CN104166131B - Double-longitudinal mode laser ranging device and method based on traceable synchronous measuring tapes - Google Patents
Double-longitudinal mode laser ranging device and method based on traceable synchronous measuring tapes Download PDFInfo
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- CN104166131B CN104166131B CN201410263633.1A CN201410263633A CN104166131B CN 104166131 B CN104166131 B CN 104166131B CN 201410263633 A CN201410263633 A CN 201410263633A CN 104166131 B CN104166131 B CN 104166131B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S11/00—Systems for determining distance or velocity not using reflection or reradiation
- G01S11/12—Systems for determining distance or velocity not using reflection or reradiation using electromagnetic waves other than radio waves
Abstract
A double-longitudinal mode laser ranging device and method based on traceable synchronous measuring tapes belongs to phase laser ranging technology. The ranging device includes a measuring tape generation unit, a laser frequency shift unit, a beam-expanding collimating lens group, a measuring light path and a circuit unit. The ranging method includes the following steps: step one, starting a frequency reference laser and a double-longitudinal mode frequency stabilization He-Ne laser; step two, using one beam as a reference laser beam, and using the other beam as measuring laser; step three, using c/|v2-v3| as a precise measuring tape; step four, using c/|v1-v2| as a rough measuring tape; and step five, moving a measuring cone prism to a target end, obtaining phase differences phi1 and phi2 of the precise measuring tape and the rough measuring tape respectively, and finally obtaining measured distance values through formulas. The double-longitudinal mode laser ranging device and method based on the traceable synchronous measuring tapes in the invention solves the problem that phase laser ranging technology lacks a laser ranging device and method capable of giving consideration to large power, multi-measuring tape synchronization and traceability, and has the characteristics of high ranging precision, high measuring efficiency, and strong stability and real-time performance.
Description
Technical field
The invention belongs to phase place laser measuring technique, relate generally to a kind of phase laser distance apparatus and method.
Background technology
Large-scale metrology development large-scale precision machine-building, great science and technology engineering, aerospace industry, shipping industry and
Receive much concern in the large-scale optical, mechanical and electronic integration equipment processing and manufacturing of microelectronics equipment industry etc., wherein several meters to hundreds of meter of scopes big
Dimensional measurement is large parts processing and the overall important foundation assembled in aerospace vehicle and jumbo ship, its measurement side
Method directly affects workpiece quality and assembly precision with the quality of equipment performance, and then affects the running quality of complete equipment, performance
And the life-span.Chi phase ranging methods of surveying carry out refining accuracy survey using one group of survey chi wavelength from big to small to tested distance more
Amount, solves conflicting between measurement range and certainty of measurement, can reach submillimeter in hundreds of meters overlength operating distance
To micron-sized static measurement precision.
Survey in chi phase laser distance technology, although the mode how survey chi measures step by step has taken into account measurement range and survey more
The demand of accuracy of measurement, but the restriction due to light source technology, bigness scale chi and accurate measurement chi can not produce line phase measurement of going forward side by side simultaneously,
Cause that time of measuring is long, the problem of measurement result poor real, on the other hand due to surveying chi phase laser distance skills more
Measured on the basis of surveying chi wavelength size in art, the stability surveying chi wavelength directly affects the precision of laser ranging, therefore
How to obtain the bigness scale chi of high stability and accurate measurement chi wavelength, and to be allowed to simultaneously participate in measurement be that current raising surveys chi phase places more
Precision of laser ranging and the subject matter of real-time.
The stability surveying chi is relevant with light source technology with synchronous generation technology, by phase laser distance method LASER Light Source
The analysis of technology understands, the modulation means of phase difference method have electric current directly modulation, light modulation and intermode beats frequency modulation both at home and abroad at present
System etc..
Direct current modulation method utilizes semiconductor laser, and light intensity, with the feature of curent change, carrys out noise spectra of semiconductor lasers
Output intensity be modulated, have the advantages that simply easily modulate.Document [siyuan liu, jiubin tan and binke
hou.multicyclesynchronous digital phase measurement used to further improve
Phase-shift laser range finding.meas.sci.technol.2007,18:1756 1762] [many with patent
The large range high precision fast laser ranging apparatus and method of frequency synchronous modulation, publication number: cn1825138] all elaborate one kind
Based on the current modulating method of semiconductor laser, it is carried out to laser output power using the composite signal of multiple frequency synchronous synthesis
Synchronous modulation modulates, it is achieved that obtaining multifrequency in synchronization, the measurement result that each modulation frequency in range finding is directed to tested distance,
But in order to obtain linear modulation, make operating point be in the straight line portion of output characteristic curve it is necessary to add modulated signal electric current
While adds one, and suitable bias current makes its output signal undistorted, and the introducing of direct current biasing increases power consumption, long-time
During work, temperature raises, and can affect the stability of Output optical power, leads to modulation waveform to deform, and the increasing with modulating frequency
Plus, modulation depth can reduce, lead to modulation waveform deform it is impossible to carry out high frequency modulated, limit accurate measurement chi wavelength size and
Degree of stability；On the other hand, in the actual application of large-scale metrology, laser easily causes sharp during long range propagation
The loss of luminous power, causes the impact to modulation waveform, and then affects to survey accuracy and the degree of stability of chi, it surveys the frequency of chi
Degree of stability is generally less than 10-7.
It is mainly acousto-optic modulation method and electro-optic modulation method using light modulating method, its modulation bandwidth is subject to laser beam spot sizes
Etc. multifactorial impact, also bring along waveform distortions, just even more serious, therefore its institute particularly when high frequency (Gigahertz)
Form big survey chi, certainty of measurement is difficult to improve due to limiting by maximum modulation frequency.
Method by the use of the formed beat signal of laser instrument different mode output as surveying chi, referred to as intermode modulation.This
The modulation bandwidth of method is related to the chamber length of laser instrument, and he-ne laser frequency stabilization technology is ripe, and its frequency stability is high, by
The degree of stability of the survey chi that it is obtained is high, patent [high accuracy multiple frequency synchronous phase laser distance apparatus and method, publication number: cn
102419166] and patent [the multiple frequency synchronous phase laser distance apparatus and method based on dual-acousto-optic shift, publication number:
Cn102305591a] all make use of the intermode of he-ne laser instrument to modulate and combine acousto-optic frequency translation technology, obtain high-precision essence
Survey chi and bigness scale chi, but the produced chi of surveying of the method does not possess tractability, during its measurement, absolute measuring chi length needs another inspection
Examining system is given, and increased the complexity of measurement；On the other hand, the method that this utilization heterodyne method obtains accurate measurement chi phase place, its
The frequency of process signal is higher, follow-up phase measurement difficulty can be affected with certainty of measurement it is assumed that surveying mutually essence
Spend for 0.05o, range measurement accuracy will reach 1um-10um, then signal frequency is at least 2ghz-20ghz, at signal
The bandwidth of reason circuit.
Patent [superheterodyne device and method of reseptance and reception device semiconductor integrated circuit, open
Number: cn102484492a] all describe a kind of superhet interference signal treatment technology, [Zhang Cunman etc. surpasses Tsing-Hua University Zhang Cunman
Difference interference absolute distance measurement Review Study, optical technology 1998, (1): 7-9.] describe superhet absolute distance measurement
Method, this method reduces the processing frequency of signal it is easier to reach higher certainty of measurement.But this technology on the one hand, can only
Obtain a survey chi, and do not possess tractability measuring it is impossible to carry out chis of surveying more, let alone the synchronicity surveying chi more；Another
Aspect superhet obtain survey chi wavelength less, typically in micron dimension, be only used for the measurement of the micro- shape in surface.Sharp in order to improve
The stability of light device output frequency, occurs in that using the output laser frequency of iodine saturated absorption frequency stabilization laser instrument as frequency stabilization benchmark
Frequency-stabilizing method, the saturated absorption spectra using iodine carries out rrequency-offset-lock control to he-ne laser instrument and semiconductor laser.China
It has been also carried out studying, such as patent zl200910072518.5 and patent zl200910072519.x etc. all describe a kind of utilization
The rrequency-offset-lock device of iodine saturated absorption he-ne frequency stabilized carbon dioxide laser, makes the laser output frequency after rrequency-offset-lock have very high
Frequency stability, has the advantages that output frequency can be traced to the source, and is devised based on the inspiration this patent of said method with frequency reference
Laser instrument export laser frequency be frequency stabilization benchmark many surveys chi light source technology, by laser instrument output frequency be traceable to iodine frequency stabilization or
The reference frequency of femtosecond frequency comb laser instrument, and make different frequencies of tracing to the source form different range findings survey chis with interference technique, enter one
Chi of finding range is traceable to frequency reference by step, and lacking of appearance in phase laser distance technology can take into account many survey chis at present for solution
Synchronicity and tractability precision distance measurement apparatus and method problem.
In order to improve the stability of laser instrument output frequency, occur in that with the output laser of iodine saturated absorption frequency stabilization laser instrument
Frequency is entered to he-ne laser instrument and semiconductor laser as the frequency-stabilizing method of frequency stabilization benchmark, the saturated absorption spectra using iodine
Row rrequency-offset-lock controls.China has been also carried out studying, such as patent zl200910072518.5 and patent
Zl200910072519.x etc. all describes a kind of rrequency-offset-lock device of utilization iodine saturated absorption he-ne frequency stabilized carbon dioxide laser, makes
Laser output frequency after rrequency-offset-lock has very high frequency stability, has the advantages that output frequency can be traced to the source, but laser
Output frequency reach 1014Hz, between 400-700nm, measurement range is in nm rank it is impossible to be used for long distance for corresponding survey chi
From laser ranging, need a kind of survey chi of laser ranging on a large scale high frequency stability laser frequency being converted to and can tracing to the source badly, and
Synchronize them the technology of generation.
In sum, lack more a kind of can taking into account is surveyed the synchronicity of chis and can be traced to the source at present in phase laser distance technology
The precision distance measurement apparatus and method of property.
Content of the invention
The invention aims to solving to lack in existing phase laser distance technology a kind of can taking into account surveys chis more
The problem of the apparatus and method of synchronicity and traceability, provides a kind of range finding dress of the double longitudinal mode laser based on same pacing chi of can tracing to the source
Put and method, reach and increase range finding motility, simplify ranging step, improve measurement efficiency and precision and degree of stability, real-time
Purpose.
The object of the present invention is achieved like this:
A kind of double longitudinal mode laser range unit based on same pacing chi of can tracing to the source, by survey chi signal generating unit, laser shift frequency list
Unit, beam-expanding collimation microscope group and optical path and circuit unit composition, the laser that survey chi signal generating unit sends exports laser shift frequency
The input of unit, a road laser of laser shift frequency unit output exports optical path and circuit list by beam-expanding collimation microscope group
One input of unit, another road laser of laser shift frequency unit output is directly inputted to the another of optical path and circuit unit
Individual input；
The structure of described survey chi signal generating unit is: the laser beam of frequency reference laser instrument transmitting reaches the input of beam splitter
End, the first outfan of beam splitter connects a spectroscopical input, and a spectroscopical outfan connects one
The input of number photodetector, the second outfan of beam splitter connects No. two spectroscopical inputs, No. two spectroscopes
Outfan connect the input of No. two photodetectors, the outfan of a photodetector and No. two photodetectors connects
The input of single-chip microcomputer, two outfan connecting cavity length of single-chip microcomputer adjust two inputs of executor, the adjustment execution of chamber length
Two outfans of device connect the input of a double-bus network he-ne laser instrument and No. two double-bus network he-ne laser instrument respectively, and one
One outfan of number double-bus network he-ne laser instrument connects a spectroscopical input, a double-bus network he-ne laser
Another outfan of device connects the input of No. three reflecting mirrors, and the outfan of No. three reflecting mirrors connects the input of a polaroid
End, an outfan of No. two double-bus network he-ne laser instrument connects No. two spectroscopical inputs, No. two double-bus network he-
Another outfan of ne laser instrument connects the input of No. two reflecting mirrors；
The structure of described laser shift frequency unit is: an outfan surveying chi signal generating unit connects the input of No. nine reflecting mirrors
End, the outfan of No. nine reflecting mirrors connects No. three spectroscopical inputs, and No. three spectroscopical outfans connect No. four points
One input of light microscopic, another outfan surveying chi signal generating unit connects the input of a polarization spectroscope, and No. one partially
Spectroscopical outfan that shakes connects the input of a half-wave plate, and the outfan of a half-wave plate connects No. two polarization spectros
The input of mirror, an outfan of No. two polarization spectroscopes connects an input of No. three polarization spectroscopes, No. two polarizations
Another outfan spectroscopical connects the input of No. four reflecting mirrors, and the outfan of No. four reflecting mirrors connects a laser shift frequency
One input of device, the outfan of a dds signal source connects another input of a laser frequency shifter, a laser
The outfan of frequency shifter connects the input of No. five reflecting mirrors, and the outfan of No. five reflecting mirrors connects the another of No. three polarization spectroscopes
One input, the outfan of No. three polarization spectroscopes connects No. three another input spectroscopical, and No. three spectroscopical defeated
Go out end and connect one input of No. four spectroscopes, another outfan of a polarization spectroscope connects the input of No. six reflecting mirrors
End, the outfan of No. six reflecting mirrors connects the input of No. four polarization spectroscopes, No. four polarization spectroscopes through No. two half-wave plates
Outfan connect an input of No. five polarization spectroscopes, another outfan of No. four polarization spectroscopes connects seven
The input of number reflecting mirror, the outfan of No. seven reflecting mirrors connects an input of No. two laser frequency shifters, No. two dds signals
The outfan in source connects another input of No. two laser frequency shifters, and the outfan of No. two laser frequency shifters connects No. eight reflections
The input of mirror, the outfan of No. eight reflecting mirrors 33 connects another input of No. five polarization spectroscopes, No. five polarization spectros
The outfan of mirror connects No. four another input spectroscopical；
The structure of described optical path and circuit unit is: an outfan of laser shift frequency unit connects ten No. two reflections
The input of mirror, the outfan of ten No. two reflecting mirrors connects the input of No. five reflecting mirrors, an outfan of No. five reflecting mirrors
Connected with the input of No. three photodetectors by No. two polaroids, the outfan of No. three photodetectors connects a low pass
The input of wave filter, the outfan of a low pass filter connects an input of a frequency mixer, No. three dds signal sources
Outfan connect another input of a frequency mixer, the outfan of a frequency mixer connects the one of a phase discriminator
Individual input, another outfan of No. five reflecting mirrors is connected with the input of No. four photodetectors by No. three polaroids,
The outfan of No. four photodetectors connects the input of No. two low pass filters, and the outfan of No. two low pass filters connects two
One input of number phase discriminator, the outfan of beam-expanding collimation microscope group connects an input of No. six polarization spectroscopes, No. six
One outfan of polarization spectroscope is connected with the input of No. ten reflecting mirrors by a quarter-wave plate, No. ten reflecting mirrors
Outfan connected with an input of No. six polarization spectroscopes by a quarter-wave plate, No. six polarization spectroscopes
One outfan is connected with the input of ride on Bus No. 11 reflecting mirror by No. two quarter-wave plates, the outfan of ride on Bus No. 11 reflecting mirror
Connected with another input of No. six polarization spectroscopes by No. two quarter-wave plates, No. six polarization spectroscopes another
Outfan connects No. eight spectroscopical inputs, and No. eight spectroscopical outfans pass through No. four polaroids and No. five light
The input connection of electric explorer, the outfan of No. five photodetectors connects the input of No. three low pass filters, and No. three low
The outfan of bandpass filter connects an input of No. three frequency mixers, and another outfan of No. three dds signal sources connects three
Another input of number frequency mixer, the outfan of No. three frequency mixers connects another input of a phase discriminator, No. eight points
Another outfan of light microscopic is connected with the input of No. six photodetectors by No. five polaroids, No. six photodetectors
Outfan connects the input of No. four low pass filters, and the outfan of No. four low pass filters connects another of No. two phase discriminators
Input.
A kind of double longitudinal mode laser distance-finding method based on same pacing chi of can tracing to the source, it specifically comprises the following steps that
Step one, open frequency benchmark laser, double-bus network he-ne laser instrument, No. two double-bus network he-ne laser
Device, after passing through preheating and frequency stabilization, by feedback control, by a double-bus network he-ne laser instrument and No. two double-bus network he-ne
Within the scope of laser instrument output frequency is locked in the certain frequency of frequency reference laser instrument, a double-bus network he-ne laser instrument is defeated
Going out frequency is v1And v4Double-frequency laser, No. two double-bus network he-ne laser instrument output frequencies are v2And v3Double-frequency laser, wherein v1
And v4Double-frequency laser through a polaroid, adjust polarization angle and make only to allow frequency be v1Laser pass through；
Step 2, the laser of the three kinds of frequencies being formed by step one enter laser shift frequency unit, and wherein a branch of double frequency swashs
It is v that light separates frequency with a polarization spectroscope2And v3Two bundle laser, frequency is v2Laser use two after a half-wave plate
Number polarization spectroscope separates the mutually perpendicular laser in two bundle polarization directions, wherein a branch of through a laser frequency shifter, by No. one
Dds signal source drives a laser frequency shifter, and shift frequency frequency is f1, frequency is v3Laser after No. two half-wave plates with No. four
Polarization spectroscope also separates the mutually perpendicular laser in two bundle polarization directions, wherein a branch of through No. two laser frequency shifters, by No. two
Dds signal source drives No. two laser frequency shifters, and shift frequency frequency is f2, finally the laser merging of various frequencies, wherein has five kinds
Frequency, respectively v1、v2、v3、v2+f1And v3+f2, this restraints laser light incident and is divided into two-beam to No. four spectroscopes, a branch of conduct ginseng
Examine laser beam, another Shu Zuowei Laser Measurement bundle shines measurement target；
Step 3, reference laser beam are divided into two bundle laser beams through No. five spectroscopes, and wherein one laser beam is through polarization direction
With v1After No. two polaroids of identical, frequency is v1、v2And v3The polarization laser of horizontal direction enter into No. three photodetectors
Changed, it exports the signal of telecommunication, its frequency is v1-v2, in this, as bigness scale chi, another beam of laser is through polarization direction and v1Become
No. four photodetectors are incided, the signal of telecommunication of No. four photodetector outputs is through No. two low passes after 45 degree of No. three polaroids
Wave filter has filtered high frequency electrical signal, retains low-frequency electrical signal, and its frequency is f1-f2, in this, as accurate measurement chi；
When step 4, measurement start, No. ten reflecting mirrors of the plane of reference maintain static, and move ride on Bus No. 11 reflecting mirror to destination end,
Measurement distance is l, and, after measurement reflecting mirror reflection, the light beam reflecting with the plane of reference is in No. six polarization spectroscopes for measuring beam
Place converges, and enters measuring circuit, and Laser Measurement bundle is divided into two bundle laser beams through No. eight spectroscopes, and one laser beam is through polarization direction
With v1After No. four polaroids of identical, frequency is v1、v2And v3The polarization laser of horizontal direction enter into No. five photodetectors
Changed, it exports the signal of telecommunication, its frequency is v1-v2, in this, as bigness scale chi, survey a length of c/ of chi | v1-v2|, another Shu Ji
Light is through polarization direction and v1No. six photodetectors are incided after No. five polaroids becoming 45 degree, No. six photodetector outputs
The signal of telecommunication has filtered high frequency electrical signal through No. four low pass filters, retains low-frequency electrical signal, and its frequency is f1-f2, in this, as
Accurate measurement chi, surveys a length of c/ of chi | v2-v3|；
Step 5, respectively obtained frequency by a phase discriminator and No. two phase discriminators be v1-v2And f1-f2Two path signal
Phase difference1And φ2, according to formulaTry to achieve distance measure l of bigness scale chic, and substituted into public affairs
Formula tries to achieve the phase integer value of accurate measurement chiWherein floor (x) function returns the whole of x value
Fractional part, tries to achieve tested distance value finally according to formula:In formula: c is the light velocity, n is environment
Air refraction.
The feature of the present invention and beneficial effect are:
First, the present invention proposes a kind of many surveys traced to the source chi production method and device, and this apparatus and method is using frequency
Rate reference model frequency reference laser instrument carries out frequency stabilization and feedback control to two double-longitudinal-mode lasers, and is exported using after frequency stabilization
Four Mode for Laser in three different frequencies laser with superhet form formed laser ranging accurate measurement chi, make output laser
Frequency and the laser ranging being formed are surveyed chi wavelength and can be directly traceable to frequency/wavelength benchmark, and can adjust according to actual needs
Lock point, and then be adjusted to surveying chi wavelength, increased the motility of range finding, overcome survey chi in existing range unit
The shortcoming not directly traced to the source, simplify general range unit survey when absolute measuring is long chi wavelength need another detecting system need to be given
Step, improve measurement efficiency and precision, this is one of innovative point that the present invention distinguishes existing apparatus.
Second, the present invention proposes a kind of many surveys chi Phase synchronization acquisition methods being combined based on heterodyne and dress with superhet
Put.This apparatus and method carries out shift frequency using laser frequency shifter to the laser of component frequency, produces the laser of multi-frequency, and with
Shi Liyong heterodyne approach and superhet approach obtain bigness scale chi and accurate measurement chi respectively, so be allowed to simultaneously participate in measurement it is achieved that
The coarse-fine synchro measure surveying chi phase place, shortens time of measuring, improves the real-time of measurement result.By heterodyne and superhet
The laser interferometry combining obtains test phase signal, eliminates common mode disturbances, improves the degree of stability surveying chi, drops simultaneously
The low frequency of phase measuring circuit receipt signal, reduces the difficulty of circuit design, and this is the wound that the present invention distinguishes existing apparatus
The two of new point.
Brief description
Fig. 1 is the general structure schematic diagram of the laser ranging system of the present invention；
Fig. 2 is the structural representation surveying chi signal generating unit；
Fig. 3 is the structural representation of laser shift frequency unit；
Fig. 4 is the structural representation of optical path and circuit unit.
In figure piece number illustrate: 1, survey chi signal generating unit, 2, laser shift frequency unit, 3, beam-expanding collimation microscope group, 4, optical path
And circuit unit, 5, frequency reference laser instrument, 6, beam splitter, 7, spectroscope, 8, No. two spectroscopes, 9, photodetection
Device, 10, No. two photodetectors, 11, single-chip microcomputer, 12, chamber length adjustment executor, 13, double-bus network he-ne laser instrument, 14,
No. two double-bus network he-ne laser instrument, 15, No. two reflecting mirrors, 16, No. three reflecting mirrors, 17, polaroid, 18, polarization point
Light microscopic, 19, half-wave plate, 20, No. two polarization spectroscopes, 21, No. four reflecting mirrors, 22, dds signal source, 23, No. one swash
Optical frequency shifter, 24, No. five reflecting mirrors, 25, No. three polarization spectroscopes, 26, No. three spectroscopes, 27, No. six reflecting mirrors, 28, No. two
Half-wave plate, 29, No. four polarization spectroscopes, 30, No. seven reflecting mirrors, 31, No. two dds signal sources, 32, No. two laser frequency shifters, 33,
No. eight reflecting mirrors, 34, No. five polarization spectroscopes, 35, No. nine reflecting mirrors, 36, No. four spectroscopes, 37, ten No. two reflecting mirrors, 38,
No. five spectroscopes, 39, No. two polaroids, 40, No. three photodetectors, 41, low pass filter, 42, frequency mixer,
43rd, No. three dds signal sources, 44, phase discriminator, 45, No. three polaroids, 46, No. four photodetectors, 47, No. two low pass filtered
Ripple device, 48, No. two phase discriminators, 49, No. six polarization spectroscopes, 50, quarter-wave plate, 51, No. ten reflecting mirrors, 52, two
Number quarter-wave plate, 53, ride on Bus No. 11 reflecting mirror, 54, No. eight spectroscopes, 55, No. four polaroids, 56, No. five photodetectors,
57th, No. three low pass filters, 58, No. three frequency mixers, 59, No. five polaroids, 60, No. six photodetectors, 61, No. four low pass filtered
Ripple device.
Specific embodiment
Below in conjunction with the accompanying drawings embodiment of the present invention is described in detail.
A kind of double longitudinal mode laser range unit based on same pacing chi of can tracing to the source, including beam-expanding collimation microscope group 3, described device
It is made up of survey chi signal generating unit 1, laser shift frequency unit 2, beam-expanding collimation microscope group 3 and optical path and circuit unit 4, survey chi and generate
The laser that unit 1 sends exports the input of laser shift frequency unit 2, and a road laser of laser shift frequency unit 2 output passes through to expand
Bundle collimation microscope group 3 exports an input of optical path and circuit unit 4, and another road of laser shift frequency unit 2 output is swashed
Light is directly inputted to another input of optical path and circuit unit 4；
The structure of described survey chi signal generating unit 1 is: the laser beam of frequency reference laser instrument 5 transmitting reaches the defeated of beam splitter 6
Enter end, the first outfan of beam splitter 6 connects an input of a spectroscope 7, and an outfan of a spectroscope 7 is even
Connect the input of a photodetector 9, the second outfan of beam splitter 6 connects an input of No. two spectroscopes 8, No. two
The outfan of spectroscope 8 connects input, a photodetector 9 and No. two photodetectors 10 of No. two photodetectors 10
Outfan connect the input of single-chip microcomputer 11, two outfan connecting cavity length of single-chip microcomputer 11 adjust executors 12 two are defeated
Enter end, two outfans that chamber length adjusts executor 12 connect a double-bus network he-ne laser instrument 13 and No. two double-bus network respectively
The input of he-ne laser instrument 14, an outfan of a double-bus network he-ne laser instrument 13 connects the one of a spectroscope 7
Individual input, another outfan of a double-bus network he-ne laser instrument 13 connects the input of No. three reflecting mirrors 16, and No. three anti-
The outfan penetrating mirror 16 connects the input of a polaroid 17, and an outfan of No. two double-bus network he-ne laser instrument 14 is even
Connect an input of No. two spectroscopes 8, another outfan of No. two double-bus network he-ne laser instrument 14 connects No. two reflecting mirrors
15 input；
The structure of described laser shift frequency unit 2 is: an outfan surveying chi signal generating unit 1 connects No. nine reflecting mirrors 35
Input, the outfan of No. nine reflecting mirrors 35 connects an input of No. three spectroscopes 26, the outfan of No. three spectroscopes 26
Connect an input of No. four spectroscopes 36, another outfan surveying chi signal generating unit 1 connects a polarization spectroscope 18
Input, outfan of a polarization spectroscope 18 connects the input of a half-wave plate 19, a half-wave plate 19
Outfan connects the input of No. two polarization spectroscopes 20, and an outfan of No. two polarization spectroscopes 20 connects No. three polarizations point
One input of light microscopic 25, the input of another outfan No. four reflecting mirrors 21 of connection of No. two polarization spectroscopes 20, four
The outfan of number reflecting mirror 21 connects the input of No. five reflecting mirrors 24, and the outfan of No. five reflecting mirrors 24 connects a laser and moves
One input of frequency device 23, the outfan of a dds signal source 22 connects another input of a laser frequency shifter 23,
The outfan of a number laser frequency shifter 23 connects another input of No. three polarization spectroscopes 25, No. three polarization spectroscopes 25
Outfan connects another input of No. three spectroscopes 26, and the outfan of No. three spectroscopes 26 connects 36 1, No. four spectroscopes
Input, another outfan of a polarization spectroscope 18 connects the input of No. six reflecting mirrors 27, No. six reflecting mirrors 27
Outfan connects the input of No. four polarization spectroscopes 29, an output of No. four polarization spectroscopes 29 through No. two half-wave plates 28
End connects an input of No. five polarization spectroscopes 34, and another outfan of No. four polarization spectroscopes 29 connects No. seven reflections
The input of mirror 30, the outfan of No. seven reflecting mirrors 30 connects an input of No. two laser frequency shifters 32, No. two dds signals
The outfan in source 31 connects another input of No. two laser frequency shifters 32, and the outfan of No. two laser frequency shifters 32 connects eight
The input of number reflecting mirror 33, the outfan of No. eight reflecting mirrors 33 connects another input of No. five polarization spectroscopes 34, and five
The outfan of number polarization spectroscope 34 connects another input of No. four spectroscopes 36；
The structure of described optical path and circuit unit 4 is: an outfan of laser shift frequency unit 2 connects ten No. two instead
Penetrate the input of mirror 37, the outfan of ten No. two reflecting mirrors 37 connects the input of No. five reflecting mirrors 38, No. five reflecting mirrors 38
One outfan is connected with the input of No. three photodetectors 40 by No. two polaroids 39, No. three photodetectors 40 defeated
Go out the input that end connects a low pass filter 41, the outfan of a low pass filter 41 connects the one of a frequency mixer 42
Individual input, an outfan of No. three dds signal sources 43 connects another input of a frequency mixer 42, a frequency mixer
42 outfan connects an input of a phase discriminator 44, and another outfan of No. five reflecting mirrors 38 passes through No. three and polarizes
Piece 45 is connected with the input of No. four photodetectors 46, and the outfan of No. four photodetectors 46 connects No. two low pass filters
47 input, the outfan of No. two low pass filters 47 connects an input of No. two phase discriminators 48, beam-expanding collimation microscope group 3
Outfan connect an input of No. six polarization spectroscopes 49, an outfan of No. six polarization spectroscopes 49 passes through No. one
Quarter-wave plate 50 is connected with the input of No. ten reflecting mirrors 51, and the outfan of No. ten reflecting mirrors 51 passes through an a quarter
Wave plate 50 is connected with an input of No. six polarization spectroscopes 49, and an outfan of No. six polarization spectroscopes 49 passes through No. two
Quarter-wave plate 52 is connected with the input of ride on Bus No. 11 reflecting mirror 53, and the outfan of ride on Bus No. 11 reflecting mirror 53 passes through No. two four points
One of wave plate 52 connect with another input of No. six polarization spectroscopes 49, another outfan of No. six polarization spectroscopes 49
Connect an input of No. eight spectroscopes 54, an outfan of No. eight spectroscopes 54 passes through No. four polaroids 55 and No. five light
The input connection of electric explorer 56, the outfan of No. five photodetectors 56 connects the input of No. three low pass filters 57,
The outfan of No. three low pass filters 57 connects an input of No. three frequency mixers 58, No. three dds signal sources 43 another
Outfan connects another input of No. three frequency mixers 58, and the outfan of No. three frequency mixers 58 connects the another of a phase discriminator 44
One input, another outfan of No. eight spectroscopes 54 passes through the input of No. five polaroids 59 and No. six photodetectors 60
End connection, the outfan of No. six photodetectors 60 connects the input of No. four low pass filters 61, No. four low pass filters 61
Outfan connect No. two phase discriminators 48 another input.
A number laser frequency shifter 23 of described laser shift frequency unit 2 and No. two laser frequency shifters 32 all include acousto-optic frequency translation
Device, electro-optic frequency translation device, and laser frequency can adjust.
Described survey chi signal generating unit 1 medium frequency benchmark laser 5 includes iodine stabilizd laser, femtosecond laser frequency comb laser
Device, and frequency stability is better than 10-12.
A kind of double longitudinal mode laser distance-finding method based on same pacing chi of can tracing to the source, it specifically comprises the following steps that
Step one, open frequency benchmark laser 13, No. two double-bus network he-ne of 5, double-bus network he-ne laser instrument swash
Light device 14, after preheating and frequency stabilization, by feedback control, will a double-bus network he-ne laser instrument 13 and No. two double vertical
Within the scope of mould he-ne laser instrument 14 output frequency is locked in the certain frequency of frequency reference laser instrument 5, a double-bus network he-
Ne laser instrument 13 output frequency is v1And v4Double-frequency laser, No. two double-bus network he-ne laser instrument 14 output frequencies are v2And v3's
Double-frequency laser, wherein v1And v4Double-frequency laser through a polaroid 17, adjust polarization angle and make only to allow frequency be v1Swash
Light passes through；
Step 2, the laser of the three kinds of frequencies being formed by step one enter laser shift frequency unit 2, and wherein a branch of double frequency swashs
It is v that light separates frequency with a polarization spectroscope 182And v3Two bundle laser, frequency is v2Laser after a half-wave plate 19
Separate the mutually perpendicular laser in two bundle polarization directions with No. two polarization spectroscopes 20, wherein a branch of through a laser frequency shifter
23, a laser frequency shifter 23 is driven by a dds signal source 22, shift frequency frequency is f1, frequency is v3Laser through two and half
Also the mutually perpendicular laser in two bundle polarization directions is separated with No. four polarization spectroscopes 29 after wave plate 28, wherein a branch of sharp through No. two
Optical frequency shifter 32, drives No. two laser frequency shifters 32 by No. two dds signal sources 31, and shift frequency frequency is f2, finally various frequencies
Laser merges, and wherein has five kinds of frequencies, respectively v1、v2、v3、v2+f1And v3+f2, this bundle laser light incident is to No. four spectroscopes
36 are divided into two-beam, a branch of as reference laser beam, another Shu Zuowei Laser Measurement bundle shines measurement target；
Step 3, reference laser beam are divided into two bundle laser beams through No. five spectroscopes 38, and wherein one laser beam is through polarization side
To with v1After No. two polaroids 39 of identical, frequency is v1、v2And v3The polarization laser of horizontal direction enter into No. three light electrical resistivity surveys
Survey device 40 to be changed, it exports the signal of telecommunication, its frequency is v1-v2, in this, as bigness scale chi, another beam of laser is through polarization direction
With v1No. four photodetectors 46, the signal of telecommunication of No. four photodetector 46 outputs is incided after No. three polaroids 45 becoming 45 degree
Filter high frequency electrical signal through No. two low pass filters 47, retained low-frequency electrical signal, its frequency has been f1-f2, in this, as accurate measurement
Chi；
When step 4, measurement start, No. ten reflecting mirrors 51 of the plane of reference maintain static, and mobile ride on Bus No. 11 reflecting mirror 53 is to target
End, measurement distance is l, and after measurement reflecting mirror 53 reflection, the light beam being reflected with the plane of reference is polarized measuring beam at No. six
Converge at spectroscope 49, enter measuring circuit, Laser Measurement bundle is divided into two bundle laser beams, one laser beam through No. eight spectroscopes 54
Through polarization direction and v1After No. four polaroids 55 of identical, frequency is v1、v2And v3The polarization laser of horizontal direction enter into five
Number photodetector 56 is changed, and it exports signal of telecommunication, and its frequency is v1-v2, in this, as bigness scale chi, survey a length of c/ of chi |
v1-v2|, another beam of laser is through polarization direction and v1No. six photodetectors 60 are incided after becoming 45 degree of No. five polaroids, No. six
The signal of telecommunication of photodetector 60 output has filtered high frequency electrical signal through No. four low pass filters 61, retains low-frequency electrical signal,
Its frequency is f1-f2, in this, as accurate measurement chi, survey a length of c/ of chi | v2-v3|；
Step 5, respectively obtained frequency by a phase discriminator and No. two phase discriminators be v1-v2And f1-f2Two path signal
Phase difference1And φ2, according to formulaTry to achieve distance measure l of bigness scale chic, and substituted into public affairs
Formula tries to achieve the phase integer value of accurate measurement chiWherein floor (x) function returns the whole of x value
Fractional part, tries to achieve tested distance value finally according to formula:In formula: c is the light velocity, n is environment
Air refraction.
The phase difference of described two path signal1With phase difference2Measurement carry out in synchronization.
Accurate measurement chi used and bigness scale chi all can be traced to the source.
Claims (6)
1. a kind of double longitudinal mode laser range unit based on same pacing chi of can tracing to the source it is characterised in that: described device by survey chi life
Become unit (1), laser shift frequency unit (2), beam-expanding collimation microscope group (3) and optical path and circuit unit (4) composition, survey chi and generate
The laser that unit (1) sends exports the input of laser shift frequency unit (2), the road laser that laser shift frequency unit (2) exports
Export an input of optical path and circuit unit (4) by beam-expanding collimation microscope group (3), laser shift frequency unit (2) is defeated
Another road laser going out is directly inputted to optical path and another input of circuit unit (4)；
The structure of described survey chi signal generating unit (1) is: the laser beam that frequency reference laser instrument (5) is launched reaches beam splitter (6)
Input, an input of a first outfan number spectroscope (7) of connection of beam splitter (6), one of a spectroscope (7)
Outfan connects the input of a photodetector (9), and the second outfan of beam splitter (6) connects No. two spectroscopes (8)
One input, the outfan of No. two spectroscopes (8) connects the input of No. two photodetectors (10), a photodetector
(9) outfan of and No. two photodetectors (10) connects the input of single-chip microcomputer (11), two outfans of single-chip microcomputer (11)
Connecting cavity length adjusts two inputs of executor (12), and two outfans that chamber length adjusts executor (12) connect No. one respectively
Double-bus network he-ne laser instrument (13) and the input of No. two double-bus network he-ne laser instrument (14), a double-bus network he-ne laser
One outfan of device (13) connects an input of a spectroscope (7), double-bus network he-ne laser instrument (13) another
One outfan connects the input of No. three reflecting mirrors (16), and the outfan of No. three reflecting mirrors (16) connects a polaroid (17)
Input, outfan of No. two double-bus network he-ne laser instrument (14) connects an input of No. two spectroscopes (8),
Another outfan of No. two double-bus network he-ne laser instrument (14) connects the input of No. two reflecting mirrors (15)；
The structure of described laser shift frequency unit (2) is: an outfan surveying chi signal generating unit (1) connects No. nine reflecting mirrors (35)
Input, the outfan of No. nine reflecting mirrors (35) connects an input of No. three spectroscopes (26), No. three spectroscopes (26)
Outfan connect No. four spectroscopes (36) an input, survey chi signal generating unit (1) another outfan connect No. one
The input of polarization spectroscope (18), an outfan of a polarization spectroscope (18) connects the input of a half-wave plate (19)
End, the outfan of a half-wave plate (19) connects the input of No. two polarization spectroscopes (20), No. two polarization spectroscopes (20)
One outfan connects an input of No. three polarization spectroscopes (25), another outfan of No. two polarization spectroscopes (20)
Connect the input of No. four reflecting mirrors (21), the outfan of No. four reflecting mirrors (21) connects one of a laser frequency shifter (23)
Input, the outfan of a dds signal source (22) connects another input of a laser frequency shifter (23), a laser
The outfan of frequency shifter (23) connects the input of No. five reflecting mirrors (24), and the outfan of No. five reflecting mirrors (24) connects No. three partially
Shake another input of spectroscope (25), and the outfan of No. three polarization spectroscopes (25) connects the another of No. three spectroscopes (26)
Individual input, the outfan of No. three spectroscopes (26) connects (36) inputs of No. four spectroscopes, a polarization spectroscope
(18) another outfan connects the input of No. six reflecting mirrors (27), and the outfan of No. six reflecting mirrors (27) is through two and half
Wave plate (28) connects the input of No. four polarization spectroscopes (29), and an outfan of No. four polarization spectroscopes (29) connects No. five
One input of polarization spectroscope (34), another outfan of No. four polarization spectroscopes (29) connects No. seven reflecting mirrors (30)
Input, the outfan of No. seven reflecting mirrors (30) connects an input of No. two laser frequency shifters (32), No. two dds signals
The outfan in source (31) connects another input of No. two laser frequency shifters (32), the outfan of No. two laser frequency shifters (32)
Connect the input of No. eight reflecting mirrors (33), the outfan of No. eight reflecting mirrors (33) connects the another of No. five polarization spectroscopes (34)
Individual input, the outfan of No. five polarization spectroscopes (34) connects another input of No. four spectroscopes (36)；Described measurement
The structure of light path and circuit unit (4) is: an outfan of laser shift frequency unit (2) connects the defeated of ten No. two reflecting mirrors (37)
Enter to hold, the input of outfan No. five reflecting mirrors (38) of connection of ten No. two reflecting mirrors (37), one of No. five reflecting mirrors (38)
Outfan is connected with the input of No. three photodetectors (40) by No. two polaroids (39), No. three photodetectors (40)
Outfan connects the input of a low pass filter (41), and the outfan of a low pass filter (41) connects a frequency mixer
(42) a input, an outfan of No. three dds signal sources (43) connects another input of a frequency mixer (42)
End, the outfan of a frequency mixer (42) connects an input of a phase discriminator (44), No. five reflecting mirrors (38) another
Individual outfan is connected with the input of No. four photodetectors (46) by No. three polaroids (45), No. four photodetectors (46)
Outfan connect the input of No. two low pass filters (47), the outfan of No. two low pass filters (47) connects No. two phase demodulations
One input of device (48), the outfan of beam-expanding collimation microscope group (3) connects an input of No. six polarization spectroscopes (49),
One outfan of No. six polarization spectroscopes (49) passes through the input of a quarter-wave plate (50) and No. ten reflecting mirrors (51)
End connection, the outfan of No. ten reflecting mirrors (51) passes through the one of a quarter-wave plate (50) and No. six polarization spectroscopes (49)
Individual input connection, an outfan of No. six polarization spectroscopes (49) is anti-with ride on Bus No. 11 by No. two quarter-wave plates (52)
Penetrate the input connection of mirror (53), the outfan of ride on Bus No. 11 reflecting mirror (53) passes through No. two quarter-wave plates (52) with No. six partially
Shake another input connection of spectroscope (49), another outfans of No. six polarization spectroscopes (49) connects No. eight spectroscopes
(54) a input, an outfan of No. eight spectroscopes (54) passes through No. four polaroids (55) and No. five photodetectors
(56) input connection, the input of outfan No. three low pass filters (57) of connection of No. five photodetectors (56), three
The outfan of number low pass filter (57) connects an input of No. three frequency mixers (58), No. three dds signal sources (43) another
One outfan connects another input of No. three frequency mixers (58), and the outfan of No. three frequency mixers (58) connects a phase demodulation
Another input of device (44), another outfan of No. eight spectroscopes (54) passes through No. five polaroids (59) and No. six photoelectricity
The input connection of detector (60), the outfan of No. six photodetectors (60) connects the input of No. four low pass filters (61)
End, the outfan of No. four low pass filters (61) connects another input of No. two phase discriminators (48).
2. the double longitudinal mode laser range unit based on same pacing chi of can tracing to the source according to claim 1 it is characterised in that: institute
State a laser frequency shifter (23) of laser shift frequency unit (2) and No. two laser frequency shifters (32) all include acousto-optic frequency shifters, electricity
Optical frequency shifter, and laser frequency can adjust.
3. the double longitudinal mode laser range unit based on same pacing chi of can tracing to the source according to claim 1 it is characterised in that: institute
State survey chi signal generating unit (1) medium frequency benchmark laser (5) and include iodine stabilizd laser, femtosecond laser frequency comb laser instrument, and
Frequency stability is better than 10-12.
4. a kind of distance-finding method of the double longitudinal mode laser range unit based on same pacing chi of can tracing to the source as claimed in claim 1,
It is characterized in that: specifically comprise the following steps that
Step one, open frequency benchmark laser (5), double-bus network he-ne laser instrument (13), No. two double-bus network he-ne swash
Light device (14), after passing through preheating and frequency stabilization, by feedback control, by double-bus network he-ne laser instrument (13) and No. two
Within the scope of double-bus network he-ne laser instrument (14) output frequency is locked in the certain frequency of frequency reference laser instrument (5), No. one double
Longitudinal mode he-ne laser instrument (13) output frequency is v1And v4Double-frequency laser, No. two double-bus network he-ne laser instrument (14) output frequency
Rate is v2And v3Double-frequency laser, wherein v1And v4Double-frequency laser through a polaroid (17), adjust polarization angle and only make
Frequency is allowed to be v1Laser pass through；
Step 2, the laser of the three kinds of frequencies being formed by step one enter laser shift frequency unit (2), wherein a branch of double-frequency laser
Separating frequency with a polarization spectroscope (18) is v2And v3Two bundle laser, frequency is v2Laser through a half-wave plate (19)
Separate the mutually perpendicular laser in two bundle polarization directions with No. two polarization spectroscopes (20) afterwards, wherein a branch of through a laser shift frequency
Device (23), drives a laser frequency shifter (23) by a dds signal source (22), and shift frequency frequency is f1, frequency is v3Laser warp
Cross No. two half-wave plates (28) and also separate the mutually perpendicular laser in two bundle polarization directions with No. four polarization spectroscopes (29) afterwards, wherein one
Bundle, through No. two laser frequency shifters (32), drives No. two laser frequency shifters (32) by No. two dds signal sources (31), and shift frequency frequency is
f2, finally the laser merging of various frequencies, wherein has five kinds of frequencies, respectively v1、v2、v3、v2+f1And v3+f2, this Shu Jiguang
Incide No. four spectroscopes (36) and be divided into two-beam, a branch of as reference laser beam, another Shu Zuowei Laser Measurement bundle shines
Measurement target；
Step 3, reference laser beam are divided into two bundle laser beams through No. five spectroscopes (38), and wherein one laser beam is through polarization direction
With v1After No. two polaroids (39) of identical, frequency is v1、v2And v3The polarization laser of horizontal direction enter into No. three light electrical resistivity surveys
Survey device (40) to be changed, it exports the signal of telecommunication, its frequency is v1-v2, in this, as bigness scale chi, another beam of laser is through polarization side
To with v1No. four photodetectors (46), No. four photodetector (46) outputs are incided after No. three polaroids (45) becoming 45 degree
The signal of telecommunication filtered high frequency electrical signal through No. two low pass filters (47), retain low-frequency electrical signal, its frequency is f1-f2, with
This is as accurate measurement chi；
When step 4, measurement start, No. ten reflecting mirrors (51) of the plane of reference maintain static, and mobile ride on Bus No. 11 reflecting mirror (53) is to target
End, measurement distance is l, and, after measurement reflecting mirror (53) reflection, the light beam reflecting with the plane of reference is at No. six partially for measuring beam
Shake spectroscope (49) place converge, enter measuring circuit, Laser Measurement bundle is divided into two bundle laser beams through No. eight spectroscopes (54), a branch of
Laser beam is through polarization direction and v1After No. four polaroids (55) of identical, frequency is v1、v2And v3Horizontal direction polarization laser
Enter into No. five photodetectors (56) to be changed, it exports the signal of telecommunication, its frequency is v1-v2, in this, as bigness scale chi, survey
The a length of c/ of chi | v1-v2|, another beam of laser is through polarization direction and v1No. six photoelectricity are incided after No. five polaroids (59) becoming 45 degree
Detector (60), the signal of telecommunication that No. six photodetectors (60) export has filtered high frequency telecommunications through No. four low pass filters (61)
Number, retain low-frequency electrical signal, its frequency is f1-f2, in this, as accurate measurement chi, survey a length of c/ of chi | v2-v3|；
Step 5, respectively obtained frequency by a phase discriminator (44) and No. two phase discriminators (48) be v1-v2And f1-f2Two-way telecommunications
Number phase difference1And φ2, according to formulaTry to achieve distance measure l of bigness scale chic, and substituted into
Formula tries to achieve the phase integer value of accurate measurement chiWherein floor (x) function returns x value
Integer part, tries to achieve tested distance value finally according to formula:In formula: c is the light velocity, n is ring
The air refraction in border.
5. the distance-finding method of the double longitudinal mode laser range unit based on same pacing chi of can tracing to the source according to claim 4, its
It is characterised by: the phase difference of described two path signal1With phase difference2Measurement carry out in synchronization.
6. the distance-finding method of the double longitudinal mode laser range unit based on same pacing chi of can tracing to the source according to claim 4, its
It is characterised by: accurate measurement chi used and bigness scale chi all can be traced to the source.
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