CN1711633A - 柔性装置及其制造方法 - Google Patents

柔性装置及其制造方法 Download PDF

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CN1711633A
CN1711633A CNA2003801028822A CN200380102882A CN1711633A CN 1711633 A CN1711633 A CN 1711633A CN A2003801028822 A CNA2003801028822 A CN A2003801028822A CN 200380102882 A CN200380102882 A CN 200380102882A CN 1711633 A CN1711633 A CN 1711633A
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R·德克
T·M·米奇伊森
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Koninklijke Philips NV
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Abstract

本发明的可卷动装置包括绝缘材料衬底，该衬底具有从第一侧延伸到第二侧的孔径。在第一侧上具有开关元件，以及由有机材料涂层覆盖的相互连接线等。在第二侧上存在功能层。这种功能层例如包括电容器、天线和特殊的电光层。因此，获得可包括天线和驱动电路的可卷动显示器。

Description

柔性装置及其制造方法
技术领域
本发明涉及一种设有以下部件的柔性单片电子装置：
-具有第一侧和相对的第二侧的电绝缘材料绝缘层，其中该绝缘层具有从第一侧延伸到第二侧的第一孔径；
-处于衬底第一侧上的半导体材料有源层，在该有源层中以及在该有源层上限定至少一个开关元件，该元件具有在有源层中的第一电极；以及
-对于所述至少一个开关元件起保护覆盖层作用的柔性涂层。
本发明还涉及包括这种柔性装置的设备和标签。
本发明还涉及包括多个开关元件的柔性单片电子装置的一种制造方法，该方法包括以下步骤：
-提供具有第一侧和相对的第二侧的衬底，在该第一侧上具有半导体材料的有源层，在该有源层中以及在该有源层上设有开关元件，该开关元件的第一电极处于有源层中；
-部分去除有源层，从而在至少一个岛状物上具有包括多个开关元件的功能实体；
-在衬底的第一侧上涂覆柔性涂层，从而覆盖所述的至少一个岛状物；
-将载体衬底暂时附着到该衬底的第一侧；以及
-从第二侧去除所述衬底，包括通过蚀刻剂进行的湿化学蚀刻步骤。
背景技术
在未正式公开的申请EP02100445.2(PHDE010137)中描述了这种装置和这种方法。此处，描述了这样一种方法，其中开关元件是构成集成电路的集成电路元件。衬底是绝缘体上硅衬底，具体来说，具有半导体材料基底层、氧化物层和硅有源层。在提供涂层并用粘合剂进行适当的预处理之后，用胶水固定玻璃载体衬底。然后将衬底削薄，以便利用在碱性蚀刻剂如浓缩KOH的液池中进行湿化学蚀刻，去除基底层。在此氧化物层起蚀刻停止层的作用，且可以在之后被去除。然后用接合焊盘在集成电路元件的暴露的后侧上设置附加的金属层。之后去除载体衬底，从衬底剥离该装置，反之亦然。
发明内容
本发明的第一目的在于提供一种开头段落中提到的那种具有更多功能性的装置。
本发明的第二目的在于提供一种开头段落中提到的方法，从而可以方便地制造本发明的装置。
通过使功能层处于绝缘层的第二侧上，并通过绝缘层中的第一孔径与第一电极相连，来实现第一目的。术语‘功能层’应理解为表示在衬底区域的相等大部分上延伸的一层，并且其在该装置中单独或者与开关元件结合实现特定功能。例如包括电光层，其中限定了天线的导电层，高K介电层如用作电容器的铁电层，用于传感器应用的层，如包括用于粘接缩氨酸、蛋白质或其他生物材料的抗体的粘接层。
在装置中集成这种功能层对于非常柔性并且最好可卷动的装置而言极为重要，其中柔性对于组装来说成为负担。即使柔软箔片能适宜附着到接合焊盘，通常仍然希望这种柔软箔片仅用于功率分配，并且如果需要的话用于信号传输。不过，应当集成任意的其他元件。
在装置的优选实施例中，功能层是与开关元件一起构成显示像素的电光层。由于在衬底的第二侧设置电光层，所以可制造可卷动的显示器。这种可卷动的显示器意在与移动装置如移动电话结合使用。例如在未预先公开的申请EP02079131.5(PHNL020942)中描述了这种显示盒(display cartridge)。
适用于本发明的电光层包括液晶层，有机、聚合物或无机电致发光层以及电泳层。特别优选电泳层，因为其提供良好的对比度。
用于制造柔性显示器的技术本身称作SUFTLA。S.Utsunomiya等人在Conference reports of Eurodisplay 2002中发表的“Flexible TFT-LEPD transferred onto plastic substrate usingsurface free technology by laser ablation/annealing”(第79-82页)中披露了SUFTLA。通过在具有牺牲非晶硅层的玻璃衬底上设置薄膜晶体管，制造这种技术的柔性显示器。随后，用塑料衬底取代玻璃衬底，并在衬底的第一侧上设置电光层。如从所引用文献的图4可以看出，所产生的显示器是柔性的，以致于到达可以弯曲的程度。不过，其决不能如箔片那样可卷动。根据本发明者的观点，这是因为晶体管的源电极和漏电极镀有金属，其中之一与像素电极又相互连接的原因。其中需要相对较厚的绝缘材料层覆盖晶体管，并作为像素电极的衬底。在本发明的装置中，衬底的第二侧原则上是完全平坦的。从而，既不需要对源电极和漏电极镀金属，也不需要足够厚的绝缘层覆盖晶体管。
例如，对于液晶材料或电致发光材料的电光层而言，适于具有另一电极层作为反电极。如果需要，也可以存在特定类型显示器领域技术人员已知的其他层，如在有机电致发光装置的情形中包括聚(3，4-乙烯二氧噻吩)的空穴注入层。此外，在所述的另一电极层附近可具有另一保护层。
在另一实施例中，在有源层与功能层之间存在导电层，在该导电层中限定了像素电极。尽管可以在有源层中限定像素电极，当然可通过已知方式设置掺杂原子以便在电极区域导电，不过优选提供像素电极作为单独的层。这样能最佳地使用可用空间，并增大选择衬底的自由度。否则，绝缘层需要相对较薄，以便使电光层具有大致平坦的表面。此外，在此情形中，在相互连接层中在像素电极与金属线之间存在的用于驱动晶体管栅极的电容太高了。
在另一实施例中，显示像素包括具有第一和第二电极以及电介质的电容器，其中第一电极处于导电层中，第二电极在有源层中限定，衬底作为电介质。对于由电压驱动的显示器，如有源矩阵液晶显示器，每个像素中必须包括电容器。当第一电极设置在导电层中时，最好集成该电容器。
从而最好衬底具有高K区域和低K区域，其中高K区域作为电容器的电介质。该实施例使导电层与有源层之间的寄生电容最小，同时可使电容密度足够高。可以首先去除临时衬底例如玻璃或绝缘体上硅，从而仅剩下有源层，由此适宜实现该实施例。然后可以设置多个层，并进行光刻构图和蚀刻。用于低K区域的适宜材料包括SiLk、聚酰亚胺、苯并环丁烯、二氧化硅、有机改性的二氧化硅以及氢和甲基硅酸盐类(methylsilsesquioxane)。用于高K区域的适宜材料包括氮化硅和可通过溶胶-凝胶处理产生的具有钙钛矿结构的铁电氧化物。
在显示器的另一实施例中，开关元件是有源层中和有源层上具有的开关元件阵列的一部分，该阵列由驱动电路驱动，驱动电路包括存在于有源层中和有源层上的电路元件的集成电路。当柔性装置不需要与外部部件连接时，非常优选装置本身中包括任何驱动电路。这在有源层由十分适用于驱动器电子装置的高质量单晶或多晶硅制成时极有可能。
在本发明的另一实施例中，功能层是限定天线并设有多个相互连接的开关元件、以便构成集成电路的导电层。该实施例的天线允许集成电路与读出装置之间非接触地通信。这种通信包括信号的传输，不过也可以包括功率的传输。这种天线适合于低频和中频。对于极高频率和短距离，即高于2GHz，天线可以包含在电路中。可以用衬底作为沉积种层的掩模，随后进行电镀，从而适宜制造天线。此外，如果需要可以设置阻挡层。
本发明装置的绝缘层可包含氧化物或任何其他绝缘层，如氮化物或氧氮化物。可以在去除临时衬底之后进行沉积。例如，如果使用单晶或多晶衬底，可通过首先研磨，然后按照所需图案蚀刻来大量去除。从而将保留下构成有源层的衬底的平台结构。这形成了岛状形状。之后涂覆具有孔径的绝缘层。如果热氧化物作为绝缘层，则采用权利要求2中所述的状态。或者，可使用具有埋入氧化物层的衬底，并且并非去除埋入的氧化物，而是将其构图。特别是在具有氧化物层的衬底的情形中，优选涂层还具有氧化物层。应当看到，这可以防止装置发生不可控制的卷曲。
有源层具体包括无机半导体材料，如Si、GaAs或其他III-V或II-VI族材料。该有源层中的电极通常形成为包含n-或p-型电荷载流子的掺杂区。
本发明装置的涂层通常具有1至50μm量级的厚度，优选2至5μm。鉴于这种材料优异的柔性，最好包含有机材料。适宜的材料包括环氧化物、苯酚、三聚氰胺、聚酯、硅树脂或其聚合物或共聚物，或者与其他聚合物的混合物，并且可以通过纤维、颜料、填充剂、玻璃或金属来加强。考虑到操作条件或者在衬底的第二侧上提供适宜材料，在更高温度下依然需要稳定的高等级产品，例如基于聚酰亚胺树脂、聚碳酸酯树脂、碳氟化合物树脂或聚砜树脂。可以在上述未预先公开的申请EP02100445.2(PHDE010137)中寻找到与聚合物的选择有关的进一步信息。
本发明的装置适于作为标签的一部分出售，并且可与适用于在识别和安全区中具有天线的实施例的任何设备结合使用。显示器的合适用途包括识别和安全事务，不过也可以用于信息目的，例如作为纸张上文档的一部分。为此，不仅具有驱动电路是有利的，而且存在用于功率和信号的非接触通信的天线也是有利的。
通过提供涂层侧面上具有保护区域的有机材料涂层，实现提供一种开头段落中所述类型的改进方法的目的，并且去除衬底的步骤包括通过蚀刻剂进行湿化学蚀刻，通过保护区域保护涂层不受所述蚀刻剂的影响。在试验中发现，由于与蚀刻剂相互作用，涂层易于发生膨胀,特别是在具有强碱性蚀刻剂如KOH时。这种膨胀不仅损害外观，而且在衬底的第二、后侧上设置层也存在问题。由于发生膨胀，衬底不再足够平坦，并且层不具有足够大的分辨率。在本发明的方法中，通过在涂层的在浸入液池期间与蚀刻剂接触的侧面上定义保护区域，解决该问题。
在优选实施例中，按照所需的图案涂覆有机材料，使有机材料在保护区域不存在而在装置区域存在。之后，用粘接剂对保护区进行处理，并且从载体衬底去除电子装置的动作大致仅限于装置区域。由于构图而在保护区域中形成了胶水层并且由于粘接剂的处理，胶水层很好地粘附到衬底上。于是胶水层构成了对有机材料层的适当保护，防止受到蚀刻剂的侵害。
为了防止卷曲，并在保护区域形成非常好的粘接，可以在有机材料涂层的顶部上设置氧化物层。这样做具有附加的优点，即可使用硅烷耦合剂作为粘接剂。例如包括3-异丁烯酰基丙氧基三甲氧基硅烷和缩水甘油基丙氧基三甲氧基硅烷。在施加玻璃载体衬底后，玻璃的羟基与硅烷的甲氧基通过释放甲醇相互作用。从而硅烷通过Si-O-Si键与玻璃表面共价地结合。
在使用装置之前去除载体衬底。可以在装置制造过程之后直接进行该去除步骤。这样就具有可重复使用载体衬底的优点。不过，也可以由消费者进行载体衬底的去除步骤；如果装置包含用于安全或识别目的的集成电路，则这尤为有用。在这种去除步骤之前，可将各装置编程，以便包含识别代码。此外，在装置附着于另一个不使用的载体衬底之前，不执行该去除步骤。然后可以沿直线切割该衬底，如纸张，从而获得一系列柔性装置。最好，利用例如用刀片进行切割，实现载体衬底的去除。
应当看到，各装置之间不必存在保护区域。特别是，如果这些区域仅存在于包括多个单独装置(也称作晶片)的衬底的外边缘，则这足以满足需要。还应看到，还可以不需要在衬底的第二侧处提供功能层的步骤而实施该方法。
附图说明
将参照附图进一步解释和说明本发明的装置和方法的这些和其他方面，其中：
图1-6用示意剖面图表示该方法的各个步骤。
附图没有依照比例绘出，相同附图标记表示相同部件。附图仅是示例性的，无意于限制本发明的范围。
具体实施方式
图1表示具有第一侧1和第二侧2的衬底10。衬底10包括有源层11、氧化层12和基底层13。在此情形中衬底为绝缘体衬底上的硅，其中基底层13和有源层11都包含硅。此处有源层11为单晶硅。不过，有源层11也可以为在氧化硅晶片上受到处理的多晶硅或非晶硅层。氧化层12然后例如设有PECVD。或者，氧化层12可以为高度掺杂的隐埋层。还可以使用玻璃衬底作为基底层13。
开关元件(未示出)限定于有源层11中，并处于其顶部。开关元件是CMOS或TFT型晶体管，不过也可以为微机电系统(MEMS)开关或pin二极管。还可以具有其他元件，如二极管、肖特基二极管、双极性晶体管、电容器、电阻器、光电元件和其他元件。这些元件按照本领域技术人员熟知的所需电路图案相互连接。由于使用半导体材料的有源层11，半导体材料优选为硅，不过也可以为任何III-V族半导体材料，可使用常规电路图案。为了制造开关和其他元件，在有源层11处或其附近中进行处理。这些处理包括例如氧化步骤、光刻步骤、选择蚀刻步骤和中间掺杂步骤如扩散或离子注入，所有这些处理本身是公知的。在薄膜或CMOS晶体管的情形中，在多晶硅、金属、硅化物的栅电极和栅氧化物层所覆盖的有源层中，形成源、漏电极以及中间沟道。可以设置用于相互连接目的的附加金属层。不过，优选保持有限数量的层数。随后，或者在多个中间步骤后，通过湿化学或干蚀刻去除有源层11的多余区域和其顶部上的任何层，从而获得至少一个岛状结构。
图2表示在提供涂层3之后得到的结果。用柔性涂层，优选用聚合物覆盖岛状结构。优选地，该层通过旋涂、喷射或薄膜形成来提供，并随后进行固化。涂层3对有源层11和其顶部的叠层的粘附得到了提高，这是由于首先进行蒸发HNO3的清洁步骤，随后用适宜的底料进行处理。然后由于涂覆了聚酰亚胺的前体，而形成聚酰胺树脂涂层3。在将该材料的溶液旋涂到晶片上之后，在125℃下将溶剂蒸发。之后，在200℃下进行加热步骤，激活底料。接下来涂覆诸如HPR504的光致抗蚀剂4，并进行曝光。曝光的结果是光致抗蚀剂4在装置区21中存在，在保护区22中不存在。
图3表示在一些进一步的步骤之后产生的结果。首先，通过光致抗蚀剂掩模4将涂层构图。使用常规的显影溶液如环戊酮(cyclopentanon)，实现涂层的构图。然后，在丙酮(aceton)与异丙醇的混合物中剥离抗蚀剂。随后，在300-400℃下固化涂层3。最后，在大约300℃下沉积0.5μm厚的PECVD氧化物层5。
图4表示衬底10已经暂时附着于载体衬底30并被减薄之后的结果。此时，用粘接方式处理保护区域22，在此情形中为硅烷耦合剂。按照所谓的“边缘敲打去除(edge beat removal)”方式进行该处理。或者，将保护区域22浸入该硅烷基底料的溶液中。然后，提供胶31和载体衬底30。分两步进行衬底的减薄，在第一步中研磨基底层13，之后用KOH溶液进行蚀刻。此处，氧化层12作为蚀刻停止层。
图5表示在氧化层12中形成孔径14后所产生的结果。这通过使光致抗蚀剂沉积在氧化层12上并构图而完成。然后将氧化物层构图。此后，在孔径14中设置金属。该金属沉积过程包括沉积Ti0.9W0.3阻挡层的第一步，在其上照常沉积Al。或者，可通过电镀沉积Cu。
图6表示从载体衬底30去除柔性装置100之后所产生的结果。这通过用刀片切穿氧化物层5来进行。尽管此处柔性装置100表示为一个装置，不过应当理解还可以为多个装置100。可以在以后分离这些装置。也可以由消费者进行分离步骤。
总之，本发明的可卷动装置包括绝缘材料衬底，具有从第一侧延伸到第二侧的孔径。在第一侧上具有开关元件，以及由有机材料涂层所覆盖的互连线等。第二侧上具有功能层。这种功能层例如包括电容器、天线、特别是电光层。从而获得可包括天线和驱动电路的可卷动显示器。

Claims (13)

1、一种柔性单片电子装置，具有：
一具有第一侧和相对的第二侧的电绝缘材料的绝缘层，该绝缘层具有从第一侧延伸到第二侧的第一孔径；
-处于绝缘层第一侧上的半导体材料的有源层，在该有源层中以及在该有源层上限定至少一个开关元件，该元件具有在有源层中的第一电极；
-对于所述至少一个开关元件起保护覆盖层作用的柔性涂层，
-处于绝缘层的第二侧上、且通过绝缘层中的第一孔径与第一电极连接的功能层。
2、一种柔性单片电子装置，具有：
-半导体材料衬底，在该衬底中和该衬底上限定至少一个开关元件，该元件具有在有源层中的第一电极，将该衬底构造成岛状形状；
-具有第一侧和向上的第二侧的电绝缘材料的绝缘层，该层具有从第一侧延伸到第二侧的第一孔径，衬底处于该第一侧；
-对于处于绝缘层第二侧的至少一个开关元件起保护覆盖层作用的柔性涂层；
-处于绝缘层的第一侧上、且通过绝缘层中的第一孔径与第一电极连接的功能层。
3、如权利要求1或2所述的柔性电子装置，其特征在于该功能层是与开关元件联合构成显示像素的电光层。
4、如权利要求3所述的柔性电子装置，其特征在于导电层处于有源层与功能层之间，在该导电层中限定像素电极。
5、如权利要求4所述的柔性电子装置，其特征在于显示像素包括具有第一和第二电极以及电介质的电容器，该第一电极处于导电层中，该第二电极限定于有源层中，该绝缘层作为电介质。
6、如权利要求5所述的柔性电子装置，其特征在于该衬底具有高K区域和低K区域，该高K区域作为电容器的电介质。
7、如权利要求3所述的柔性电子装置，其特征在于开关元件是存在于有源层中和有源层上的开关元件阵列的一部分，该阵列由包括存在于有源层中和有源层上的电路元件的集成电路的驱动电路来驱动。
8、如权利要求1或2所述的柔性电子装置，其特征在于该功能层为导电层，其中限定了天线，并设有多个互连的开关元件，从而构成集成电路。
9、一种包括权根据利要求1-8其中任何一个的柔性装置的设备。
10、一种包括载体和根据权利要求1-8其中任何一个的柔性装置的标签，其设有胶层，从而可逆地/可去除地附着到载体上。
11、一种包括根据权利要求3-7任何一个的柔性电子装置的可卷动盒。
12、一种制造包括多个开关元件的柔性单片电子装置的方法，该方法包括以下步骤：
-提供具有第一侧和相对的第二侧的衬底，在该第一侧上具有半导体材料的有源层，在该有源层中和有源层上设有开关元件，该开关元件的第一电极处于有源层中；
-部分地去除有源层，从而在至少一个岛状物上具有包括多个开关元件的功能实体；
-在衬底的第一侧上涂覆柔性材料涂层，从而覆盖所述的至少一个岛状物，该涂层在该涂层的侧面上具有保护区域；
-将载体衬底暂时附着到该衬底的第一侧；
-从第二侧去除所述衬底，包括通过蚀刻剂进行湿化学蚀刻步骤，从而通过保护区域保护该涂层；以及
-在第二侧上提供功能层，其通过绝缘层中的孔径与至少一个第一电极连接。
13、如权利要求12所述的方法，其特征在于：
-按照所需的图案涂覆有机材料，使其在保护区域上不存在而在装置区域上存在，
-用粘接方式对该保护区域进行处理；以及
-从载体衬底上去除电子装置基本上局限于该装置区域。
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US8067802B2 (en) 2011-11-29
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