CN105073281A - Sensor assembly and method for detecting the surroundings of a vehicle - Google Patents

Sensor assembly and method for detecting the surroundings of a vehicle Download PDF

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Publication number
CN105073281A
CN105073281A CN201480017488.7A CN201480017488A CN105073281A CN 105073281 A CN105073281 A CN 105073281A CN 201480017488 A CN201480017488 A CN 201480017488A CN 105073281 A CN105073281 A CN 105073281A
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China
Prior art keywords
diaphragm
transducer apparatus
sensor device
rising tone
sensor
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Granted
Application number
CN201480017488.7A
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Chinese (zh)
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CN105073281B (en
Inventor
D·巴尔特伊拉
T·特肋普托
D·施密德
M·舒曼
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Robert Bosch GmbH
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Robert Bosch GmbH
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292Electrostatic transducers, e.g. electret-type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/521Constructional features
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/01Electrostatic transducers characterised by the use of electrets
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88Sonar systems specially adapted for specific applications
    • G01S15/93Sonar systems specially adapted for specific applications for anti-collision purposes
    • G01S15/931Sonar systems specially adapted for specific applications for anti-collision purposes of land vehicles
    • G01S2015/932Sonar systems specially adapted for specific applications for anti-collision purposes of land vehicles for parking operations
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2499/00Aspects covered by H04R or H04S not otherwise provided for in their subgroups
    • H04R2499/10General applications
    • H04R2499/13Acoustic transducers and sound field adaptation in vehicles

Abstract

The invention relates to a sensor assembly (1) which comprises a first acoustic transducer assembly (10) having at least one surface formed as a diaphragm (12), the diaphragm (12) being suitable to emit sound waves. An acoustic converter assembly (10) of this type is also designated a flexible resonator and can generate sound waves having a comparatively high acoustic pressure. The sensor assembly (1) according to the invention has a second acoustic transducer assembly (20), comprising a plurality of sensor elements (22a-22i) which are arranged in an array. Provision is made for the second acoustic transducer assembly (20) to be arranged on a surface of the first acoustic transducer assembly (10) that is formed as a diaphragm (12). According to the invention, the second acoustic transducer assembly (20) comprises sensor elements (22a-22i) which are formed as electret converter elements. A sensor assembly (1) of this type can be formed in particular as an ultrasound sensor assembly for detecting the surroundings of a vehicle.

Description

The sensor device detected for the surrounding environment of vehicle and method
Background technology
Now, sonac (USS) is such as the driver of support unit in the process of parking.At this, USS serves as transmitter and receiver simultaneously.The ultrasonic signal sent is by object reflection.The distance asked for object is calculated subsequently by the propagation time.The lateral attitude of object is determined by means of triangulation.
Known sonac has piezoelectric element usually, and described piezoelectric element is connected with the diaphragm of sonac.The diaphragm vibration of sonac can be made, to send acoustic signal by the corresponding control of piezoelectric element.In order to receive reflected signal, convert the vibration of diaphragm to corresponding voltage signal by piezoelectric element.
In the category of the object distance computation by triangulation, the inexactness of reflected signal incidence angle determination aspect causes the unreliability of calculated distance.When this problem especially appears at multiple reflective object, thus produce ambiguity, this ambiguity no longer can realize accurately determining of object's position.Therefore, for safety reasons, usually to driver, the shortest possibility spacing is described.The use of supersonic array (USA) provides a kind of possibility improving angle determination precision.This is the layout of multiple single sensor element, and described multiple single sensor element is ideally arranged with the mutual spacing being less than 1/2 wavelength.Because USA produces less acoustic pressure by less area usual compared with traditional comparable USS, so usually divide sending function and receiving function.This means to need additional assembly space, visible add ons must be installed on vehicle in addition.
By the ultrasound transducer array on the known a kind of diaphragm of WO03/092915A2.The diaphragm be made up of diamond or diamond-like-carbon is provided with barrier layer and piezoelectric layer.Multiple the first and second arrangement of electrodes be spatially separated over the piezoelectric layer.Piezoelectric layer can be encouraged to vibrate by applying alternating voltage between the first electrode and the second electrode.By arranging that electrode can encourage the regional of diaphragm to vibrate individually, thus on diaphragm, be mounted with multiple ultrasonic transducer.
By the known a kind of supersonic array for directionally sending ultrasonic signal of DE102004050794A1 and for the application of the receiver that receives ultrasonic echo.Supersonic array and ultrasonic receiver are spatially arranged separated from each other in published equipment.Transmitted along the direction determined by supersonic array.This direction can swing at this, so that little by little with sound lobe scanning vehicle-periphery.Ultrasonic echo is received by one or more receiver, and wherein receiver is for direction determines and prepare.Direction is calculated by signal propagation time and transmit direction.
By the also known a kind of sensor device of undocumented DE102012205996.2, this sensor device comprises first sound transducer apparatus, and described first sound transducer apparatus has the surface that at least one is configured to diaphragm, and wherein this diaphragm is suitable for launching sound wave.Such acoustic transducer means is also referred to as flexural vibrations device and can produce the sound wave with relatively high acoustic pressure, and on perpendicular bisector, the distance of 30cm is measured, and is generally about 103-109dB.Sensor device has rising tone transducer apparatus, and this rising tone transducer apparatus comprises multiple sensor element, and described multiple sensor element is arranged to an array.Propose at this, rising tone transducer apparatus is arranged in being configured on the surface of diaphragm of first sound transducer apparatus.The ultrasonic sensor devices that the surrounding environment that such acoustic transducer means especially can be configured to vehicle detects.
Parts are integrated into by two sonic transducer schemes, high acoustic pressure can be realized by first sound transducer apparatus in an advantageous manner and be realized the detection relevant to angle of reflective sound wave by rising tone transducer apparatus, and do not need two parts be separated, the structure space that described two part requirement be separated are additional.
Summary of the invention
Expand according to the present invention and improve by the known sensor device of DE102012205996.2, its mode proposes to form rising tone transducer apparatus, the i.e. sensor element of array to be configured to electret transducer element.
Electret transducer element according to the present invention is interpreted as the transducer according to the work of electret principle.At this, sensor element has cap rock, and described cap rock is designed to vibrating diaphragm.When acoustic signal, such as arrived by the sound of object reflection time, cap rock motion and cause the change of electric capacity, the change of this electric capacity can be measured.Amplified and this signal of analyzing and processing by the mode of electricity subsequently.By sensor is arranged to an array, can other information, such as
Electret can be called by the material of stored charge on longer time and temperature range.In electret transducer,---be different from such as capacitor-type microphone---during manufacturing process, internal dc voltage be applied in electret by corresponding charging.Eliminate the necessity of the external voltage source providing DC voltage at this, this causes cost advantage.Electret in electret transducer between two electrodes, thus electric charge produce electric field.In the structure that some are known, electret is diaphragm and therefore initiatively vibrates together.In the structure that other are known, electret is fixed on the electrode that do not move.
As charging possibility, diverse ways is available.For structure according to the present invention preference, be corona charging and contact charging for the method for charging to electret.But the possibility for charging is not limited to described method.General introduction about the known method for charging such as provides in " Electrets " (G.M.Sessler, Springer-Verlag, the second edition, 1987).
Sensor device according to the present invention has the following advantages: vibration attenuation time of first sound transducer apparatus can by active adjustment and therefore active attenuation shorten.At this, the piezoelectric element carrying out encouraging such as is used as actuator and rising tone transducer apparatus is used as sensor.Therefore, or can abandon to a great extent by the decay of respective material or only supportive utilize attenuating material.This causes can use significantly higher acoustic pressure, and need not increase measurable minimum spacing.In addition, can abandon if desired adding, serve as transformer ( ) coil, described coil in known systems in the reception of sonac runs for generation of the voltage required on large bandwidth and piezoelectric ceramics.This is functional such as can instead directly in sensor device according to the present invention realize in analysis and processing unit.Merge in analysis and processing unit and process these signals.This is required, because diaphragm does not have the transient state of static situation further aspect identification diaphragm to vibrate and is identified by the reflecting vibrations (echo) of rising tone transducer apparatus reception on the other hand after sending.Analysis and processing unit can be separated and these signals of analyzing and processing individually.
Therefore, according to the present invention, vibrating diaphragm bears the function of transmitter, and the array be made up of multiple sensor element bears the function of receiver.
Particularly preferably, the sensor element forming rising tone transducer apparatus be arranged in first sound transducer apparatus be configured to the surface of diaphragm with in lower area: described region when encouraging diaphragm vibration along the direction perpendicular to diaphragm plane without undergoing skew or only stand little skew.This is such as with lower area: diaphragm has node of oscillations when encouraging with the transmission frequency determined in this region.This layout has the following advantages: acoustic transducer element also only stand little mechanical load when the judder of diaphragm and along diaphragm direction of vibration without undergoing skew or only stand small skew.Draw thus, the vibration of diaphragm affects array element as small as possible.At this, the center of diaphragm normally peak excursion and the region of therefore maximum effect, and fringe region is the region with minimum influence.
Preferably, first sound transducer apparatus (transmitter) is designed to have the flexural vibrations device of piezoelectric ceramics as actuator.According to the present invention, the rising tone transducer apparatus with multiple sensor element (array) utilizes electret principle as transducer.At this, rising tone transducer apparatus preferably has cap rock, and described cap rock is designed to vibrating diaphragm.Described cap rock such as can cover all the sensors element, namely be public for all the sensors element or only cover the sensor element or single-sensor element determining to organize.When signal, such as arrived by the sound of object reflection time, cap rock motion and cause the change of electric capacity, the change of this electric capacity can be measured.Can be amplified and this signal of analyzing and processing by the mode of electricity subsequently.
Cap rock such as can by metal material---and such as aluminium or high-quality steel are made, or also can by compo compound---such as CFK or GFK makes.Bonding agent constructs in can implementing of the present invention first conductively.
If bonding agent is nonconducting in alternative enforcement of the present invention, then must by apply electric wire---such as twisted wire or metal wire realize the electrical contact with cap rock, described cap rock is counter electrode.In order to not produce short circuit, in this enforcement, the subregion being applied with array of the diaphragm of flexural vibrations device must be nonconducting.This such as can be realized by the electroxidation of described subregion (anodic oxidation).Thus, as long as diaphragm is made up of conductive aluminum, then produce nonconducting pottery.Then, pottery can apply printed conductor, such as, by vapour plating, sputtering, serigraphy or other painting methods.
The electret self (as long as it exists as film) such as with FEP, PTFE or similar material then bonds on shaped electrode by electrically conducting adhesive.Preferably (downwards) evaporation is on side to be contacted in this case for electret film, because FEP or PTFE has very low surface energy, it makes bonding possibility hardly.Bondingly such as also can to avoid in the following manner: by electret heating until close to the temperature of its fusion temperature and subsequent layer be pressed onto on diaphragm.If electret exists in dissolved form, as the Cytop (fluororesin) of TeflonAF (amorphous fluoropolymer) or AsahiGlass company, then also can pass through additive method, as spot printing (Auftropfen) or weaving (Spinnen) apply as described in electret.
In the preferred enforcement of sensor device according to the present invention, first sound transducer apparatus comprises tank shaped element part, and described tank shaped element part comprises bottom surface and edge surface, and wherein said bottom surface is preferably configured as diaphragm.In order to encourage diaphragm vibration, be provided with the piezoelectric element with described film contact.Therefore, first sound transducer apparatus is corresponding to the ultrasonic transducer of routine in this enforcement, thus the sensor device so implemented can substitute conventional sonac simply installs, and does not need to mate---such as keep.The sensor element of described rising tone transducer apparatus is preferably placed on the side of being configured on the bottom surface of diaphragm of tank shaped element part, especially the sensing outside of bottom surface.
Printed conductor is preferably applied on diaphragm, and its mode is, such as, have the film of printed conductor being configured on the surface of diaphragm to described first sound transducer apparatus by the bonding evaporation that applies.Film especially can relate to Kapton or Teflon film.The feature of such film is mainly high-fire resistance and good electrical insulation characteristics.
Substitute in enforcement in one of the present invention, rising tone transducer apparatus is applied on flexible printed circuit board (PCB), and the printed circuit board (PCB) of wherein said flexibility has printed conductor and electrode, and the printed circuit board (PCB) of wherein said flexibility is especially bonding with described diaphragm.This can realize especially simply manufacturing according to sensor device of the present invention.
In order to carry out protecting with anti-tamper, the sensor element of rising tone transducer apparatus is provided with cover layer, and it such as has compo compound.In addition, in order to additional sealing and protection are with moisture proof and other ambient influnence, preferably, at least one in the sensor element of rising tone transducer apparatus can by such as covering with the cladding element of the form of cover or sealing film.
That cladding element preferably can be configured to tank shape and cover the diaphragm of the first and second acoustic transducer means or rising tone transducer apparatus and first sound transducer apparatus completely.
Surrounding environment that is that sensor device according to the present invention is suitable for motor vehicle or robot detects, is particularly suited for parking assisting system or is also suitable for autonomous driving platform.
In addition according to the present invention, a kind of method for the especially surrounding environment detection of vehicle is set, wherein applies according to sensor device of the present invention.Described method proposes, described first sound transducer apparatus sends acoustic signal, described acoustic signal can reflect on one or more object, and described rising tone transducer apparatus receives reflected signal, and carries out the analyzing and processing relevant to angle of described reflected signal.The analyzing and processing relevant to angle be especially interpreted as be arranged as acoustic transducer array by the sensor element of rising tone transducer apparatus can based on the position of the time difference between the sound wave received by respective sensor element and the following object of phase difference detection and shape: on described object, sound wave is reflected.
Method according to the present invention proposes in one is preferably implemented, and after transmission acoustic signal, realizes the decay of first sound transducer apparatus in the following manner: the anti-phase control especially carrying out first sound transducer apparatus.At this, rising tone transducer apparatus is used as the regulating loop of control, to determine the current phase place of the vibration of the diaphragm of first sound transducer apparatus and/or frequency and/or amplitude.The current phase place of the vibration of the diaphragm about first sound transducer apparatus obtained and/or the information of frequency and/or amplitude, for so controlling first sound transducer apparatus, make to realize decaying fast and effectively of transient state vibration.
Such as be applied in the vehicle in the vehicle in the vehicle in the vehicle in the vehicle on vehicle driver's system of the vehicle for daily road traffic, airport, in harbour, in warehouse, on construction site, in road construction according to sensor device of the present invention, but also in the space ship that docks with other space ships, or for machine and robot.
Accompanying drawing explanation
Fig. 1 illustrates the enforcement of first sound transducer apparatus;
Fig. 2 illustrates the sensor device according to the first embodiment of the present invention;
Fig. 3 illustrates sensor device according to a second embodiment of the present invention with profile and top view;
Fig. 4 illustrates sensor device according to the third embodiment of the invention with profile;
Fig. 5 illustrates sensor device according to a fourth embodiment of the invention with profile.
Detailed description of the invention
Fig. 1 schematically illustrates an embodiment for first sound transducer apparatus 10 with perspective view.First sound transducer apparatus 10 comprises tank shaped element part 11, and described tank shaped element part such as can be made up of plastics or aluminium.This element 11 comprise the bottom surface 12 that is configured to diaphragm 12 and around edge surface 14.Bottom surface 12 constructs substantially circularly.Diaphragm 12 such as can with element 11 single type construct, or as independent parts be fixed on around edge surface 14 on.Edge surface 14 have along the direction that it deviates from the seamed edge of bottom surface 12 around jut 16.This jut 16 is for being fixed on element 11 in the accommodation section of the unshowned sensor housing on such as motor vehicle.Unshowned piezoelectric element is so arranged on diaphragm 12 in known manner, makes this piezoelectric element that diaphragm 12 can be encouraged to vibrate, realizes the transmitting of sound wave by first sound transducer apparatus 10 thus.Usually, the sound wave frequency of launching is positioned at the scope of 40kHz to 120kHz, namely in ultrasonic range.By described structure, first sound transducer apparatus 10 advantageously radiation has the sound wave of high sound pressure.In the diagram of Fig. 1, diaphragm 12 is in vibration, and this is represented by the central arch of diaphragm 12.Diaphragm 12 has middle section 12b, and this middle section stands along the peak excursion (vibration antinode) perpendicular to the direction in diaphragm face 12 when encouraging shown vibration mode.
In addition, diaphragm 12 has the region 12a of general toroidal in its edge, described region stand during vibration mode shown in encouraging along perpendicular to the direction in diaphragm face 12 smallest offset or even do not stand along perpendicular to the skew (node of oscillations) in the direction in diaphragm face 12.Advantageously, the sensor element of rising tone transducer apparatus arranged according to the present invention is arranged in only standing little skew or even not standing the region that offsets, to avoid the mechanical load of sensor element and/or by kinetic measure error.Vibration mode shown here is only that the one of the vibration mode encouraged of diaphragm 12 may example.More the vibration mode of high-order has vibration antinode or node of oscillations in known manner in other regions.
Sensor device 1 according to the present invention schematically illustrates with perspective view in fig. 2.Sensor device 1 comprises first sound transducer apparatus 10, and described first sound transducer apparatus constructs according to acoustic transducer means 10 shown in Figure 1.Identical part is provided with identical reference marker.
Rising tone transducer apparatus 20 is arranged on the bottom surface being configured to diaphragm 12 of element 11, and described rising tone transducer apparatus comprises sensor element 22a, 22b, 22c, 22d, 22f, 22g, 22h, 22i of eight like configurations.Rising tone transducer apparatus 20 is configured to acoustic transducer array.Spacing between neighboring sensor elements is identical respectively.Middle position on diaphragm 12 does not have sensor element, because the strongest at diaphragm flexes vibration hour offset in this region, as drawn by Fig. 1.In order to avoid mechanical load and the certainty of measurement of sensor element 22a-22i, sensor element 22a-22i is arranged in the fringe region of diaphragm 12, compared with the peak excursion (as shown in FIG. 1) of diaphragm central authorities, in the pattern encouraged in this example that described fringe region vibrates in diaphragm flexes, only stand little skew.Alternatively, other also can considering sensor element are arranged, it has the sensor element of more or less column or row and/or larger quantity or more smallest number.
Sensor element 22a-22i in the x-direction with the half that the spacing in y direction is preferably the wavelength of sound wave respectively, sensor device 1 designs for this.Therefore, for the application in the typical frequencies of 50kHz and air, the mid point from the mid point of a sensor element to distance sensor element is farthest measured, and spacing is about 3mm.Loss of significance when deviation causes pip space to be separated.
Because just carry out the reliable detection of received acoustic signal after certain vibration attenuation time of sensor device 1, so propose to make sensor device 1 decay after transmission acoustic signal.Reduce by decaying at least sent acoustic signal by first sound transducer apparatus 10 and detected the duration that must pass between the acoustic signal that reflects by rising tone transducer apparatus 20, to ensure the reliable measurements especially in the near field of sensor device 1.If sensor device 1 according to the present invention for the object-detection in the drive assist system of motor vehicle or parking assisting system, then also can identify by the reduction in so-called dead time (Totzeit) the closely spaced object had to sensor.Minimum detectable spacing is determined by the transient state vibration duration of sensor device 1 in known manner.
The decay of first sound transducer apparatus 10 realizes preferably by the ACTIVE CONTROL of the piezoelectric element of first sound transducer apparatus, and the vibration of itself and diaphragm 11 is anti-phase.Rising tone transducer apparatus 20 is used as the sensor of the vibration of diaphragm 11 at this, and can form regulating loop, and this regulating loop can realize decaying fast and efficiently of diaphragm.Therefore possible that, reduce or abandon attenuating material completely---the use of such as foamed plastic.
Substitute the layout of sensor element 22a-22i shown in figure 2, also can consider that other are arranged, the layout of the vicissitudinous spacing of such as tool.Sensor element 22a-22i has substantially circular surface in shown example.Alternatively, other shapes are also possible, such as rectangle, square or polygonal shape.
Sensor element 22a-22i comprises an electret elements and a public cap rock respectively, and described cap rock is designed to vibrating diaphragm.When signal, such as arrived by the sound of object reflection time, cap rock motion and cause the change of electric capacity, the change of this electric capacity is measurable.Thus, each in sensor element 22a-22i produces voltage signal.Being arranged as acoustic transducer array by sensor element 22a-22i can based on the position of the time difference between the sound wave received by respective sensor element 22a-22i and the following object of phase difference detection and shape: on described object, sound wave is reflected.The information obtained such as can continue process by the driver assistance system of motor vehicle.
With profile (Fig. 3 A) and top view (Fig. 3 B), sensor device 1 is according to a second embodiment of the present invention shown in figure 3, wherein the cap rock 125 of sensor element 22a-22i is invisible in figure 3b.First sound transducer apparatus 110 comprises tank shaped element part 111, and it has diaphragm 112 as bottom surface.First sound transducer apparatus 110 is configured to have the flexural vibrations device of piezoelectric ceramics 115 as actuator, and described piezoelectric ceramics is controlled by electric connecting terminal 117.In this enforcement, the diaphragm 112 of first sound transducer apparatus 110 is provided with four sensor elements 122, described sensor element is used as sensor array and forms rising tone transducer apparatus 120 together.The sensor element 122 of rising tone transducer apparatus 120 utilizes electret principle.At this, the cap rock 125 of array is designed to vibrating diaphragm.When sound wave arrives, especially, cap rock 125 moves and causes the change of electric capacity at each sensor element place.The change of electric capacity represents the signal received.
This cap rock 125 such as not only can by metal material---and such as aluminium or high-quality steel are made, and can by compo compound---such as CFK or GFK makes.Cap rock 125 is bonding at different bonding location 128 places from the diaphragm 112 of first sound transducer apparatus 110.The adhesives used can be such as conduction.If adhesives is non-conductive, then must be realized the electrical contact of cap rock 125 and earth electrode 137 by applying twisted wire or metal wire 130, described cap rock is the counter electrode of rising tone transducer apparatus 120, as shown in FIG. 3.In order to not produce short circuit, the subregion 114 of the diaphragm 112 of first sound transducer apparatus 110 must be nonconducting, and described first sound transducer apparatus 110 arranges acoustic transducer means 120.This such as can passage subregion 114 electroxidation (anodic oxidation) realize.Thus, as long as diaphragm 112 is made up of conductive aluminum, then nonconducting pottery is produced.Then, described pottery can apply printed conductor, it such as can pass through vapour plating, sputtering, serigraphy or other coating processes and realize.Alternatively, printed conductor 132 can have the film of printed conductor 132, especially Teflon film to be applied on the surface 112 being configured to diaphragm of first sound transducer apparatus 110 by applying evaporation.Form sensor element 122 and such as there is the electret of FEP, PTFE, as long as it exists as film, then can bond on shaped electrode by electrically conducting adhesive.Preferably (downwards) evaporation is on side to be contacted in this case for electret film, because FEP or PTFE has very low surface energy, it makes bonding possibility hardly.If electret exists with dissolved form, as the Cytop (fluororesin) of TeflonAF (amorphous fluoropolymer) or AsahiGlass company, then also can pass through additive method---as drop (Auftropfen) or weaving (Spinnen) apply as described in electret.Connector 135 can be connected with printed conductor 132 or by soldering or melting welding by electric bonding agent 129.Connector 135 or be connected with the electronic device of analysis and processing unit (not shown) through the passage shape breach 138 in housing 111 to the electric feeder line of connector 135.
With profile, the alternative enforcement according to sensor device 1 of the present invention is shown in the diagram.First sound transducer apparatus 210 comprises tank shaped element part 211, and it has diaphragm 212 as bottom surface.First sound transducer apparatus 210 is configured to have the flexural vibrations device of piezoelectric ceramics 215 as actuator, and described piezoelectric ceramics is controlled by electric connecting terminal 217.In this enforcement, the diaphragm 212 of first sound transducer apparatus 210 is provided with multiple sensor element 222, described sensor element is used as sensor array and forms rising tone transducer apparatus 220 together.According to the present invention, the sensor element 222 of rising tone transducer apparatus 220 utilizes electret principle.At this, the cap rock 225 of array is designed to vibrating diaphragm.In this enforcement, be different from Fig. 3, rising tone transducer apparatus 220 (except cap rock 225) is applied on flexible printed circuit board (PCB) 232, and the printed circuit board (PCB) of described flexibility has had required element, as printed conductor and electrode.Thus, the processing of the cost intensive of the diaphragm 212 of first sound transducer apparatus is not needed.Printed circuit board (PCB) 232 has flexible connector 235, and the connector of described flexibility can guide in the breach 238 of diaphragm tank.Compared with the flexible program in figure 3, eliminate complicated contact in this way.Printed circuit board (PCB) 232 is connected with diaphragm by bonding material layer 240.Cap rock 225 is fixed on flexible printed circuit board (PCB) 232 by bonding location 228,229.
Embodiment shown in Figure 5 of the present invention is to a great extent corresponding to the example described explicitly with Fig. 4.Identical element is provided with identical reference marker.Be with the difference of embodiment shown in Figure 4, be provided with the cap rock 326 of rising tone transducer apparatus 220, described cap rock tank shape ground structure, namely have around edge 330, described edge is substantially perpendicular to diaphragm 212 ground and extends.By the described structure of cap rock, provide continuous print optical surface on the one hand, provide another possibility for seal sensor device 1 on the other hand.Sealing is carried out at bonding location 350 place in the example shown.

Claims (10)

1. sensor device (1), especially a ultrasonic sensor devices, its surrounding environment for vehicle detects, and described sensor device comprises:
First sound transducer apparatus (10,110,210), it has at least one surface being configured to diaphragm (12,112,212), and wherein, described diaphragm (12,112,212) is suitable for launching ultrasonic wave;
Rising tone transducer apparatus (20,120,220), it comprises multiple sensor element (22a-22i, 122,222), and described rising tone transducer apparatus is configured to array, is especially configured to supersonic array;
Wherein, described rising tone transducer apparatus (20,120,220) is arranged on the surface (12,112,212) being configured to diaphragm of described first sound transducer apparatus (10,110,210),
It is characterized in that, described sensor element (22a-22i, 122,222) is configured to electret transducer element.
2. sensor device according to claim 1 (1), it is characterized in that, described first sound transducer apparatus (10, 110, 210) tank shaped element part (11 is comprised, 111, 211), described tank shaped element part has edge surface (14) and is configured to diaphragm (12, 112, 212) bottom surface, wherein, in order to encourage described diaphragm (12, 112, 212) vibration, be provided with and described diaphragm (12, 112, 212) piezoelectric element (115 contacted, 215), wherein, described rising tone transducer apparatus (20, 120, 220) sensor element (22a-22i, 122, 222) be arranged in and be configured to diaphragm (12, 112, 212) on the outside of bottom surface.
3. the sensor device (1) according to any one of the preceding claims, is characterized in that,
The surface (12) being configured to diaphragm of described first sound transducer apparatus (10) has stands little skew or the region (12a) without undergoing skew when encouraging the vibration of described diaphragm (12), and the sensor element (22a-22i) of described rising tone transducer apparatus (20) is arranged in the described region (12a) of described diaphragm (12).
4. the sensor device (1) according to any one of the preceding claims, it is characterized in that, in order to described rising tone transducer apparatus (20,120) sensor element (22a-22i, 122) electrically connect, the surface (12,112) being configured to diaphragm of described first sound transducer apparatus (10,110) is applied with printed conductor.
5. sensor device according to claim 4 (1), it is characterized in that, described printed conductor (132) has the film of described printed conductor (132), especially Teflon film to be applied on the surface (112) being configured to diaphragm of described first sound transducer apparatus (110) by applying evaporation.
6. sensor device according to any one of claim 1 to 3 (1), it is characterized in that, described rising tone transducer apparatus (220) is applied on flexible printed circuit board (PCB) (232), wherein, the printed circuit board (PCB) (232) of described flexibility has printed conductor and electrode, wherein, the printed circuit board (PCB) of described flexibility is especially bonding with described diaphragm (112).
7. the sensor device (1) according to any one of the preceding claims, it is characterized in that, sensor element (the 22a-22i of described rising tone transducer apparatus (20), 122) there is cap rock (125,225,326), the described structure of sedimentary cover is vibrating diaphragm.
8. sensor device according to claim 7, is characterized in that, described cap rock tank shape ground structure, and described rising tone transducer apparatus (220) and described diaphragm (212) are covered by described cap rock (326) completely.
9. the sensor device (1) according to any one of the preceding claims; it is characterized in that, at least one in the sensor element (22a-22i) of described rising tone transducer apparatus (20) is covered by the cladding element carrying out protecting.
10., for the method that the surrounding environment of carrying out especially vehicle when using sensor device according to any one of claim 1 to 9 (1) detects, it is characterized in that,
Described first sound transducer apparatus (10) sends acoustic signal, and described acoustic signal can be reflected on one or more object,
Described rising tone transducer apparatus (20) receives reflected signal,
Carry out the analyzing and processing relevant to angle of described reflected signal.
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