CN103991288A - Piezoelectric ink jet head and printing device with piezoelectric ink jet head - Google Patents
Piezoelectric ink jet head and printing device with piezoelectric ink jet head Download PDFInfo
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- CN103991288A CN103991288A CN201410223048.9A CN201410223048A CN103991288A CN 103991288 A CN103991288 A CN 103991288A CN 201410223048 A CN201410223048 A CN 201410223048A CN 103991288 A CN103991288 A CN 103991288A
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Abstract
The invention discloses a piezoelectric ink jet head and a printing device with the piezoelectric ink jet head, and belongs to the technical field of ink jet printing. The ink jet head comprises a piezoelectric ceramic and a nozzle plate. The piezoelectric ceramic is provided with a plurality of strip-shaped channel walls, a groove is formed between every two adjacent channel walls, metal inner electrodes are embedded in the channel walls to form a piezoelectric bimorph structure, and the outer surfaces of the channel walls are provided with outer electrodes. The nozzle plate covers the far end faces of the channel walls, a flexible sealing substance is arranged between the nozzle plate and the channel walls at intervals, the nozzle plate is provided with nozzles, the number of the nozzles is equal to the number of grooves, and the nozzles correspond to the grooves in position. According to the piezoelectric ink jet head, the channel walls are powered up and deformed in a d31 transverse bending mode, large deformation can be produced, large deformation pressure can be produced on ink in an ink channel, large-grain-size ink can be ejected, and the ejecting speed can be improved.
Description
Technical field
The present invention relates to inkjet technology field, refer to especially a kind of piezoelectric ink jet head and comprise the printing device of this piezoelectric ink jet head.
Background technology
The parts that ceramic spray head is the highest, most important as most crucial, the shared cost of current ceramic ink jet printer, technology content is the highest, domesticly belong to blank from researching and developing to manufacture all, and import places one's entire reliance upon.And in order to protect as far as possible the colorant structure in ink; strengthen better color development effect and Ceramic Tiles decorative effect; generally need to strengthen the particle diameter of ceramic material ink; by the average grain diameter 300nm of existing ceramic material ink; expansion uses the particle diameter category of 0.8 to 8 micron; this just need to redesign injection unit structure and the ejector principle of shower nozzle, to reach the object of the deflection that increases piezoelectric actuator.
In prior art, have a kind of XAAR ink gun, its ink channel adopts the cast-cutting saw of semi-conductor industry directly on piezoelectric ceramics, to cut and form, and is shared wall in the middle of passage.Aluminum metal electrode deposition is being shared the first half on wall both sides, and every pair of electrode is connected with each other and guides to the circuit region of ink gun.The polarised direction of sharing wall is parallel to conduit wall, while therefore applying voltage, shearing deformation occurs, and realizes the action of extruding of ink.The material of upper cover plate is also piezoelectric ceramics, is fixed on pedestal.The ink gun detrusion deflection of this structure is little, is unfavorable for the injection of large particle diameter ink.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of piezoelectric ink jet head and comprises the printing device of this piezoelectric ink jet head, can effectively solve ink gun deflection little, is unfavorable for the problem of the injection of large particle diameter ink.
For solving the problems of the technologies described above, the invention provides technical scheme as follows:
On the one hand, a kind of piezoelectric ink jet head is provided, comprise piezoelectric ceramics and nozzle plate, on described piezoelectric ceramics, be provided with some strip channel walls, between adjacent two described conduit walls, be formed with groove, in described conduit wall, be embedded with metal inner electrode, thereby form piezoelectric bimorph chip architecture, the outer surface of described conduit wall is provided with external electrode, and the polarised direction of described conduit wall is perpendicular to described conduit wall;
Described nozzle plate lid is located on the distal face of described conduit wall, is arranged at intervals with flexible sealing material between described nozzle plate and conduit wall, has the nozzle consistent with described groove quantity on described nozzle plate, and described nozzle is corresponding with the position of groove.
Further, the polarised direction of described conduit wall is all identical, described in each, the external electrode of the both sides of conduit wall is connected, described in each, the metal inner electrode of conduit wall and external electrode are jointly as the positive and negative electrode of this conduit wall, and metal inner electrode and the external electrode of adjacent two described conduit walls apply opposite voltage.
Further, on the distal face of described conduit wall, be also provided with external electrode, external electrode on the distal face of described conduit wall and the external electrode of outer surface are structure as a whole, and on the distal face of described conduit wall, between described external electrode and metal inner electrode, are provided with insulating barrier.
Further, described in each, conduit wall is contrary in the polarised direction of the described metal inner electrode both sides of its correspondence, the polarised direction of adjacent two described conduit walls is contrary, described in each, the external electrode of the both sides of conduit wall is respectively as the positive and negative electrode of this conduit wall, and the external electrode that is positioned at the both sides of groove described in each applies opposite voltage.
Further, the surface coverage of described external electrode has passivation layer.
Further, the width of the piezoelectric ceramics between adjacent described metal inner electrode is 80 μ m-400 μ m, and the thickness of described conduit wall is 40 μ m-200 μ m, and the height of described conduit wall is 200 μ m-500 μ m; The thickness of described metal inner electrode is 1 μ m-5 μ m; The width of described groove is 40 μ m-200 μ m; The diameter of described nozzle is 25 μ m-100 μ m.
Further, described piezoelectric ceramics is by some piezoelectric ceramics sub-blocks and described metal inner electrode is low temperature co-fired makes, and described conduit wall is that by accurate scribing machine, through grooving, processing makes on described piezoelectric ceramics; Described nozzle plate adopts micro injection molding technique to make, and described nozzle makes by injection mo(u)lding, Laser Processing or accurate engraving.
Further, the material of described piezoelectric ceramics adopts flexible piezoelectric ceramic material or piezoelectric strain constant d
33be greater than 500 piezoelectric; The material of described metal inner electrode adopts silver palladium alloy or copper; The material of described external electrode adopts aluminium, silver, nickel or gold, and described external electrode makes by sputtering method or galvanoplastic; The material of described flexible sealing material adopts macromolecular material, and described macromolecular material is phenolic resins; The material of described nozzle plate adopts structural ceramics, lucite, engineering plastics, Teflon or semiconductor silicon material, and described structural ceramics adopts aluminium oxide, zirconia, silicon nitride or aluminium nitride.
Further, the material of described insulating barrier adopts organic polymer insulating materials.
On the other hand, provide a kind of printing device, comprise above-mentioned piezoelectric ink jet head.
The present invention has following beneficial effect:
Compared with prior art, piezoelectric ink jet head of the present invention and comprise the printing device of this piezoelectric ink jet head, is embedded with metal inner electrode in conduit wall, thereby form piezoelectric bimorph chip architecture, and the polarised direction of conduit wall is perpendicular to conduit wall, when conduit wall powers up, that distortion adopts is d
31transverse curvature pattern, can produce larger deflection, can produce larger rock deformation pressure to the ink in ink channel, is conducive to the injection of large particle diameter ink and the raising of jet velocity.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of embodiment of piezoelectric ink jet head of the present invention;
Fig. 2 is the polarization mode schematic diagram of the piezoelectric ceramics of piezoelectric ink jet head shown in Fig. 1;
Fig. 3 is the piezoelectric ceramics of piezoelectric ink jet head shown in Fig. 2 structural representation after grooving processing;
Fig. 4 for plating and establish the structural representation after insulating barrier and external electrode on the conduit wall of piezoelectric ink jet head shown in Fig. 3;
Fig. 5 is that the conduit wall of piezoelectric ink jet head shown in Fig. 4 powers up distortion schematic diagram;
The change in volume situation schematic diagram of adjacent two ink channels when Fig. 6 is the work of piezoelectric ink jet head shown in Fig. 1;
Fig. 7 is the structural representation of the another kind of embodiment of piezoelectric ink jet head of the present invention;
Fig. 8 is the polarization mode schematic diagram of the piezoelectric ceramics of piezoelectric ink jet head shown in Fig. 7;
Fig. 9 is the piezoelectric ceramics of piezoelectric ink jet head shown in Fig. 8 structural representation after grooving processing;
Figure 10 for plating and establish the structural representation after external electrode on the conduit wall of piezoelectric ink jet head shown in Fig. 9;
Figure 11 is that the conduit wall of piezoelectric ink jet head shown in Figure 10 powers up distortion schematic diagram;
The change in volume situation schematic diagram of adjacent two ink channels when Figure 12 is the work of piezoelectric ink jet head shown in Fig. 7.
The specific embodiment
For making the technical problem to be solved in the present invention, technical scheme and advantage clearer, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
On the one hand, the invention provides a kind of piezoelectric ink jet head, as shown in Fig. 1-12, comprise piezoelectric ceramics 1,1 ' and nozzle plate 5,5 ', on piezoelectric ceramics 1,1 ', be provided with some strip channel walls 13,13 ', between adjacent two conduit walls 13,13 ', be formed with groove 14,14 ' (being ink channel), in conduit wall 13,13 ', be embedded with metal inner electrode 12,12 ', thereby form piezoelectric bimorph chip architecture, conduit wall 13,13 ' outer surface are provided with external electrode 3,3 ', and conduit wall 13,13 ' polarised direction are perpendicular to conduit wall 13,13 ';
Nozzle plate 5,5 ' lid are located on conduit wall 13,13 ' distal face, nozzle plate 5,5 ' and conduit wall 13,13 ' between be arranged at intervals with flexible sealing material 4,4 ', flexible sealing material 4,4 ' cuts off adjacent groove 14,14 ', and for conduit wall 13,13 ' distortion provide cushion space, on nozzle plate 5,5 ', have and groove 14, nozzle 6,6 ' that 14 ' quantity is consistent nozzle 6,6 ' corresponding with groove 14,14 ' position.
During work, ink flows in ink channel (being groove 14,14 '), when certain nozzle 6 of needs, 6 ' action, can power up the conduit wall 13,13 ' on the corresponding groove of this nozzle 6,6 ' 14,14 ' both sides, thereby make conduit wall 13,13 ' produce distortion, squeezeout ink, makes ink from nozzle 6,6 ' ejection.
Compared with prior art, piezoelectric ink jet head of the present invention, in conduit wall 13,13 ', be embedded with metal inner electrode 12,12 ', thereby form piezoelectric bimorph chip architecture, and conduit wall 13,13 ' polarised direction are perpendicular to conduit wall 13,13 ', when conduit wall 13,13 ' powers up, that distortion adopts is d
31transverse curvature pattern, can produce larger deflection, can produce larger rock deformation pressure to the ink in ink channel, is conducive to the injection of large particle diameter ink and the raising of jet velocity.
Concrete, the present invention can have following two kinds of versions:
Version one (parallel connection type):
As shown in Fig. 1-6, the polarised direction of conduit wall 13 is all identical, the external electrode 3 of the both sides of each conduit wall 13 is connected, the metal inner electrode 12 of each conduit wall 13 and external electrode 3 are jointly as the positive and negative electrode of this conduit wall 13, and metal inner electrode 12 and the external electrode 3 of adjacent two conduit walls 13 apply opposite voltage.
For simplifying manufacture craft, on the distal face of conduit wall, also can be provided with external electrode, external electrode on the distal face of conduit wall 13 and the external electrode of outer surface are structure as a whole, and on the distal face of conduit wall 13, between external electrode 3 and metal inner electrode 12, be provided with insulating barrier, to avoid short circuit between the two.
In the embodiment shown in Fig. 1-6, first, as shown in Figure 2, the piezoelectric ceramics 1 of this piezoelectric ink jet head can utilize low temperature co-fired technique to make by some piezoelectric ceramics sub-blocks 11 and metal inner electrode 12, and each piezoelectric ceramics sub-block 11 is carried out to the polarization processing of equidirectional (as shown in arrow in figure 10).
Then, as shown in Figure 3, on the piezoelectric ceramics 1 after polarization, utilize grooving processing technology to produce and be the conduit wall 13 that periodic structure is arranged.Piezoelectric ceramics sub-block 11 can be bonded in above a laminar substrate (not shown), and the degree of depth of grooving is less than or equal to the height of piezoelectric ceramics sub-block, considers bonding intensity, and suggestion is not cut.The adjacency channel wall 13 forming after cutting can form ink channel with nozzle plate.
Then, as shown in Figure 4, on conduit wall 13 outer surfaces, insulating barrier 2 and external electrode 3 are established in plating, and metal inner electrode 12 and external electrode 3 are respectively as the positive and negative electrode of conduit wall 13.Electrode is coated with and can adopts physical vaporous deposition or galvanoplastic.
During work, power up distortion as shown in Figure 5, conduit wall 13 is deformation places of piezoelectric ink jet head, and the external electrode 3 of one of them conduit wall 13 adds positive voltage, and its metal inner electrode 12 adds negative voltage, because the polarised direction of conduit wall 13 is perpendicular to conduit wall 13, that conduit wall 13 distortion employings is d
31transverse curvature pattern, can produce larger deflection.In this figure, conduit wall 13 can be considered parallel connection type piezoelectric bimorph.
And as shown in Figure 6, metal inner electrode 12 and the external electrode 3 of adjacent two conduit walls 13 apply opposite voltage, so the deformation direction of adjacent two conduit walls 13 is contrary, thereby realizes the volume increase of ink channel or dwindle, complete the process that ink droplet sprays.
Version two (tandem type):
As shown in Fig. 7-12, each conduit wall 13 ' is contrary in the polarised direction of its corresponding metal inner electrode 12 ' both sides, the polarised direction of adjacent two conduit walls 13 ' is contrary, the external electrode 3 ' of the both sides of each conduit wall 13 ' is respectively as the positive and negative electrode of this conduit wall 13 ', and the external electrode 3 ' that is positioned at the both sides of each groove 14 ' applies opposite voltage.Metal inner electrode 12 ' becomes the metal substrate of conduit wall 13 ' " twin lamella ".
In the embodiment shown in Fig. 7-12, first, as shown in Figure 8, the piezoelectric ceramics 1 ' of this piezoelectric ink jet head can utilize low temperature co-fired technique to make by some piezoelectric ceramics sub-blocks 11 ' and metal inner electrode 12 ', and adjacent piezoelectric ceramics sub-block 11 ' is carried out to the polarization processing of rightabout (as shown in arrow 10 ' in figure).
Then, as shown in Figure 9, on the piezoelectric ceramics 1 ' after polarization, utilize grooving processing technology to produce and be the conduit wall 13 ' that periodic structure is arranged.
Then, as shown in figure 10, on conduit wall 13 ' lateral surface, external electrode 3 ' is established in plating, and the external electrode 3 ' of the both sides of each conduit wall 13 ' is respectively as the positive and negative electrode of this conduit wall 13 '.Electrode is coated with and can adopts physical vaporous deposition or galvanoplastic.After plated electrode, can adopt the methods such as laser cutting or machine cuts that the electrode of conduit wall 13 ' distal face and two sides is disconnected.
During work, power up distortion as shown in figure 11, conduit wall 13 ' is the deformation place of piezoelectric ink jet head, the external electrode 3 ' of one of them conduit wall 13 ' both sides adds respectively positive and negative voltage, because the polarised direction of conduit wall 13 ' is perpendicular to conduit wall 13 ', so that conduit wall 13 ' distortion employing is d
31transverse curvature pattern, can produce larger deflection.In this figure, conduit wall 13 ' can be considered tandem type piezoelectric bimorph.
And as shown in figure 12, the external electrode 3 ' that is positioned at the both sides of each groove 14 ' applies opposite voltage, so the deformation direction of adjacent two conduit walls 13 ' is contrary, thereby realizes the volume increase of ink channel or dwindle, complete the process that ink droplet sprays.
Should be understood that; in the illustrated embodiment of Fig. 1-12, only show the preferred two kinds of different versions of piezoelectric ink jet head, those skilled in the art can change on this basis and adjust, to form how different version; all belong to protection scope of the present invention, repeat no more herein.
In the above-described embodiments, external electrode 3,3 ' surface can be coated with passivation layer, to prevent the corrosion of ink to electrode, piezoelectric ceramics etc.
In the present invention, the size of piezoelectric ink jet head each several part is preferably as follows:
Piezoelectric ceramics in adjacent metal between electrode 12,12 ' width (being piezoelectric ceramics sub-block 11,11 ' width) are 80 μ m-400 μ m, and concrete size can be according to required shower nozzle resolution adjustment, and overall width depends on the print span of shower nozzle.While changing piezoelectric ceramics sub-block 11,11 ' width, corresponding ink channel number will change, again due to ink channel number corresponding nozzle number, so the number of nozzle of piezoelectric ink jet head of the present invention can be adjusted flexibly, the work requirements that can adapt to different occasions, has stronger practicality.
Meanwhile, conduit wall 13,13 ' thickness (being the width shown in Fig. 1, Fig. 3-7, Fig. 9-12) are 40 μ m-200 μ m, and conduit wall 13,13 ' height are 200 μ m-500 μ m; Metal inner electrode 12,12 ' thickness are 1 μ m-5 μ m; Groove 14,14 ' width are 40 μ m-200 μ m; The diameter of nozzle 6 is 25 μ m-100 μ m.
In the present invention, the manufacture craft of piezoelectric ink jet head each several part is preferably as follows:
Piezoelectric ceramics 1,1 ' is by some piezoelectric ceramics sub-block 11,11 ' and metal inner electrode the 12,12 ' low temperature co-fired making, and conduit wall 13,13 ' is that 1,1 ' by accurate scribing machine, through grooving, processing makes on piezoelectric ceramics; The conduit wall 13 of piezoelectric ink jet head, 13 ' piezoelectric bimorph chip architecture can have been simplified technological process like this by this low temperature co-fired and grooving processing disposal molding, have improved production efficiency.
Nozzle plate 5,5 ' adopts micro injection molding technique to make, and nozzle 6,6 ' makes by injection mo(u)lding, Laser Processing or accurate engraving, and passivation layer adopts vapour deposition process to make.
In the present invention, the material of piezoelectric ink jet head each several part is preferably as follows:
Piezoelectric ceramics 1,1 ' material adopt flexible piezoelectric ceramic material, as commercial PZT5H, or piezoelectric strain constant d
33be greater than 500 piezoelectric;
Metal inner electrode 12,12 ' material adopt the metallic conduction materials such as silver palladium alloy or copper;
External electrode 3,3 ' material adopt the metallic conduction materials such as aluminium, silver, nickel or gold, and external electrode 3,3 ' can make by sputtering method or galvanoplastic;
Flexible sealing material 4,4 ' material adopt the macromolecular materials such as phenolic resins;
Nozzle plate 5,5 ' material adopt structural ceramics (aluminium oxide, zirconia, silicon nitride or aluminium nitride etc.), lucite, engineering plastics, Teflon or semiconductor silicon material etc.
Meanwhile, insulating barrier 2,2 ' material adopt the organic polymer insulating materials such as polyvinyl chloride.
On the other hand, the present invention also provides a kind of printing device, comprises above-mentioned piezoelectric ink jet head, and the structure of piezoelectric ink jet head, with upper identical, repeats no more herein.
Beneficial effect of the present invention is as follows:
That 1, conduit wall 13, the 13 ' distortion of piezoelectric ink jet head adopt is d
31transverse curvature pattern, can produce larger deflection, can produce larger rock deformation pressure to the ink in ink channel, is conducive to the injection of large particle diameter ink and the raising of jet velocity.
2, compact conformation, the more nozzle 6,6 ' of can arranging.In order to improve the speed of inkjet printing, a kind of method is exactly the nozzle that increases shower nozzle.The nozzle number of the shower nozzle that can buy in the market mostly hundreds of to 1,000 left and right, the nozzle number of single shower nozzle also can increase to some extent from now on.Shower nozzle of the present invention simple and compact for structure, can adjust the density of ink channel by adjusting the thickness of piezoelectric ceramics sub-block, thereby obtain corresponding number of nozzle, therefore can adapt to the work requirements of different occasions, has stronger practicality.
3, the present invention adopts flexible sealing material to flexibly connect conduit wall and nozzle plate.Because conduit wall is piezoelectric bimorph cantilever beam, so far-end can not be fixed on nozzle plate, can adopt flexible material as the coupling part of conduit wall and nozzle plate, so both can prevent that ink channel from interconnecting, also can not affect the normal work of piezoelectric channel walls.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, do not departing under the prerequisite of principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (10)
1. a piezoelectric ink jet head, comprise piezoelectric ceramics and nozzle plate, it is characterized in that, on described piezoelectric ceramics, be provided with some strip channel walls, between adjacent two described conduit walls, be formed with groove, in described conduit wall, be embedded with metal inner electrode, thereby form piezoelectric bimorph chip architecture, the outer surface of described conduit wall is provided with external electrode, and the polarised direction of described conduit wall is perpendicular to described conduit wall;
Described nozzle plate lid is located on the distal face of described conduit wall, is arranged at intervals with flexible sealing material between described nozzle plate and conduit wall, has the nozzle consistent with described groove quantity on described nozzle plate, and described nozzle is corresponding with the position of groove.
2. piezoelectric ink jet head according to claim 1, it is characterized in that, the polarised direction of described conduit wall is all identical, described in each, the external electrode of the both sides of conduit wall is connected, described in each, the metal inner electrode of conduit wall and external electrode are jointly as the positive and negative electrode of this conduit wall, and metal inner electrode and the external electrode of adjacent two described conduit walls apply opposite voltage.
3. piezoelectric ink jet head according to claim 2, it is characterized in that, on the distal face of described conduit wall, be also provided with external electrode, external electrode on the distal face of described conduit wall and the external electrode of outer surface are structure as a whole, and on the distal face of described conduit wall, between described external electrode and metal inner electrode, are provided with insulating barrier.
4. piezoelectric ink jet head according to claim 1, it is characterized in that, described in each, conduit wall is contrary in the polarised direction of the described metal inner electrode both sides of its correspondence, the polarised direction of adjacent two described conduit walls is contrary, described in each, the external electrode of the both sides of conduit wall is respectively as the positive and negative electrode of this conduit wall, and the external electrode that is positioned at the both sides of groove described in each applies opposite voltage.
5. according to the piezoelectric ink jet head described in arbitrary claim in claim 1 to 4, it is characterized in that, the surface coverage of described external electrode has passivation layer.
6. according to the piezoelectric ink jet head described in arbitrary claim in claim 1 to 4, it is characterized in that, the width of the piezoelectric ceramics between adjacent described metal inner electrode is 80 μ m-400 μ m, and the thickness of described conduit wall is 40 μ m-200 μ m, and the height of described conduit wall is 200 μ m-500 μ m;
The thickness of described metal inner electrode is 1 μ m-5 μ m;
The width of described groove is 40 μ m-200 μ m;
The diameter of described nozzle is 25 μ m-100 μ m.
7. according to the piezoelectric ink jet head described in arbitrary claim in claim 1 to 4, it is characterized in that, described piezoelectric ceramics is by some piezoelectric ceramics sub-blocks and described metal inner electrode is low temperature co-fired makes, and described conduit wall is that by accurate scribing machine, through grooving, processing makes on described piezoelectric ceramics;
Described nozzle plate adopts micro injection molding technique to make, and described nozzle makes by injection mo(u)lding, Laser Processing or accurate engraving.
8. according to the piezoelectric ink jet head described in arbitrary claim in claim 1 to 4, it is characterized in that, the material of described piezoelectric ceramics adopts flexible piezoelectric ceramic material or piezoelectric strain constant d
33be greater than 500 piezoelectric;
The material of described metal inner electrode adopts silver palladium alloy or copper;
The material of described external electrode adopts aluminium, silver, nickel or gold, and described external electrode makes by sputtering method or galvanoplastic;
The material of described flexible sealing material adopts macromolecular material, and described macromolecular material is phenolic resins;
The material of described nozzle plate adopts structural ceramics, lucite, engineering plastics, Teflon or semiconductor silicon material, and described structural ceramics adopts aluminium oxide, zirconia, silicon nitride or aluminium nitride.
9. piezoelectric ink jet head according to claim 3, is characterized in that, the material of described insulating barrier adopts organic polymer insulating materials.
10. a printing device, is characterized in that, comprises the piezoelectric ink jet head described in arbitrary claim in claim 1 to 9.
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| CN105128532A (en) * | 2015-08-11 | 2015-12-09 | 北京派和科技股份有限公司 | Piezoelectric array nozzle and spraying equipment comprising same |
| CN105984216A (en) * | 2015-02-13 | 2016-10-05 | 北京派和科技股份有限公司 | Piezoelectric nozzle and processing method thereof, and spraying equipment including the nozzle |
| CN106827813A (en) * | 2015-12-07 | 2017-06-13 | 清华大学 | Finger-like cantilever type piezoelectric shower nozzle and its processing method and spraying equipment |
| CN106915161A (en) * | 2015-12-28 | 2017-07-04 | 清华大学 | Laminated piezoelectric shower nozzle and the spraying equipment including the shower nozzle |
| CN108274913A (en) * | 2017-12-05 | 2018-07-13 | 武汉璟丰科技有限公司 | It is a kind of to improve the adaptive equal division methodology for sharing wall nozzle straightness |
| CN108480053A (en) * | 2018-02-08 | 2018-09-04 | 中国矿业大学 | A kind of Nonlinear Electric Field self-checking device of friction electrical selection |
| CN108705864A (en) * | 2018-07-26 | 2018-10-26 | 南京沃航智能科技有限公司 | Efficient low-pressure drives piezo jets |
| CN110065305A (en) * | 2018-01-23 | 2019-07-30 | 上海新微技术研发中心有限公司 | Piezoelectric nozzle structure and manufacturing method thereof |
| CN113459671A (en) * | 2021-06-28 | 2021-10-01 | 华南理工大学 | Flexible variable-size micro-piezoelectric spray head based on electromagnetic coupling effect and adjusting method |
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