CN104723332A - Direct drive type reversible wafer transmission robot - Google Patents
Direct drive type reversible wafer transmission robot Download PDFInfo
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- CN104723332A CN104723332A CN201510121144.7A CN201510121144A CN104723332A CN 104723332 A CN104723332 A CN 104723332A CN 201510121144 A CN201510121144 A CN 201510121144A CN 104723332 A CN104723332 A CN 104723332A
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Abstract
The invention discloses a direct drive type reversible wafer transmission robot. A lifting and dropping and swing mechanism is installed on the inner portion of a base seat, the lifting and dropping and swing mechanism is connected with one end of a big arm, the other end of the big arm is connected with one end of a small arm, the other end of the small arm is connected with one end of a reverse wrist, and the other end of the reverse wrist is connected with a vacuum adsorption tail end. When the wafer transmission robot moves, a three-connection rod which composed of the big arm, the small arm and the reverse wrist fixes a specific speed movement, and a straight line expansion movement in the radial direction is achieved; a motor is used for driving the vacuum adsorption tail end, so that a reverse movement of the reverse wrist is achieved; by the adoption of the direct drive motor to drive directly, an interior structure of the robot is simplified, the number of intermediate links is reduced, and the rotating precision and the rotating efficiency of the robot are improved. Due to fewer part mechanisms, the robot is convenient to assemble and produce. A steel belt is used rotatably, so that the rotating precision is provided, the reliability of the robot is enhanced, the production of contaminant particles is lowered, and the level of cleanliness of the robot is improved. The degree of freedom of reversing of the robot is increased by the reverse wrist, and the range of application of the robot is enlarged.
Description
Technical field
This invention relates to wafer automated handling apparatus field, is specifically related to a kind of wafer transfer clean-room robot.
Background technology
In super large-scale integration (IC) manufacture process, wafer needs frequent transmission between hundreds of roads technique, and wafer production line procedures is concentrated, and process velocity is fast, and working environment purity requirements is high, needs high performance wafer transfer robot.Existing R-θ type wafer transfer robot, use servomotor (stepper motor) driving to be equipped with decelerator deceleration more and drive drive axis again, drive mechanism is complicated, difficulty is installed, and most reducing gear (V belt translation, gear drive etc.) can make power transmission shaft be biased, more easily cause the generation of unbalance loading and redundancy radial load, cause Motor torque to lose and precision reduction.Employing direct driving motor drives, and can reduce the use of reducing gear, direct driving motor directly connects load, and produce without unbalance loading, transmission accuracy is high, without loss of machine of torque.The design feature of direct driving motor hollow, facilitates the inside cabling of robotic wafer control circuit and gas circuit, and what also can realize between different power transmission shaft is coaxially arranged, reduces number of components, reduces the rotary inertia of rotating shaft, is convenient to assembling.
Existing R-θ type wafer transfer robot, its radial direction (R to) rectilinear motion by the certainty ratio motion of large arm, forearm and wrist realize (principle visible [design and research of radial alignment sports type wafer-handling robot. Cong Ming, Zhang Shijun. automated manufacturing. the 27th volume the 2nd phase 2005-02]).Prior art many uses Timing Belt, utilizes planet circular system transmission principle, uses a motor to drive large arm, forearm and wrist joint.But Timing Belt has the shortcoming of corner angle error, elastic deformation and fatigue wear, and transmission system rigidity is low, easily causes vibration, easily produce source of particulate contamination at speed and sudden change of acceleration or when altering a great deal.Use Steel Belt Transmission, no elastic deformation, transmission accuracy is high, and system stiffness is large.Steel Belt Transmission, without the need to tensioning apparatus, without fatigue wear, can improve robot reliability, increases robot service life.The generation of particle contamination can also be avoided, improve the cleanliness factor of robot.
Summary of the invention
For above problem, the main purpose of this invention is to provide wafer transfer robot.Employing direct driving motor drives, and solves prior art type of drive, complex structure, installs difficulty, power transmission shaft disalignment, the problem of transmission unbalance loading etc.Adopt Steel Belt Transmission to solve the shortcoming of corner angle error in toothed belt transmission, elastic deformation and fatigue wear, improve transmission accuracy and service life, robot cleanliness factor is provided.
Another object of this invention is to provide the turning wafer transfer robot of direct-drive type end.In wafer transfer process, need the turning operation of wafer under various working, the turning robot of direct-drive type end can meet this kind of demand.
The invention provides the turning wafer transfer robot of direct-drive type end, adopt following technical scheme: the turning wafer transfer robot of a kind of direct-drive type, this robot comprises pedestal 1, lifting and slew gear 2, vacuum suction end 3, overturns wrist 4, forearm 5 and large arm 6; Lifting and slew gear 2 are installed in described pedestal 1 inside, lifting is connected with large arm 6 one end (near-end) with slew gear 2, large arm 6 other end (far-end) is connected with forearm 5 one end (near-end); forearm 5 other end (far-end) is connected with one end of upset wrist 4, and the other end of upset wrist 4 is connected with vacuum suction end 3.
During described wafer transfer robot motion, pedestal 1 is fixed, and lifting and slew gear 2 around pedestal 1 center steering, also can move up and down along pedestal vertical direction (Z-direction); Large arm 6 near-end can wraparound rotation mechanism 2 center steering (θ to motion); forearm 5 near-end turn round around large arm 6 distal center; upset wrist 4 is around the revolution of forearm 5 far-end, and the certainty ratio revolution of large arm 6, forearm 5 and upset wrist 4 realizes the radial alignment motion of robot arm (R is to moving); Upset wrist 4 built-in turning structure, vacuum suction end 3 thorny wrist housing horizontal axis overturns; Vacuum suction end 3 adsorbs wafer, drives wafer motion.
The elevating mechanism of above-mentioned wafer transfer robot, with reference to shown in accompanying drawing 2, this elevating mechanism comprises servomotor 101, decelerator 102, shaft coupling 103, pedestal section bar 104, nut 108, leading screw 109, guide rail 105, slide block 107 and lifting connecting plate 106.Servomotor 101, decelerator 102, leading screw 109 and nut 108 are coaxially arranged forms feed screw nut auxiliary drive gear on pedestal 1 sidewall; Pedestal section bar 104 is pedestal lateral support, and guide rail 105 is fixed on pedestal section bar 104; Nut 108 connects lifting connecting plate 106.
Servomotor 101 is connected with decelerator 102, and the output shaft of decelerator 102 is connected with leading screw 109 by shaft coupling 103; Leading screw 109 is fixed in the middle of the sidewall of pedestal 1, and two guide rails 105 are fixed on the sidewall both sides of pedestal 1; Described each guide rail 105 is separately installed with two slide blocks, 107, two slide blocks 107 to be connected with lifting connecting plate 106, to realize guide effect respectively.
Described servomotor 101 slows down through decelerator 102, drives the elevating movement of the nut 108 of screw pair, and then drives lifting connecting plate 106 to move up and down;
Center steering (θ is to the motion) mechanism of above-mentioned wafer transfer robot, comprises θ to direct driving motor 204, θ to rotating shaft 203, crossed roller bearing b215, thrust bearing 213.θ is fixed on lifting connecting plate 106 to the base of direct driving motor 204, and θ is connected to θ to the output shaft end of direct driving motor 204 to rotating shaft 203 and is connected to rotating shaft connecting plate a205 with θ; θ is connected by screw to rotating shaft connecting plate b206 and is fixed on θ on rotating shaft connecting plate a205.
The outer ring of crossed roller bearing b215 is fixedly mounted on connecting plate fixed muffle 201 inwall, to bear θ to the radial load of rotating shaft 203 and power of toppling; Thrust bearing 213 is fixed upper bush 202 by θ be arranged on θ on the outer wall of rotating shaft 203 to shaft sleeve 214, connecting plate.Thrust bearing 213 is in order to bear the axial force of robots arm's body.θ coordinates to rotating shaft 203 with pedestal upper cover 110, is provided with U-shaped large elastic rubber ring 217 and O type wear-resisting high-strength degree sealing ring 216 at pedestal upper cover 110 endoporus place simultaneously.
θ rotates to direct driving motor 204 output shaft Direct driver θ to rotating shaft 203, drives crossed roller bearing b215 inner ring, θ to shaft sleeve 214 and thrust bearing 213 times circle common rotation.U-shaped large elastic rubber ring 217 floats and bears the radial unbalance loading of θ to rotating shaft 203.
R forms the radial alignment motion of wafer transfer robot to direct driving motor 207, R to rotating shaft 208, large arm 6, forearm 5, upset wrist 4; It is inner to rotating shaft 203 that R is coaxially arranged on θ to direct driving motor 207, and R is arranged on θ on rotating shaft connecting plate b206 to the bottom of direct driving motor 207; R directly connects R to rotating shaft 208 to the output shaft of direct driving motor 207, R is supported by crossed roller bearing a212 to rotating shaft 203 upper end at θ between rotating shaft 203 to rotating shaft 208 and θ, large arm 6 one end is connected to θ in rotating shaft 203, the other end connects forearm 5 near-end (close large arm 6 one end is near-end), and forearm 5 far-end connects upset wrist 4.
R to direct driving motor 207 and R to rotating shaft 208 with θ to rotating shaft 203 synchronous revolving, R can rotate to rotating shaft 203 to rotating shaft 208 relative to θ by drive R to direct driving motor 207 output shaft simultaneously, R drives large arm 6 around θ to rotating shaft 203 center steering to the revolution of rotating shaft 208, forearm 5 near-end turns round around large arm 6 far-end (large arm 6 is away from θ one end to rotating shaft 203) simultaneously, upset wrist 4 is turned round around forearm 5 far-end, fixed than angular speed motion by large arm 6, forearm 5 and upset wrist 4 three connecting rod, the R realizing robot moves to linear telescopic.
In radial alignment motion (R is to the motion) mechanism of above-mentioned wafer transfer robot, large arm 6 comprises large arm housing 601, large arm fixed pulley 210, forearm driving wheel 606, large arm half steel band 610, forearm live axle 604, crossed roller bearing d612, crossed roller bearing e613, deep groove ball bearing 605 up and down.
Large arm housing 601 is by large arm case top lid 607, large arm housing lower cover 602 upper-lower seal.
R connects the near-end upper shell of large arm housing 601 to rotating shaft 208 upper end, and large arm fixed pulley 210 is fixed on θ to rotating shaft 203 upper end, and large arm fixed pulley 210 and R are supported by crossed roller bearing d612 between rotating shaft 208; Supported by crossed roller bearing e613 between large arm housing lower cover 602 and large arm fixed pulley 210.
Large arm up and down half steel band 610 is fixedly mounted between the large arm fixed pulley 210 of large arm planet circular system and forearm driving wheel 606, large arm housing 601 far-end lower house is fixedly connected with forearm live axle 604, is supported between forearm live axle 604 and forearm driving wheel 606 by a pair deep groove ball bearing 605; Supported by crossed roller bearing c608 between little arm housing 501, large arm case top lid 607; Forearm driving wheel 606 upper end connects little arm housing 501 near-end.
Large arm housing 601 (being equivalent to planet carrier), large arm fixed pulley 210 (sun gear), forearm driving wheel 606 (planetary gear), large arm up and down half steel band 610 form planet cyclic gear train jointly.Large arm housing 601 turns round to rotating shaft 203 around θ, forearm driving wheel 606 is driven to revolve round the sun around large arm fixed pulley 210, large arm up and down half steel band 610 strip winding wheel is wound around, and large arm fixed pulley 210 is not turned round with large arm housing 601, make forearm driving wheel 606 around forearm live axle 604 rotation, and then drive little arm housing 501 near-end to turn round around large arm housing 601 far-end.
In radial alignment motion (R is to the motion) mechanism of above-mentioned wafer transfer robot, forearm 5 comprises little arm housing 501, forearm fixed wheel 512, forearm half steel band 510, wrist driving wheel 504, wrist live axle 502 up and down; Inner at little arm housing 501, forearm live axle 604 upper end being fixed on large arm housing 601 far-end is connected with forearm fixed wheel 512; Wrist live axle 502 is fixed on little arm housing 501 far-end lower house, wrist driving wheel 504 is supported on wrist live axle 502 lower end by upper and lower a pair deep groove ball bearing a503, is supported between wrist rotating shaft 505 and forearm upper cover 507 by crossed roller bearing b506; And forearm up and down half steel band 510 be connected between forearm fixed wheel 512 and wrist driving wheel 504; Wrist driving wheel 504 upper end connects wrist rotating shaft 505, and wrist rotating shaft 505 connects upset wrist 4.
Little arm housing 501 is sealed by forearm upper cover 507.
Little arm housing 501 near-end is when large arm housing 601 far-end revolution, and forearm fixed wheel 512 is static relative to large arm housing 601, and forearm up and down half steel band 510 is wound around around forearm fixed wheel 512 and wrist driving wheel 504, composition forearm planet circular system.The thorny wrist live axle 502 of wrist driving wheel 504 turns round, and wrist rotating shaft 505 is rotated around little arm housing 501 far-end thereupon.
With reference to shown in accompanying drawing 5, wrist rotating shaft 505 is turned round around little arm housing 501 far-end, and wrist rotating shaft 505 upper end is fixedly connected with upset wrist 4, and upset wrist 4 indoor design switching mechanism, drives vacuum suction end 3 to overturn.
When this wafer transfer robot R is to rectilinear motion, Figure 6 shows that forearm 5, large arm 6 revolution action signal relatively (in contrast accompanying drawing 1 size arm state) with reference to attached, vacuum suction end 3 achieves rotary movement simultaneously.
Adopt technique scheme, realize the vertical displacement movement of wafer transfer robot, center steering motion, radial alignment motion and flip-flop movement, meet the multitask requirement in wafer handling process.Adopt direct driving motor Direct driver, simplify robot interior structure, cut down the number of intermediate links, improve robot transmission precision and efficiency.Less part mechanism, is convenient to the Assembling Production of robot.The use of Steel Belt Transmission, can provide transmission accuracy, strengthens machine human reriability, the generation of decreasing pollution particulate, improves the cleaniliness classs of robot.Upset wrist increases the robot upset free degree, strengthens the scope of application of robot.Whole wafer transfer robot overcomes existing robot part's defect, and have good stability, transmission accuracy is high, and speed is fast, and cleaniliness classs is high, and electrical control is simple, the advantages such as Assembling Production is efficient.
Accompanying drawing explanation
Fig. 1 is the part assembling drawing of wafer transfer robot of the present invention.
Fig. 2 is elevating movement mechanism of wafer transfer robot of the present invention and center steering motion cut-away view.
Fig. 3 is the internal view of Fig. 2.
Fig. 4 is wafer transfer robot of the present invention radial alignment motion internal view.
Fig. 5 is the three-dimensional structure diagram of Fig. 4.
Fig. 6 be wafer transfer robot of the present invention compared to Figure 1 compared with arm flexible with wrist rotary movement figure.
In figure: 1: pedestal, 2: lifting and slew gear, 3: vacuum suction end, 4: upset wrist, 5: forearm, 6: large arm.
101: servomotor, 102: decelerator, 103: shaft coupling, 104: pedestal section bar, 105: guide rail, 106: lifting connecting plate, 107: slide block, 108: nut, 109: leading screw, 110: pedestal upper cover.
201: connecting plate fixed muffle, 202: connecting plate fixes upper bush, 203: θ to rotating shaft, 204: θ to direct driving motor, 205: θ to rotating shaft connecting plate a, and 206: θ to rotating shaft connecting plate b, and 207:R is to direct driving motor, 208:R is to rotating shaft, 209: θ to rotating shaft upper cover, and 210: large arm fixed pulley, 211: crossed roller bearing upper press cover, 212: crossed roller bearing a, 213: thrust bearing, 214: θ to shaft sleeve, and 215: crossed roller bearing b, 216:O type wear-resisting high-strength degree sealing ring, the large elastic rubber ring of 217:U type.
401: wrist housing, 424: vacuum tracheae, 425: wrist motor control lines.
501: little arm housing, 502: wrist live axle, 503: deep groove ball bearing a, 504: wrist driving wheel, 505: wrist rotating shaft, 506: crossed roller bearing b, 507: forearm upper cover, 508:O RunddichtringO a, 509: bearing gland, 510: forearm is half steel band up and down, 511: forearm fixed wheel gland, 512: forearm fixed wheel, 513; O RunddichtringO b.
601: large arm housing, 602: large arm housing lower cover, 603:O RunddichtringO c, 604: forearm live axle, 605: deep groove ball bearing b, 606: forearm driving wheel, 607: large arm case top lid, 608: crossed roller bearing c, 609: bearing upper press cover, 610: large arm is half steel band up and down, 611: crossed roller bearing back-up ring a, 612: crossed roller bearing d, 613: crossed roller bearing e, 614: crossed roller bearing back-up ring b, 615: bearing bottom end cover.
Detailed description of the invention
Specific embodiments of the invention are elaborated below in conjunction with concrete legend.
As shown in figures 1 to 6, the turning wafer transfer robot of a kind of direct-drive type, this robot comprises pedestal 1, lifting and slew gear 2, vacuum suction end 3, overturns wrist 4, forearm 5 and large arm 6; Lifting and slew gear 2 are installed in described pedestal 1 inside, lifting is connected with large arm 6 one end (near-end) with slew gear 2, large arm 6 other end (far-end) is connected with forearm 5 one end (near-end); forearm 5 other end (far-end) is connected with one end of upset wrist 4, and the other end of upset wrist 4 is connected with vacuum suction end 3.
During described wafer transfer robot motion, pedestal 1 is fixed, and lifting and slew gear 2 around pedestal 1 center steering, also can move up and down along pedestal vertical direction (Z-direction); Large arm 6 near-end can wraparound rotation mechanism 2 center steering (θ to motion); forearm 5 near-end turn round around large arm 6 distal center; upset wrist 4 is around the revolution of forearm 5 far-end, and the certainty ratio revolution of large arm 6, forearm 5 and upset wrist 4 realizes the radial alignment motion of robot arm (R is to moving); Upset wrist 4 built-in turning structure, vacuum suction end 3 thorny wrist housing horizontal axis overturns; Vacuum suction end 3 adsorbs wafer, drives wafer motion.
The elevating mechanism of above-mentioned wafer transfer robot, with reference to shown in accompanying drawing 2, this elevating mechanism comprises servomotor 101, decelerator 102, shaft coupling 103, pedestal section bar 104, nut 108, leading screw 109, guide rail 105, slide block 107 and lifting connecting plate 106.Servomotor 101, decelerator 102, leading screw 109 and nut 108 are coaxially arranged forms feed screw nut auxiliary drive gear on pedestal 1 sidewall; Pedestal section bar 104 is pedestal lateral support, and guide rail 105 is fixed on pedestal section bar 104; Nut 108 connects lifting connecting plate 106.
Servomotor 101 is connected with decelerator 102, and the output shaft of decelerator 102 is connected with leading screw 109 by shaft coupling 103; Leading screw 109 is fixed in the middle of the sidewall of pedestal 1, and two guide rails 105 are fixed on the sidewall both sides of pedestal 1; Described each guide rail 105 is separately installed with two slide blocks, 107, two slide blocks 107 to be connected with lifting connecting plate 106, to realize guide effect respectively.
Described servomotor 101 slows down through decelerator 102, drives the elevating movement of the nut 108 of screw pair, and then drives lifting connecting plate 106 to move up and down.
Center steering (θ is to the motion) mechanism of above-mentioned wafer transfer robot, comprises θ to direct driving motor 204, θ to rotating shaft 203, crossed roller bearing b215, thrust bearing 213.θ is fixed on lifting connecting plate 106 to the base of direct driving motor 204, and θ is connected to θ to the output shaft end of direct driving motor 204 to rotating shaft 203 and is connected to rotating shaft connecting plate a205 with θ; θ is connected by screw to rotating shaft connecting plate b206 and is fixed on θ on rotating shaft connecting plate a205.
The outer ring of crossed roller bearing b215 is fixedly mounted on connecting plate fixed muffle 201 inwall, to bear θ to the radial load of rotating shaft 203 and power of toppling; Thrust bearing 213 is fixed upper bush 202 by θ be arranged on θ on the outer wall of rotating shaft 203 to shaft sleeve 214, connecting plate.Thrust bearing 213 is in order to bear the axial force of robots arm's body.θ coordinates to rotating shaft 203 with pedestal upper cover 110, is provided with U-shaped large elastic rubber ring 217 and O type wear-resisting high-strength degree sealing ring 216 at pedestal upper cover 110 endoporus place simultaneously.
θ rotates to direct driving motor 204 output shaft Direct driver θ to rotating shaft 203, drives crossed roller bearing b215 inner ring, θ to shaft sleeve 214 and thrust bearing 213 times circle common rotation.U-shaped large elastic rubber ring 217 floats and bears the radial unbalance loading of θ to rotating shaft 203.
Radial alignment motion (R is to the motion) mechanism of above-mentioned wafer transfer robot, comprises R to direct driving motor 207, R to rotating shaft 208, large arm 6, forearm 5, upset wrist 4; It is inner to rotating shaft 203 that R is coaxially arranged on θ to direct driving motor 207, and R is arranged on θ on rotating shaft connecting plate b206 to the bottom of direct driving motor 207; R directly connects R to rotating shaft 208 to the output shaft of direct driving motor 207, R is supported by crossed roller bearing a212 to rotating shaft 203 upper end at θ between rotating shaft 203 to rotating shaft 208 and θ, large arm 6 one end is connected to θ in rotating shaft 203, the other end connects forearm 5 near-end (close large arm 6 one end is near-end), and forearm 5 far-end connects upset wrist 4.
R to direct driving motor 207 and R to rotating shaft 208 with θ to rotating shaft 203 synchronous revolving, R can rotate to rotating shaft 203 to rotating shaft 208 relative to θ by drive R to direct driving motor 207 output shaft simultaneously, R drives large arm 6 around θ to rotating shaft 203 center steering to the revolution of rotating shaft 208, forearm 5 near-end turns round around large arm 6 far-end (large arm 6 is away from θ one end to rotating shaft 203) simultaneously, upset wrist 4 is turned round around forearm 5 far-end, fixed than angular speed motion by large arm 6, forearm 5 and upset wrist 4 three connecting rod, the R realizing robot moves to linear telescopic.
The lifting of above-mentioned wafer transfer robot and slew gear 2 (R is to motion), large arm 6 comprises large arm housing 601, large arm fixed pulley 210, forearm driving wheel 606, large arm half steel band 610, forearm live axle 604, crossed roller bearing d612, crossed roller bearing e613, deep groove ball bearing 605 up and down.
Large arm housing 601 is by large arm case top lid 607, large arm housing lower cover 602 upper-lower seal.
R connects the near-end upper shell of large arm housing 601 to rotating shaft 208 upper end, and large arm fixed pulley 210 is fixed on θ to rotating shaft 203 upper end, and large arm fixed pulley 210 and R are supported by crossed roller bearing d612 between rotating shaft 208; Supported by crossed roller bearing e613 between large arm housing lower cover 602 and large arm fixed pulley 210.
Large arm up and down half steel band 610 is fixedly mounted between the large arm fixed pulley 210 of large arm planet circular system and forearm driving wheel 606, large arm housing 601 far-end lower house is fixedly connected with forearm live axle 604, is supported between forearm live axle 604 and forearm driving wheel 606 by a pair deep groove ball bearing 605; Supported by crossed roller bearing c608 between little arm housing 501, large arm case top lid 607; Forearm driving wheel 606 upper end connects little arm housing 501 near-end.
Large arm housing 601 (being equivalent to planet carrier), large arm fixed pulley 210 (sun gear), forearm driving wheel 606 (planetary gear), large arm up and down half steel band 610 form planet cyclic gear train jointly.Large arm housing 601 turns round to rotating shaft 203 around θ, forearm driving wheel 606 is driven to revolve round the sun around large arm fixed pulley 210, large arm up and down half steel band 610 strip winding wheel is wound around, and large arm fixed pulley 210 is not turned round with large arm housing 601, make forearm driving wheel 606 around forearm live axle 604 rotation, and then drive little arm housing 501 near-end to turn round around large arm housing 601 far-end.
In radial alignment motion (R is to the motion) mechanism of above-mentioned wafer transfer robot, forearm 5 comprises little arm housing 501, forearm fixed wheel 512, forearm half steel band 510, wrist driving wheel 504, wrist live axle 502 up and down; Inner at little arm housing 501, forearm live axle 604 upper end being fixed on large arm housing 601 far-end is connected with forearm fixed wheel 512; Wrist live axle 502 is fixed on little arm housing 501 far-end lower house, wrist driving wheel 504 is supported on wrist live axle 502 lower end by upper and lower a pair deep groove ball bearing a503, is supported between wrist rotating shaft 505 and forearm upper cover 507 by crossed roller bearing b506; And forearm up and down half steel band 510 be connected between forearm fixed wheel 512 and wrist driving wheel 504; Wrist driving wheel 504 upper end connects wrist rotating shaft 505, and wrist rotating shaft 505 connects upset wrist 4.
Little arm housing 501 is sealed by forearm upper cover 507.
Little arm housing 501 near-end is when large arm housing 601 far-end revolution, and forearm fixed wheel 512 is static relative to large arm housing 601, and forearm up and down half steel band 510 is wound around around forearm fixed wheel 512 and wrist driving wheel 504, composition forearm planet circular system.The thorny wrist live axle 502 of wrist driving wheel 504 turns round, and wrist rotating shaft 505 is rotated around little arm housing 501 far-end thereupon.
With reference to shown in accompanying drawing 5, wrist rotating shaft 505 is turned round around little arm housing 501 far-end, and wrist rotating shaft 505 upper end is fixedly connected with upset wrist 4, and upset wrist 4 indoor design switching mechanism, drives vacuum suction end 3 to overturn.
When this wafer transfer robot R is to rectilinear motion, Figure 6 shows that forearm 5, large arm 6 revolution action signal relatively (in contrast accompanying drawing 1 size arm state) with reference to attached, vacuum suction end 3 achieves rotary movement simultaneously.
Claims (7)
1. the turning wafer transfer robot of direct-drive type, is characterized in that: this robot comprises pedestal (1), lifting and slew gear (2), vacuum suction end (3), upset wrist (4), forearm (5) and large arm (6); Lifting and slew gear (2) are installed in described pedestal (1) inside, lifting is connected with large arm (6) one end with slew gear (2), large arm (6) other end is connected with forearm (5) one end; forearm (5) other end is connected with one end of upset wrist (4), and the other end of upset wrist (4) is connected with vacuum suction end (3);
During described wafer transfer robot motion, pedestal (1) is fixed, and lifting and slew gear (2), around pedestal (1) center steering, also move up and down along pedestal vertical direction; Large arm (6) near-end can wraparound rotation mechanism (2) center steering; forearm (5) near-end turns round around large arm (6) distal center; upset wrist (4) is around the revolution of forearm (5) far-end, and the radial alignment that the certainty ratio revolution of large arm (6), forearm (5) and upset wrist (4) realizes robot arm is moved; Upset wrist (4) built-in turning structure, vacuum suction end (3) thorny wrist housing horizontal axis overturns; Vacuum suction end (3) absorption wafer, drives wafer motion.
2. the turning wafer transfer robot of a kind of direct-drive type according to claim 1, is characterized in that: the elevating mechanism of the lifting of wafer transfer robot and slew gear (2) comprises servomotor (101), decelerator (102), shaft coupling (103), pedestal section bar (104), nut (108), leading screw (109), guide rail (105), slide block (107) and lifting connecting plate (106); Servomotor (101), decelerator (102), leading screw (109) and nut (108) are coaxially arranged forms feed screw nut auxiliary drive gear on pedestal (1) sidewall; Pedestal section bar (104) is pedestal lateral support, and guide rail (105) is fixed on pedestal section bar (104); Nut (108) connects lifting connecting plate (106);
Servomotor (101) is connected with decelerator (102), and the output shaft of decelerator (102) is connected with leading screw (109) by shaft coupling (103); Leading screw (109) is fixed in the middle of the sidewall of pedestal (1), and two guide rails (105) are fixed on the sidewall both sides of pedestal (1); Described each guide rail (105) is separately installed with two slide blocks (107), two slide blocks (107) are connected with lifting connecting plate (106), to realize guide effect respectively;
Described servomotor (101) slows down through decelerator (102), drives the elevating movement of the nut (108) of screw pair, and then drives lifting connecting plate (106) to move up and down.
3. the turning wafer transfer robot of a kind of direct-drive type according to claim 1, it is characterized in that: the center steering mechanism of the lifting of wafer transfer robot and slew gear (2), comprise θ to direct driving motor (204), θ to rotating shaft (203), crossed roller bearing b (215), thrust bearing (213); θ is fixed in lifting connecting plate (106) to the base of direct driving motor (204), and θ is connected to θ to the output shaft end of direct driving motor (204) to rotating shaft (203) and is connected to rotating shaft connecting plate a (205) with θ; θ is connected by screw to rotating shaft connecting plate b (206) and is fixed on θ on rotating shaft connecting plate a (205);
The outer ring of crossed roller bearing b (215) is fixedly mounted on connecting plate fixed muffle (201) inwall, to bear θ to the radial load of rotating shaft (203) and power of toppling; Thrust bearing (213) is fixed upper bush (202) by θ be arranged on θ on the outer wall of rotating shaft (203) to shaft sleeve (214), connecting plate; Thrust bearing (213) is in order to bear the axial force of robots arm's body; θ coordinates to rotating shaft (203) with pedestal upper cover (110), is provided with U-shaped large elastic rubber ring (217) and O type wear-resisting high-strength degree sealing ring (216) at pedestal upper cover (110) endoporus place simultaneously;
θ rotates to direct driving motor (204) output shaft Direct driver θ to rotating shaft (203), and drive crossed roller bearing b (215) inner ring, θ enclose common rotation under shaft sleeve (214) and thrust bearing (213); U-shaped large elastic rubber ring (217) floating bears the radial unbalance loading of θ to rotating shaft (203);
R to direct driving motor (207), R to rotating shaft (208), large arm (6), forearm (5), upset wrist (4) composition wafer transfer robot radial alignment motion; It is inner to rotating shaft (203) that R is coaxially arranged on θ to direct driving motor (207), and R is arranged on θ on rotating shaft connecting plate b (206) to the bottom of direct driving motor (207); R directly connects R to rotating shaft (208) to the output shaft of direct driving motor (207), R is supported by crossed roller bearing a (212) to rotating shaft (203) upper end at θ between rotating shaft (203) to rotating shaft (208) and θ, large arm (6) one end is connected to θ in rotating shaft (203), the other end connects forearm (5) near-end, and forearm (5) far-end connects upset wrist (4);
R to direct driving motor (207) and R to rotating shaft (208) with θ to rotating shaft (203) synchronous revolving, R can rotate to rotating shaft (203) to rotating shaft (208) relative to θ by drive R to direct driving motor (207) output shaft simultaneously, R drives large arm (6) around θ to rotating shaft (203) center steering to the revolution of rotating shaft (208), forearm (5) near-end turns round around large arm (6) far-end simultaneously, upset wrist (4) is turned round around forearm (5) far-end, by large arm (6), forearm (5) and upset wrist (4) three connecting rod are determined to move than angular speed, the R realizing robot moves to linear telescopic.
4. the turning wafer transfer robot of a kind of direct-drive type according to claim 1, it is characterized in that: in the radial alignment motion of above-mentioned wafer transfer robot, large arm (6) comprises large arm housing (601), large arm fixed pulley (210), forearm driving wheel (606), large arm half steel band (610), forearm live axle (604), crossed roller bearing d (612), crossed roller bearing e (613), deep groove ball bearing (605) up and down;
Large arm housing (601) is by large arm case top lid (607), large arm housing lower cover (602) upper-lower seal;
R connects the near-end upper shell of large arm housing (601) to rotating shaft (208) upper end, large arm fixed pulley (210) is fixed on θ to rotating shaft (203) upper end, and large arm fixed pulley (210) and R are supported by crossed roller bearing d (612) between rotating shaft (208); Supported by crossed roller bearing e (613) between large arm housing lower cover (602) and large arm fixed pulley (210);
Large arm up and down half steel band (610) is fixedly mounted between the large arm fixed pulley (210) of large arm planet circular system and forearm driving wheel (606), large arm housing (601) far-end lower house is fixedly connected with forearm live axle (604), is supported between forearm live axle (604) and forearm driving wheel (606) by a pair deep groove ball bearing (605); Supported by crossed roller bearing c (608) between little arm housing (501), large arm case top lid (607); Forearm driving wheel (606) upper end connects little arm housing (501) near-end.
5. the turning wafer transfer robot of a kind of direct-drive type according to claim 1, is characterized in that: large arm housing (601), large arm fixed pulley 210, forearm driving wheel (606), large arm up and down half steel band (610) form planet cyclic gear train jointly; Large arm housing (601) turns round to rotating shaft (203) around θ, forearm driving wheel (606) is driven to revolve round the sun around large arm fixed pulley (210), large arm up and down half steel band (610) strip winding wheel is wound around, and large arm fixed pulley (210) is not turned round with large arm housing (601), make forearm driving wheel (606) around forearm live axle (604) rotation, and then drive little arm housing (501) near-end to turn round around large arm housing (601) far-end.
6. the turning wafer transfer robot of a kind of direct-drive type according to claim 1, it is characterized in that: in the radial alignment motion of above-mentioned wafer transfer robot, forearm (5) comprises little arm housing (501), forearm fixed wheel (512), forearm half steel band (510), wrist driving wheel (504), wrist live axle (502) up and down; Inner at little arm housing (501), forearm live axle (604) upper end being fixed on large arm housing (601) far-end is connected with forearm fixed wheel (512); Wrist live axle (502) is fixed on little arm housing (501) far-end lower house, wrist driving wheel (504) is supported on wrist live axle (502) lower end by upper and lower a pair deep groove ball bearing a (503), is supported between wrist rotating shaft (505) and forearm upper cover (507) by crossed roller bearing b (506); And forearm up and down half steel band (510) be connected between forearm fixed wheel (512) and wrist driving wheel (504); Wrist driving wheel (504) upper end connects wrist rotating shaft (505), and wrist rotating shaft (505) connects upset wrist (4);
Little arm housing (501) is sealed by forearm upper cover (507).
7. the turning wafer transfer robot of a kind of direct-drive type according to claim 1, it is characterized in that: little arm housing (501) near-end is when large arm housing (601) far-end turns round; forearm fixed wheel (512) is static relative to large arm housing (601); forearm up and down half steel band (510) is wound around around forearm fixed wheel (512) and wrist driving wheel (504), composition forearm planet circular system; Thorny wrist live axle (502) revolution of wrist driving wheel (504), wrist rotating shaft (505) is rotated around little arm housing (501) far-end thereupon;
Wrist rotating shaft (505) is turned round around little arm housing (501) far-end, wrist rotating shaft (505) upper end is fixedly connected with upset wrist (4), upset wrist (4) indoor design switching mechanism, drives vacuum suction end (3) upset.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510121144.7A CN104723332B (en) | 2015-03-19 | 2015-03-19 | A kind of direct-drive type may be reversed wafer transfer robot |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510121144.7A CN104723332B (en) | 2015-03-19 | 2015-03-19 | A kind of direct-drive type may be reversed wafer transfer robot |
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| CN104723332B CN104723332B (en) | 2017-04-05 |
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| CN106393077A (en) * | 2016-11-24 | 2017-02-15 | 上海交通大学 | Five-freedom-degree spraying robot |
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| CN110948512A (en) * | 2018-09-26 | 2020-04-03 | 沈阳新松机器人自动化股份有限公司 | Tilt-swing compensation type direct-drive vacuum robot |
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| CN114620447A (en) * | 2022-04-26 | 2022-06-14 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Substrate transfer device |
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| CN113043253A (en) * | 2021-02-08 | 2021-06-29 | 珞石（北京）科技有限公司 | Single-drive linear motion robot |
| CN114620447A (en) * | 2022-04-26 | 2022-06-14 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Substrate transfer device |
| CN114620447B (en) * | 2022-04-26 | 2024-01-26 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Substrate transfer apparatus |
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