CN105078419A - Flexible liquid crystal temperature sensor and manufacturing method of flexible liquid crystal temperature sensor - Google Patents
Flexible liquid crystal temperature sensor and manufacturing method of flexible liquid crystal temperature sensor Download PDFInfo
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- CN105078419A CN105078419A CN201510575522.9A CN201510575522A CN105078419A CN 105078419 A CN105078419 A CN 105078419A CN 201510575522 A CN201510575522 A CN 201510575522A CN 105078419 A CN105078419 A CN 105078419A
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Abstract
The invention discloses a flexible liquid crystal temperature sensor and a manufacturing method of the flexible liquid crystal temperature sensor, wherein the flexible liquid crystal temperature sensor comprises an absorption layer (1a), a thermal change liquid crystal array (1b), an elastomer material layer (1c) and a resistance heating layer (1d), wherein the thermal change liquid crystal array (1b) is positioned at one side of the absorption layer; the elastomer material layer (1c) covers the thermal change crystal array; and the resistance heating layer (1d) is positioned at the other side of the absorption layer. The flexible liquid crystal temperature sensor has the advantages of high precision, low cost, good ventilation performance, thin thickness and the like, cannot be closely attached to the skin, and cannot cause water content increase or temperature rise of the skin under the condition of long use time. In addition, the data collection of the flexible liquid crystal temperature sensor is simple; the temperature distribution of the skin can be fast measured and drawn; and the heating effect can be achieved through a dismountable battery, so that the water content of the skin can be calculated according to the heat conductivity of the skin.
Description
Technical field
The invention belongs to medical diagnosis/evaluation apparatus, particularly a kind of flexible liquid crystal temperature sensor and preparation method thereof.
Background technology
The Temperature Distribution of human body has certain stability and characteristic, and the temperature at each position of body is different, forms different thermal fields.When human body blood supply organ, when integumentary musculature tissue or blood vessel generation disease or changing function, the blood flow of blood vessel can change, and causes the change of near vessels local skin temperature.And integumentary musculature tissue occurs that the situation of wound and inflammation also can cause the change of temperature.According to this principle, technical staff devises the multiple sensor can measuring skin temperature, and such as thermal infrared imager, flexible electronic skin etc., infer and monitor source and the process of pathological changes with this
The precision of thermal infrared imager is higher, but its cost is also very high, is difficult in clinical and daily life extensive use.The structure of flexible electronic skin has various ways, and common comprises metal thin film resistor array temperature sensors.Metal thin film resistor temperature sensor needs to be connected for source circuit with outside and fine measuring instrument carries out data analysis, and be unsuitable for routine use, and its device area and density cannot reach higher spatial resolution to temperature mapping by traditional light section technical limitations.And the structure of existing thermo-color liquid crystal adhesive cover products mainly comprises seven layers, comprise polyester layer, printing type face layer, thermo-color liquid crystal layer, absorbed layer, cohesive material basal layer and paper carrier layer.In use, be attached to skin surface and measure, visually liquid crystal color present position judges temperature height.Because its thickness is 75 ~ 125 microns, permeability is poor, easily cause the gathering of heat and moisture, thus precision is poor, and accuracy is only 0.6 DEG C.Meanwhile, its mechanical property is poor, can only realize certain flexible and can only be used in more flat skin as positions such as foreheads, is then not suitable for using in a lot of joint of human body or surface location.
Summary of the invention
Goal of the invention a: object is to provide a kind of flexible liquid crystal temperature sensor, to solve at least one problem that prior art exists.Further object is to provide a kind of method making above-mentioned flexible liquid crystal temperature sensor.
Technical scheme: a kind of flexible liquid crystal temperature sensor, the layer of elastomer material comprising absorbed layer, be positioned at the thermal change liquid crystal array of described absorbed layer side, cover described thermal change liquid crystal array, and be positioned at the resistance heating layer of absorbed layer opposite side.
In a further embodiment, described absorbed layer is the elastomeric material being mixed with black oxidation iron powder, and elastomeric material comprises polydimethylsiloxane.Described resistance heating layer comprises serpentine resistive heater and snakelike wire.The thickness of described absorbed layer is 20 microns, and the height of described thermal change liquid crystal array is 25 microns, and described layer of elastomer material is 30 microns.
In other embodiments, described flexible liquid crystal temperature sensor also comprises adhesion body, and described adhesion body has a hollow-out parts, and described flexible liquid crystal temperature sensor is positioned at described hollow-out parts, and the edge of flexible liquid crystal temperature sensor is fixedly connected with adhesion body.
Further, the invention also discloses a kind of manufacture method of flexible liquid crystal temperature sensor, comprise the steps:
Step 1, elastomeric material to be mixed with black oxidation iron powder, with sol evenning machine painting black absorbed layer drying on loading plate;
Step 2, dip in upper thermal change liquid-crystal ink liquid with the seal with columnar arrays and air-dry,
Step 3, use Thermal release gluing liquid crystal array, and be affixed on the one side of described black absorbing layer, raised temperature, make Thermal release glue depart from liquid crystal array, with sol evenning machine in liquid crystal array side spin coating one deck layer of elastomer material;
Step 4, prepare radio zone of heating, and transfer them to the another side of black absorbing layer.
In a further embodiment, the detailed process preparing radio zone of heating in described step 4 is:
Step 41, use sol evenning machine, at silicon chip surface spin coating one deck polymethyl methacrylate, are dried, and continue spin coating one deck polyimides, dry;
Step 42, evaporation titanium and gold, utilize photoetching development and wet etching method to obtain serpentine resistive heater;
Step 43, evaporation titanium/copper/titanium/gold, utilizes photoetching development and wet etching method to obtain snakelike wire and can the electrode of welding circuit;
Step 44, spin coating one deck polyimides, dry, and utilizes photoetching development and wet etching method by whole device package, obtain by the resistance heater of polyimides coated metal line;
Step 45, dissolve polymethyl methacrylate in acetone, resistance heater is transferred to water-soluble adhesive tape, titanium and silicon dioxide on evaporation.
In step 41, the thickness of polymethyl methacrylate is 100 nanometers, in step 42, the thickness of titanium and gold is respectively 5 nanometers and 50 nanometers, in step 43, the thickness of titanium/copper/titanium/gold is respectively 10 nanometers, 500 nanometers, 10 nanometers and 20 nanometers, in step 45, the thickness of titanium and silicon dioxide is respectively 5 nanometers and 30 nanometers.The resistance of described serpentine resistive heater is 800 ~ 1200 ohm.
Implement the present invention and there is following beneficial effect: the present invention has that precision is high, cost is low, good permeability and the advantage such as thickness is thin, skin can be close to, can be used for the skin surface that curvature is higher, and in use between longer when can not cause moisture content of skin increase and temperature accumulation.In addition, data acquisition of the present invention is simple, can the Temperature Distribution of mapping skin fast; In case of need, by connecting detachable battery, resistor is heated, thus calculate the water content of skin according to skin thermal conductivity; Also can resistor be placed in above blood vessel, after the heating near vessels skin heat dissipating be carried out analyzing and infer blood flow rate and direction.
This product can be applicable to the monitoring of body temperature in medical industry daily life and moisture content of skin, also can be used as the locating injection in hospital environment, especial patient (as blocked up in subcutaneous fat etc.) being carried out to arterial-venous, or block return time test carry out assist physician to the diagnosis of heart of patient working condition and analyze the character such as vascular flow direction and speed by carrying out arteries blood.
Accompanying drawing explanation
Fig. 1 a and Fig. 1 b is the structural representation of flexible liquid crystal temperature sensor of the present invention.
Fig. 2 a to 2d is practical work process of the present invention and effect schematic diagram.
Fig. 3 is the structural representation of resistor of the present invention.
Detailed description of the invention
As shown in Figure 1a, flexible liquid crystal temperature sensor of the present invention, the layer of elastomer material 1c of the thermal change liquid crystal array that mainly comprises absorbed layer 1a, is positioned at the thermal change liquid crystal array 1b of absorbed layer side, covers, and be positioned at the resistance heating layer 1d of absorbed layer opposite side.
In use, thermal change liquid crystal array shows different colors at different temperature (33-38 DEG C), utilizes computer acquisition color data, and by the date comprision in itself and data base, can obtain temperature data.This embodiment is compared with the prior art, and its number of plies obviously reduces, and selected backing material mechanical property is obviously more excellent, therefore product can be done thinner more soft.Product is thinner, and its ability adhering to skin is better, therefore not only may be used for the use at smooth skin place, can also be used for non-smooth skin place.
Particularly, absorbed layer is the elastomeric material being mixed with black oxidation iron powder, and elastomeric material comprises polydimethylsiloxane or similar compound, specifically can determine with the parameter of material as requested.Described resistance heating layer comprises serpentine resistive heater and snakelike wire.Resistance electric heating layer is after battery-powered, and can produce heat, heat spreads from centre to surrounding, diffusion mode and skin heat conductance closely related.If used on the skin of different moisture content, then can calculate water content according to skin thermal conductivity, detailed process is hereafter describing in detail.
In the product that certain is concrete, the thickness of absorbed layer is about 20 microns, and the height of thermal change liquid crystal array is about 25 microns, and layer of elastomer material is about 30 microns.The thickness of other layers is in nanometer, and therefore the integral thickness of product is 50 microns, much smaller than the thickness of average 100 microns of existing product.Due to the change of material, its Young's modulus is reduction by more than thousand times compared with existing product, and tensility also can stretch 200% by non-stretchable rising to.
Forward Fig. 1 b to, in a further embodiment, flexible liquid crystal temperature sensor also comprises adhesion body 2, and described adhesion body 2 has a hollow-out parts, described flexible liquid crystal temperature sensor 1 is positioned at described hollow-out parts, and the edge of flexible liquid crystal temperature sensor is fixedly connected with adhesion body.Because this product is very soft ultra-thin, cause model ylid bloom action power very strong, if be used alone, then may become one by crinkle.Conveniently dress and win; original structure has added adhesion body (such as medical adhesive tape etc.); by hollow out in the middle of square medical adhesive tape; the edge of this product of softness is affixed on adhesive tape; middle hollow part is then the device being covered with liquid crystal dots; adhesive tape is protection device edge then, in use tears off adhesive tape.
The manufacture method of flexible liquid crystal temperature sensor of the present invention is described.
Step 1, elastomeric material to be mixed with black oxidation iron powder, with sol evenning machine painting black absorbed layer drying on loading plate;
Step 2, dip in upper thermal change liquid-crystal ink liquid 102 with the seal 101 with columnar arrays and air-dry,
Step 3, gluing 104 liquid crystal arrays of use Thermal release, and be affixed on the one side of described black absorbing layer, raised temperature, make Thermal release glue 104 depart from liquid crystal array, with sol evenning machine in liquid crystal array side spin coating one deck layer of elastomer material;
Step 4, prepare resistance heating layer, and transfer them to the another side of black absorbing layer.
In a further embodiment, the detailed process preparing resistance heating layer in described step 4 is:
Step 41, use sol evenning machine, at silicon chip surface spin coating one deck polymethyl methacrylate, are dried, and continue spin coating one deck polyimides, dry;
Step 42, evaporation titanium and gold, utilize photoetching development and wet etching method to obtain serpentine resistive heater;
Step 43, evaporation titanium/copper/titanium/gold, utilizes photoetching development and wet etching method to obtain snakelike wire;
Step 44, spin coating one deck polyimides, dry, and utilizes photoetching development and wet etching method by whole device package, obtain by the resistance heater of polyimides coated metal line;
Step 45, dissolve polymethyl methacrylate in acetone, resistance heater is transferred to water-soluble adhesive tape, titanium and silicon dioxide on evaporation.
In a further embodiment, in step 41, the thickness of polymethyl methacrylate is 100 nanometers, in step 42, the thickness of titanium and gold is respectively 5 nanometers and 50 nanometers, and in step 43, the thickness of titanium and copper is respectively 10 nanometers, 500 nanometers, 10 nanometers and 20 nanometers, in step 45, the thickness of titanium and silicon dioxide is respectively 5 nanometers and 30 nanometers.
In a further embodiment, the resistance of described serpentine resistive heater is 800 ~ 1200 ohm, is preferably 1000 ohm.
The design parameter of certain implementing process is as follows:
First the croci of poly-(dimethyl siloxane) Poly (dimethylsiloxane) 40:1 of mixed elastomer material and black, uses sol evenning machine on polyethylene terephthalate Poly (ethyleneterephlatate) supporting body, obtain the black absorbing layer of 20 microns and dry.
Use has the PDMS seal that rectangular cylindrical array (size of each post is 250 microns of x250 microns) area is 15 square centimeters, dips in the thermal change liquid-crystal ink of last layer or liquid and air-dry, and the thickness of the liquid crystal dots on last seal pillar is 25 microns.
Sticked up by liquid crystal array with Thermal release adhesive tape, and be attached on black absorbing layer, after temperature is elevated to 90 DEG C, Thermal release adhesive tape will automatically disengage liquid crystal array, and now liquid crystal array is transferred on black absorbing layer.Poly-(dimethyl siloxane) Poly (dimethylsiloxane) 40:1 of the elastomeric material of mixed transparent, and to be spin-coated on thickness with sol evenning machine be that the protective clear layer of 30 microns is dried on liquid crystal array surface.
The polymethyl methacrylate poly (methylmethacrylate) of one deck 100 ran is spin-coated on silicon chip surface by sol evenning machine to dry and continue spin coating one deck polyimide thin film and dry, evaporation titanium (5 nanometer) and gold (50 nanometer) on this, the serpentine resistive heater that resistance is 1000 ohms is obtained by the method for photoetching development and wet etching, evaporation titanium (20 nanometer) copper (500 nanometer) titanium (10 nanometer) gold (20 nanometer) on this also obtains the very little snakelike wire of resistance and electrode by the method for photoetching development and wet etching, last spin coating one deck polyimides polyimide dry and the method reusing photoetching development and wet etching by whole device package only exposed electrode obtain by the resistance heater of polyimides polyimide coated metal line.
Electronic device to be transferred to after water-soluble adhesive tape titanium (5 nanometer) and silicon dioxide (30 nanometer) on evaporation by dissolving polymethyl methacrylate poly (methylmethacrylate) in acetone; after activating the black absorbing layer back side by UV ozone; by electronic device firmly transfer paste at the black protective layer back side, ultrathin flexible electrode installed the electrod assembly with detachable battery electrode coupling finally by welding
Fig. 2 a to Fig. 2 d is finally described:
As shown in Fig. 2 a to Fig. 2 d, the horizontal line in figure is 1 centimetre, and this product can directly tightly be fitted in above skin, as in wrist.Fig. 2 a is static map, total 26x26 liquid crystal dots in figure, and diverse location liquid crystal dots is due to its temperature difference, and color demonstrates some difference.Extract colouring information (the HSV colour model of each liquid crystal dots, Hue tone, Saturation saturation, Value is worth), the color of these colouring information comparisons being corrected in advance with software again and the data base of temperature relation, the last Temperature numerical automatically exporting each liquid crystal dots as shown in Figure 2 b.This three dimensional temperature figure is with regard to gem-pure the distribution trend and the temperature that present vein blood vessel under wrist skin, and this can give medical personnel correct sign information.
Except static map, camera can the figure of continuous shooting dynamic change or continuously recording, and therefore this product can monitor variations in temperature that some vascular flows cause in dynamic change to judge health of heart etc. by continuous print.
As shown in Figure 2 c, after the black absorbing layer back side adds serpentine resistive heater, detachable battery is utilized to heat it, heater can raise 5-10 degree Celsius very soon, and the liquid crystal dots in face is owing to being heated colorific change on the heaters, medium temperature is the highest, then dispels the heat to surrounding.If used on the skin of different moisture content, the image that the difference due to skin heat conductance result in this heat radiation is variant.After this is taken pictures, instead can be released the water content situation using skin by the image calculating and simulate heat radiation.This product has very large development potentiality in skin care item industry, human body physical sign monitoring (in as motion prevention dehydration etc.).
Briefly introduce a kind of monitoring method:
Step 1. makes flexible liquid crystal temperature sensor according to the method described above;
Step 2. product corrects:
Flexible liquid crystal temperature sensor is placed on standard warm table by step 21., adjustment lighting condition, by camera and infrared imaging instrument placed side by side directly over described flexible liquid crystal temperature sensor;
Step 22. is heated to standard of closure warm table after preset temperature, and described photographing unit is according to the photo of pre-set velocity shooting product, and described infrared one-tenth line imaging instrument is taken according to predetermined speed record the variations in temperature in region simultaneously;
Step 23. Extracting temperature often changes pictorial information during preset temperature point, obtains the colouring information of each temperature spot, and described colouring information comprises color and luster in hsv color space and saturation value;
Step 24. sets up the relation of C&T by two-dimensional linear matching, makes the combined value of any color and luster and saturation corresponding with Temperature numerical;
Step 3. skin temperature image acquisition: described flexible liquid crystal sensor is placed in position to be measured, uses camera pictures taken;
The process of step 4. pictorial information, carry out following process successively: reduce noise by Gaussian Blur, convert picture to gray-scale map, adaptive threshold controls, the speckle in image is removed by erosion arithmetic, expand pixel bright spot to original size by expansion again, extract the profile of data point, locate the coordinate of each data by closed circle algorithm and extract colouring information;
Step 5. obtains the temperature data of each point according to the corresponding relation of color and temperature digital.
In a further embodiment, step 4 is specially:
S41. read pictorial information: the variable importing mat type into, the head of reading images, view data size and data volume, this data volume is two dimension or one-dimension array;
S42. the disposal of gentle filter, to each pixel, all obtained after weighted average by other pixel values in itself and neighborhood, be specially by each pixel in a template scanogram, in the neighborhood determined by template, the weighted average gray value of pixel goes the value of alternate template central pixel point;
S43. by the color space of converted image, picture is converted into gray scale picture;
S44. adaptive threshold method is adopted to be become by Iamge Segmentation gray value to be the image of " 0 " (black) and " 255 " (white);
S45. carry out morphological operation, comprise corrosion and expansive working: the kernel of image and arbitrary shape is carried out convolution,
When carrying out expansive working, kernel streaks image, and just the max pixel value of kernel overlay area proposes, and replaces the pixel of core center point position; When carrying out etching operation, kernel streaks image, the minimum pixel value of kernel overlay area is extracted, and replaces the pixel of anchor point position;
S46. the profile of each point is found: extract profile, adoptable method comprises only extracts outermost profile, extract all profiles, and be positioned in list, extract all profiles, and be organized as two-layer, top layer is the peripheral boundary of connected region, sublevel is the inner boundary in hole, extracts all profiles, and reconstructs nested profile; Approach method, the output profile of chain code, additive method exports polygon, by be a little translated as point sequence form by chain code form, compression level, vertical and diagonal angle segmentation, retain the pixel of end, application The-Chin chain approximate algorithm, the horizontal fragment being 1 by connection uses diverse contours extract algorithm;
S47. draw profile, the set of contours of input target image, each set of contours is made up of a vector, draws profile, if profile parameters is negative value, then draws whole profile, draws the color of profile, live width and line style;
S48. calculate the smallest circle of surrounding and having profile and draw circle;
S49. the average HSV value of color in each circle is calculated;
S50. give each circular HSV value corresponding Temperature numerical;
S51. three dimensional temperature image is drawn.
In a word:
1. degree of accuracy of the present invention and time and space resolution can reach standard (± 0.05 ° of C close to infrared temperature imager, 30 milliseconds, 0.5 millimeter), the degree of accuracy (± 0.6 DEG C) of existing similar products far away, and cost reduces (100,000 yuan to 10 yuan) greatly.Due to the tightly laminating of substrate material layer very thin (20 microns) and product and skin, the fast reaction of thermal change liquid crystal material after variations in temperature (30 milliseconds) helps the fluctuation monitoring ambulatory skin temperature in real time.
2. due to its ultra-thin thickness (50 microns) and remarkable mechanical property (Young's modulus test is 178 kPas), one, this product can realize extraordinary breathability, dress this product after three hours skin without the change of any temperature fluctuation and water content, compared with the performance of existing product poor air permeability, this product wearing comfort degree there has also been very large raising, is suitable for worn for long periods.Two, it can utilize the model ylid bloom action power of self to be fitted in skin surface closely, and no matter skin has the non-wrinkled feature such as bending.
3., by changing the density of liquid crystal array, the present invention can reach very high spatial resolution, and the temperature information of each liquid crystal dots can be extracted separately, and the variations in temperature that in use skin is separated by between millimeter can be measured easily.
4. by connecting detachable battery parts heating resistor, make its temperature improve 5 ° of more than C.By observing the color image change that this focus dispels the heat to surrounding, we can by calculating thermal conductivity and the water content of learning skin.
5. the data acquisition of this product is simple, only needs the photo of shooting clear, and in conjunction with the mapping skin temperature profile that computed in software just can be very fast, this is significant to future products exploitation volume production.
In brief, this product can realize the skin temperature imaging of low-cost and high-performance, and data acquisition can be realized by the photograph of mobile phone and calculating.This very manyly than existing product innovation also will will have larger application space.
Known by foregoing description: this product have very large potentiality in medical industries.Surveyed and drawn by skin temperature, can vessel information under accurately detecting skin, calculate moisture content of skin, infer heart working situation, and can situation (the variations in temperature healing progress of long term monitoring wound healing, with or without infection etc.), arterial-venous position and arteries direction of flow of blood and speed, or the skin histology variations in temperature that monitoring DVT or myalgia cause.
More than describe the preferred embodiment of the present invention in detail; but the present invention is not limited to the detail in above-mentioned embodiment, within the scope of technical conceive of the present invention; can carry out multiple equivalents to technical scheme of the present invention, these equivalents all belong to protection scope of the present invention.It should be noted that in addition, each the concrete technical characteristic described in above-mentioned detailed description of the invention, in reconcilable situation, can be combined by any suitable mode.In order to avoid unnecessary repetition, the present invention illustrates no longer separately to various possible compound mode.
Claims (9)
1. a flexible liquid crystal temperature sensor, it is characterized in that, the layer of elastomer material (1c) comprising absorbed layer (1a), be positioned at the thermal change liquid crystal array (1b) of described absorbed layer side, cover described thermal change liquid crystal array, and the resistance heating layer (1d) being positioned at absorbed layer opposite side.
2. flexible liquid crystal temperature sensor as claimed in claim 1, it is characterized in that, described absorbed layer is the elastomeric material being mixed with black oxidation iron powder, and described elastomeric material comprises polydimethylsiloxane.
3. flexible liquid crystal temperature sensor as claimed in claim 1, it is characterized in that, described resistance heating layer comprises serpentine resistive heater, snakelike wire and can connect the electrode of detachable battery.
4. flexible liquid crystal temperature sensor as claimed in claim 1, it is characterized in that, the thickness of described absorbed layer is 20 microns, and the height of described thermal change liquid crystal array is 25 microns, and described layer of elastomer material is 30 microns.
5. the flexible liquid crystal temperature sensor as described in any one of Claims 1-4, it is characterized in that, also comprise and adhere to body (2), described adhesion body (2) has a hollow-out parts, described flexible liquid crystal temperature sensor (1) is positioned at described hollow-out parts, and the edge of flexible liquid crystal temperature sensor is fixedly connected with adhesion body.
6. a manufacture method for flexible liquid crystal temperature sensor, is characterized in that, comprises the steps:
Step 1, elastomeric material to be mixed with black oxidation iron powder, with sol evenning machine painting black absorbed layer drying on loading plate;
Step 2, dip in upper thermal change liquid-crystal ink liquid with the seal with columnar arrays and air-dry,
Step 3, use Thermal release gluing liquid crystal array, and be affixed on the one side of described black absorbing layer, raised temperature, make Thermal release glue depart from liquid crystal array, with sol evenning machine in liquid crystal array side spin coating one deck layer of elastomer material;
Step 4, prepare resistance heating layer, and transfer them to the another side of black absorbing layer.
7. the manufacture method of flexible liquid crystal temperature sensor as claimed in claim 6, it is characterized in that, the detailed process preparing radio zone of heating in described step 4 is:
Step 41, use sol evenning machine, at silicon chip surface spin coating one deck polymethyl methacrylate, are dried, and continue spin coating one deck polyimides, dry;
Step 42, evaporation titanium and gold, utilize photoetching development and wet etching method to obtain serpentine resistive heater;
Step 43, evaporation titanium/copper/titanium/gold, utilizes photoetching development and wet etching method to obtain snakelike wire and electrode;
Step 44, spin coating one deck polyimides, dry, and utilizes photoetching development and wet etching method by whole device package, obtain by the resistance heater of polyimides coated metal line;
Step 45, dissolve polymethyl methacrylate in acetone, resistance heater is transferred to water-soluble adhesive tape, titanium and silicon dioxide on evaporation.
8. the manufacture method of flexible liquid crystal temperature sensor as claimed in claim 7, it is characterized in that, in step 41, the thickness of polymethyl methacrylate is 100 nanometers, and in step 42, the thickness of titanium and gold is respectively 10 nanometers and 50 nanometers, in step 43, the thickness of titanium/copper/titanium/gold is respectively 10 nanometers, 500 nanometers, 10 nanometers and 20 nanometers, in step 45, the thickness of titanium and silicon dioxide is respectively 5 nanometers and 30 nanometers.
9. the manufacture method of flexible liquid crystal temperature sensor as claimed in claim 7, it is characterized in that, the resistance of described serpentine resistive heater is 800 ~ 1200 ohm.
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| CN113973494A (en) * | 2019-05-23 | 2022-01-25 | 活跃骨科技术服务有限公司 | Sensor layer for determining a temperature profile on a skin surface, auxiliary means for wearing on a skin surface, method for producing an auxiliary means and method for determining a relative temperature difference on a skin surface |
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