CN1146545A - 带有深冷分离装置的一氧化碳生产设备 - Google Patents

带有深冷分离装置的一氧化碳生产设备 Download PDF

Info

Publication number
CN1146545A
CN1146545A CN96110500A CN96110500A CN1146545A CN 1146545 A CN1146545 A CN 1146545A CN 96110500 A CN96110500 A CN 96110500A CN 96110500 A CN96110500 A CN 96110500A CN 1146545 A CN1146545 A CN 1146545A
Authority
CN
China
Prior art keywords
carbon monoxide
adsorbent
equipment
separation device
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN96110500A
Other languages
English (en)
Other versions
CN1089158C (zh
Inventor
J·比利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Publication of CN1146545A publication Critical patent/CN1146545A/zh
Application granted granted Critical
Publication of CN1089158C publication Critical patent/CN1089158C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/0228—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream characterised by the separated product stream
    • F25J3/0261—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream characterised by the separated product stream separation of carbon monoxide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/40—Carbon monoxide
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/0204—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream characterised by the feed stream
    • F25J3/0223—H2/CO mixtures, i.e. synthesis gas; Water gas or shifted synthesis gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/0228—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream characterised by the separated product stream
    • F25J3/0233—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream characterised by the separated product stream separation of CnHm with 1 carbon atom or more
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/0228—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream characterised by the separated product stream
    • F25J3/0252—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream characterised by the separated product stream separation of hydrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00—Processes or apparatus using other separation and/or other processing means
    • F25J2205/60—Processes or apparatus using other separation and/or other processing means using adsorption on solid adsorbents, e.g. by temperature-swing adsorption [TSA] at the hot or cold end
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2280/00—Control of the process or apparatus
    • F25J2280/02—Control in general, load changes, different modes ("runs"), measurements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S62/00—Refrigeration
    • Y10S62/902—Apparatus
    • Y10S62/908—Filter or absorber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S62/00—Refrigeration
    • Y10S62/92—Carbon monoxide

Abstract

本设备包括一个装填了吸附剂的永久设置在管线(2)上，在提纯装置(3)和深冷分离装置之间的罐(8)，提纯装置(3)通过从含一氧化碳的混合气中吸附可凝固的杂质来运行，深冷分离装置通过其出口(6)放出纯一氧化碳。在罐(8)中的吸附剂—最好与在提纯装置(3)中的吸附器(4A、4B)中的吸附剂相同—具有对一氧化碳的亲合力，这样能减少由分离装置(3)的吸附器(4A、4B)的周期性运行导致的一氧化碳产出速度的周期性变动。

Description

带有深冷分离装置的 一氧化碳生产设备
本发明涉及包含深冷分离装置类型的一氧化碳生产设备，含一氧化碳的混合气经过一供气管供给该分离装置，进气管与吸附杂质的且至少包括两个吸附器的提纯装置相连接。
纯一氧化碳应用于化学工业的若干过程中并且最经常通过蒸汽转化或部分氧化反应从烃类产生，因此存在于含氢气和甲烷的混合气中，它是用深冷分离装置从这种混合气中分离的。深冷分离过程要求被分离的混合气中没有任何微量的可凝固的成分，特别是水和二氧化碳，这种提纯用一种吸附提纯装置进行，该吸附提纯装置所含的吸附器包括至少一种诸如矾土、硅胶或分子筛之类的固体吸附剂。这些吸附剂也有不同程度的保留一氧化碳的某种亲合力。正因为这样，导致吸附提纯装置的周期运行产生一种也是周期性的、在深冷分离装置的出口处一氧化碳生产的放出速度的变动。在下游的用户站—一般为化学反应器—一般不能忍受这种变动，因此一氧化碳回路一般通过分流和燃烧一些产出的一氧化碳进行控制以平缓产出的速度，这伴随着产量损失和废料再处理的缺陷。
本发明的目的是提供一种设备，它能简单地、高效地和花费不多地调节在这种设备中一氧化碳的产量，同时大大减少产量的损失。
为此，根据本发明的一个特征，该设备包括一个容纳对一氧化碳有亲合力的一种吸附剂的罐，这个罐永久地置于进气管上，位于提纯装置和深冷分离装置之间。
本发明的其它特征和优点从下文中对一个实施例的描述看得更清楚，该实施例以具体说明但不施加任何限制并且参照附图的方式给出，其中唯一的示意图代表根据本发明的设备。
这个示意图表示：要分离的混合气通过管2供给深冷分离装置1，管2与提纯装置3的产物出口相连结，提纯装置3包括至少两个交替运行的用于提纯的吸附器4A、4B，用以除去可凝固的杂质，输入混合气5含有一氧化碳。深冷分离装置1包括纯一氧化碳输出管6和一般用于氢气和残余混合气的输出管7及8。
根据本发明，罐8永久地置于管线2上，这个罐的直径与吸附器4A、4B的相同并装填有吸附剂，最好与吸附器4A、4B中的主吸附剂是同一吸附剂，一般为分子筛。
根据本发明的设备的运行方式可以归纳如下：
在连续运行状态，在工作中的吸附器4A、4B以及罐8中的吸附剂被一氧化碳饱和，因而相对后者呈“透明”状。当吸附器4A、4B被转接、当新近再生的吸附剂开始被使用时，它开始被一氧化碳饱和，而在罐8中的吸附剂则释放出它保留住的一氧化碳。反过来，当新近开始使用的吸附器开始达到一氧化碳饱和时，在罐8中的吸附剂被一氧化碳重新饱和，结果是，如前所述，在一氧化碳产出速度中周期性的变动大体上被平抑。

Claims (3)

1.一氧化碳生产设备，包括一个通过一供气管(5、2)供给含一氧化碳的混合气的深冷分离装置(1)，管(5、2)与吸附杂质并至少包括两个吸附器(4A、4B)的提纯装置(3)相连结，其特征在于，它包括一个装有对一氧化碳有亲合力的吸附剂的罐(8)，该罐永久地设置在管线(2)上，在提纯装置(3)和分离装置(1)之间。
2.根据权利要求1的设备，其特征在于在罐(8)中的吸附剂与在吸附器(4A、4B)中的相同。
3.根据权利要求2的设备，其特征在于吸附剂是一种分子筛。
CN96110500A 1995-06-15 1996-06-14 带有深冷分离装置的一氧化碳生产设备 Expired - Fee Related CN1089158C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9507160A FR2735382B1 (fr) 1995-06-15 1995-06-15 Installation de production de monoxyde de carbone incorporant une unite de separation cryogenique
FR9507160 1995-06-15

Publications (2)

Publication Number Publication Date
CN1146545A true CN1146545A (zh) 1997-04-02
CN1089158C CN1089158C (zh) 2002-08-14

Family

ID=9480039

Family Applications (1)

Application Number Title Priority Date Filing Date
CN96110500A Expired - Fee Related CN1089158C (zh) 1995-06-15 1996-06-14 带有深冷分离装置的一氧化碳生产设备

Country Status (8)

Country Link
US (1) US5632162A (zh)
EP (1) EP0748765B1 (zh)
JP (1) JP3844540B2 (zh)
KR (1) KR100440665B1 (zh)
CN (1) CN1089158C (zh)
CA (1) CA2179118C (zh)
DE (1) DE69603674T2 (zh)
FR (1) FR2735382B1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109126358A (zh) * 2017-06-27 2019-01-04 清远先导材料有限公司 特种气体的提纯工艺及提纯装置
CN111854328A (zh) * 2020-07-06 2020-10-30 山东康源环保科技有限公司 深冷法回收有机废气处理装置

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7678390B2 (en) * 1999-04-01 2010-03-16 Yale University Carbon monoxide as a biomarker and therapeutic agent
DE60229848D1 (de) * 2001-06-21 2008-12-24 Beth Israel Hospital - und organtransplantationen und unterdrückt apoptose
FR2833183B1 (fr) * 2001-12-12 2004-01-23 Air Liquide Procede de traitement par adsorption d'un melange gazeux, et installation de production de monoxyde de carbone comportant une unite de traitement de mise en oeuvre d'un tel procede
KR20040096571A (ko) * 2002-02-13 2004-11-16 베쓰 이스라엘 디코니스 메디칼 센터 인크 혈관 질환을 치료하는 방법
PL373002A1 (en) * 2002-04-15 2005-08-08 University Of Pittsburgh Of The Commonwealth System Of Higher Education Methods of treating ileus
JP4585765B2 (ja) * 2002-04-15 2010-11-24 ユニバーシティ オブ ピッツバーグ オブ ザ コモンウェルス システム オブ ハイヤー エデュケイション 壊死性腸炎の治療方法
CA2482260A1 (en) 2002-04-15 2003-10-30 Beth Israel Deaconess Medical Center Inc. Use of heme oxygenase-1 and products of heme degradation
WO2003096977A2 (en) 2002-05-17 2003-11-27 Yale University Methods of treating hepatitis
US20040258772A1 (en) * 2002-06-05 2004-12-23 Otterbein Leo E. Methods of treating angiogenesis, tumor growth, and metastasis
JP2005533812A (ja) * 2002-06-21 2005-11-10 ユニバーシティ オブ ピッツバーグ オブ ザ コモンウェルス システム オブ ハイヤー エデュケイション 一酸化窒素、ヘムオキシゲナーゼ−１、およびヘム分解生成物の薬学的使用
AU2003283982A1 (en) * 2002-11-07 2004-06-03 University Of Pittsburgh Of The Commonwealth System Of High Education Treatment for hemorrhagic shock
PT1479989E (pt) * 2003-05-19 2011-07-08 Air Liquide Processo e instalação para o fornecimento de monóxido de carbono gasoso e/ou uma mistura contendo monóxido de carbono
FR2913969B1 (fr) * 2007-03-22 2010-02-19 Air Liquide Ecretement des pics d'impurete
US20150375158A1 (en) * 2013-11-26 2015-12-31 Martin Lang Increased onstream time for cryogenic separation processes
EP2902087A1 (de) * 2014-02-04 2015-08-05 Linde Aktiengesellschaft Verfahren zur Abscheidung einer Komponente eines Gasgemischs unter Verwendung einer Temperaturwechseladsorption
KR20210075093A (ko) * 2018-10-15 2021-06-22 할도르 토프쉐 에이/에스 스팀 개질 과정에서 탄소 재순환
US20210071947A1 (en) 2019-09-06 2021-03-11 Joseph M Schwartz Method and apparatus for an improved carbon monoxide cold box operation

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1544022B2 (de) * 1963-02-15 1969-10-30 Linde Ag, 6200 Wiesbaden Verfahren zur Anreicherung eines Bestandteiles in Gasgemischen
DE1467073A1 (de) * 1963-09-17 1968-12-19 Hitachi Ltd Verfahren zur Abtrennung von Kohlenmonoxyd aus oxydiertem Konvertergas
US3534562A (en) * 1967-04-14 1970-10-20 Koninklujke Nl Zout Ind Nv Method of liquefying gaseous chlorine containing water vapour
US3421984A (en) * 1967-05-02 1969-01-14 Susquehanna Corp Purification of fluids by selective adsorption of an impure side stream from a distillation with adsorber regeneration
FR2363362A1 (fr) * 1976-09-07 1978-03-31 Air Liquide Procede de traitement, par adsorption, d'un melange gazeux
DE3737408A1 (de) * 1987-11-01 1989-05-11 Schack & Co Rekuperator Verfahren zur rueckgewinnung des bei der desorption von beladenen sorptionsmaterialien anfallenden desorbats sowie vorrichtung dafuer
US4891950A (en) * 1988-11-07 1990-01-09 Texaco Inc. Control system and method for a synthesis gas process
DE4210637A1 (de) * 1992-03-31 1993-10-07 Linde Ag Verfahren zur Gewinnung von hochreinem Wasserstoff und hochreinem Kohlenmonoxid
DE4325513A1 (de) * 1993-06-17 1994-12-22 Linde Ag Verfahren zur Gewinnung eines hochreinen Kohlenmonoxid-Produktstromes und eines Wasserstoff-Produktstromes

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109126358A (zh) * 2017-06-27 2019-01-04 清远先导材料有限公司 特种气体的提纯工艺及提纯装置
CN109126358B (zh) * 2017-06-27 2024-02-20 昆明先导新材料科技有限责任公司 特种气体的提纯工艺及提纯装置
CN111854328A (zh) * 2020-07-06 2020-10-30 山东康源环保科技有限公司 深冷法回收有机废气处理装置

Also Published As

Publication number Publication date
CN1089158C (zh) 2002-08-14
KR970000307A (ko) 1997-01-21
EP0748765A1 (fr) 1996-12-18
CA2179118A1 (en) 1996-12-16
CA2179118C (en) 2006-04-18
US5632162A (en) 1997-05-27
EP0748765B1 (fr) 1999-08-11
KR100440665B1 (ko) 2004-09-24
FR2735382B1 (fr) 1997-07-25
JPH09103632A (ja) 1997-04-22
DE69603674T2 (de) 2000-04-06
DE69603674D1 (de) 1999-09-16
JP3844540B2 (ja) 2006-11-15
FR2735382A1 (fr) 1996-12-20

Similar Documents

Publication Publication Date Title
CN1089158C (zh) 带有深冷分离装置的一氧化碳生产设备
KR940011505B1 (ko) 산소 농후 공기 생산시스템
US3225516A (en) Method and apparatus for purifying gaseous mixtures by cyclic adsorption
KR19980087318A (ko) 가스정제방법 및 장치
JP2005536336A (ja) 廃棄ガス流の利用
CA2638678A1 (en) Gas purification by adsorption of hydrogen sulfide
KR960040429A (ko) 통합된 공기 분리 방법
CN1031660A (zh) 变压吸附控制方法和设备
EP0114911A1 (en) Novel repressurization for pressure swing adsorption system
US4960579A (en) Membrane process and system for nitrogen production
CN87107532A (zh) 一种利用变压吸附改进的气体分离方法
KR0185288B1 (ko) 연소배가스로부터 이산화탄소 회수용 2단식 흡착분리공정과 그 운전방법
US4874592A (en) Production process of xenon
KR910018063A (ko) 분리용 공기의 예비정제 방법
GB1586961A (en) Separation of gaseous mixtures
GB2160439A (en) Purification of gases
JP3639087B2 (ja) ヘリウム回収方法
US4834956A (en) Process for the production of high purity argon
JP3424951B2 (ja) 液体処理
JPS63107720A (ja) 空気中の水分および炭酸ガスの分離除去方法
KR19990014226A (ko) 고순도의 비활성 가스를 제조하는 방법 및 장치
CA1182765A (en) Repressurization for pressure swing adsorption system
SU1011502A1 (ru) Способ очистки водорода
SU1530228A1 (ru) Способ очистки азотоводородной смеси
KR900006080B1 (ko) 산소를 함유하는 가스로부터 탄화수소를 분리하기 위한 안전한 흡착공정

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20020814

Termination date: 20140614

EXPY Termination of patent right or utility model