CN104458654A - Gold-silicon dioxide-gold waveguide optical humidity sensing device based on surface plasmon resonance principle - Google Patents
Gold-silicon dioxide-gold waveguide optical humidity sensing device based on surface plasmon resonance principle Download PDFInfo
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- CN104458654A CN104458654A CN201410848657.3A CN201410848657A CN104458654A CN 104458654 A CN104458654 A CN 104458654A CN 201410848657 A CN201410848657 A CN 201410848657A CN 104458654 A CN104458654 A CN 104458654A
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Abstract
The invention discloses a gold-silicon dioxide-gold waveguide optical humidity sensing device based on the surface plasmon resonance principle. The gold-silicon dioxide-gold waveguide optical humidity sensing device based on the surface plasmon resonance principle comprises a laser device, a prism-excited gold-silicon dioxide-gold waveguide surface plasmon resonance sensor and a spectrum detector which are connected in sequence. The gold-silicon dioxide-gold waveguide optical humidity sensing device based on the surface plasmon resonance principle is characterized in that the prism-excited gold-silicon dioxide-gold waveguide surface plasmon resonance sensor is formed by sequentially arranging a first gold film layer, a silicon dioxide film layer and a second gold film layer at the bottom of a prism. According to the device, the SPR technology is applied to the field of humidity sensing, and the sensitivity of humidity sensing can be improved remarkably; meanwhile, the defects of low integration degree and accuracy, instability, long response time and the like existing in current electronic and electric quantity humidity sensors can be overcome, and particularly remote transmission sensing and application under special conditions such as a low-temperature complex environment can be realized according to the characteristics of optical sensors.
Description
Technical field
The present invention relates to sensor technology, the light humidity sensing device of specifically a kind of gold based on surface plasma resonance principle-silicon dioxide-Jin waveguide.
Background technology
Surface plasma resonance (Surface plasmon resonance is called for short SPR) is the phenomenon of the free electron collective oscillation that the free electron at metallic film and dielectric interface place produces because being subject to exciting of evanescent wave.Surface plasma-wave can be propagated in sub-wavelength structure system, form high integration photon circuit, it is the important channel that optical device and electron device are integrated together, surface plasmon resonance sensor technique, being subject to the great attention of scientific research personnel with fast-developing in recent years, particularly makes a breakthrough in biomacromolecule detection.Especially with the Ock seminar of Thomas Jefferson Univ. of the U.S. with spr sensor to Cu
2+detect, as the thin polymeric layers used and Cu
2+in conjunction with after, its refractive index changes, and causes the marked change of refractive index along with anomalous dispersion, finally obtains detectability and is low to moderate 10
-12m.With the sensing modality of tradition interaction technology as ultracentrifugation, fluorescence method, calorimetries etc. are compared, and SPR technique in most cases, does not need to process sample; High flux can be realized, high-quality analysis data; Can analyze in the even opaque sample of muddiness, this makes it receive the extensive attention of domestic and international many scholars in field of sensing technologies, mostly concentrates on the field such as bio-sensing, gas sensing at present for spr sensor research.
And " sensor and micro-system " 28 volumes the 5th phase 68-71 page has published in 2009 " the refractive index susceptibility index of light humidity sensor " one literary composition, the people such as the Wang Zhenyuan of Shanghai University of Science and Technology utilize the Maxwell-Gamett theoretical analysis susceptibility index of silica membrane, for silica membrane has made Theoretical Proof as wet sensory material, but also do not see the sensing device utilizing this material behavior to realize at present.From current development, utilize silica membrane to realize sensor-based system and be designed in order to silica membrane is as the primary goal of wet sensory material to practical transformation.
Summary of the invention
The object of the invention is for the deficiencies in the prior art, and the light humidity sensing device of a kind of gold based on surface plasma resonance principle-silicon dioxide-Jin waveguide is provided.This device can make up low, the low problem of precision of integration degree that electronics humidity sensor exists, and can also improve the problems such as the slow and sensitivity of the instability of electrical quantity sensor, reaction time is low, and structure simple, be easy to realize.
The technical scheme realizing the object of the invention is:
Based on a light humidity sensing device for the gold-silicon dioxide-Jin waveguide of surface plasma resonance principle, comprise gold that the laser instrument, the prism that are linked in sequence excite-silicon dioxide-Jin waveguide surface plasma resonance sensor, spectrum detection instrument.
Described laser instrument is He-Ne laser instrument.
The prism of the gold that described prism excites-silicon dioxide-Jin waveguide surface plasma resonance sensor is high-transmission rate BK7 glass.
The gold that described prism excites-silicon dioxide-Jin waveguide surface plasma resonance sensor arranges the first golden membranous layer, silica coating and the second golden membranous layer in the bottom of prism order to form.
The waveguiding structure of the gold that described prism excites-silicon dioxide-Jin waveguide surface plasma resonance sensor is the metal-dielectric-metal waveguiding structure of asymmetric membrane.
The waveguiding structure of gold-silicon dioxide-Jin can strengthen surface plasmon modes coupling effect, thus the signal intensity intensity that raising silica membrane effective refractive index changes with humidity, improve the accuracy of spectral detection.
The waveguiding structure of gold-silicon dioxide-Jin just can conveniently realize making by metallic film technique.
The P polarized light excitating surface plasma resonance phenomenon that this device utilizes output wavelength to be 632nm He-Ne laser emitting, receive resonance angle change by spectrum detection instrument, utilize surface plasma resonance principle and humidity and effective refractive index relation to obtain humidity and change.
The resonance angle that spectrum detection instrument detects obtains humidity sensor amount by following relation:
Exist between effective refractive index and humidity
relation, f in formula
1the volume fraction of pore in material, f
2the volume fraction of moisture film and crystal grain complex, and f
1+ f
2=1, n
1the refractive index of silica dioxide medium, n
2be that moisture film represents corresponding refractive index with crystal grain complex effective refractive index, obtain by effective refractive index in surface plasma resonance principle and resonance angle variation relation the amount that humidity sensor changes further.
SPR technique is applied in the sensitivity that humidity sensor field can improve humidity sensor significantly by this device, deficiencies such as can also improving Current electronic simultaneously, electricity humidity sensor exists integration degree is low, precision is low, instability, reaction time are slow, can also utilize the feature of optical sensor to realize as the application under the specific conditions such as long-distance transmissions sensing, low temperature complex environment especially.
Accompanying drawing explanation
Fig. 1 is the structural representation of embodiment;
Fig. 2 is reinforced surface plasma resonance sensor structure.
In figure, the gold that 1.He-Ne laser instrument 2. prism excites-silicon dioxide-Jin waveguide surface plasma resonance sensor 3. spectrum detection instrument 4. polarized light 5. reflectance spectrum 6. prism 7. first golden membranous layer 8. silica coating 9. second golden membranous layer.
Embodiment
Below in conjunction with drawings and Examples, explanation is further elaborated to content of the present invention, but the present invention is not limited.
Embodiment:
With reference to Fig. 1 Fig. 2, based on a light humidity sensing device for the gold-silicon dioxide-Jin waveguide of surface plasma resonance principle, comprise gold that the laser instrument 1, the prism that are linked in sequence excite-silicon dioxide-Jin waveguide surface plasma resonance sensor 2, spectrum detection instrument 3.
Described laser instrument 1 is He-Ne laser instrument, and its wavelength is 632nm, and this laser instrument has very high stability and directivity, and light beam to concentrate be the ideal chose of sensor light source.
The prism 6 of the gold that described prism excites-silicon dioxide-Jin waveguide surface plasma resonance sensor 2 is high-transmission rate BK7 glass.
The gold that described prism excites-silicon dioxide-Jin waveguide surface plasma resonance sensor 2 arranges the first golden membranous layer 7, silica coating 8 and the second golden membranous layer 9 in the bottom of prism 6 order to form.
The waveguiding structure of the gold that described prism excites-silicon dioxide-Jin waveguide surface plasma resonance sensor 2 is the metal-dielectric-metal waveguiding structure of asymmetric membrane, the long 1000nm of symmetrical golden film first golden membranous layer 7, second golden membranous layer 9, wide 800nm, thickness is 100nm; Silica coating 8 thickness is 1500nm.
Silica membrane in the waveguiding structure of gold-silicon dioxide-Jin is made by colloidal sol-gel process, such silica membrane has good hygronasty, carry out feeling that wet hygroscopic capacity is large, dehumidification rapid with silica membrane, sensing capabilities be stable, the reaction time is short, can recycling rate of waterused high.
The waveguiding structure of gold-silicon dioxide-Jin can strengthen surface plasmon modes coupling effect, thus the signal intensity intensity that raising silica membrane effective refractive index changes with humidity, improve the accuracy of spectral detection.
The waveguiding structure of gold-silicon dioxide-Jin just can conveniently realize making by metallic film technique.
The P polarized light excitating surface plasma resonance phenomenon that this device utilizes output wavelength to be 632nm He-Ne laser emitting, receive resonance angle change by spectrum detection instrument, utilize surface plasma resonance principle and humidity and effective refractive index relation to obtain humidity and change.
The waveguiding structure of gold-silicon dioxide-Jin just can conveniently realize making by metallic film technique.
The resonance angle that spectrum detection instrument detects obtains humidity sensor amount by following relation: exist between effective refractive index and humidity
relation, f in formula
1the volume fraction of pore in material, f
2the volume fraction of moisture film and crystal grain complex, and f
1+ f
2=1, n
1the refractive index of silica dioxide medium, n
2be that moisture film represents corresponding refractive index with crystal grain complex effective refractive index, obtain by effective refractive index in surface plasma resonance principle and resonance angle variation relation the amount that humidity sensor changes further.
SPR technique is applied in the sensitivity that humidity sensor field can improve humidity sensor significantly by this device, deficiencies such as can also improving Current electronic simultaneously, electricity humidity sensor exists integration degree is low, precision is low, instability, reaction time are slow, can also utilize the feature of optical sensor to realize as the application under the specific conditions such as long-distance transmissions sensing, low temperature complex environment especially.
Particularly, as shown in Figure 1, utilize SPR more highly sensitive than long-wave limit at short wave ranges, system adopts output wavelength to be 632nm He-Ne laser instrument 1, the prism 6 of surface plasma resonance sensor is utilized to receive the P polarized light 4 of laser emitting, P polarized wave can inspire the surface plasma on silica membrane surface effectively, make the evanescent waves in prism total reflection phenomenon and surface plasma wave generation resonance effect, because silicon dioxide hygroscopic capacity is large, the refractive index of silica surface can be made 1.37-1.44 change to occur thus cause resonance angle to change, then reflectance spectrum 5 changing value of prism 6 is detected by spectrum detection instrument 3.Obtaining resonance angle change according to effective refractive index with the characteristic relation that humidity changes causes humidity sensor to change.
Claims (2)
1. the light humidity sensing device of the gold based on surface plasma resonance principle-silicon dioxide-Jin waveguide, comprise the laser instrument be linked in sequence, the gold that prism excites-silicon dioxide-Jin waveguide surface plasma resonance sensor, spectrum detection instrument, it is characterized in that, the gold that described prism excites-silicon dioxide-Jin waveguide surface plasma resonance sensor arranges the first golden membranous layer in the bottom of prism order, silica coating and the second golden membranous layer are formed, the P polarized light excitating surface plasma resonance phenomenon utilizing output wavelength to be 632nm He-Ne laser emitting, obtain feeling wet variable quantity by resonance angle change, pass through SiO
2cause effective refractive index to change to the sensitive Variation Features of humidity, receive resonance angle by spectrum detection instrument and change, adopt surface plasma resonance principle and humidity and effective refractive index relation to obtain feeling wet variable quantity.
2. the light humidity sensing device of the gold based on surface plasma resonance principle according to claim 1-silicon dioxide-Jin waveguide, it is characterized in that, the waveguiding structure of the gold that described prism excites-silicon dioxide-Jin waveguide surface plasma resonance sensor is the metal-dielectric-metal waveguiding structure of asymmetric membrane.
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| CN201410848657.3A CN104458654A (en) | 2014-12-31 | 2014-12-31 | Gold-silicon dioxide-gold waveguide optical humidity sensing device based on surface plasmon resonance principle |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105865525A (en) * | 2016-05-11 | 2016-08-17 | 广西师范大学 | Multi-layer medium-metal-medium waveguide temperature and humidity surface plasma resonance sensing device |
| CN106053393A (en) * | 2016-05-18 | 2016-10-26 | 南京信息工程大学 | Relative humidity sensor device based on nano coaxial cavity structure and surface plasmon effect and manufacturing method thereof |
Citations (4)
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| US6466323B1 (en) * | 1999-11-23 | 2002-10-15 | Westinghouse Savannah River Company, L.L.C. | Surface plasmon resonance spectroscopy sensor and methods for using same |
| JP2004117325A (en) * | 2002-09-30 | 2004-04-15 | Osp:Kk | Light reflective sensor and its structure |
| CN103620385A (en) * | 2011-06-13 | 2014-03-05 | 新日铁住金化学株式会社 | Sensor element, dew condensation sensor, humidity sensor, method for detecting dew condensation, and dew-point measurement device |
| CN204346914U (en) * | 2014-12-31 | 2015-05-20 | 广西师范大学 | Based on the light humidity sensing device of the gold-silicon dioxide-Jin waveguide of surface plasma resonance principle |
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2014
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6466323B1 (en) * | 1999-11-23 | 2002-10-15 | Westinghouse Savannah River Company, L.L.C. | Surface plasmon resonance spectroscopy sensor and methods for using same |
| JP2004117325A (en) * | 2002-09-30 | 2004-04-15 | Osp:Kk | Light reflective sensor and its structure |
| CN103620385A (en) * | 2011-06-13 | 2014-03-05 | 新日铁住金化学株式会社 | Sensor element, dew condensation sensor, humidity sensor, method for detecting dew condensation, and dew-point measurement device |
| CN204346914U (en) * | 2014-12-31 | 2015-05-20 | 广西师范大学 | Based on the light humidity sensing device of the gold-silicon dioxide-Jin waveguide of surface plasma resonance principle |
Non-Patent Citations (2)
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|---|
| ERWIN MACIAK ET AL.: "EFFECT OF HUMIDITY ON NH3 GAS SENSITIVITY OF NAFION/WO3<sub> SENSING STRUCTURE OF SPR SENSOR", 《MOLECULAR AND QUANTUM ACOUSTICS》 * |
| 王珍媛等: "光湿度传感器的折射率感湿机理", 《传感器与微系统》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105865525A (en) * | 2016-05-11 | 2016-08-17 | 广西师范大学 | Multi-layer medium-metal-medium waveguide temperature and humidity surface plasma resonance sensing device |
| CN105865525B (en) * | 2016-05-11 | 2018-07-06 | 广西师范大学 | A kind of multilayer dielectricity-metal-dielectric waveguide humiture surface plasma resonance sensing device |
| CN106053393A (en) * | 2016-05-18 | 2016-10-26 | 南京信息工程大学 | Relative humidity sensor device based on nano coaxial cavity structure and surface plasmon effect and manufacturing method thereof |
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Application publication date: 20150325 |