CN1186458A - 弹性体微机电系统 - Google Patents
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Abstract
一种机电转换器,它具有一载有多个弹性体微结构(5)的衬底(4),在每个微结构上有一微电极(6)。将一电源(11)电气连接到微电极上,用于控制将一电势施加到微电极上,该电势交替地在相邻对的微电极间诱发吸引力,从而使微电极产生受控的、时变位移。作为替代方案,进一步的多个微电极(14)、或者一个或多个宏电极(32)被弹性地支承高出微电极之上,电源则被连接到宏电极上,其方式使施加于微电极和宏电极之间的电势交替地在微电极和宏电极之间诱发吸引力,从而使微电极相对于宏电极进行受控的、时变位移。宏电极也可被施加到衬底与微结构相对的一侧。
Description
发明的领域
本发明有关一种微机电转换器,它包括多个被弹性地支承在弹性体微结构之上的微电极。
发明的背景
过去的十年中,在微机电系统领域中取得了长足的发展,微机电系统的英文缩写通常为“MEMS”。如其名字所包含的意义那样,MEMS基本上为结合有某种形式的机电转换以达到一定功能的微系统。在这种情况下,“微”意指零件尺寸为微米量级。MEMS装置方面的例子有:微型泵、微型马达、微光学平镜等。在IEEE Spectrum,May 1994,pp.20-31上刊载有一篇题为“Micromachines on the March,”(前进中的微机械)的文章,对MEMS当前的发展水平作了回顾。
文献中报导的许多MEMS装置均采用静电转换。如大多数的机电转换器一样,静电转换器也可被配置为致动器或者传感器的形式。当被配置成致动器时(这种形式特别关系到本发明的应用),静电转换器利用极性相反电荷间的吸引作用来产生吸引力。对于一平行板结构型式,这一力(或压力)P可容易地被计算如下:
式中ε0为空气的介电常数(8.85×10-12F/m),E为电场强度。在两平行电极的场合,E=v/d,因而要用到第二步的关系式。
在MEMS装置的有关文献中举出了许多的例子,它们均采用静电致动力。例如下列文章:Zengerle,R.et al.,1992,“A Micro MembranePump with Electro static Actuation,”IEEE Micro Electro MechanicalSystems Workshop.;Gabriel K.J.et al.,1992,“Surface Normal Electro-static/Pneumatic Actuator,”IEEE Micro Electro Mechanical SystemsWorkshop;bobbio et al.,1993,“Integrated force Arrags,”Proc.ofIEEE MEMS 1993 Workshop,pp.149-154;以及K.Minami et al.,1993,“Fabri cation of Distributed Electrostatic Micro Actuator(DEMA),”J.of MEMS,vol.2,No.3,1993。
选择静电转换而不采用其它转换方法的某些主要原因如下:
(1)能量密度:对于两电极间所施加的一定电压,电场强度随两电极间间距的减小而增加。由于静电力与电场强度的平方成正比,当施加的电压一样时,两电极间距离减小一个数量级则会使产生的静电力增大两个数量级。与此相关的是,大部分气体的电场强度也随着极间距的减小而迅速增加(例见:H.L.Saums,“Materials for ElectricalInsulating and Dielectric Functrions,”Hayden Book Co.1973)。因此可看出,静电力很适合用于MEMS装置中。
(2)效率:静电装置典型地具有较高的效率,因为它们不需要大的电流密度,因而电阻损耗小,而这些常常是磁性的或形状记忆合金为基础的致动器所固有的,当一个静电装置它的电极运动仅为极间距的几分之一时(MEMS装置中常常是这种情形),它的效率就特别的高。
(3)费用:不同于大部分其它的转换器,尤其不同于压电转换器和磁致伸缩转换器,静电转换仅需具有相对电荷的两电极来产生机械力。仅仅淀积两个电极要比淀积两电极加一种(比如)压电材料(该压电材料其后由电极所激励)便宜得多。
尽管静电致动机构具有上述所需的特征,仍有某些例子其中效率并非是十分关键的因素,因而在这些例子中采用磁致动要更为优越些。磁致动的一个优点是能产生在较长距离上作用的力,因为力的减小仅仅与微电极距离线性相关,这一点与在分别给定电流和电势之下静电力与电极间距成平方关系的场合是不一样的。此外,在磁驱动致动器中典型地可使用较低的电压,因为它们的性能与所加电压无关,而仅取决于电流。即使效率并不十分重要,仍需注意由载有致动电流的微电极的电阻性功耗所产生的热耗散。
MEMS的研究领域似乎是从两个因素中产生的:对探索机电装置小型化所能达到的极限的好奇心(例见Feynman,R.,1993,“InfintesimalMachinery,”J.MEMS,Vol.2.No.1,)以及广泛地可得到用于集成电路制造的微加工设备。微加工技术目前已相当先进,特别是最近又增加了如LIGA法,硅熔接法等技术;且可用于制造相当多种类的装置。但是,这些微加工技术对每单位加工面积的费用就很贵,即使是对大批量的生产也是一样,因此它们似乎仅仅只能被用于单位面积价值很高的微加工表面。
限制当前MEMS技术发展的另一因素是:能使电极间产生相对运动的手段是电机械铰链机构、或是由弯曲薄的、做成高度悬臂梁形式的结构来提供。例如,在Bobbio等人文章中所描述的装置中,规定阵列中每个“单元”(cell)的支承点间的距离相对于聚酰胺/金属结构的厚度应足够大,这是因为这些材料具有较高的弹性模量的缘故。这些相对较薄的结构除了使设计和制造这些装置变得相当复杂之外,还是十分易碎的,因而也不十分适用于要求高耐用性的场合。已有MEMS技术的这样和那样的缺点可通过使用如下所述的一种新型的、称之为弹性体微机电系统(“EMEMS”)的MEMS技术来加以克服。
发明概述
本发明的目的是提供一种微机电装置,其中支承于一弹性体微结构之上的微电极在静电力的作用下经受实质性的相对运动。
本发明的另一目的是提供一种微机电转换器,通过采用模制弹性体膜的微结构仅表面可便宜地构造这种转换器。
本发明的再一目的是为有关的气体和气压在EMEMS中相反极性的两微电极间使用一定范围的极间距,即小于两倍的Paschen最小距离。
本发明的还一个目的是提供一种手段来在与相对极性的微电极相互接触的固体表面上增加路径长度,且同时还提供一种手段来构造上述微电极的图形且扩展气流路径区域。
本发明的另一个目的是提供一种手段来通过采用相对微结构化表面来制造更复杂的结构。
上述目的及其他目的是通过提供一种微机电转换器来达到的,在这种转换器中将微电极有选择地淀积到一微结构化表面上。这些微结构被选择性地连结到激励它们的一种装置上,其方式能在任何两相反极性的微电极间或在一微电极和一与之邻近的宏电极间产生静电力。
微电极的构造材料优选地采用一种具有高弹性应变极限值的低弹性模量材料,这些材料通常被称做弹性体。这种材料的选择加上对微电极作的合适的微结构设计和配置,能使静电力在两极性相反的电极间产生实质性的相对运动,或在一微电极和另一与之邻近的宏电极间产生相对运动。这种EMEMS设计技术能提供优于常规MEMS装置的专门性能优点,比如改善了耐用性。但是,预期的最重要的优点还是大大降低了单位面积的制造费用。
制造具有低弹性模量和高弹性的弹性体材料的微结构能使微结构具有相对较低的纵横比,然而却仍是高度柔性的。与此相反,常规MEMS装置中所用的高弹性模量硅微结构要求有较高的纵横比以使之具实质性的柔性。采用低纵横比能有助于采用两种关键加工技术。首先,可将微结构设计成在一膜状弹性体片材之上的可模制表面结构的形式。其次,采用熟知的大规模微细加工技术(如金刚石切削)来加工一个模子用于微细复制结构化的表面弹性体薄膜。在薄膜表面作微细复制以产生微结构与常规微细加工技术相比极大地降低了生产费用。最后,采用合适的结构设计和物理气相淀积技术,则可选择性地淀积微电极,而无需采用在制造常规MEMS装置中通常所用的昂贵的掩模工序。所有这些特点综合起来便可使人们采用熟知的大规模生产技术来便宜地生产EMEMS装置。
附图简介
图1A为本发明一优选实施例的放大了的局部剖视透视图。
图1B为图1A所示结构的局部剖面正视图,示出当微电极位于一种由施加图中所标记电势而引起的激励状态时所在的位置。
图1C为图1A所示结构的局部剖面正视图,示出当微电极位于一由施加图中所标记电势而引起的第二激励状态时所在的第二位置。
图1D示出图1A的结构外加一连结装置用于与每个电极实现电气接触。
图1E为图1D所示结构的顶视图。
图2A为图1A所示结构的剖面正视图,图中示出如何能将微结构设计原理用于取得本发明的各个目的。
图2B为一扫描电镜图,示出根据本发明的方法制造的一金属镀层弹性体微结构。
图3示出一对放大了的、相对的微结构化表面,它们提供了多个储气室。
图4与图3类似,但去掉了上部微结构部分,示出在下部微结构中储气室的位置以及弹性支撑在该微结构之上的一宏电极。
图5A和5B示出本发明的一实施例,它具有一位于图1实施例下方的一宏电极。
图6示出与图1A-1D的实施例相类似的一实施例,其中载有微电极的弹性体微结构被提供在一平面衬底的两侧。
优选实施例详细说明
图1A提供的是根据本发明的优选实施例所制造的一装置的剖视透视图。该装置具有一组线性排列的(通常超过1000个)均匀间隔开的微电极6,每个电极均被支承在微结构化的弹性体脊5的顶部。微结构化的弹性体脊5作为表面特征被形成在一弹性体衬底膜或片4之上。
可采用大批量模制微复制技术来经济地制造这种微结构脊5,已知的有如制造象微棱镜式光学膜片等微结构化表面产品。可以采用许多好的导电性材料中的任何一种来形成微电极6,例如:纯金属(如Al,Cu,Au)、合金、金属氧化物(如铟锡氧化物)、超导体、导电聚合物、形状记忆合金;或导电弹性体。
在导电材料要求的应变相对较高的场合,则需采用导电弹性体材料制作微电极以降低机械疲劳失效的风险,这种机械疲劳失效会导致微电极失去导电性。以下将更详细地叙述一种用于将微电极淀积在微结构脊5之上的优选技术。
图1A所示装置的一个重要目的是要使微电极6在完全平行于微结构化底片4的方向上以一定的频率f且作为时间t的函数作一种简谐运动。这种简谐运动对许多流体力学的应用是有用的,例如边界层控制,其中需要对流体表面相互作用进行微观控制以便对宏观流产生实质性影响。例如,可利用这种效果来增加混合在边界层中的流体量级并由此增加其动量交换。在某些电驱动条件下,也可以使用这种效果来减少所混合入的湍流量级并由此亦降低在诸如飞机这样的空气动力体之上的表面阻力。在许多参考文献中已对使用微机械装置来与液体流相互作用作了详细讨论,如:Ho,Chih-Ming,“Interaction Between Fluid DynamicsAnd New Technology,”IEEE International Conference on flowInteraction,Keynote Talk,Sept.5-9,1994。
下面根据图1B和1C来讨论能用来得到微电极6的简谐运动的手段。将4个独特的驱动电势函数a、b、c、d中的一个施加于每个微电极6,其中:
a=+V B=+VSin(2πft)
c=-V d=-VSin(2πft)
如图1B所示的那样,这些函数被反复地交替施加到邻近微电极上。由这种驱动电势序列所产生的静电力通过支撑微电极6的微结构化弹性体脊5的变形以下列的方式来产生微电极6的简谐运动。在时间t=0时,微电极6处于图1A所示的未变形状态。在t=1(4f)时,微电极6处于图1B所示的最大变形状态。在t=1/(2f)时,微电极6将经过图1A所示的未变形状态。最后在t=3/(4f)时,微电极6将处于图1C所示的最大变形的相反极性状态。这一运动模式被以频率f反复进行并由此取得所需的操作。由此可知,所施加的电势交替地在相邻电极6对之间诱发吸引力,从而使微电极产生受控的时变位移。
每个微电极6优选地具有小于0.01mm2的横截面积,且产生的位移超过这一面积的平方根值的1%。
可采用一边缘连接带10来将微电极6电气地连接到一合适的电源11(如图1D和1E所示)。连接带10由一系列突出的微结构化脊8组成,它们隔开且支承住倒“U”型电触头9。脊8的几何形状被做成能同时插进微结构化弹性体脊5之间。脊的几何形状要做成使相互交错的脊5和8间的间隙足以能容易地插入但却要仍能在触头9和各电极6的相邻表面间提供很好的电接触。
每个倒“U”型电触头9组成从电源11运载合适驱动信号(即a、b、c或d)的导电路径的一部分。采用诸如光刻法那样的众所周知的集成电路制造工艺来将一种微图形化的接线方案应用于连接带10可很方便地实现上述这一点。由于微电极6和触头9紧密接触,因而可得到十分好的电连接,可能的话还可借助于如导电胶那样的导电粘性材料在将微电极和触头如前所述地交错插入之前将导电胶涂在一个表面上。将诸如聚酰胺那样的一种具有适当较高的电场强度绝缘性材料用来形成每个脊8的主体并用来绝缘邻近的导电通路。
在微电极6之间可被产生的最大静电力是受相邻电极间的静击穿所限制。尽管发明者并不愿意被任何特殊理论所约束,但看起来在如上所述的一EMEMS装置中通常仍存在有三种主要的电击穿方式。
第一种主要的电击穿方式是在微电极6和/或平面电极间的整个弹性体表面上的表面放电。如碳化这样的许多机理均可引起在原本非导电表面上产生表面放电。在大多数场合,表面放电的机率随每单位路径长度上的电压的增加而增加。这样便希望尽可能长地增加路径长度。这一点在优选实施例的结构中是通过利用长的路径长度“S”(图2A)来达到的,而这种长的路径长度“S”则是横过位于弹性体脊5之上的微电极6(见图2A)之间的凹槽所要求的。
第二种主要的电击穿方式是位于电极间的气体的雪崩击穿。当电压超过给定气体的Paschen曲线值的电压时,则会产生气体雪崩击穿。Paschen曲线可参考某些学术著作来加以确定,如Kuffel,E.Et al,“TheSparking Uoltage-Faschem’s Law,”pp.354-361 in High UoltageEngineering Fundamentals,Pergamon Press,Oxford,1984.Paschen定理讲述:不发生雪崩击穿所能获取的最大电压V是一个仅与气压p和间隙d的乘积有关的函数,即V=f(pd)。这样便希望使电极间隙3(图1A)做得尽量小以防止气体击穿。然而,这一点必须针对如下的事实来加以平衡,即:电极间隙3的减小也会减小微电极6的最大位移量,而这将限制装置的有用性。某些类型的气体,尤其象六氟化硫这样的负电性气体,较之空气具有对雪崩击穿更高的抵抗性且可提供一种增加绝缘强度的有用手段。
第三种主要的电击穿方式是场致发射。场致发射是在一个表面上电子穿过势垒的隧道效应,它反过来又导致一系列的击穿机理。从理论上讲,势垒值太大以致不可能允许产生实质性的隧道效应,除非电场强度达到3000MV/m这样大的量级。然而在实际中,实质性的场致发射仍可在标称电场强度达到比上述值低两个数量级的值时(即30MV/m)开始发生。这种减弱性看起来似乎是由大量的微凸起所造成的,它们即使是在高度抛光过的表面中也是固有地存在的。这些微凸起能使局部电场强度增大两个数量级且因此而导致场致发射击穿。所以,为防止场致发射,必须采用一种手段来减小表面粗糙度。也有证据表明,除了电场强度值之外,电极间距(它影响着施加在间隙两端的整个电压)也能起作用(例见A.Kojima et al.,“Effect of Gap Length on Effective FieldStrength,”Proc.3rd Intl.Conf on Properties and Applications ofDielectric Maferiais,July 8-12,1991,Tokyo,Japan)。这一点进一步表明,应将电极间距尽量做得切合实际地小。
总的说来,作为薄弱环节的击穿机理将取决于一系列的因素,诸如:表面路径长度、电极间距、介电气体类型、电极表面等。例如:如果要在一高真空环境中来操作上述装置,就必须实质性地减少气体击穿机理且仅需对付表面放电和场致发射。根据一般的经验,对涉及的气体和气压来说,应使电极间距小于2倍的Paschen最小距离。这样可原则上保证能得到实质性的静电力而不生产出气体击穿或不需要过分高的工作电压。
现在来讨论用来将微电极6有选择地淀积在脊5顶部的方法。如上所述,需要有选择地将微电极6以一种便宜的、大规模生产的方式淀积在脊5的某些部分。一种这样的方法是采用物理气相淀积原子的定向性质与弹性体的微结构相结合来制造微遮蔽效应。微遮蔽技术已被用于本领域的其它地方,如用在Bobblo等人所描述的装置中,见Babbio et al.,“Integrated Force Arrays,”Proc.1993 IEEE MEMSWorkshop,p.150。
参照图2A,通过将金属原子沿与垂直于脊5的方向成α的角度进行投射(该角度α足以产生所需的遮蔽度),可获得微遮蔽效应。图2A示出一45°的投射角(α。这样可提供一相对较长的表面击穿路径长度,同时也在靠近脊5顶部的地方造成到电场的一光滑过渡。较小的角度将会使金属限制在脊5顶部的一较小区域中,但这些较小区域的边缘会产生很高的电场,这些电场有可能成为电击穿源。图2B是在与一个装置的微结构化表面成一斜角的方向上拍摄的扫描电镜图,该装置是根据上述本发明的优选实施例所构造的。在该扫描电镜图中,浅阴影区32代表钽金属镀层,而深阴影区33则代表硅弹性体。
在某些场合需要使用两相对且相互接触的微结构化表面图3中示出一个这样的实施例的一小部分。图3的下部表示载有多个第一弹性体脊5的一弹性体微结构化衬底4,每个弹性体脊均如前所述如图1A所示的那样覆盖有一第一微电极6。图3的上部表示一第二弹性体微结构化衬底12,在其中连接有多个第二微电极14,其方式为:每个微电极14面对多个相应的微电极6。图3的尺度是不成比例的,实际中,上弹性体微结构化衬底12的厚度要远大于下弹性体微结构化衬底4的厚度。
一系列的弹性体脊16从上微结构化衬底12的下伸出以规则的间隔同下微结构化衬底4相接触,这样便限定了微电极6和14间的一极间距18。象空气这样的一种气体充实了由两微结构化衬底所包围的空间20。优选地将一种粘接剂涂到两微结构间的触点22上。将微电极14连到一电压源的一端,而面对电极14的微电极6则被连至另一端。在上微结构化衬底12上等间隔地做有多个凹槽以提供多个储气室24用于下面所述的目的。
图3实施例的操作如下:在两组微电极6和14间施加一电势差以产生一静电吸引力。这一静电吸引力使弹性体脊16变形,从而使这两组微电极相互间进行运动。当微电极运动时,被围在空间20中的气体在上、下微结构间被压缩。在微电极6和14间的气体压缩要大于储气室24内的气体压缩,这样气体倾向于被压进、压出储气室24。因此,如果不提供储气室24的话,整个气体压缩量要小得多。由于空间20中的气体具有压缩刚性,因此储气室24相应地减少了对两微结构相对运动的阻力,且因此也无需再构造具有高纵横比的下微结构,而这种高纵横比的下微结构通常是难于制造的。
气体流进流出储气室24带来了粘性阻尼,这种阻尼在许多场合通常是不希望的。为减少粘性阻尼,应减小流体流进流出储气室24的速度。这一点比如可通过将各储气室24安排得更靠近些来达到,因为这样仅需移动较少的气流量,或者可增加储气室横截面积以降低平均气流速度。再次参考图2A,与凹槽区“r”相关的被增加的截面积除被用于其它前述的增加表面击穿路径长度和能进行微电极6的微遮蔽之外,还可用来进行上述第二途径。
图4为图3装置的一替补方案,它消除了对上微结构的需要,如图4所见,一个或多个宏电极32(它们是毫米量级的平面结构)高出微电极6被支承在从衬底4向上伸出的弹性体脊16之上。采用有选择地移去衬底4和弹性体脊5的某些部分来制造出储气室24,操作时,将电势差施加于微电极6和宏电极32之间,以在它们之间产生一静电吸引力。这一静电吸引力使弹性体脊16产生变形,从而使微电极和宏电极相互间产生相对运动。在此运动期间,被围在空间20中的气体在宏电极和衬底4间被压缩。
图5A和5B示出一进一步的替补实施例,其中将一个或多个宏电极30加于衬底4的基底上。操作时,将一电势差加于微电极6和宏电极30之间,以在它们之间产生一静电吸引力。该静电吸引力使弹性体脊5变形,从而使微电极6如图5B所示的那样相对于宏电极30移动。
图6示出一更进一步的替补实施例,其中将微电极6和6’施加于衬底4的两侧。可看到这样便提供了上、下两结构(对称于衬底4的平面),每一结构以上述图1A-1D所示的方式工作。这样一种双边结构可被用于例如改善通过薄膜的对流热传递。
根据前面披露的内容,熟悉本技术领域的人将可看到,在实施本发明过程中在不偏离本发明的精神和范围的条件下仍会有许多替代方案和修改。因此,有必要根据以下权利要求所述的精神来解释本发明的范围。
Claims (17)
1.一种机电转换器,其特征为:
(a)一个第一衬底(4),在上述衬底的一侧载有多个第一弹性体微结构(5);
(b)在上述多个第一弹性体微结构的每一个上的一第一微电极(6);以及
(c)用于对上述微电极施加电势进行控制的、与上述微电极电气连接的电源(11)装置。
2.如权利要求1所述的机电转换器,其特征为:上述电势在相邻对的上述微电极之间交替地诱发吸引力,从而使上述微电极产生受控的、时变位移。
3.如权利要求1所述的机电转换器,其特征在于,它进一步包括位于上述衬底的相对一侧上的一个或多个宏电极(32),其中:
(a)上述电源装置被进一步连接到上述一个或多个宏电极上;以及
(b)上述电势在上述微电极和上述一个或多个宏电极之间交替地诱发吸引力,从而使上述微电极产生相对于上述一个或多个宏电极的受控的、时变位移。
4.如权利要求1所述的机电转换器,其特征在于,它进一步包括被弹性地支撑在高出上述微电极之上的一个或多个宏电极,其中:
(a)上述电源装置被进一步电气连接到上述一个或多个宏电极上;以及
(b)上述电势在上述微电极和上述一个或多个宏电极之间交替地诱发吸引力,从而从上述微电极产生相对于上述一个或多个宏电极的受控的、时变位移。
5.如权利要求1所述的机电转换器,其特征为:上述第一弹性体微结构的数量超过1000。
6.如权利要求1所述的机电转换器,其特征为:
(a)上述第一衬底为一弹性体片状材料;以及
(b)上述微结构被成型为上述片状材料的集成表面特征。
7.如权利要求1所述的机电转换器,其特征在于,进一步包括:
(a)载有多个第二弹性体微结构(16)的一第二衬底(12),上述第二衬底邻接于且面对着上述第一衬底,上述多个第二弹性体微电极与上述第一衬底相接触;以及
(b)位于上述第二衬底之上的多个第二微电极(14);
其中:
上述电源装置被进一步电气连接到上述第二微电极,用于控制将上述电势施加到上述第二微电极以便在上述多个第一和第二微电极间交替地诱发吸引力,从而使上述多个第一和第二微电极产生受控的、时变位移。
8.如权利要求1所述的机电转换器,其特征在于,进一步包括:
(a)载有多个第二弹性体微结构(16)的一第二衬底(12),上述第二衬底邻接于且面对着上述第一衬底,上述多个第二弹性体微结构与上述第一衬底相接触;以及
(b)一个或多个宏电极(32)被上述多个第二弹性体微结构支承高出上述微电极;
其中:
上述电源装置被进一步电气连接至上述一个或多个宏电极上,用于控制将上述电势施加到一个或多个宏电极以便在上述微电极和上述一个或多个宏电极间交替地诱发吸引力,从而使上述微电极产生相对于上述一个或多个宏电极的受控制的、时变位移。
9.如如权利要求1所述的机电转换器,其特征为:
(a)相邻对的上述第一微电极被一充气间隙(3)所分隔开,上述间隙的特征是在一特定的气压之下具有一Paschen最小距离“d”;以及
(b)上述间隙宽度小于两倍的Paschen最小距离“d”。
10.如权利要求1所述的机电转换器,其特征为:上述第一微电极具有一导电的弹性体。
11.如权利要求1所述的一种机电转换器,其特征为:上述微结构的几何形状被做成能将导电材料定向地淀积到上述微结构上,用于在当一预定的表面微图形淀积在上述微结构上时形成上述微电极。
12.如权利要求1所述的机电转换器,其特征在于,进一步包括位于每一相邻对的上述多个第一微结构间的一凹槽,每个上述凹槽限定了位于上述相邻微结构之上的上述第一微电极间的一表面路径长度,上述表面路径长度应实质性地超过位于相邻微结构之上的上述第一微电极间的任何直接的路程长度。
13.如权利要求7所述的机电转换器,其特征在于,进一步包括在上述第二衬底中的多个储气室(24),用于上述微电极作上述位移期间使上述微电极间的气流流进和流出上述储气室。
14.如权利要求4所述的机电转换器,其特征在于,进一步包括在上述第一衬底中的多个储气室(24),用于在上述微电极作上述位移期间使上述微电极间的气流流进和流出上述储气室。
15.如权利要求1所述的机电转换器,其特征为:上述微电极各自具有小于0.01mm2的横截面积。
16.如权利要求2所述的机电转换器,其特征为:上述微电极各自具有小于0.01mm2的横截面积,且上述位移量超过上述横截面积值的平方根的1%。
17.如权利要求1所述的机电转换器,其特征在于,进一步包括:
(a)位于上述衬底的一相对侧之上的多个第二弹性体微结构(5’);以及
(b)位于上述多个第二微结构之一上的一第二微电极(6’);
其中,上述电源装置被进一步电气连接到上述第二微电极之上,用于控制将一电势施加到上述第二微电极上。
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- 1996-04-26 AU AU53945/96A patent/AU5394596A/en not_active Abandoned
- 1996-04-26 DE DE69609414T patent/DE69609414T2/de not_active Expired - Fee Related
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CA2218876A1 (en) | 1996-11-07 |
KR100286486B1 (ko) | 2001-04-16 |
EP0824381A1 (en) | 1998-02-25 |
CA2218876C (en) | 1999-12-07 |
MX9708359A (es) | 1998-06-30 |
US5642015A (en) | 1997-06-24 |
JP3016870B2 (ja) | 2000-03-06 |
DE69609414D1 (de) | 2000-08-24 |
JPH10511528A (ja) | 1998-11-04 |
DE69609414T2 (de) | 2001-03-08 |
CN1047107C (zh) | 1999-12-08 |
WO1996034701A1 (en) | 1996-11-07 |
EP0824381B1 (en) | 2000-07-19 |
KR19990008212A (ko) | 1999-01-25 |
AU5394596A (en) | 1996-11-21 |
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