaxed state or actuating state.This is referred to herein as " lag windwo " or " stability window ".For the display array of retarding characteristic with Fig. 3, can design during the feasible gating of being expert at of row/row actuation protocol, the pixel during gating to be activated is capable exposes to about 10 volts voltage difference, and pixel to be relaxed exposes to the voltage difference near 0 volt.After gating, it is poor that pixel exposes to the steady state voltage that is about 5 volts, makes it remain in capable gating and make in its residing any state.After being written into, in this example, each pixel all experiences " stability window " interior potential difference (PD) of a 3-7 volt.This feature makes pixel design illustrated in fig. 1 be stabilized in actuating state or relax under the identical condition of exerting pressure and deposits in the state earlier.Owing to no matter be under actuating state or relaxed state, each pixel of interferometric modulator all is a capacitor that is formed by fixing and mobile reflection horizon basically, the almost inactivity dissipation so this steady state (SS) can be kept under the voltage in the lag windwo.If the current potential that applies is fixed, so essentially no electric current flow in the pixel.
In the typical case uses, can be by determining that according to the actuate pixel that will organize in first row group of row electrode produces display frame.Then horizontal pulse is applied to row 1 electrode, thereby activates pixel corresponding to determined alignment.Then the group with determined row electrode changes over will organize corresponding to the actuate pixel in second row.Then pulse is applied to row 2 electrodes, thereby according to the suitable pixel in the determined row electrode actuating row 2.Row 1 pixel is not subjected to the influence of row 2 pulses, and remains in the state that its 1 impulse duration of being expert at sets.Can be in a sequential manner the row of whole series be repeated this process to produce described frame.In general, described frame can be by being wanted frame number/second and repeated continuously this process to refresh and/or upgrade with new video data with a certain.The row and column electrode that is used to drive pel array also is well-known with a variety of agreements that produce display frame and it can use in conjunction with the present invention.
Fig. 4, Fig. 5 A and Fig. 5 B explanation are used for producing a possible actuation protocol of display frame on 3 * 3 arrays of Fig. 2.Fig. 4 explanation can be used to represent the one group of possible row and the row voltage level of pixel of the hysteresis curve of Fig. 3.In Fig. 4 embodiment, activate a pixel comprise with suitably row be set to-V
Bias, and will suitably go and be set to+Δ V, it corresponds respectively to-5 volts and+5 volts.Be set to+V by will suitably being listed as
BiasAnd will suitably go and be set to identical+Δ V and finish lax to described pixel, thereby on whole pixel, produce 0 volt potential difference.The voltage of being expert at remains in those row of 0 volt, and pixel is stable in its initial residing any state, and is to be in+V with described row
BiasStill-V
BiasIrrelevant.And for example illustrated in fig. 4, will understand the voltage can use with those opposite polarity polarity as described above, for example, activates a pixel and can comprise and be set to+V suitably being listed as
BiasAnd will suitably go and be set to-Δ V.In this embodiment, be set to-V by will suitably being listed as
BiasAnd will suitably go and be set to identical-Δ V and finish lax to described pixel, thereby on pixel, produce 0 volt potential difference.
Fig. 5 B is the sequential chart of row and column signal of showing 3 * 3 arrays of a series of Fig. 2 of being applied to, and its demonstration that will cause illustrating among Fig. 5 A is arranged, and the pixel right and wrong that wherein activated are reflexive.Before the frame that illustrates in writing Fig. 5 A, described pixel can be in any state, and in this example, and all row all are in 0 volt, and all row all be in+5 volts.Because the voltage that these applied, all pixels are stable in its existing actuating or relaxed state.
In the frame of Fig. 5 A, pixel (1,1), (1,2), (2,2), (3,2) and (3,3) activated.For finishing this, during be expert at 1 " line time (line time) ", row 1 and 2 are set to-5 volts, and row 3 is set to+5 volts.This does not change the state of any pixel, because all pixels all remain in the stability window of 3-7 volt.Then rising to 5 volts of pulses that roll back 0 volt then again down by one from 0 comes gating capable 1.This actuating (1,1) and (1,2) pixel and lax (1,3) pixel.Other pixel in the array is all unaffected.Desired for row 2 is set to, row 2 are set to-5 volts, and row 1 and 3 are set to+5 volts.The same strobe that is applied to row 2 is then with actuate pixel (2,2) and relax pixels (2,1) and (2,3).Equally, other pixel is all unaffected in the described array.Similarly, set row 3 by row 2 and 3 being set to-5 volts and row 1 are set to+5 volts.Row 3 gatings are set row 3 pixels as shown in Fig. 5 A.After writing incoming frame, the row current potential is 0, and the row current potential can remain in+5 or-5 volts, and then display in the arrangement of Fig. 5 A for stable.Should be appreciated that, can adopt same program at the array of tens of or hundreds of row and columns.Should also be clear that the sequential, order and the level that are used to carry out the voltage that row and column activates can extensively variations in the General Principle of above-outlined, and above example only is exemplary, and any actuation voltage method can be used for system and method described herein.
Fig. 6 A and 6B are the system block diagram of the embodiment of explanation display device 40.Described display device 40 can be (for example) honeycomb or mobile phone.Yet the same components of display device 40 or its slight change have also illustrated the polytype display device such as TV and portable electronic device.
Display device 40 comprises shell 41, display 30, antenna 43, loudspeaker 44, input media 48 and loudspeaker 46.Shell 41 is generally formed by any method in the known multiple manufacture method of those skilled in the art, and described method comprises injection moulding and vacuum formation method.In addition, described shell 41 can be made by any material in the multiple material, and described material includes, but is not limited to plastics, metal, rubber and pottery or its combination.In one embodiment, shell 41 comprises removable portion (not shown), and it can exchange with different color or other removable portion that comprises different identification, picture or symbol.
The display 30 of exemplary display device 40 can be in the multiple display any, it comprises bistable display as described herein.In other embodiments, well-known as the those skilled in the art, display 30 for example comprises the flat-panel monitor of as described above plasma, EL, OLED, SIN LCD or TFT LCD, or a non-tablet display of CRT or other pipe unit for example.Yet for describing the purpose of present embodiment, display 30 comprises interferometric modulator display as described herein.
The assembly of one embodiment of exemplary display device 40 schematically has been described among Fig. 6 B.Illustrated exemplary display device 40 comprises a shell 41 and can comprise the additional assemblies that is closed at least in part wherein.For instance, in one embodiment, exemplary display device 40 comprises a network interface 27, and it comprises an antenna 43 that is couple to transceiver 47.Described transceiver 47 is connected to processor 21, and described processor 21 is connected to regulates hardware 52.Described adjusting hardware 52 can be configured to regulate a signal (for example, filtering a signal).Regulate hardware 52 and be connected to loudspeaker 44 and loudspeaker 46.Processor 21 also is connected to input media 48 and driver controller 29.Driver controller 29 is couple to frame buffer 28, and is couple to array driver 22, and described array driver 22 is couple to display array 30 again.Power supply 50 provides electric power to the desired all component of particular exemplary display device 40 designs.
Network interface 27 comprises antenna 43 and transceiver 47, makes exemplary display device 40 to communicate via network with one or more devices.In one embodiment, network interface 27 can also have some processing power to alleviate the requirement of processor 21.Antenna 43 is to be used to transmit the also known any antenna of those skilled in the art of received signal.In one embodiment, described antenna is according to comprising that IEEE 802.11 (a) and (b) or 802.11 standards of IEEE (g) transmit and receive the RF signal.In another embodiment, antenna transmits and receives the RF signal according to the BLUETOOTH standard.In cellular situation, antenna is through design other known signal to receive CDMA, GSM, AMPS or to communicate in the wireless cellular telephone network network.Described transceiver 47 pre-service make it to be received and further to be controlled by processor 21 by processor 21 from the signal that antenna 43 receives.Transceiver 47 is also handled the signal that receives from processor 21, makes it to transmit via antenna 43 from exemplary display device 40.
In alternate embodiment, transceiver 47 can be replaced by receiver.In another alternate embodiment, network interface 27 can be replaced by image source, and the view data that is sent to processor 21 can be stored or be produced to described image source.For instance, image source can be digital video disk (DVD) or hard disk drive that contains view data or the software module that produces view data.
The integrated operation of processor 21 general control exemplary display device 40.Processor 21 for example receives the data from the compressing image data of network interface 27 or image source, and processes data into raw image data or become a form that easily is processed into raw image data.Processor 21 then send treated data to driver controller 29 or to frame buffer 28 be used for the storage.Raw data typically refers in an image information in each position recognition image feature.For instance, these characteristics of image can comprise color, saturation degree and gray level.
In one embodiment, processor 21 comprises the operation with control exemplary display device 40 of a microcontroller, CPU or logical block.Regulate hardware 55 and generally comprise amplifier and filtrator, being used for transmitting signals, and be used for from loudspeaker 46 received signals to loudspeaker 44.Regulating hardware 55 can perhaps can incorporate in processor 21 or other assembly for the discrete component in the exemplary display device 40.
Driver controller 29 is directly from processor 21 or from the raw image data of frame buffer 28 acquisitions by processor 21 generations, and the suitable described raw image data of reformatting, at full speed is sent to array driver 22.In particular, driver controller 29 is reformated into the data stream of the form with similar grating with raw image data, makes it have the chronological order that is suitable in display array 30 enterprising line scannings.Then driver controller 29 sends formative information to array driver 22.Although for example driver controller 29 system processors 21 common and as stand-alone integrated circuit (IC) of lcd controller are associated, these controllers can be implemented in many ways.It can be used as hardware and is embedded in the processor 21, is embedded in the processor 21 as software, or is fully integratible in the hardware with array driver 22.
Usually, array driver 22 receives formative information and video data is reformated into one parallel group waveform from driver controller 29, and it repeatedly is applied to hundreds of lead-in wires and (sometimes) thousands of lead-in wires from the x-y matrix of the pixel of display by per second.
In one embodiment, driver controller 29, array driver 22 and display array 30 are suitable for any in the type of display described herein.For instance, in one embodiment, driver controller 29 is a conventional display controller or a bistable state display controller (for example, interferometric modulator controller).In another embodiment, array driver 22 is a conventional driver or bi-stable display driver (for example a, interferometric modulator display).In one embodiment, driver controller 29 forms an integral body with array driver 22.Described embodiment is common in the integrated system of the height of for example cell phone, wrist-watch and other zonule display.In another embodiment, display array 30 is a typical display array or bi-stable display array (display that for example, comprises an array interferometric modulator).
Input media 48 allows the user to control the operation of exemplary display device 40.In one embodiment, input media 48 comprise qwerty keyboard for example or telephone keypad keypad, button, switch, touch quick formula screen, pressure-sensitive or thermosensitive film.In one embodiment, loudspeaker 46 is one to be used for the input media of exemplary display device 40.When loudspeaker 46 is used to enter data into described device, can provide voice command to be used to control the operation of exemplary display device 40 by the user.
In certain embodiments, the control programmability is present in (as described above) driver controller, and described driver controller can be arranged in some positions of electronic display system.In some cases, the control programmability is present in the array driver 22, those skilled in the art will realize that above-mentioned optimization can be in many hardware and/or component software and with various configurations enforcements.
The details of the structure of the interferometric modulator of operating according to principle mentioned above can extensively change.For instance, Fig. 7 A-7C illustrates three different embodiment of mobile mirror surface structure.Fig. 7 A is the cross-sectional view of the embodiment of Fig. 1, and wherein a strip metal material 14 is deposited on the support member 18 of quadrature extension.In Fig. 7 B, removable reflecting material 14 only is attached to the support member of the corner on the drift bolt (tether) 32.In Fig. 7 C, removable reflecting material 14 suspends from deformable layer 34.Can be with respect to optical property and optimization because be used for the structural design of reflecting material 14 and material, and be used for the structural design of deformable layer 34 and material can be with respect to want engineering properties and optimization, so this embodiment has benefit.Comprise the production of having described all kinds interferometric device in the multiple open source literature of the open application case 2004/0051929 of (for example) U.S..Multiple known technology can be used to produce the said structure that relates to a series of material depositions, patterning and etching step.
Revise through some, the basic structure of an interferometric modulator can be used as mems switch.Fig. 8 A is the cross-sectional side view of mems switch 700.The mems switch 700 of Fig. 8 A has the collapsible cavity feature similar to the interferometric modulator of Fig. 7 A.Mems switch 700 additionally comprises two terminals 706, an insulation course 710 and conductive strips 708.Mems switch 700 is structures that provide selectivity to electrically contact between two terminals 706.More particularly, when terminal 706 electrically contacted, it is closed that mems switch 700 is considered to, and when terminal 706 did not electrically contact, mems switch was considered to disconnect.In the mechanical relaxation state, terminal 706 does not electrically contact, and therefore mems switch 700 disconnects.As shown in Fig. 8 A, mems switch 700 comprises the insulation course 710 between removable material 714, conductive strips 708 and removable material 714 and the conductive strips 708.Insulation course 704 on substrate 720 support electrodes 702 and the described electrode 702.Two terminals 706 of separating a distance are deposited on the insulation course 704 and/or pass insulation course 704.Terminal 706 can be connected to other circuit by the through hole that insulation course 704 and/or electrode 702 are passed in use.Insulation course 704 is mechanically separated to define cavity 707 by support member 718 with removable material 714.Describe about interferometric modulator as mentioned, removable material 714 is deformable, makes when applying a voltage difference on removable material 714 and electrode 702 two ends, and removable material 714 can be towards substrate 720 distortion.Reflecting material 14, substrate 20 and the electrode 16 of this and Fig. 7 A are similar, and similar with the reflection horizon 14a of Fig. 1 and 14b, transparent substrates 20 and reflection horizon 16a and 16b.Removable material 714 can have an insulator 710 on it, and insulator has conductive strips 708 on it.Described conductive strips 708 are aimed at, make when removable material 714 by as described above one apply current potential when substrate 720 departs from, conductive strips 708 contact two terminals 706, thereby cause terminal 706 to electrically contact and mems switch 700 closures.In this embodiment, conductive strips 708 are isolated by insulator 710 and removable material 714 electricity, make the voltage difference that does not upset applying on removable material 714 and electrode 702 two ends that contacts between terminal 706 and the removable material 714.Not needing therein will not need conductive strips 708 and insulator 710 among some embodiment of this isolation, and removable material 714 self can serve as the conductor of two terminals 706 of bridge joint.Voltage drop on being applied to removable material 714 and electrode 702 two ends is low to moderate when being lower than a certain level (also as described above), and removable material 714 is returned to its mechanical relaxation state and mems switch 700 disconnects.
Fig. 8 B is the top view of mems switch 700.Among the figure support member 718, conductive strips 708 and terminal 706 be shown as and pass the situation that removable material 714 observation post see.Conductive strips 708 can be significantly less than removable material 714.Because in case described band contacts described electrode, described with on current potential can be different from current potential on the removable material, so this is intended to guarantee that electromotive force between removable material 714 and the electrode 702 is greater than the electromotive force between conductive strips 708 and the electrode 702.
Fig. 9 is the cross-sectional side view of the mems switch 800 of another embodiment.Mems switch 800 has the structural attitude similar to the interferometric modulator of Fig. 7 C.Its also have with Fig. 8 A in those switching functions of mems switch 700 and the functional and feature of mems switch of feature similarity.
From combining of the convenient logic of the mems switch of the basic structure identical structure and handoff functionality and interfere type adjustment device array with interferometric modulator.Switch that may can integrated other type for example is deposited on the more conventional electronic switch that the silicon thin film on the glass substrate is made with a switch made from the dissimilar mode of manufacturing of interferometric element with by use.Yet, because the manufacturing based on the mems switch of interferometric modulator can be carried out by use many same treatment steps of using in making interferometric modulator, so these mems switches can be integrated into the identical substrate of array with the interferometric modulator that is used for (for example) display in not expensive mode.
For instance, in one embodiment, mems switch and interferometric modulator can use same procedure manufacturing, although can carry out additional step on interferometric modulator and/or mems switch in manufacture process.For instance, concerning making interferometric modulator, do not need terminal is added to the deposition and the etching step of mems switch.In described embodiment, will carry out some common step, for example be used to form those steps of electrode or the like.Then will form the mems switch terminal.After these steps, the more multistep of then carrying out the necessity that is used for interferometric modulator and mems switch is rapid, therefore an interferometric modulator and a mems switch array that makes up be provided.In another embodiment, the same procedure that is used to make interferometric modulator is made mems switch.Can at first on substrate, make described interferometric modulator, then on substrate, make mems switch.Similarly, can at first on substrate, make mems switch, then on substrate, make interferometric modulator.Because mems switch comprises the many structures identical with interferometric modulator, so in arbitrary situation, manufacture method does not need material alteration.
Figure 10 A is the schematic circuit that the embodiment of the interferometric modulator array with integrated with MEMS switches of carrying out the row selection function is described.In the time need driving the display with high line number by the display driver with less line output line, this journey selection function is useful in some display embodiment.For instance, the row with display of colour element can be 3 times of the row of black and white display with similar number pixel, and its row is 4 times of the latter.In these colored embodiment, each pixel can comprise four kinds of redness, four kinds of bluenesss and four kinds of green modulator.The whole aware colors of judging pixel of the reflective condition of described group 12 " sub-pixel ".For this embodiment, need four times line driver output usually.Yet, because the switch of explanation configuration among Figure 10 A (one described group 12 sub-pixels are described) only needs line driver output for each organizes 12 sub-pixels.This embodiment can use the mems switch as the identical embodiment that shows among Fig. 8 A, Fig. 8 B and Fig. 9, yet other mems switch embodiment is possible.The row selection function is used to write data into interferometric modulator array.In one embodiment, will be driven into corresponding to the data of the needed state of specific son row in the interferometric modulator array on the alignment that a plurality of row and son row shared.Subsequently, with data at specific son row drive work, therefore cause the interferometric modulator in described son row to present the state of wanting.The principle that this paper discussed can easily be suitable for carrying out the column selection function that is used for this embodiment or another embodiment.
The part of modulator array is shown as viewing area 45 in Figure 10 A.The term viewing area is introduced into herein to specify whole some zone that shows.The viewing area is the set of display element, and described display element is decomposed into the part of the demonstration of the image information of representing a coherent group usually.One typical viewing area will be corresponding to the single pixel in the gained image.Described viewing area 45 among Figure 10 A comprises three row 62,64 and 66, and in the situation of one pixel of viewing area 45 expressions therein, common row are used for for example each color of red, green and blue; With a row that comprises 4 son row 52a-d.Each son row 52a-d comprises an interferometric modulator and an a pair of mems switch from each row in three row.Each modulator array of drive unit 51 is capable to have an output stitch, and provides a row to be connected between the corresponding row in each drive unit 51 output stitch and the modulator array.Row 5 is illustrated in Figure 10 A and Fig. 9 B.
In the order pattern with row 1 beginning, the row of drive unit 51 is selected the output activity that becomes, and then advances to row 2 or the like, therefore movable row of disposable selection.Timing circuit 53 regularly line drives in proper order and continues the part that drive unit 50 will row drives the time alive, therefore once selects a movable son row.When timing signal when being movable, the mems switch that is connected to described timing signal and is connected to bias line B1 again will disconnect, and the mems switch that is connected to described timing signal and is connected to the row connection again is with closure.Signal on row connects will be delivered to the interferometric modulator of son row 52a-d.When 1) drive unit 51 row that will be associated with the capable 52a-d of child drive when alive and 2) will drive with the timing signal t1-t4 that described specific son row 52a-d be associated when alive when timing circuit 53, what the interferometric modulator of the capable 52a-d of individual small pin for the case will be for activity.
For instance, in Figure 10 A, will export row 5 when drive unit 50 and drive when alive, timing circuit 53 drives work with each signal sequence among the timing signal t1-t4, and each signal continues 1/4 of the 5 activity times of row.When timing circuit 53 drives timing signal t1 when alive, mems switch s1 will disconnect and mems switch s2 with closure.The interferometric modulator of son row 52a will be connected to the row that is driven by drive unit 50 output row 5 and connect.Because output row 5 is movable, so the interferometric modulator of son row 52a will be driven work.Residue is about to remain connected to bias line B1.Timing circuit 53 will then drive work with timing signal t2, and the interferometric modulator of sub-row 52b will be connected to the row connection that is driven by output row 5 and will be driven work.This continues in proper order, and each is all driven work up to the capable 52a-d of child.Then at this order of repetitions such as row 6,7.
As shown in Figure 10 A, timing signal in row with all other row institute share, when making the first sub-behavioral activity when any row, be used for the switch triggering of the first son row of each row, and then second, third and the 4th sub switch triggering of going.Yet the driver output pin that only is used for movable row is driven work.All non-movable row are maintained at bias voltage, and movable row is driven work.In this way, except movable son row, the element during all sons of whole array are gone all is independent of the state of timing signal and therefore is independent of the interior identical bias voltage of position of the switch experience of described son row.Should observe, need therein further to reduce in the situation of low power consumption, can avoid the switching of non-movable row selecting switch by masking circuit (masking circuit).
Figure 10 B shows the circuit of Figure 10 A of interferometric modulator with viewing area 45 and mems switch with physical layout.Row 62,64,66 and son row 52a-d have been indicated among the figure.Among the figure each conductive strips 1008 and the terminal 1006 in the mems switch is shown as and passes removable material 1014 and observe the situation that can see.Also showed the interconnect traces 47 that connects mems switch according to the synoptic diagram shown in Figure 10 A among the figure.Can under fixed electorde, carry out the part of interconnection wiring.The trace that is used for regularly line 49 can or even connect up on the substrate bottom at those.Can connect with vertical through hole.
Integrated convenience is especially obvious in Figure 10 B.Because it has similar physical features, so mems switch can manufacture the size identical with interferometric modulator.Equally, the spacing of the spacing of mems switch and interferometric modulator is complementary.This spacing matching is specially adapted to this embodiment and provides other embodiment of signal to each row or each row.Essential wiring also integrates with interferometric modulator expediently, because it can be made by using standard metallization process interconnection manufacturing technology.
Figure 11 A is the schematic circuit that another embodiment of the interferometric modulator array with integrated with MEMS switches is described.In this embodiment, mems switch is carried out ternary function.This embodiment shows as the mems switch of Fig. 8 A with the identical embodiment as shown in Fig. 8 B, yet other mems switch embodiment also is possible.Ternary function is applicable to the interferometric modulator array system, to be used to save electric power.Though rowaand column lines is ternary, the circuit that is used to drive those lines can be de-energized.Be expert at and alignment is under the ternary situation, the interferometric modulator in the described array strides across interferometric modulator or passes limited ternary offresistance and slowly dissipate up to electric charge keeping being written to its inner numerical value.Because can charge to interferometric modulator in the sub-fraction of charge dissipation institute spended time, in the most of the time of whole display operation time, driving circuit can cut off the power supply.
The part of modulator array is shown as viewing area 40 in Figure 11 A, it comprises three row 42,44 and 46, and in the situation of one pixel of viewing area 40 expressions therein, common row are used for for example each color of red, green and blue; With a row that comprises 4 son row 52a-d.Each row comprises a ternary mems switch of row and an interferometric modulator from each son row.Each son row 52a-d comprises an interferometric modulator and the ternary mems switch of a son row from each row in three row.
In row and the ternary mems switch of son row each all is connected to signal and keeps.The state of holding signal will judge that whether described row and sub-line be ternary or whether described row and son row are driven.
Figure 11 B has showed the circuit of Figure 11 A of interferometric modulator with viewing area 40 and mems switch with physical layout.Figure 11 B and Fig. 9 category-B seemingly, and the notable feature of discussing about Fig. 9 B in Figure 10 B also clearly.As the situation of Fig. 9 B, can also see integrated convenience by Figure 10 B.
In another embodiment, mems switch can be used for utilizing any application of switch, no matter whether described application also uses interferometric modulator.Therefore, for example the entire substrate of glass can manufacture and has the mems switch that is used for various application.As hereinafter further describing, can be similar to transistorized mode with one and use these mems switches.Therefore, mems switch can replace transistor, logical circuit or controller and the drive unit in (for example) any application.
Figure 12 shows the embodiment of the logic function of using mems switch.Because mems switch is 4 end devices that do not have intrinsic polarity, these logic functions can only be implemented by two switches.In the phase inverter of Figure 12, AND and the OR door each is all used two mems switches, its displaceable layers is connected to the displaceable layers of another mems switch, thereby form one first input, and a terminal is connected to a terminal of another mems switch, thereby forms an output.In the situation of phase inverter, the electrode of first switch and another terminal all are connected to power supply, and the electrode of second switch is connected to ground with another terminal.In the situation of AND door, the electrode of first switch is connected to ground and another terminal is connected to second input, and the electrode of second switch is connected to power supply and its another terminal is connected to ground.In the situation of OR door, the electrode of first switch is connected to ground and another terminal is connected to power supply, and the electrode of second switch is connected to power supply and its another terminal is connected to second input.In other embodiments, the mems switch of single type can be used to produce digital logic functions, for example AND, NAND, NOR, OR, XOR, XNOR and AOI.Other digital logic functions and combination also are possible.
The logic function of finding in the assembly externally to provide usually can be provided together the logical block that comprises mems switch, therefore saves system cost.For instance, mems switch can be through arranging to be used for the ability of low leakage transistor, shift register or demoder.In the situation of interferometric modulator display, mems switch can be used in combination with (for example) line driver or row driver.Advantageously, mems switch can be made on the various substrates of for example glass substrate or plastic.Place the ability on the large-area glass substrate more insensitive than silicon substrate usually on switch, thereby the conventional transistorized advantage of the logic-based that is better than many forms is provided.
Though above-detailed is showed, described and pointed out as being applied to the novel feature of various embodiment, should understand the those skilled in the art and can under the situation that does not depart from spirit of the present invention, form and the details to illustrated device or method make various omissions, replacement and change.As will be recognized, use or put into practice owing to some feature can be independent of further feature, the present invention can embody in the form of all features that do not provide this paper and stated and benefit.
Claims (21)
1. display device, it comprises:
One MEMS display part, it comprises the MEMS display element of several rows and some row; With a plurality of mems switches, it forms the mems switch element of one or more extra row or column of contiguous described display part, in wherein said a plurality of mems switch at least some are collapsible cavity mems switches, and each collapsible cavity mems switch comprises: first and second terminals;
One first electrode; With
One deformable layer, one voltage at described layer of its response and the described first electrode two ends, wherein said first and second terminals optionally connect, and wherein said deformable layer be configured to the primary importance that all contacts with described first and second terminals and and all discontiguous second place of described first and second terminals between move.
2. device according to claim 1, wherein said a plurality of mems switches partly form row or column and select circuit.
3. device according to claim 1, it further comprises:
One with the processor of described display element telecommunication, described processor is configured to image data processing; With
One with the memory storage of described processor telecommunication.
4. device according to claim 3, it further comprises one drive circuit, and described driving circuit is configured to send at least one signal to described display.
5. device according to claim 4, it further comprises a controller, and described controller is configured to send to described driving circuit at least a portion of described view data.
6. device according to claim 3, it further comprises an image source module, and described image source module is configured to send described view data to described processor.
7. device according to claim 6, wherein said image source module comprises at least one in a receiver, transceiver and the transmitter.
8. device according to claim 3, it further comprises an input media, and described input media is configured to receive the input data and transmits described input data to described processor.
9. display device, it comprises:
One MEMS display part, it comprises the MEMS display element of several rows and some row; With a plurality of mems switches, it forms the mems switch element of one or more extra row or column of the described MEMS element that is close to described display part, the spacing of wherein said MEMS element matches with the spacing of the described MEMS element of described display, and wherein said MEMS display and mems switch are made on a glass substrate, and at least some of wherein said a plurality of mems switches are collapsible cavity mems switches, and each collapsible cavity mems switch all comprises:
First and second terminals;
One first electrode; With
One deformable layer, one voltage at described layer of its response and the described first electrode two ends, wherein said first and second terminals optionally connect, and wherein said deformable layer be configured to the primary importance that all contacts with described first and second terminals and and all discontiguous second place of described first and second terminals between move.
10. display device that is configured to based on data presentation one image, described device comprises: be used to show the member of at least a portion of described image, described display member comprises the row and column of MEMS element; With
Be used for described data are switched to the member of described display member, described switching member comprises a plurality of mems switches in the mems switch element that is configured in one or more extra row or column of being close to described display member, the spacing of wherein said mems switch element matches with the spacing of the described MEMS element of described display part, and at least some of wherein said a plurality of mems switches are collapsible cavity mems switches, and each collapsible cavity mems switch comprises:
First and second terminals;
One first electrode; With
One deformable layer, one voltage at described layer of its response and the described first electrode two ends, wherein said first and second terminals optionally connect, and wherein said deformable layer be configured to the primary importance that all contacts with described first and second terminals and and all discontiguous second place of described first and second terminals between move.
11. device according to claim 10, wherein said display member comprise the MEMS display part of the MEMS display element of several rows and some row.
12. according to claim 10 or 11 described devices, wherein said switching member comprises a plurality of mems switches of the mems switch element of one or more extra row or column that form contiguous described display member.
13. device according to claim 10, it further comprises:
Be used to select the member of row or column; With
Be used for data are switched to the member of the row and column of described selection.
14. device according to claim 13, wherein said selected member comprises a controller.
15. device according to claim 13 wherein is used for the member that described data switch to the row and column of described selection is comprised a plurality of mems switches of the mems switch element of one or more extra row or column that form contiguous described display member.
16. method that on a display device, shows an image, described display device comprises a MEMS display part and a plurality of mems switch, described MEMS display part comprises the MEMS display element of several rows and some row and the mems switch element of one or more extra row or column that described a plurality of mems switch forms for the described MEMS element of contiguous described display part, the spacing of wherein said mems switch element matches with the spacing of the described MEMS element of described display part, and described method comprises:
Be provided for being presented at the view data on described several rows and the described MEMS display element of some row;
By switch the view data that is used to be presented on the row MEMS display element from the switch in the mems switch of additional row;
By from the switch in the mems switch of extra row one drive circuit being connected to the MEMS of delegation display element, at least some of wherein said a plurality of mems switches are collapsible cavity mems switches, and each collapsible cavity mems switch comprises:
First and second terminals;
One first electrode; With
One deformable layer, one voltage at described layer of its response and the described first electrode two ends, wherein said first and second terminals optionally connect, and wherein said deformable layer be configured to the primary importance that all contacts with described first and second terminals and and all discontiguous second place of described first and second terminals between move.
17. method according to claim 16 is wherein switched view data and is included in a mobile deformable layer in the collapsible cavity, a voltage at described layer of described layer response and electrode two ends, and wherein first and second terminals optionally connect.
18. a method of making a MEMS display device, described method comprises:
Form the MEMS element of several rows and some row on a substrate, described element is configured to show an image; With
On described identical or different substrates, form the mems switch element of one or more extra row or column, the spacing of wherein said mems switch element matches with the spacing of the described MEMS element that is configured to show described image, and at least some elements of wherein said mems switch element are configured to the described MEMS element switching signal that is configured to show described image, and at least some of wherein said a plurality of mems switches are collapsible cavity mems switches, and each collapsible cavity mems switch comprises:
First and second terminals;
One first electrode; With
One deformable layer, one voltage at described layer of its response and the described first electrode two ends, wherein said first and second terminals optionally connect, and wherein said deformable layer be configured to the primary importance that all contacts with described first and second terminals and and all discontiguous second place of described first and second terminals between move.
19. method according to claim 18, wherein form and be configured to show that the described MEMS element of described image and the described mems switch element of formation comprise at least some treatment steps of execution, described treatment step forms simultaneously and is configured to show the described MEMS element of described image and the ingredient of described mems switch element.
20. method according to claim 19 is configured to wherein show that the described MEMS element of described image and described mems switch element are formed on the common glass substrate.
21. a MEMS display device comprises:
The MEMS element of the several rows on a glass substrate and some row, described MEMS element is configured to show an image; With
The mems switch element of one or more the extra row or column on described glass substrate, the spacing of wherein said mems switch element matches with the spacing of the described MEMS element that is configured to show described image, and at least some elements of wherein said mems switch element are configured to the described MEMS element switching signal that is configured to show described image, and at least some of wherein said a plurality of mems switches are collapsible cavity mems switches, and each collapsible cavity mems switch comprises:
First and second terminals;
One first electrode; With
One deformable layer, one voltage at described layer of its response and the described first electrode two ends, wherein said first and second terminals optionally connect, and wherein said deformable layer be configured to the primary importance that all contacts with described first and second terminals and and all discontiguous second place of described first and second terminals between move.
Applications Claiming Priority (4)
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| US61350104P | 2004-09-27 | 2004-09-27 | |
| US60/613,501 | 2004-09-27 | ||
| US11/150,407 | 2005-06-10 | ||
| US11/150,407 US7345805B2 (en) | 2004-09-27 | 2005-06-10 | Interferometric modulator array with integrated MEMS electrical switches |
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| CN1755477A CN1755477A (en) | 2006-04-05 |
| CN1755477B true CN1755477B (en) | 2011-11-16 |
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| CN 200510103444 Expired - Fee Related CN1755477B (en) | 2004-09-27 | 2005-09-15 | Interferometric modulator array display device with integrated MEMS electrical switches, and method therefor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US7719752B2 (en) | 2007-05-11 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same |
| CN101995689A (en) | 2009-08-11 | 2011-03-30 | 江苏丽恒电子有限公司 | Switch array and display array of display device |
| US8804295B2 (en) | 2009-10-15 | 2014-08-12 | Altera Corporation | Configurable multi-gate switch circuitry |
| US20120153970A1 (en) * | 2010-12-21 | 2012-06-21 | Qualcomm Mems Technologies, Inc. | Capacitive touch sensing devices and methods of manufacturing thereof |
| US9293076B2 (en) * | 2013-10-21 | 2016-03-22 | Qualcomm Mems Technologies, Inc. | Dot inversion configuration |
| GB2555510B (en) * | 2016-06-30 | 2020-03-11 | Cirrus Logic Int Semiconductor Ltd | MEMS device and process |
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| US20030043157A1 (en) * | 1999-10-05 | 2003-03-06 | Iridigm Display Corporation | Photonic MEMS and structures |
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| US6366186B1 (en) * | 2000-01-20 | 2002-04-02 | Jds Uniphase Inc. | Mems magnetically actuated switches and associated switching arrays |
| CA2355450A1 (en) * | 2000-09-29 | 2002-03-29 | Nortel Networks Limited | Hybrid attach mirrors for a mems optical switch |
| US6489857B2 (en) * | 2000-11-30 | 2002-12-03 | International Business Machines Corporation | Multiposition micro electromechanical switch |
| US20020149834A1 (en) * | 2000-12-22 | 2002-10-17 | Ball Semiconductor, Inc. | Light modulation device and system |
| US6614581B2 (en) * | 2001-07-03 | 2003-09-02 | Network Photonics, Inc. | Methods and apparatus for providing a multi-stop micromirror |
| US6850133B2 (en) * | 2002-08-14 | 2005-02-01 | Intel Corporation | Electrode configuration in a MEMS switch |
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- 2005-09-26 TW TW101136074A patent/TW201302597A/en unknown
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| US5619061A (en) * | 1993-07-27 | 1997-04-08 | Texas Instruments Incorporated | Micromechanical microwave switching |
| US20020000959A1 (en) * | 1998-10-08 | 2002-01-03 | International Business Machines Corporation | Micromechanical displays and fabrication method |
| US20030043157A1 (en) * | 1999-10-05 | 2003-03-06 | Iridigm Display Corporation | Photonic MEMS and structures |
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| TW200624369A (en) | 2006-07-16 |
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| CN1755477A (en) | 2006-04-05 |
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