CN1082782C - Organic electronic light emitting element and its making process - Google Patents
Organic electronic light emitting element and its making process Download PDFInfo
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- CN1082782C CN1082782C CN99119610A CN99119610A CN1082782C CN 1082782 C CN1082782 C CN 1082782C CN 99119610 A CN99119610 A CN 99119610A CN 99119610 A CN99119610 A CN 99119610A CN 1082782 C CN1082782 C CN 1082782C
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Abstract
The present invention relates to an organic electronic luminous element and a manufacturing method thereof. Firstly, a plurality of holes are etched on a base plate, and an expected luminous zone is formed between every two holes of the base plate. Then, a first electrode, an organic layer and a second electrode are orderly formed on the expected luminous zone by a vapor deposition method. Finally, the elements are covered by an insulating sealing layer. Because each hole of the base plate is far deeper than the bottom layer position of the first electrode formed on the expected luminous zone, the hole of the base plate has the functions of insulating and blocking, and the current generates a transmitting illuminant when passing through the organic layer and displays full color. The present invention can ensure the correctness of forming the organic layer and the second electrode, simplify the manufacturing process, and expand the effective luminous function area.
Description
The present invention relates to a kind of organic electroluminescent device that can be used as the display floater main element and preparation method thereof, not only can guarantee the accuracy when forming the organic layer and second electrode, and can simplify and make flow process and can enlarge its effective luminous active area.
Current, development in science and technology is maked rapid progress, the application of display floater is also extremely extensive, every television set, computer peripheral, billboard, all need be applied to display floater in video telephone or the global satellite positioning system apparatus, and in the materials used or display packing of numerous display floaters, because it is bigger that organic electroluminescent device (organic electroluminescent device) has field-of-view angle, display quality is preferable, display thickness is thinner, use consumption electric power less, long and manufacturing easily in useful life, and launch the advantage of full color light source, therefore in display floater of new generation, be subjected to gazing at of each side.
See also the structure sectional view of traditional organic electroluminescent device shown in Figure 1, it mainly is to be formed with one first electrode 12 on a substrate 11, and in the appropriate location of first electrode 12 in regular turn evaporation be formed with one and include an organic emission layer (organic emitting layer at least; Show among the figure) organic layer 13, and second electrode 14.Owing to organic layer 13 is subjected to airborne moisture and the oxygen function influence suffers damage easily, cause its luminous video picture zone to dwindle, therefore on the conditional electronic light-emitting component, can utilize insulated enclosure layer 15 just like resin with topped said elements again.But because resin can't adhere on the whole surface of organic electroluminescent device for a long time, and when forming insulated enclosure layer 15 and can't guarantee that for carrying out under the vacuum environment, the injury of moisture and oxygen still is difficult to comprehensive eliminating.
At above-mentioned shortcoming, so the improvement manufacturing technology of second kind of conditional electronic light-emitting component is arranged, as the United States Patent (USP) mat woven of fine bamboo strips 5,457, No. 357＜organic electroluminescent devicehaving improved durability and producing method thereof) disclosed, it mainly is at first to form an interlayer dielectric film (polyimide layer) on the substrate and first electrode, and utilizes an oblique evaporation mode to form organic layer and second electrode and form a metal film under vacuum environment and can be adsorbed on the organic electroluminescent device well to be used as the insulated enclosure layer.But, in second kind of electroluminescent element technology, still have following shortcoming:
1. it can't be made and include the electronic light-emitting component matrix that the RGB three primary colors are arranged; In other words, it can't form the full color display floater;
2. also can't accurately locate when oblique evaporation forms the organic layer and second electrode, so figure can't become more meticulous;
3. utilize the oblique evaporation mode to form the organic layer and second electrode, cause the ora terminalis (leaving an end of interlayer dielectric) of electrode to form the generation deviation easily, therefore often cause its minute short circuit phenomenon.
For this reason, the third traditional organic electroluminescent device is as United States Patent (USP) the 5th, 701, No. 055＜organic electroluminescent display panel and method formanufacturing the same〉disclosed, it makes flow process such as Fig. 2 is extremely shown in Figure 8.At first on a substrate 21, form first electrode 22, as shown in Figure 2; On first electrode 22, form an insulating material layer 28 again, as Fig. 3; Cover (mask) 27 is covered in utilization and the appropriate location of stamp technology on insulating material layer 28 forms several contact windows, as Fig. 4; Utilize etching technique etching insulating material layers 28 such as dry ecthing or wet etching to have the interlayer dielectric 25 that ledge is gone up on the top, as Fig. 5 to form several; Utilize a shade cover plate 29 and oblique evaporation mode to form the organic layer 23 that can send ruddiness (R), green glow (G), blue light (B) separately between the interlayer dielectric 25 in regular turn, as Fig. 6 in twos; Form second electrode 24, so can send the full color display light of RGB during by organic layer 23, as shown in Figure 7 when power supply; Form an insulated enclosure layer 26 all elements, as shown in Figure 8 with topped all organic electroluminescent devices.
Though the third traditional organic electroluminescent device technology can solve the problem that more becomes more meticulous of figure and send full color coloured light, but has following shortcoming:
1, because the existence of its interlayer dielectric 25, under interlayer dielectric 25 positions, will form can't be luminous interlayer luminous zone 255 not, have only the luminous zone 235 of expectation can act on luminous, the full blast that can't reach organic electroluminescent device is used, especially when its transmitted light is designed to the multifaceted light-emitting aspect, the phenomenon that its front lighting (among the figure up direction) is blocked is obvious especially;
2, when making interlayer dielectric 25, its manufacture process is quite loaded down with trivial details;
3, it utilizes the oblique evaporation mode to form the organic layer and second electrode, and the shortcoming that it still has second kind of conditional electronic light-emitting component oblique evaporation causes the minute short circuit phenomenon easily.
Therefore, how the problem that is taken place at above-mentioned various conditional electronic light-emitting components proposes a kind of solution of novelty, not only can under than the simpler production method, make the organic electroluminescent device that can send the full color demonstration, and effectively improve its luminous active area and do not have the short circuit matter of regret and take place, be not to use the person eagerly to look forward to for a long time always.
Main purpose of the present invention provides a kind of organic electroluminescent device and preparation method thereof, can on the appropriate location of substrate, directly lose and be provided with several substrate holes to replace the insulation insulating effect of traditional interlayer dielectric, not only can simplify its manufacture process relatively, transmissive goes out its full color video picture again.
Secondary objective of the present invention provides a kind of organic electroluminescent device and preparation method thereof, can utilize vertical evaporation mode can form second electrode and various organic layer, not only can allow the meticulousr and accurate location of its figure, and does not have the minute short circuit matter of regret again and take place.
Another purpose of the present invention provides a kind of organic electroluminescent device and preparation method thereof, and its substrate hole can form another and estimate the luminous zone, promotes and can reach the most effective light-emitting area in the unit organic electroluminescent device.
Organic electroluminescent device of the present invention is achieved in that it is mainly constructed and includes: a substrate, and the appropriate location erosion of this substrate is provided with several substrate holes, and forms an expectation luminous zone in twos between the substrate hole naturally; One is formed at first electrode on this expectation luminous zone respectively; Several can be formed at the organic layer on corresponding first electrode individually; And second electrode that is formed at respectively on this organic layer.
Wherein the degree of depth of this substrate hole will be deeper than the first electrode bottom position that is formed on this expectation luminous zone.
Also including one can topped first electrode, the insulated enclosure layer of organic layer and second electrode.
Also include a diaphragm that can be formed on this second electrode.
Also include a reflective film that can be formed on this diaphragm.
Also include a reflective film that can be formed at this substrate bottom.
Wherein these several organic layers include the organic layer that can throw blue light, the organic layer of green glow and the organic layer of ruddiness at least.
Wherein these several organic layers all are to be made by the organic layer material that can launch single colored light.
Wherein this organic layer also can include the side overcoat of topped this first electrode side.
Wherein the width of this substrate hole is identical with the expectation luminous zone.
Wherein also can be formed with this first electrode, organic layer and second electrode in regular turn in this substrate hole.
Also can be from the organic electroluminescent device of each substrate hole cutting with the launched single colored light that forms several separate single.
The manufacture method of organic electroluminescent device of the present invention is achieved in that its key step includes: a. forms one first electrode layer on a substrate; B. utilize stamp and etching technique on first electrode, to select the appropriate location erosion to be provided with several and penetrate first electrode and go deep into the substrate hole of base in pulling, and formation one expectation luminous zone naturally between the substrate hole in twos; C. utilize the shade cover plate to be chosen in respectively that evaporation forms a corresponding organic layer on first electrode; D. on organic layer, form one second electrode.
After step e, also can include the following step: form an insulated enclosure layer with topped first electrode, organic layer and second electrode.
After step e, also can include the following step: cut organic electroluminescent device with the launched single colored light that forms several separate single from each substrate hole.
After step e, also can include the following step: on second electrode, form a diaphragm.
After step e, also can include the following step: form a reflective film at the substrate bottom.
Wherein also can utilize among this step c the oblique evaporation mode with form one can the topped first electrode side organic side overcoat.
The manufacture method of organic electroluminescent device of the present invention can also be achieved in that its key step includes, and: a. utilizes etching technique to select appropriate location erosion to be provided with several on a substrate to go deep into substrate hole in the substrate, and forms an expectation luminous zone in twos between the substrate hole naturally; B. on substrate hole and expectation luminous zone, form one first electrode; C. utilize the shade cover plate to be chosen in respectively and form a corresponding organic layer on first electrode; D. on organic layer, form one second electrode.
After steps d, also can include the following step: form an insulated enclosure layer with topped first electrode, organic layer and second electrode.
After steps d, also can include the following step: cut organic electroluminescent device with the launched single colored light that forms several separate single from each substrate hole.
After steps d, also can include the following step: on second electrode, form a diaphragm.
Wherein formed substrate hole width is identical with expectation luminous zone width among this step a.
The present invention is a kind of organic electroluminescent device that can be used as the display floater main element and preparation method thereof, not only can guarantee the accuracy when forming the organic layer and second electrode, and can simplify and make flow process and can enlarge its effective luminous active area.
The effect that describes structure of the present invention, feature in detail and reached below in conjunction with accompanying drawing and preferred embodiment:
Fig. 1 is the structure sectional view of traditional organic electroluminescent device;
Fig. 2 to Fig. 8 is another kind of traditional organic electroluminescent device each step structure sectional view when making;
Fig. 9 to Figure 14 is a preferred embodiment of the present invention each step structure sectional view when making;
Figure 15 is the step structure sectional view of another embodiment of the present invention when making;
Figure 16 is embodiment shown in Figure 15, the structure sectional view when finishing making;
Figure 17 is the structure sectional view of further embodiment of this invention;
Figure 18 is the structure sectional view of further embodiment of this invention;
Figure 19 to Figure 23 is further embodiment of this invention each step structure sectional view when making;
Figure 24 is the structure sectional view of further embodiment of this invention;
Figure 25 is the structure sectional view of further embodiment of this invention.
At first, see also Fig. 9 to a preferred embodiment of the present invention shown in Figure 14 each step structure sectional view when making, key step of the present invention includes:
Step 1 at first forms first electrode 32 on substrate 31, wherein this substrate 31 can be a glass substrate, and first electrode 32 also is to make with transparent material, as IT0, as shown in Figure 9;
Step 2 is utilized as stamp method such as optics, electron beam, X-light or ion beam and cover and cover 37, cooks up several contact windows in the appropriate location of first electrode 32, as shown in figure 10;
Step 3 is utilized etching techniques such as dry ecthing or wet etching to set out several in contact window position erosion and is penetrated first electrode 32 and go deep into substrate hole 35 substrate 31 in, and formation one expectation luminous zone 38 naturally between substrate aperture 35 holes in twos, as shown in figure 11;
Step 4, utilize shade cover plate (shadow mask) 39 to be chosen in respectively that evaporation forms a corresponding organic layer 33 that can send ruddiness (R), green glow (G) or blue light (B) individually on first electrode 32, and each organic layer 33 include an organic emission layer (organic emittinglayer at least; Do not show), as shown in figure 12;
Step 5 forms one second electrode 34 on organic layer 33, so can become corresponding electrode with first electrode 32 of previous formation, thus can project display light source during by organic layer 33 when electric current, as shown in figure 13;
Step 6 form an insulated enclosure layer 36 with topped first electrode 32, organic layer 33 and second electrode 34, and this insulated enclosure layer 36 is to be made by the metal material that can operate, as shown in figure 14 under vacuum environment.
So can finish one and not have the organic electroluminescent device that traditional interlayer dielectric but can throw the full color color light source, so its manufacture process will be simplified many relatively.Even and since its utilize the degree of depth of substrate hole 35 to lose to establish and be deep to substrate hole 35 evaporations and be formed with an organic layer 335 and second electrode 345, still also lower than being formed at first electrode, 32 bottoms of estimating on the luminous zone 38, bring into play the isolated effect of its insulation fully, therefore it is applicable to vertical evaporation mode, so the present invention can accurately locate in the time of not only can allowing the evaporation organic layer and second electrode, cause to allow figure become more meticulous more, and incidental minute short circuit matter of regret takes place when also not having oblique evaporation.
Moreover, see also another embodiment of the present invention shown in Figure 15 structure sectional view when process steps 4; As shown in the figure, in this step, also can utilize an oblique evaporation main vertical evaporation mode of arranging in pairs or groups, cause at normal organic layer 33 sides and form a side overcoat 333 to clad first electrode, 32 peripheries of previous formation, can guarantee that so more first electrode 32 and second electrode 34 abnormal short circuit phenomenon can not take place, as shown in figure 16.
In addition, see also another embodiment of the present invention structure schematic cross-section shown in Figure 17; For the actual needs of special occasions, organic layer 33 of the present invention also uses the organic material of same monochromatic series, as the ruddiness (R) of present embodiment.And each complete display floater also can cut into several single light-emitting component, as shown in figure 18.
Again, see also Figure 19 to further embodiment of this invention shown in Figure 23 each step structure sectional view when making, its key step includes:
Step 1, at first before a substrate 51 does not form first electrode, promptly utilize etching technique on substrate 51, to select the appropriate location erosion to be provided with several bases that go deep in the substrate 51 in advance and pull hole 55, estimate luminous zone 65 and form one in twos between the substrate hole 55 naturally, as shown in figure 19;
Step 2 is estimating to form one first electrode 52,525 respectively on luminous zone 65 and the substrate hole 55, as shown in figure 20;
Step 3 is utilized shade cover plate 59 to be chosen on first electrode 52,525 respectively evaporation respectively and is formed one and include an organic emission layer at least and the corresponding organic layer 53,535 that can send ruddiness (R), green glow (G) or blue light (B) individually, as shown in figure 21;
Step 4 forms one second electrode 54,545, as shown in figure 22 on all organic layers 53,535;
Step 5 form an insulated enclosure layer 56 with topped first electrode 52, organic layer 53 and second electrode 54, and this insulated enclosure layer 56 can be made by the metal material that can operate, as shown in figure 23 under vacuum environment.
In this embodiment, have complete first electrode 525, organic layer 535 and second electrode 545 in its substrate hole 55 equally, so when electric current passes through, but it is projection source still, so in whole organic electronic substrate, can effectively utilize all projection areas, bring into play its projection source effect ultimate attainment, and do not have the luminous dead angle of traditional interlayer dielectric.Certainly, as previous embodiment, the top layer that the degree of depth of its substrate hole 55 must be deeper than its second electrode 545 still is lower than first electrode, the 52 bottom aspects that are present on the expectation luminous zone 65, so can carry out the isolated effect of its insulation.
See also the structure sectional view of further embodiment of this invention shown in Figure 24 again; As shown in the figure, in this embodiment, it is identical that the width of its substrate hole 55 is designed to lose the width that is set as with desiring luminous zone 65, form so thereon after one first electrode 525, organic layer 535 and second electrode 545, the light source of its projection no longer is the auxiliary effect that strengthens, but it is identical with the location of desiring luminous zone 65 designed projection sources, so can cook up its projection source different, by this and luminous efficiency that can more effective raising organic electroluminescent device with the organic layer 53 of contiguous desire luminous zone 65, both sides.
At last, see also another embodiment of the present invention structure schematic cross-section shown in Figure 25; As shown in the figure, in this embodiment, with previous insulated enclosure layer 56 with a diaphragm 70 directly across being formed on second electrode, 54 surfaces, can reach the effect of isolated protection organic layer 53 equally.Because the substrate 51 and first electrode 52 are to make with transparent material respectively; so its transmitting illuminant is to see through first electrode 52 and substrate 51 projection demonstrations from organic layer 53 basically; so on diaphragm 70 (or insulated enclosure layer 56), can form a reflective film 72 again, to strengthen the intensity of its projection source.
Certainly; second electrode 54 of the present invention, organic layer 53, and diaphragm 70 (or insulated enclosure layer 56) also can select transparent unlike material to make respectively; the projection source that its organic layer 53 like this is sent also can see through second electrode 54 and diaphragm 70 (or insulated enclosure layer 56) throw away; so use category with the selection that increases organic electroluminescent device; so its substrate 51 and first electrode 52 are not must be made with transparent material; and when it if when making with nontransparent material, but its substrate 51 bottoms also can form the reflective film 74 of a reflection source.
In sum, the present invention is a kind of organic electroluminescent device that can be used as the display floater main element and preparation method thereof, not only can guarantee the accuracy when forming the organic layer and second electrode, and can simplify and make flow process and can enlarge its effective luminous active area.
Claims (23)
1, a kind of organic electroluminescent device is characterized in that: it is mainly constructed and includes: a substrate, and the appropriate location erosion of this substrate is provided with several substrate holes, estimates the luminous zone and form one in twos between the substrate hole naturally; One is formed at first electrode on this expectation luminous zone respectively; Several can be formed at the organic layer on corresponding first electrode individually; And second electrode that is formed at respectively on this organic layer.
2, organic electroluminescent device as claimed in claim 1 is characterized in that: wherein the degree of depth of this substrate hole will be deeper than the first electrode bottom position that is formed on this expectation luminous zone.
3, organic electroluminescent device as claimed in claim 1 is characterized in that: also including one can topped first electrode, the insulated enclosure layer of organic layer and second electrode.
4, organic electroluminescent device as claimed in claim 1 is characterized in that: also include a diaphragm that can be formed on this second electroplax.
5, organic electroluminescent device as claimed in claim 4 is characterized in that: also include a reflective film that can be formed on this diaphragm.
6, organic electroluminescent device as claimed in claim 1 is characterized in that: also include a reflective film that can be formed at this substrate bottom.
7, organic electroluminescent device as claimed in claim 1 is characterized in that: wherein these several organic layers include the organic layer that can throw blue light, the organic layer of green glow and the organic layer of ruddiness at least.
8, organic electroluminescent device as claimed in claim 1 is characterized in that: wherein these several organic layers all are to be made by the organic layer material that can launch single colored light.
9, organic electroluminescent device as claimed in claim 1 is characterized in that: wherein this organic layer also can include the side overcoat of topped this first electrode side.
10, organic electroluminescent device as claimed in claim 1 is characterized in that: wherein the width of this substrate hole is identical with the expectation luminous zone.
11, organic electroluminescent device as claimed in claim 10 is characterized in that: wherein also can be formed with this first electrode, organic layer and second electrode in regular turn in this substrate hole.
12, organic electroluminescent device as claimed in claim 1 is characterized in that: also can be from the organic electroluminescent device of each substrate hole cutting with the launched single colored light that forms several separate single.
13, a kind of manufacture method of organic electroluminescent device is characterized in that: its key step includes: a. forms one first electrode layer on a substrate; B. utilize stamp and etching technique on first electrode, to select the appropriate location erosion to be provided with several and penetrate first electrode and go deep into the substrate hole of base in pulling, and formation one expectation luminous zone naturally between the substrate hole in twos; C. utilize the shade cover plate to be chosen in respectively that evaporation forms a corresponding organic layer on first electrode; D. on organic layer, form one second electrode.
14, organic electroluminescent device manufacture method as claimed in claim 13 is characterized in that: also can include the following step after step e: form an insulated enclosure layer with topped first electrode, organic layer and second electrode.
15, organic electroluminescent device manufacture method as claimed in claim 13 is characterized in that: also can include the following step after step e: cut organic electroluminescent device with the launched single colored light that forms several separate single from each substrate hole.
16, organic electroluminescent device manufacture method as claimed in claim 13 is characterized in that: also can include the following step after step e: form a diaphragm on second electrode.
17, organic electroluminescent device manufacture method as claimed in claim 13 is characterized in that: also can include the following step after step e: form a reflective film at the substrate bottom.
18, organic electroluminescent device manufacture method as claimed in claim 13 is characterized in that: wherein also can utilize among this step c the oblique evaporation mode with form one can the topped first electrode side organic side overcoat.
19, a kind of manufacture method of organic electroluminescent device, it is characterized in that: its key step includes, and: a. utilizes etching technique to select appropriate location erosion to be provided with several on a substrate to go deep into substrate hole in the substrate, and forms an expectation luminous zone in twos between the substrate hole naturally; B. on substrate hole and expectation luminous zone, form one first electrode; C. utilize the shade cover plate to be chosen in respectively and form a corresponding organic layer on first electrode; D. on organic layer, form one second electrode.
20, organic electroluminescent device manufacture method as claimed in claim 19 is characterized in that: also can include the following step after steps d: form an insulated enclosure layer with topped first electrode, organic layer, and second electrode.
21, organic electroluminescent device manufacture method as claimed in claim 19 is characterized in that: also can include the following step after steps d: cut organic electroluminescent device with the launched single colored light that forms several separate single from each substrate hole.
22, organic electroluminescent device manufacture method as claimed in claim 19 is characterized in that: also can include the following step after steps d: form a diaphragm on second electrode.
23, organic electroluminescent device manufacture method as claimed in claim 19 is characterized in that: wherein formed substrate hole width is identical with expectation luminous zone width among this step a.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN99119610A CN1082782C (en) | 1999-09-21 | 1999-09-21 | Organic electronic light emitting element and its making process |
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| Application Number | Priority Date | Filing Date | Title |
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| CN99119610A CN1082782C (en) | 1999-09-21 | 1999-09-21 | Organic electronic light emitting element and its making process |
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| CN1289224A CN1289224A (en) | 2001-03-28 |
| CN1082782C true CN1082782C (en) | 2002-04-10 |
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| CN99119610A Expired - Fee Related CN1082782C (en) | 1999-09-21 | 1999-09-21 | Organic electronic light emitting element and its making process |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5550066A (en) * | 1994-12-14 | 1996-08-27 | Eastman Kodak Company | Method of fabricating a TFT-EL pixel |
| US5656508A (en) * | 1995-03-22 | 1997-08-12 | Motorola | Method of making two dimensional organic light emitting diode array for high density information image manifestation apparatus |
| EP0831676A2 (en) * | 1996-09-21 | 1998-03-25 | Philips Patentverwaltung GmbH | Organic electroluminescent element with exciplex |
| JPH10149879A (en) * | 1996-11-20 | 1998-06-02 | Hokuriku Electric Ind Co Ltd | Substrate structure for organic el element and its forming method |
| EP0851714A2 (en) * | 1996-12-23 | 1998-07-01 | Samsung Display Devices Co., Ltd. | Donor film for organic thin film of organic electroluminescence device, and method for manufacturing organic electroluminescence device using the same |
-
1999
- 1999-09-21 CN CN99119610A patent/CN1082782C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5550066A (en) * | 1994-12-14 | 1996-08-27 | Eastman Kodak Company | Method of fabricating a TFT-EL pixel |
| US5656508A (en) * | 1995-03-22 | 1997-08-12 | Motorola | Method of making two dimensional organic light emitting diode array for high density information image manifestation apparatus |
| EP0831676A2 (en) * | 1996-09-21 | 1998-03-25 | Philips Patentverwaltung GmbH | Organic electroluminescent element with exciplex |
| JPH10149879A (en) * | 1996-11-20 | 1998-06-02 | Hokuriku Electric Ind Co Ltd | Substrate structure for organic el element and its forming method |
| EP0851714A2 (en) * | 1996-12-23 | 1998-07-01 | Samsung Display Devices Co., Ltd. | Donor film for organic thin film of organic electroluminescence device, and method for manufacturing organic electroluminescence device using the same |
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| CN1289224A (en) | 2001-03-28 |
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