CN1139215A - 直接观察可变形镜面装置 - Google Patents

直接观察可变形镜面装置 Download PDF

Info

Publication number
CN1139215A
CN1139215A CN94117830A CN94117830A CN1139215A CN 1139215 A CN1139215 A CN 1139215A CN 94117830 A CN94117830 A CN 94117830A CN 94117830 A CN94117830 A CN 94117830A CN 1139215 A CN1139215 A CN 1139215A
Authority
CN
China
Prior art keywords
optical fiber
panel
specular components
dmd
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN94117830A
Other languages
English (en)
Other versions
CN1064134C (zh
Inventor
杰弗里·B·桑普塞尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of CN1139215A publication Critical patent/CN1139215A/zh
Application granted granted Critical
Publication of CN1064134C publication Critical patent/CN1064134C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Abstract

一种用于直接观察由数字微镜器件(10b)所产生图像的面板(10a)，数字微镜器件(10b)通过倾斜微小镜面元件(11)至开启或闭合位置而产生图像。面板(10a)有许多根相互平行且紧密排列在一起的光纤(12)。光纤(12)的端面为面板(10a)的顶表面和底表面。每一光纤(12)的两个端面一根根以一个由镜面元件(11)的开启位置所确定的角度加以分开。这就仅由那些处于开启状态的镜面元件，能够使光向下传播给光纤(12)，并反射回到观察者。

Description

直接观察可变形镜面装置
本发明涉及图像显示系统，尤其涉及一种提供直接观察图像的可变形镜面装置。
基于空间光调制器(简称SLM)的实时显示系统作为采用阴极射线管(简称CRT)的显示系统的一种替换方式，其应用正日趋广泛。SLM系统提供高分辨率的显示而无需大体积和功耗的CRT系统。
数字微镜器件(简称为DMD)是SLM的一种，并可应用于显示器。DMD有一微机械像素元件阵列，每一微机械像素元件有一镜面和记忆单元(memory cell)。每一像素元件可以逐个由电子数据寻址。根据其寻址信号的状态，使每一镜面发生倾斜，为的是将光或者反射、或者不反射到像平面上，也即使镜面处于开启(on)或者关闭(off)状态。镜面处于开启状态的每一视频帧期间的那一部分时间决定了灰度梯度—从时间上为零的黑色至时间上为100％的白色。
现有的DMD显示系统均为投射系统。来自开启镜面的光通过投射透镜，在大屏幕上成像。来自关闭镜面的光从投射透镜反射出去并被拦截。色彩可以用两种方式加入，即通过色盘(color wheel)或三—DMD结构。
可以用半导体制造技术来制作DMD。对于含有记忆单元的静态RAM以及寻址电极，采用标准的CMOS加工工艺来制作DMD。然后，在存储和寻址电路上制作一倾斜镜面的“顶(roof)”。这一上层结构足够高到允许镜面围绕扭转轴倾斜正10度和负10度左右。
用于观察DMD所产生图象的显示光学对于投射观察易于实施。例如，DMD可以与暗场投射光学系统耦合在一起。这里，明亮的光源朝向芯片，与其表面呈一角度。倾斜至某一开启位置的镜面通过一投射透镜将入射光反射到屏幕上。倾斜至某一关闭位置的镜面则把入射光反射掉以便跳过投射透镜。
本发明的首要方面在于一种直接观察显示系统的面板，它提供从一数字微镜器件(DMD)反射的图像，该DMD具有倾斜至开启或关闭位置的镜面元件。面板上有许多根平行并紧密排列在一起的光纤。光纤的上端面和下端面分别位于面板的上表面和下表面上。这些端面与光纤的轴呈一由镜面元件的开启倾斜角所确定的角度。这一面板位于DMD表面上方隔开一定距离处，并允许周围光线向下传播给光纤，并被开启的镜面元件向上反射回来。
本发明的技术优越性在于可以无需大体积的光学系统来直接观察DMD产生的图像。这种直接观察系统体积小，成本低廉，适用于头戴、腕戴或其他小型显示器。
图1是直接观察显示系统的截面图，该系统使用根据图像数据产生图像的DMD。
图2是单个镜面元件和直接观察DMD的相关光纤的透视图。
图3是图1所示显示系统的截面图，其中，镜面元件处于接收并反射入射光的某一开启位置。
图4说明显示系统的面板如何可由一束光纤加以制作。
图5—7描述的是镜面表面和面板光纤直经的相对大小。
图8描述的是带有内部光源的直接观察显示系统。
图9说明一具有透明滤色镜的面板。
图1是直接观察显示系统10的横截面，此系统采用一产生图像的数字微镜器件(DMD)10b，此图像来源于图像数据处理单元10c提供的数据。面板10a将周围光线传播到DMD的表面，并将图像传播回观察者。
DMD 10b是镜面元件11的阵列，镜面元件11按照从图像数据处理单元10c接收到的数据状态发生倾斜。每一镜面元件11有三个状态。正如图中虚线所示的那样，其镜面沿两个方向中的一个方向倾斜，镜面也可以处于一平面位置，当DMD不用时，镜面就处于这一位置。
面板10a附装于DMD 10b上，并与DMD 10b的顶面隔开一定距离。DMD 10b的顶面和面板10a的底面之间的间距足以使DMD10b的镜面元件11进行倾斜动作。
面板10a是一组光纤12，它们相互平行，并这样来安放其位置，使其端面分别位于面板10a的顶面和底面。这些端面与光纤12的轴呈一角度关系，每一角度大小相同。正如下文结合图3所描述的那样，这一角度是由每一镜面元件11的开启倾斜位置确定的。
光纤12相互系缚在一起，这可以用多种方法中的一种方法来完成。例如，光纤12可以用粘合剂或者用具有在其通孔中可插入光纤的模板来系缚在一起。一种制造一束光纤的普通方法是用一种用作粘接剂的玻璃熔结材料，将它们相互粘接在一起。
本说明书的实施例中，光纤12这样来系缚俾使它们彼此互相直接紧贴在一起。在其他实施例中，光纤12可以略微分开一定距离，但在一般情况下，光纤12是紧密捆束在一起的。典型的情况如图1所示，光纤12的长度相对于面板10a的区域是短的。
图1中，镜面元件11和光纤12之间有一个一一对应关系。然而，在其他实施例中，共用一个光纤12的像素元件11可以大于1，或者是一个像素元件11具有的光纤12的数量可以大于1。在下面结合图5—7的说明中，相对于镜面元件11数量的光纤12的数量与显示器10的分辨率有关。
图像处理系统10c接收待在DMD 10b上显示的模拟或数字视频数据。如果是模拟数据，处理系统10c将此数据转变成数字形式。系统所进行的其他运行有去伽马校(degamma correction)，色彩转换和逐步扫描(progressive scanning)以及其他图像处理任务。这些任务可以由逻辑电路、执行存储指令的处理器，或者两种处理器的某种组合或混合来加以完成。处理系统10c包括一用一种“毕特一平面格式(bit—plane format)”缓冲记忆数据帧的显示存储器，其中，像素值的每一帧被传送到DMD 10b，每次每一像素1毕特。有关与DMD 10b一起使用的典型图像数据处理系统10c的进一步细节可参见美国专利号第5,079,544，标题为“标准独立数字化视频系统”；美国专利申请序号________________(Atty Dkt No.TI—17855)、标题为“数字电视系统”；美国专利申请序号07/678,761、标题为“用于脉宽调制显示系统中的DMD结构和计时”；美国专利申请序号07/809,816、标题为“白光增色场序贯投影”：以及美国专利申请序号________________(Atty Dkt No.TI—17671)、标题为“DMD显示系统”。这些专利以及专利申请已被转让给得克萨斯仪器股份有限公司，这里引述作为参考。
图2是具有带相关光纤12的单个镜面元件11的透视图。而图1是描述每一镜面元件11倾斜角的侧视图，图2是正面视图。图2中，描述了镜面元件11处于水平放置位置的情况，但它也可以如箭头所示的那样向上或者向下倾斜。
典型的镜面元件11成正方形，每一边长16微米。镜面元件11之间的间隔可以近至1微米。一典型的DMD 10b可以有数千个镜面元件11。因此，举例来说，如果DMD 10a是一个1000×1000镜面元件11的正方形阵列，面板10a的尺寸可以是17,000×17,000微米的数量级。
镜面元件11的阵列用半导体制造技术制作在硅衬底21上。每一镜面元件11与静态RAM的存储单元22之间在电学上是连通的。视实施的特定寻址方案而定，每一镜面元件11可以有其自己的存储单元22，或者几个镜面元件11可以共有一个存储单元22。处于存储单元22正上方的是一个寻址层，上面有两个着陆电极(land-ing electrode)23和两个寻址电极24。图2中只能看到一个着陆电极；两个电极23位于镜面25的对角处。镜面25位于电极23和24上方，用铰链26支承，铰链26装在支柱27上。
为了制作DMD，在衬底21上用标准加工工艺制作一层静态RAM单元22。通常，RAM单元22按照CMOS工艺方法制作。电极23和24可以用普通的金属光刻加以制作。在下一个工艺阶段，将大园片涂以聚合物隔离层。聚合物层上刻蚀有在其上制作支柱27的接触点通孔。然后，沉积、光刻并腐蚀一薄的铝层(用于铰链26)和一更厚一点的铝镜面层(用于镜面25)。等离子体腐蚀(plasmaetch)除去所遗留下的聚合物层，用装在支柱27上的铰链26将镜面25悬吊于电极23和24之上。当运转时，根据存储单元22中的数据，施加到寻址电极23和24上的静电力引起镜面25的倾斜。倾斜时，镜面25的表面平坦，而铰链26则扭曲转动。
有关典型DMD的结构、运行及制作的更进一步细节参见美国专利号为4,956,619、标题为“空间光调制器”的专利文献，这里引述供参考。
图3说明面板10a的光纤12如何以一由镜面元件11开启倾斜角所确定的角度加以倾斜。如果倾斜角是θ，则光纤12被倾斜的角度为90—θ度。这里该角度被称为光纤12的“偏转角”(Bias angle)。此偏转角允许光线向下传播给光纤12，并由处于开启状态的镜面加以反射。倾斜至一关闭位置的镜面将把光反射到光纤12的接收角以外。由关闭镜面元件11反射的光在面板10a的背面被吸收。观察者将看到，开启的镜面元件11为亮场，而并闭的镜面元件11则为暗场。
图4说明面板10a如何可借助分开一束光纤12′来加以制作。图4已被大大简化—那里光纤12和镜面元件11之间存在一一对应的关系，面板10a将由和镜面元件11一样多的光纤12′加以制作，且每一光纤12′的直径将近似地与每一镜面元件11的侧边尺寸相同。然而，正如下文所说明的那样，光纤12的直径即为所要求的分辨率问题。
将许多光纤12′捆扎成一束，并将束的一部分一根根分开。对于具有10度开启倾斜位置镜面元件11，这束光纤被一根根分开偏离轴向80度(90—10度)。对于具有其他角度的开启倾斜位置的镜面元件，光纤12′将以相应角度一根根加以分开。
图5—7说明光纤12的端面区域与镜面11的表面区域之间的关系如何影响显示器10的分辨率。图5—7是顶面图，代表当光纤12向下对着镜面元件11的表面所看到的情况。每一光纤12有一由其直径D所确定的“接收区域”。
图5中，如图1—4一样，光纤12的接收区域与镜面元件11的表面区域“吻合(match)”，这意味着光纤12的直径D近似与镜面元件11的侧边线尺寸L相同。对于面板10a的这种实施例，如果如图所示，每一光纤12位于其相应镜面元件11的中心，则得到最佳分辨率。可以采用各种技术将面板10a附装到DMD 10b上方以确保恰当的对准。
图6中，每一镜面元件11有四根光纤12。该实施例使确保面板10a对准DMD 10b的需要减少。例如，如果四根光纤12相对于镜面元件11的表面错开一个或二个方向，镜面元件11将可继续接收并反射来自二根光纤12的所有光线。每一镜面元件11的光纤数越大，光纤12与镜面元件11之间的对准的严格程度就越小。
图7中，每一光纤12的接收区域大于镜面元件11的表面区域。在这种类型的实施例中，显示器10以相应低的分辨率进行运转。例如，若将单根光纤12置于一组四个镜面元件11之上，则那四个镜面元件11的开启和关闭位置将决定有多大一部分图像被反射回到观察者。然而，该实施例的优点在于，可以控制一组四个镜面元件11的每一镜面元件11的开启和关闭时间，从而给出光纤12的灰度值。
图8描述如何可把光源81置于面板10a和DMD 10b之间空间的一侧。这就允许显示器10在周围没有光线经光纤12传送到DMD10b的表面时，能够产生图像。控制单元82使用户能够开启或者关闭光源81，并提供任何可能需要的功率。如图所示，光源81位于对应于“开启”倾斜位置方向上DMD一侧的位置。如果光源81将光传播到面板10a的底面，则光纤12的端面将把光散布到DMD 10b的反射表面。光源81可以是一个或多个发光二极管(LED)，或其他一些恰当的光源。
对黑、白图像，光源81可以是单个白色光源。对于灰度图像，处理单元10c可以实施脉宽调制技术，以便在镜面元件11处于开启或关闭的每一帧周期内的时间长度得以控制。
或者，如图8所示，对于彩色图像，光源81可以是一组三个光源，红、绿和蓝。每一镜面元件11依次接收用于每一色彩的数据。不同色彩的光源，在和由镜面元件正在接收的数据同步情况下依次被开启和关闭。
图9描述面板10a的另一个实施例以提供彩色图像。在这一种实施例中，面板10a有一个覆盖光纤12上端面的透明滤色片91。滤色片91具有用红、绿、蓝材料相互交替的狭条。入射光通过滤色片91时由这些狭条滤色，从而产生彩色图像。另一种变通方法是，滤色片91可以覆盖光纤12的底端面。同样，滤色片91也可以不采用这种用不同颜色材料制成的狭条，而改用由红、绿、蓝三种色彩的材料形成的正方形或其他多边形面积代替。理想的情况是，这些狭条或形状在其他相对尺寸可能的情况下要小到足以为每一镜面元件11提供一种颜色。
尽管上文结合特定实施例描述了本发明，但不能把这些描述理解为是对本发明的限定。已公开的实施例以及其他替换实施的各种改进对于熟知该领域的技术人员来说将是很清楚的。因此，应该把后文的权利要求书理解为覆盖了落入本发明的发明范围的所有改进。

Claims (20)

1.一种用于直接观察显示系统的面板，所述直接观察显示系统显示由数字微镜器件产生的图像，所述数字微镜器件具有倾斜至某一倾斜角度的镜面，其特征在于，所述面板包含：
许多根光纤，所述光纤如此系缚在一起，使得相互间平行且紧密地排列；
所述光纤长度大体相等，从而给出所述面板的一个平面；
所述光纤的端面包含所述面板的上表面和下表面；以及
所述光纤有一个相对于所述面板平面的偏转角，它由所述镜面元件的所述倾斜角所确定。
2.如权利要求1所述的面板，其特征在于，所述偏转角近似为90度减去所述开启倾斜角的值。
3.如权利要求1所述的面板，其特征在于，所述光纤有一个接收区域，所述接收区域的直径近似与所述镜面元件的侧边尺寸相同。
4.如权利要求1所述的面板，其特征在于，所述光纤的直径小于所述镜面元件的所述尺寸。
5.如权利要求1所述的面板，其特征在于，所述光纤的直径大于所述镜面元件的侧边尺寸。
6.如权利要求1所述的面板，其特征在于，它还包含一大体与所述光纤的所述端面平行的透明滤色片，所述滤色片具有由不同着色材料形成的区域。
7.如权利要求6所述的面板，其特征在于，所述区域为狭条。
8.如权利要求6所述的面板，其特征在于，所述区域为多边形。
9.一种直接观察由一简称为DMD的数字微镜器件所产生图像的方法，所述数字微镜器件具有倾斜至某一开启倾斜角的镜面元件，其特征在于，所述方法包含下述步骤：
以一确定于所述开启倾斜角的偏转角形成许多根光纤的两个端面；
将所述光纤组合成一组，成为具有由所述端面限定的平面底表面和平面顶表面的面板；
放置所述底表面，使之平行并贴近所述DMD的反射表面；以及
在所述顶表面处观察由所述DMD产生的图像。
10.如权利要求9所述的方法，其特征在于，它还包含将由不同色彩区域材料制成的透明滤色片置于所述面板正上方或正下方的步骤。
11.如权利要求9所述的方法，其特征在于，它还包含将所述光纤与所述镜面元件对准的步骤。
12.如权利要求9所述的方法，其特征在于，所述组合步骤通过将许多根光纤组合在一起加以完成，所述光纤的根数近似与镜面元件的个数相同。
13.如权利要求9所述的方法，其特征在于，所述组合步骤通过将许多根光纤组合在一起加以完成，所述光纤的根数大于镜面元件的个数。
14.如权利要求9所述的方法，其特征在于，所述组合步骤是通过许多根光纤组合在一起加以完成，所述光纤的根数小于镜面元件的个数。
15.如权利要求9所述的方法，其特征在于，它还包含沿所述偏转角的方向、在所述面板的边缘处的所述面板与所述DMD之间放置一光源的步骤。
16.如权利要求15所述的方法，其特征在于，所述光源是一组不同颜色的光源，并且所述方法还包含按照正在被传递至所述DMD的数据依次点燃所述光源的步骤。
17.一种直接观察显示系统，其特征在于，它包含：
通过倾斜一个镜面阵列至开启或关闭倾斜角而产生图像的数字微镜器件；
一种用来产生代表所述图像的图像数据、并把所述数据传递到所述数字微镜器件的图像数据处理系统；以及
一种具有许多根光纤的面板，所述光纤如此系缚在一起，俾使光纤之间彼此相互平行并且紧密排列，所述光纤长度相等，以使提供所述面板的平面形状，且其中所述光纤的端面含有所述面板的一个上表面和一个下表面，所述光纤有一相对于所述面板平面的偏转角，所述偏转角由所述镜面元件的所述倾斜角加以确定。
18.如权利要求17所述的直接观察显示系统，其特征在于，所述面板有一近似为90度减去所述倾斜角度值的偏转角。
19.如权利要求17所述的直接观察显示系统，其特征在于，在相应于所述偏转角的方向上、所述DMD一侧的所述面板和所述DMD之间还包含一个光源。
20.如权利要求15所述的直接观察显示系统，其特征在于，在所述面板的上表面或下表面处还包含一透明滤色片，所述滤色片具有由不同颜色材料形成的区域。
CN94117830A 1993-12-01 1994-12-01 直接观察可变形镜面装置 Expired - Fee Related CN1064134C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/159,963 1993-12-01
US08/159,963 US5517347A (en) 1993-12-01 1993-12-01 Direct view deformable mirror device

Publications (2)

Publication Number Publication Date
CN1139215A true CN1139215A (zh) 1997-01-01
CN1064134C CN1064134C (zh) 2001-04-04

Family

ID=22574865

Family Applications (1)

Application Number Title Priority Date Filing Date
CN94117830A Expired - Fee Related CN1064134C (zh) 1993-12-01 1994-12-01 直接观察可变形镜面装置

Country Status (8)

Country Link
US (1) US5517347A (zh)
EP (1) EP0656554B1 (zh)
JP (1) JPH07261102A (zh)
KR (1) KR950015186A (zh)
CN (1) CN1064134C (zh)
CA (1) CA2137058A1 (zh)
DE (1) DE69428965T2 (zh)
TW (1) TW274121B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI472476B (zh) * 2009-11-10 2015-02-11 Ibm 非揮發性奈米機電系統元件
CN108761982A (zh) * 2018-04-28 2018-11-06 毅丰显示科技（深圳）有限公司 投影集光系统

Families Citing this family (184)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6219015B1 (en) 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US8014059B2 (en) 1994-05-05 2011-09-06 Qualcomm Mems Technologies, Inc. System and method for charge control in a MEMS device
DE19504568A1 (de) * 1995-02-11 1996-08-14 Zeiss Carl Fa Kippspiegelanordnung
US6882473B2 (en) 1995-03-02 2005-04-19 Carl Zeiss Jena Gmbh Method for generating a stereoscopic image of an object and an arrangement for stereoscopic viewing
EP0730181B1 (de) * 1995-03-02 2000-12-20 CARL ZEISS JENA GmbH Verfahren zur Erzeugung des stereoskopischen Bildes eines Objektes sowie Anordnung zur stereoskopischen Betrachtung
US6348994B1 (en) 1995-03-02 2002-02-19 Carl Zeiss Jena Gmbh Method for generating a stereoscopic image of an object and an arrangement for stereoscopic viewing
US5841579A (en) 1995-06-07 1998-11-24 Silicon Light Machines Flat diffraction grating light valve
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US5640479A (en) * 1995-10-18 1997-06-17 Palomar Technologies Corporation Fiberoptic face plate stop for digital micromirror device projection system
US7907319B2 (en) 1995-11-06 2011-03-15 Qualcomm Mems Technologies, Inc. Method and device for modulating light with optical compensation
US7471444B2 (en) 1996-12-19 2008-12-30 Idc, Llc Interferometric modulation of radiation
US5982553A (en) 1997-03-20 1999-11-09 Silicon Light Machines Display device incorporating one-dimensional grating light-valve array
US5867251A (en) * 1997-05-02 1999-02-02 The General Hospital Corp. Scanning ophthalmoscope with spatial light modulators
US5790297A (en) * 1997-06-26 1998-08-04 Xerox Corporation Optical row displacement for a fault tolerant projective display
US5815303A (en) * 1997-06-26 1998-09-29 Xerox Corporation Fault tolerant projective display having redundant light modulators
US5774254A (en) * 1997-06-26 1998-06-30 Xerox Corporation Fault tolerant light modulator display system
US6088102A (en) 1997-10-31 2000-07-11 Silicon Light Machines Display apparatus including grating light-valve array and interferometric optical system
US5930027A (en) * 1998-02-12 1999-07-27 Mcdonnell Douglas Corporation Digitally controlled fiber optic light modulation system
US6037564A (en) * 1998-03-31 2000-03-14 Matsushita Electric Industrial Co., Ltd. Method for scanning a beam and an apparatus therefor
KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US6271808B1 (en) 1998-06-05 2001-08-07 Silicon Light Machines Stereo head mounted display using a single display device
US6130770A (en) 1998-06-23 2000-10-10 Silicon Light Machines Electron gun activated grating light valve
US6101036A (en) 1998-06-23 2000-08-08 Silicon Light Machines Embossed diffraction grating alone and in combination with changeable image display
US6215579B1 (en) 1998-06-24 2001-04-10 Silicon Light Machines Method and apparatus for modulating an incident light beam for forming a two-dimensional image
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
WO2001018494A1 (en) * 1999-09-03 2001-03-15 Cortron Corporation Digital imaging system utilizing modulated broadband light
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6480218B2 (en) * 1999-12-03 2002-11-12 Konica Corporation Printer for recording an image on a recording material
US6700598B1 (en) 2000-04-25 2004-03-02 Cortron Corporation Digital imaging system employing non-coherent light source
US7099065B2 (en) * 2000-08-03 2006-08-29 Reflectivity, Inc. Micromirrors with OFF-angle electrodes and stops
US6962771B1 (en) * 2000-10-13 2005-11-08 Taiwan Semiconductor Manufacturing Company, Ltd. Dual damascene process
US6664779B2 (en) * 2000-11-16 2003-12-16 Texas Instruments Incorporated Package with environmental control material carrier
US6707591B2 (en) 2001-04-10 2004-03-16 Silicon Light Machines Angled illumination for a single order light modulator based projection system
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
US6985655B2 (en) * 2002-01-30 2006-01-10 Affymetrix, Inc. Compositions and methods involving direct write optical lithography
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US6767751B2 (en) 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
TWI289708B (en) 2002-12-25 2007-11-11 Qualcomm Mems Technologies Inc Optical interference type color display
US7417782B2 (en) * 2005-02-23 2008-08-26 Pixtronix, Incorporated Methods and apparatus for spatial light modulation
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
CN1860520B (zh) * 2003-05-20 2011-07-06 辛迪安特公司 数字底板
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US7142346B2 (en) * 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7161728B2 (en) 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7855824B2 (en) * 2004-03-06 2010-12-21 Qualcomm Mems Technologies, Inc. Method and system for color optimization in a display
US7720148B2 (en) * 2004-03-26 2010-05-18 The Hong Kong University Of Science And Technology Efficient multi-frame motion estimation for video compression
US7060895B2 (en) * 2004-05-04 2006-06-13 Idc, Llc Modifying the electro-mechanical behavior of devices
US7164520B2 (en) 2004-05-12 2007-01-16 Idc, Llc Packaging for an interferometric modulator
US7551159B2 (en) 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7515147B2 (en) 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7560299B2 (en) 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7602375B2 (en) * 2004-09-27 2009-10-13 Idc, Llc Method and system for writing data to MEMS display elements
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7710629B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. System and method for display device with reinforcing substance
US7928928B2 (en) * 2004-09-27 2011-04-19 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing perceived color shift
US7679627B2 (en) 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7345805B2 (en) 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
US7668415B2 (en) 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7675669B2 (en) 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7701631B2 (en) 2004-09-27 2010-04-20 Qualcomm Mems Technologies, Inc. Device having patterned spacers for backplates and method of making the same
US8362987B2 (en) 2004-09-27 2013-01-29 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US20060076634A1 (en) 2004-09-27 2006-04-13 Lauren Palmateer Method and system for packaging MEMS devices with incorporated getter
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7916103B2 (en) * 2004-09-27 2011-03-29 Qualcomm Mems Technologies, Inc. System and method for display device with end-of-life phenomena
US7545550B2 (en) 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US7911428B2 (en) 2004-09-27 2011-03-22 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US7807488B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. Display element having filter material diffused in a substrate of the display element
US7692839B2 (en) 2004-09-27 2010-04-06 Qualcomm Mems Technologies, Inc. System and method of providing MEMS device with anti-stiction coating
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7486429B2 (en) * 2004-09-27 2009-02-03 Idc, Llc Method and device for multistate interferometric light modulation
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7710632B2 (en) * 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. Display device having an array of spatial light modulators with integrated color filters
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US7898521B2 (en) 2004-09-27 2011-03-01 Qualcomm Mems Technologies, Inc. Device and method for wavelength filtering
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7369296B2 (en) * 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7508571B2 (en) * 2004-09-27 2009-03-24 Idc, Llc Optical films for controlling angular characteristics of displays
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7920135B2 (en) 2004-09-27 2011-04-05 Qualcomm Mems Technologies, Inc. Method and system for driving a bi-stable display
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7653371B2 (en) 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7626581B2 (en) 2004-09-27 2009-12-01 Idc, Llc Device and method for display memory using manipulation of mechanical response
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US8124434B2 (en) 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7808703B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. System and method for implementation of interferometric modulator displays
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US20080158635A1 (en) * 2005-02-23 2008-07-03 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US9229222B2 (en) * 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US7755582B2 (en) 2005-02-23 2010-07-13 Pixtronix, Incorporated Display methods and apparatus
US7675665B2 (en) 2005-02-23 2010-03-09 Pixtronix, Incorporated Methods and apparatus for actuating displays
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US7295363B2 (en) 2005-04-08 2007-11-13 Texas Instruments Incorporated Optical coating on light transmissive substrates of micromirror devices
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
KR20080027236A (ko) 2005-05-05 2008-03-26 콸콤 인코포레이티드 다이나믹 드라이버 ｉｃ 및 디스플레이 패널 구성
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
US7355779B2 (en) 2005-09-02 2008-04-08 Idc, Llc Method and system for driving MEMS display elements
US7630114B2 (en) * 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US7903047B2 (en) 2006-04-17 2011-03-08 Qualcomm Mems Technologies, Inc. Mode indicator for interferometric modulator displays
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US8004743B2 (en) 2006-04-21 2011-08-23 Qualcomm Mems Technologies, Inc. Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
EP1943551A2 (en) 2006-10-06 2008-07-16 Qualcomm Mems Technologies, Inc. Light guide
EP2366943B1 (en) 2006-10-06 2013-04-17 Qualcomm Mems Technologies, Inc. Optical loss structure integrated in an illumination apparatus of a display
US7545552B2 (en) 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
WO2008088892A2 (en) * 2007-01-19 2008-07-24 Pixtronix, Inc. Sensor-based feedback for display apparatus
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7692841B2 (en) * 2007-07-31 2010-04-06 Texas Instruments Incorporated System and method for regulating micromirror position
US7898716B2 (en) * 2007-08-01 2011-03-01 Texas Instuments Incorporated System and method for controlling a digital micromirror device (DMD) system to generate an image
US20090040516A1 (en) * 2007-08-10 2009-02-12 Honeywell International Inc. Spectroscopic system
US8068710B2 (en) 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
US7948672B2 (en) * 2008-03-07 2011-05-24 Qualcomm Mems Technologies, Inc. System and methods for tiling display panels
US7920317B2 (en) * 2008-08-04 2011-04-05 Pixtronix, Inc. Display with controlled formation of bubbles
US8169679B2 (en) * 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
US20100245370A1 (en) * 2009-03-25 2010-09-30 Qualcomm Mems Technologies, Inc. Em shielding for display devices
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
US9071834B2 (en) * 2009-04-25 2015-06-30 James Yett Array of individually angled mirrors reflecting disparate color sources toward one or more viewing positions to construct images and visual effects
CN104916258B (zh) 2010-02-02 2018-02-16 追踪有限公司 用于控制显示装置的电路
CN102834763B (zh) 2010-02-02 2015-07-22 皮克斯特罗尼克斯公司 用于制造填充冷密封流体的显示装置的方法
JP5960066B2 (ja) 2010-03-11 2016-08-02 ピクストロニクス，インコーポレイテッド ディスプレイ装置のための反射および半透過動作モード
KR20130100232A (ko) 2010-04-09 2013-09-10 퀄컴 엠이엠에스 테크놀로지스, 인크. 전기 기계 디바이스의 기계층 및 그 형성 방법
US8848294B2 (en) 2010-05-20 2014-09-30 Qualcomm Mems Technologies, Inc. Method and structure capable of changing color saturation
EP2656134A1 (en) 2010-12-20 2013-10-30 Pixtronix, Inc. Systems and methods for mems light modulator arrays with reduced acoustic emission
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8749538B2 (en) 2011-10-21 2014-06-10 Qualcomm Mems Technologies, Inc. Device and method of controlling brightness of a display based on ambient lighting conditions
US9076368B2 (en) 2012-02-06 2015-07-07 Battelle Memorial Institute Image generation systems and image generation methods
US8982014B2 (en) 2012-02-06 2015-03-17 Battelle Memorial Institute Image generation systems and image generation methods
US9183812B2 (en) 2013-01-29 2015-11-10 Pixtronix, Inc. Ambient light aware display apparatus
US9170421B2 (en) 2013-02-05 2015-10-27 Pixtronix, Inc. Display apparatus incorporating multi-level shutters
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
EP3117249B1 (en) 2014-03-14 2021-05-05 BAE Systems PLC Improvements in and relating to displays
EP3117262A1 (en) * 2014-03-14 2017-01-18 BAE Systems PLC Fibre-optical diffuser for displays
EP2919059A1 (en) * 2014-03-14 2015-09-16 BAE Systems PLC Fibre-optical diffuser for displays
CN106646927B (zh) * 2016-11-02 2020-03-06 京东方科技集团股份有限公司 一种显示面板及显示装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5141537B2 (zh) * 1972-03-24 1976-11-10
NL7807315A (nl) * 1978-07-06 1980-01-08 Philips Nv Vezeloptiekplaat.
CA1245494A (en) * 1983-03-17 1988-11-29 Ralph R. Rover, Jr. Light directing faceplate
US4569571A (en) * 1983-10-04 1986-02-11 Tru-Lyte Systems, Inc. Amplifier assembly for electromagnetic radiation, preferably in the actinic spectrum
US4601537A (en) * 1984-01-06 1986-07-22 Ohio State University Research Foundation Apparatus and methods for forming images and for optical demultiplexing
US4859012A (en) * 1987-08-14 1989-08-22 Texas Instruments Incorporated Optical interconnection networks
US4956619A (en) * 1988-02-19 1990-09-11 Texas Instruments Incorporated Spatial light modulator
DE69033542T2 (de) * 1989-02-27 2001-01-11 Texas Instruments Inc Apparat und Verfahren für ein digitalisiertes Videosystem
US5037173A (en) * 1989-11-22 1991-08-06 Texas Instruments Incorporated Optical interconnection network
US5129028A (en) * 1990-11-01 1992-07-07 The United States Of America As Represented By The Secretary Of The Navy Grid free, modular, large screen display
US5127078A (en) * 1991-02-13 1992-06-30 Terry Weed Integrated display for image presentation and receiving using fiber optics
US5240818A (en) * 1991-07-31 1993-08-31 Texas Instruments Incorporated Method for manufacturing a color filter for deformable mirror device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI472476B (zh) * 2009-11-10 2015-02-11 Ibm 非揮發性奈米機電系統元件
CN108761982A (zh) * 2018-04-28 2018-11-06 毅丰显示科技（深圳）有限公司 投影集光系统
CN108761982B (zh) * 2018-04-28 2021-01-12 毅丰显示科技（深圳）有限公司 投影集光系统

Also Published As

Publication number Publication date
CA2137058A1 (en) 1995-06-02
EP0656554A2 (en) 1995-06-07
JPH07261102A (ja) 1995-10-13
DE69428965D1 (de) 2001-12-13
CN1064134C (zh) 2001-04-04
TW274121B (zh) 1996-04-11
EP0656554A3 (en) 1997-05-21
US5517347A (en) 1996-05-14
KR950015186A (ko) 1995-06-16
EP0656554B1 (en) 2001-11-07
DE69428965T2 (de) 2002-06-27

Similar Documents

Publication Publication Date Title
CN1064134C (zh) 直接观察可变形镜面装置
US5467146A (en) Illumination control unit for display system with spatial light modulator
CN1114318C (zh) Ｄｍｄ显示系统
CN1086894C (zh) 投影型图像显示装置
EP0831352B1 (en) Optical modulating device, display and electronic device
EP0712243B1 (en) Method of enhancing the resolution of a display system
US7125121B2 (en) Image display apparatus
US5619059A (en) Color deformable mirror device having optical thin film interference color coatings
EP0758100B1 (en) Transmissive display device
US5640479A (en) Fiberoptic face plate stop for digital micromirror device projection system
JPS6223022A (ja) 照明装置
US20080158641A1 (en) Backlight unit and an imaging system using the same
JPS63118125A (ja) 液晶表示装置
US7636190B2 (en) Method of projecting an image from a reflective light valve
EP1550899A1 (en) A silicon-based color liquid crystal display microdevice
US8023173B2 (en) Biaxial mirror color selecting micro imager
US7086741B2 (en) Optical system for a projector and a projection method using the same
CN1052545C (zh) 彩色大屏幕和超大屏幕液晶显示屏
US7085035B2 (en) Display apparatus with improved contrast ratio
CN101256281A (zh) 超薄显示系统
JPH0416825A (ja) 光シャッターアレイ
CN101595729B (zh) 一种降低数字视频系统中暂态伪像的方法
CN1178523C (zh) 彩色投影显示装置
JPH03198037A (ja) 高精細投影型表示装置
US20040141154A1 (en) Color projection display device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C14 Grant of patent or utility model
GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee