CN105699980A - High-precision laser range unit and measurement method - Google Patents
High-precision laser range unit and measurement method Download PDFInfo
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- CN105699980A CN105699980A CN201610221712.5A CN201610221712A CN105699980A CN 105699980 A CN105699980 A CN 105699980A CN 201610221712 A CN201610221712 A CN 201610221712A CN 105699980 A CN105699980 A CN 105699980A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
Abstract
The invention discloses a high-precision laser range unit and measurement method. The high-precision laser range unit includes a laser, an optical fiber isolator, an optical fiber light splitter, an optical fiber polarized light splitter, a polarization modulator, a square wave sweep frequency signal source, an optical fiber coupler and a reflector. According to the invention, a problem that the range precision is difficult to improve due to low phase discrimination precision in a traditional phase telemetry method is solved and problems of complex optical paths, comparatively small modulation band width and limited range field in spatial light polarization modulation range are also solved. According to the invention, the measurement device is simplified and the measurement precision and the stability of a measurement system are improved.
Description
Technical field
The present invention relates to technical field of optical detection, particularly relate to a kind of high frequency polarization based on optic fibre light path waveguide and modulate range unit and measuring method。
Background technology
The absolute precise distance measurement in large scale space is an important key technology in Chinese large-sized equipment manufacturing。Traditional absolute distance measurement method includes pulse time-of-flight method, phase ranging method, multi-wavelength interference method, Continuous Wave with frequency modulation measurement method etc.。But, the certainty of measurement of pulse time-of-flight method and phase ranging method cannot meet the required precision of precise distance measurement；Multi-wavelength interference method and FM-CW laser ranging method are significantly high to the stability requirement measuring light, and anti-interference is poor, it is impossible to meet the demand that industry spot is measured。
The phase information of outgoing wave and echo is converted into intensity signal by the distance-finding method based on Feisuo gear light-metering speed that Lycra company of Switzerland proposes, and finds the modulating frequency of zero phase error point, finally resolves range information, and this distance-finding method has higher certainty of measurement。But the collimation of light in space optical path is had high requirement by this method, and spatial light modulator used is driven the restriction of voltage and modulation bandwidth, and stability is relatively low so that measurement scope is restricted。
Summary of the invention
In view of this, it is an object of the invention to propose a kind of high-precision laser range-finding device and measuring method, to solve the problem that in conventional phase telemetry, precision of phase discrimination is low, thus improving certainty of measurement and the stability of the system of measurement。
Based on above-mentioned purpose, the invention provides a kind of range unit, including the laser instrument set gradually from left to right, fibre optic isolater, optical fiber beam splitter, optical fiber polarisation beam splitter, light polarization modulator, square wave swept signal source, fiber coupler and reflecting mirror。
In some embodiments of the invention, described laser instrument is used for sending P molded line polarisation, described fibre optic isolater is used for isolating backward P molded line polarisation, forward direction P molded line polarisation is made to transmit to optical fiber beam splitter, described optical fiber beam splitter is as energy beam splitter, for by P molded line polarisation transmission to optical fiber polarisation beam splitter, described optical fiber polarisation beam splitter is for by P molded line polarisation transmission to light polarization modulator, being simultaneously used for transmitting to described optical fiber beam splitter the P molded line polarisation returned。
In some embodiments of the invention, described light polarization modulator is for changing the polarization state of light, form P type and S type polarized light periodically alternately, transmit light to fiber coupler simultaneously, described fiber coupler is used for transmitting light to reflecting mirror, described reflecting mirror is for by luminous reflectance to described fiber coupler, and described fiber coupler is used for transmitting light to light polarization modulator；
Described square wave swept signal source is for applying alternate level signal to described light polarization modulator。
In some embodiments of the invention, described light polarization modulator is waveguide type manipulator, and the driving voltage that described square wave swept signal source produces reaches the half-wave voltage of light polarization modulator。
Alternatively, described reflecting mirror can be the prism of corner cube of metal coating, and described metal can be the metals such as platinum, chromium, rhodium or iridium, to realize polarized light polarization maintenance before and after reflection。
In some embodiments of the invention, described range unit also includes optical fiber quarter wave plate, and described optical fiber quarter wave plate is between optical fiber polarisation beam splitter, light polarization modulator, for emergent ray polarized light is changed into circularly polarized light。Produce the left-handed circularly polarized light replaced with dextrorotation after being modulated device modulation to propagate in an atmosphere, and the backward circular polarization after being modulated device secondary modulation is reduced to line polarized light。It is little compared with line polarized light that circularly polarized light is subject to atmospheric effect, thus is more beneficial for improving range accuracy。
In some embodiments of the invention, described range unit also includes the first photodetector and the second photodetector, described first photodetector is for receiving the photoelectric signal that optical fiber polarisation beam splitter transmits, and described second photodetector is for receiving the photoelectric signal that optical fiber beam splitter transmits。
In some embodiments of the invention, described range unit also includes measure-controlling unit, for processing the voltage signal of the first photodetector, the second photodetector output；Square wave swept signal source is carried out frequency sweep control simultaneously, and frequency acquisition value carries out the resolving of testing distance。
In some embodiments of the invention, described testing distance
Wherein, C is the light velocity；
f1It is the first photodetector output low level, modulating frequency during the second photodetector output high level；
f2For based on the first photodetector output low level, second photodetector output high level, after modulating frequency is carried out unidirectional frequency sweep by continuation, the pulse signal pulsewidth of the second photodetector output is gradually reduced, until pulse signal disappears, voltage perseverance is zero, and the pulse signal that the first photodetector output pulse width becomes larger is until magnitude of voltage is maximum, now the second photodetector output low level, modulating frequency during the first photodetector output high level。
The present invention also provides for a kind of measuring method adopting above-mentioned range unit to carry out, and comprises the following steps:
Making the P molded line polarisation freedom of entry space that laser instrument sends return experienced light path after arriving reflecting mirror is 2D, and wherein D is testing distance；
The modulating frequency of light polarization modulator is carried out unidirectional frequency sweep, if at modulating frequency f1Lower light path 2D is the integral multiple of modulation wavelength, then the light through again modulating is all P type polarized light, the first photodetector output low level, the second photodetector output high level, then
Wherein, C is the light velocity, N1For positive integer；
Continue modulating frequency is carried out unidirectional frequency sweep, in frequency sweep, the pulse signal pulsewidth of the second photodetector output is gradually reduced, until pulse signal disappears, voltage perseverance is zero, and the pulse signal that the first photodetector output pulse width becomes larger is maximum until magnitude of voltage, now the second photodetector output low level, modulating frequency during the first photodetector output high level, now at modulating frequency f2Under, light path 2D is modulation wavelengthTimes, then,
Wherein,
Simultaneous above-mentioned two formula,
By above formula it can be seen that the certainty of measurement of tested distance D is determined by the order of magnitude and the certainty of measurement of modulating frequency f1 and f2。At present, frequency measurement accuracy is far above precision of phase discrimination, and therefore, measuring method provided by the invention can improve the certainty of measurement of tested distance D。
Can be seen that described in above, range unit based on optic fibre light path waveguide provided by the invention and measuring method, phase place zero point is found by detecting light intensity minimum, solve the problem that in conventional phase telemetry, precision of phase discrimination is low, utilize the broadband character of waveguide type manipulator simultaneously, also solving light path in the range finding of spatial light Polarization Modulation complicated, modulation bandwidth is little thus problem that finding range is limited。This invention simplifies measurement apparatus, improve certainty of measurement and the degree of stability of the system of measurement。
Accompanying drawing explanation
Fig. 1 is the structural representation of the range unit of the embodiment of the present invention；
Fig. 2 is the first time modulating wave ratio phase result with second time modulating wave of the embodiment of the present invention。
Wherein: 1-laser instrument, 2-fibre optic isolater, 3-optical fiber beam splitter, 4-optical fiber polarisation beam splitter, 5-optical fiber quarter wave plate, 6-light polarization modulator, 7-square wave swept signal source, 8-fiber coupler, 9-reflecting mirror, 10-the first photodetector, 11-the second photodetector, 12-measure-controlling unit。
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail。
It should be noted that, in inventive embodiments, the statement of all uses " first " and " second " is for the parameter of entity or the non-equal distinguishing two same names non-equal, visible " first " " second " is only for the convenience of statement, should not be construed as the restriction to inventive embodiments, this is no longer illustrated by subsequent embodiment one by one。
Referring to Fig. 1, it is the structural representation of range unit of the embodiment of the present invention。As one embodiment of the present of invention, described high frequency circular polarization modulation range unit includes laser instrument 1, fibre optic isolater 2, optical fiber beam splitter 3, optical fiber polarisation beam splitter 4, light polarization modulator 6, square wave swept signal source 7, fiber coupler 8 and reflecting mirror 9, as it is shown in figure 1, described laser instrument 1, fibre optic isolater 2, optical fiber beam splitter 3, optical fiber polarisation beam splitter 4, light polarization modulator 6, square wave swept signal source 7, fiber coupler 8 and reflecting mirror 9 set gradually from left to right。
Described laser instrument 1 is used for sending P molded line polarisation, and described fibre optic isolater 2 is used for isolating backward P molded line polarisation, it is to avoid laser instrument 1 is produced damage, makes forward direction P molded line polarisation transmit to optical fiber beam splitter 3 simultaneously。Light echo, as energy beam splitter, for transmitting P molded line polarisation to optical fiber polarisation beam splitter 4, is introduced the second photodetector 11 by described optical fiber beam splitter 3 simultaneously。Described optical fiber polarisation beam splitter 4 is for by P molded line polarisation transmission to light polarization modulator 6, being simultaneously used for transmitting the P molded line polarisation of return to optical fiber beam splitter 3 and S molded line polarisation being introduced the first photodetector 10。
Described light polarization modulator 6 is for changing the polarization state of light, form P type and S type polarized light periodically alternately, transmit light to fiber coupler 8 simultaneously, described fiber coupler 8 is used for transmitting light to reflecting mirror 9, described reflecting mirror 9 is for by luminous reflectance to described fiber coupler 8, and described fiber coupler 8 is used for transmitting light to light polarization modulator 6。Alternatively, described reflecting mirror 9 can be the prism of corner cube of metal coating, and described metal can be the metals such as platinum, chromium, rhodium or iridium, to realize polarized light polarization maintenance before and after reflection。
Described square wave swept signal source 7 is for applying alternate level signal to light polarization modulator 6, namely the alternate level signal that light polarization modulator 6 is produced by square wave swept signal source 7 drives, and the driving voltage that square wave swept signal source 7 produces must reach the half-wave voltage of light polarization modulator 6。
Preferably, described light polarization modulator 6 is waveguide type manipulator, and half-wave voltage is little, will not produce too big power。In a preferred embodiment of the present invention, described range unit also includes optical fiber quarter wave plate 5, described optical fiber quarter wave plate 5 is between optical fiber polarisation beam splitter 4, light polarization modulator 6, for line polarized light being changed into circularly polarized light (changing into circularly polarized light by P molded line polarized light), it is little compared with line polarized light that circularly polarized light receives atmospheric effect, thus is more beneficial for improving range accuracy。
Preferably, described range unit may further include the first photodetector 10 and the second photodetector 11, light echo is introduced the second photodetector 11 by described optical fiber beam splitter 3 simultaneously, described second photodetector 11 is then for receiving the photovoltage that optical fiber beam splitter 3 transmits, S molded line polarisation is introduced the first photodetector 10 by described optical fiber polarisation beam splitter 4 simultaneously, and described first photodetector 10 is for receiving the photoelectric signal that optical fiber polarisation beam splitter 4 transmits。Preferably, described first photodetector 10 and the second photodetector 11 performance are just the same, can be high-speed photodetector。
In a preferred embodiment of the present invention, described range unit also includes measure-controlling unit 12, and described measure-controlling unit 12 is for processing the voltage signal of first photodetector the 10, second photodetector 11 output, to carry out the phase place comparison of round-trip wave；Signal source 7 is carried out frequency sweep control simultaneously, and frequency acquisition value carries out the resolving of testing distance。
Visible, after laser instrument sends P molded line polarisation, P molded line polarisation passes sequentially through fibre optic isolater 2, optical fiber beam splitter 3, optical fiber polarisation beam splitter 4 and optical fiber quarter wave plate 5, and from the light of reflecting mirror 9 reflection, only exist P molded line polarized light (S type polarized light is separated by optical fiber polarisation beam splitter 4) from optical fiber polarisation beam splitter 4-optical fiber this light path of beam splitter 3-fibre optic isolater 2, and detected by the second photodetector 11。
It should be noted that, light polarization modulator 6 make use of the electric birefringence effect of its birefringece crystal, only when high level, light polarization modulator 6 just can work, change its polarization state, therefore applying square wave swept-frequency signal is the modulating wave in order to produce alternate polarization, changes modulating frequency simultaneously and can change modulating wave wavelength。
Described square wave swept signal source 7 and light polarization modulator 6 combination form a photoswitch, light polarization modulator 6 applies the continuously adjustable square-wave signal of frequency, when the level applied is high level, the 90 degree of deflections of P molded line polarized light generation entering light polarization modulator 6 (first time modulation) form S molded line polarized light, otherwise do not deflect。The light modulated comes and goes and again passes by light polarization modulator 6 (second time modulation) after entering space optical path, if now modulation level is still high level, then polarization state deflects again, S molded line polarized light becomes P molded line polarized light, fiber optic splitter 3 beam splitting is entered all through beam splitter 4, received by the second detector 11 after beam splitting, the high level of the second detector 11 output, the first photodetector 10 output low level。Now testing distance D is the integral multiple of modulation half-wavelength。Unidirectional continuously adjust modulating frequency, modulation half-wavelength when two photovoltages of continuous print are zero can be obtained, and then testing distance can be calculated。
Utilizing the purpose that round-trip wave is carried out secondary modulation by light polarization modulator is than phase by first time modulating wave and second time modulating wave, than phase result as in figure 2 it is shown, point three kinds of states:
1) twice modulating wave same phase, be equivalent to first time when the S molded line polarized light that light polarization modulator 6 modulation produces returns by light polarization modulator 6 perfect restitution, close echo exports P molded line polarized light completely from optical fiber polarisation beam splitter 4, first photodetector 10 output low level, the second photodetector 11 exports high level；
2) during the complete antiphase of twice modulating wave, be equivalent to P molded line polarized light second time not modulated when light polarization modulator 6 for the first time also modulated when light polarization modulator 6, close echo exports S molded line polarized light completely from optical fiber polarisation beam splitter 4, second photodetector 11 output low level, the first photodetector 10 exports high level；
3) neither same phase neither antiphase time, the first photodetector 10 and the second photodetector 11 all there will be recurrent pulses ripple, now need continue frequency modulation rate, so as to above-mentioned two situations occur。
By the first state and the second state computation, described testing distance D,
Wherein, C is the light velocity；
f1It is the first photodetector output low level, modulating frequency during the second photodetector output high level；
f2For based on the first photodetector output low level, second photodetector output high level, after modulating frequency is carried out unidirectional frequency sweep by continuation, the pulse signal pulsewidth of the second photodetector output is gradually reduced, until pulse signal disappears, voltage perseverance is zero, and the pulse signal that the first photodetector output pulse width becomes larger is until magnitude of voltage is maximum, now the second photodetector output low level, modulating frequency during the first photodetector output high level。
The present invention also provides for a kind of measuring method based on above-mentioned range unit, including:
Making the P molded line polarisation freedom of entry space that laser instrument 1 sends return experienced light path after arriving reflecting mirror 9 is 2D, and wherein D is testing distance；
The modulating frequency of light polarization modulator 6 is carried out unidirectional frequency sweep, if at modulating frequency f1Lower light path 2D is the integral multiple of modulation wavelength, then the light through again modulating is all P type polarized light, and the magnitude of voltage of detector output is in the first state, i.e. the first photodetector 10 output low level, the second photodetector 11 exports high level, then
Wherein, C is the light velocity, N1For positive integer；
Continue modulating frequency is carried out unidirectional frequency sweep, in frequency sweep, the pulse signal pulsewidth of the second photodetector output is gradually reduced, until pulse signal disappears, voltage perseverance is zero, and the pulse signal that the first photodetector output pulse width becomes larger is until magnitude of voltage is maximum, the voltage of detector output is in the second state, i.e. the second photodetector 11 output low level, the first photodetector 10 exports high level, now at modulating frequency f2Under, light path 2D is modulation wavelengthTimes, π phase place that namely emergent light is just poor with return light, now,
Wherein,
Simultaneous (1) (2) two formula, can obtain
Calculate testing distance D。
Specific embodiment: structure as shown in Figure 1, light source selects the linear polarization type laser instrument of wavelength 1550nm, and polarization ratio is 500:1。Fiber optic splitter 3 selects energy type fiber optic splitter, and splitting ratio is 1:20, and fiber optic splitter 4 selects polarization-type beam splitter, is individually separated S light and P light。The polarization switch that light polarization modulator 6 selects bandwidth to be DC-12GHz, half-wave voltage is 7V。The InGaAs type PIN light sensitive diode of look-in frequency 40GHz selected by first photodetector the 10, second photodetector 11, and its rise time is 7ps。
Opening laser instrument 1 and light polarization modulator 6, make square wave swept signal source 7 produce continuous print frequency sweep square-wave signal, signal amplitude is 7V。Reading first photodetector the 10, second photodetector 11 respectively and export signal, find in frequency sweep process, two detectors successively obtain the frequency values f under light intensity minimum continuously1And f2, calculate testing distance D by (3) formula。
If it is preferred that background noise can rationally be eliminated, and sweeping steps and frequency-measurement accuracy reach Hz rank, then range accuracy is up to sub-μm level。
As can be seen here, compared to prior art, the method have the advantages that
1, optic fibre light path is utilized to simplify range-measurement system, it is to avoid when utilizing spatial light Polarization Modulation, the additional polarization that light polarization modulator is produced by beam divergence angle, also can avoid the high variations in refractive index driving power to cause, thus improving the stability of certainty of measurement and system；
2, utilize the ultra-wide modulation bandwidth of waveguide type manipulator, the meter level finding range to km level can be obtained；
3, utilize optical fiber quarter wave plate, produce the circularly polarized light less by atmospheric effect, the range accuracy of remote range finding can be improved；
4, high frequency modulated reduces range ambiguity scope, improves range accuracy；
5, utilize double detector to detect simultaneously, reduce swept frequency range, improve measuring speed；
6, device has design succinctly, simple in construction, the advantages such as certainty of measurement is high, with low cost, it is adaptable to the large scale high-acruracy survey of industrial occasions。
Those of ordinary skill in the field are it is understood that the discussion of any of the above embodiment is exemplary only, it is not intended that hint the scope of the present disclosure (including claim) is limited to these examples；Under the thinking of the present invention, can also be combined between technical characteristic in above example or different embodiment, step can realize with random order, and there are other changes many of the different aspect of the present invention as above, for they not offers in details simple and clear。Therefore, all within the spirit and principles in the present invention, any omission of making, amendment, equivalent replacement, improvement etc., should be included within protection scope of the present invention。
Claims (9)
1. a high-precision laser range-finding device, it is characterised in that include the laser instrument, fibre optic isolater, optical fiber beam splitter, optical fiber polarisation beam splitter, light polarization modulator, square wave swept signal source, fiber coupler and the reflecting mirror that set gradually from left to right。
2. high-precision laser range-finding device according to claim 1, it is characterized in that, described laser instrument is used for sending P molded line polarisation, described fibre optic isolater is used for isolating backward P molded line polarisation, forward direction P molded line polarisation is made to transmit to optical fiber beam splitter, described optical fiber beam splitter is as energy beam splitter, for by P molded line polarisation transmission to optical fiber polarisation beam splitter, described optical fiber polarisation beam splitter is for by P molded line polarisation transmission to light polarization modulator, being simultaneously used for the P molded line polarisation transmission extremely described optical fiber beam splitter that will return。
3. high-precision laser range-finding device according to claim 1, it is characterized in that, described light polarization modulator is for changing the polarization state of light, form P type and S type polarized light periodically alternately, transmit light to fiber coupler simultaneously, described fiber coupler is used for transmitting light to reflecting mirror, and described reflecting mirror is for by luminous reflectance to described fiber coupler, and described fiber coupler is used for transmitting light to light polarization modulator；
Described square wave swept signal source is for applying alternate level signal to described light polarization modulator。
4. high-precision laser range-finding device according to claim 3, it is characterised in that described light polarization modulator is waveguide type manipulator, the driving voltage that described square wave swept signal source produces reaches the half-wave voltage of light polarization modulator。
5. high-precision laser range-finding device according to claim 1, it is characterised in that also include optical fiber quarter wave plate, described optical fiber quarter wave plate is between optical fiber polarisation beam splitter, light polarization modulator, for line polarized light is changed into circularly polarized light。
6. high-precision laser range-finding device according to claim 1, it is characterized in that, also include the first photodetector and the second photodetector, described first photodetector is for receiving the photoelectric signal that optical fiber polarisation beam splitter transmits, and described second photodetector is for receiving the photoelectric signal that optical fiber beam splitter transmits。
7. high-precision laser range-finding device according to claim 1, it is characterised in that also include measure-controlling unit, for processing the voltage signal of the first photodetector, the second photodetector output；Square wave swept signal source is carried out frequency sweep control simultaneously, and frequency acquisition value carries out the resolving of testing distance。
8. high-precision laser range-finding device according to claim 7, it is characterised in that described testing distance
Wherein, C is the light velocity；
f1It is the first photodetector output low level, modulating frequency during the second photodetector output high level；
f2For based on the first photodetector output low level, second photodetector output high level, after modulating frequency is carried out unidirectional frequency sweep by continuation, the pulse signal pulsewidth of the second photodetector output is gradually reduced, until pulse signal disappears, voltage perseverance is zero, and the pulse signal that the first photodetector output pulse width becomes larger is until magnitude of voltage is maximum, now the second photodetector output low level, modulating frequency during the first photodetector output high level。
9. the measuring method according to any one in claim 1～8, it is characterised in that comprise the following steps:
Making the P molded line polarisation freedom of entry space that laser instrument sends return experienced light path after arriving reflecting mirror is 2D, and wherein D is testing distance；
The modulating frequency of light polarization modulator is carried out unidirectional frequency sweep, if at modulating frequency f1Lower light path 2D is the integral multiple of modulation wavelength, then the light through again modulating is all P type polarized light, the first photodetector output low level, the second photodetector output high level, then
Wherein, C is the light velocity, N1For positive integer；
Continue modulating frequency is carried out unidirectional frequency sweep, in frequency sweep, the pulse signal pulsewidth of the second photodetector output is gradually reduced, until pulse signal disappears, voltage perseverance is zero, and the pulse signal that the first photodetector output pulse width becomes larger is maximum until magnitude of voltage, the second photodetector output low level, first photodetector output high level, now at modulating frequency f2Under, light path 2D is modulation wavelengthTimes, then,
Wherein,
Simultaneous above-mentioned two formula,
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| CN105699980B (en) | 2017-11-28 |
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Inventor after: Gao Shuyuan Inventor after: Wang Guoming Inventor after: Wang Yanqing Inventor after: Cheng Zhi Inventor after: Ji Rongdai Inventor after: Zhou Weihu Inventor after: Dong Dengfeng Inventor after: Lao Dabao Inventor after: Zhang Zili Inventor after: Yuan Jiang Inventor after: Shi Junkai Inventor after: Liu Xin Inventor before: Ji Rongdai Inventor before: Wang Guoming Inventor before: Wang Yanqing Inventor before: Cheng Zhi Inventor before: Gao Shuyuan Inventor before: Zhou Weihu Inventor before: Dong Dengfeng Inventor before: Lao Dabao Inventor before: Zhang Zili Inventor before: Yuan Jiang Inventor before: Shi Junkai Inventor before: Liu Xin |
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Effective date of registration: 20200819 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences Effective date of registration: 20200819 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 100094, No. 9 Deng Nan Road, Beijing, Haidian District Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |