CN103983671A - Chemical sensor and method for manufacturing the same - Google Patents
Chemical sensor and method for manufacturing the same Download PDFInfo
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- CN103983671A CN103983671A CN201410199052.6A CN201410199052A CN103983671A CN 103983671 A CN103983671 A CN 103983671A CN 201410199052 A CN201410199052 A CN 201410199052A CN 103983671 A CN103983671 A CN 103983671A
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- 239000000126 substance Substances 0.000 title claims abstract description 112
- 238000000034 method Methods 0.000 title claims abstract description 56
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 43
- 239000000463 material Substances 0.000 claims abstract description 134
- 238000006243 chemical reaction Methods 0.000 claims abstract description 57
- 239000007772 electrode material Substances 0.000 claims abstract description 48
- 239000011347 resin Substances 0.000 claims description 24
- 229920005989 resin Polymers 0.000 claims description 24
- 241000272165 Charadriidae Species 0.000 claims description 19
- 239000004020 conductor Substances 0.000 claims description 11
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 238000007650 screen-printing Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 abstract description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 11
- 238000005755 formation reaction Methods 0.000 description 10
- 238000005259 measurement Methods 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 7
- HVYWMOMLDIMFJA-DPAQBDIFSA-N cholesterol Chemical compound C1C=C2C[C@@H](O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2 HVYWMOMLDIMFJA-DPAQBDIFSA-N 0.000 description 6
- -1 acetylcholine ester Chemical class 0.000 description 5
- 229920000049 Carbon (fiber) Polymers 0.000 description 4
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000004917 carbon fiber Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910021389 graphene Inorganic materials 0.000 description 4
- 229910021385 hard carbon Inorganic materials 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 239000002109 single walled nanotube Substances 0.000 description 4
- 229910021384 soft carbon Inorganic materials 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 3
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N benzene Substances C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 239000004202 carbamide Substances 0.000 description 3
- 239000002041 carbon nanotube Substances 0.000 description 3
- 229910021393 carbon nanotube Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 2
- 108010015776 Glucose oxidase Proteins 0.000 description 2
- 239000004366 Glucose oxidase Substances 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 2
- 229960004373 acetylcholine Drugs 0.000 description 2
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 2
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 2
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 2
- 239000008280 blood Substances 0.000 description 2
- 210000004369 blood Anatomy 0.000 description 2
- 235000012000 cholesterol Nutrition 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000005562 fading Methods 0.000 description 2
- YAGKRVSRTSUGEY-UHFFFAOYSA-N ferricyanide Chemical compound [Fe+3].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-] YAGKRVSRTSUGEY-UHFFFAOYSA-N 0.000 description 2
- 239000008103 glucose Substances 0.000 description 2
- 229940116332 glucose oxidase Drugs 0.000 description 2
- 235000019420 glucose oxidase Nutrition 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 102000012440 Acetylcholinesterase Human genes 0.000 description 1
- 108010022752 Acetylcholinesterase Proteins 0.000 description 1
- KXDHJXZQYSOELW-UHFFFAOYSA-M Carbamate Chemical compound NC([O-])=O KXDHJXZQYSOELW-UHFFFAOYSA-M 0.000 description 1
- 108010089254 Cholesterol oxidase Proteins 0.000 description 1
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
- 108010046334 Urease Proteins 0.000 description 1
- 229940022698 acetylcholinesterase Drugs 0.000 description 1
- 239000003905 agrochemical Substances 0.000 description 1
- WQZGKKKJIJFFOK-VFUOTHLCSA-N beta-D-glucose Chemical compound OC[C@H]1O[C@@H](O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-VFUOTHLCSA-N 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
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- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Abstract
The invention provides a chemical sensor and a method for manufacturing the same. The chemical sensor has a sensing region and includes a substrate, an electrode material, a reaction material, and a cover plate. The substrate has at least one trench, and one end of the trench extends into the sensing region. The electrode material is filled in the at least one trench to form at least one electrode. The thickness of the electrode material is less than or equal to the depth of the groove, and one end of the electrode extends into the sensing area. The reactive material covers the electrodes located in the sensing region. The cover plate is positioned on the base material.
Description
Technical field
The invention relates to a kind ofly for measuring and the element of analytical chemistry material, and relate to especially a kind of chemical sensor and manufacture method thereof.
Background technology
In recent years, along with the development of raw medical technologies art, the chemical substance measurement technology in human body is taken seriously gradually, and wishes to measure whereby chemical substance in human body to reach effect of early detection and treatment.Therefore,, at raw doctor's technical elements, the application of chemical sensor is also gradually extensively polynary.
So-called chemical sensor refers to and utilizes chemical molecular (as ferment, antibody ... Deng) with subject matter (as glucose, cholesterol, urea or acetylcholine ester ... Deng) react, and reaction result is converted to a kind of analytical equipment of electronic signal or optical signalling.But, in existing chemical sensor, in the time that the live width of electrode is excessive, exist the problem of the low and low measurement accuracy that low signal noise ratio (S/N ratio) causes of the diffuser efficiency causing due to electric double layer effect.In addition, because being traditionally utilizes screen painting or lithography process to carry out the electrode of manufacturing chemistry sensor, therefore that manufacturing chemical sensor out has electrode wires is wide inhomogeneous and affect repeatability and the too high problem of manufacturing cost.
Summary of the invention
The invention provides a kind of chemical sensor, the high signal noise ratio of its tool, high accuracy and the uniform electrode live width of measuring.
The invention provides a kind of manufacture method of chemical sensor, it has low process costs and short process time.
Chemical sensing appliance of the present invention has sensing area and comprises base material, electrode material, reaction material and cover plate.Base material has at least one groove, and one end of groove extends in sensing area.Electrode material is inserted at least one groove, and to form at least one electrode, wherein the thickness of electrode material is less than or equal to the degree of depth of groove, and one end of electrode extends in sensing area.Reaction material covers the electrode that is positioned at sensing area.Cover plate is positioned on base material.
Wherein, this at least one groove is multiple grooves, and this electrode material inserts in those grooves to form multiple electrodes, and this reaction material covers those electrodes that are positioned at this sensing area.
Wherein, the thickness of this electrode material is less than the degree of depth of this at least one groove, and this reaction material of part inserts in this at least one groove to cover this at least one electrode, and it is separated from one another to be positioned at this reaction materials of two adjacent grooves.
Wherein, this reaction material being positioned on those adjacent electrodes is not separated.
Wherein, this electrode material comprises multiple conductive material, and it is incomplete same to be positioned at those conductive materials of those grooves.
Wherein, more comprise at least one projected electrode, be positioned on a surface of this base material at this at least one groove place, one end of this at least one projected electrode extends in this sensing area, and this reaction material covers this at least one projected electrode that is positioned at this sensing area.
Wherein, this base material is a flexible base plate, and this at least one groove is positioned at this flexible base plate and does not run through this flexible base plate.
Wherein, this base material comprises: a flexible base plate; And a resin bed, be positioned on this flexible base plate, wherein those grooves are positioned at this resin bed and exposed this flexible base plate or not exposed this flexible base plate.
Wherein, more comprise a stilt, be configured between this base material and this cover plate and with this cover plate and contact, and in sensing area, this stilt is positioned at the edge of this base material.
Wherein, the width of this at least one groove is less than 25 microns.
The manufacture method that the invention provides a kind of chemical sensor, wherein chemical sensing appliance has sensing area.The manufacture method of chemical sensor of the present invention comprises the following steps.Base material is provided.In base material, form at least one groove, and one end of groove extends in sensing area.In groove, insert electrode material, to form at least one electrode, wherein the thickness of electrode material is less than or equal to the degree of depth of groove, and the end of electrode extends in sensing area.In sensing area, form reaction material, with coated electrode.On base material, configure cover plate.
Wherein, the method that forms this at least one groove in this base material shape comprises: a flexible base plate is provided; And this flexible base plate is carried out to a patterning program, to form this at least one groove in this flexible base plate, and this at least one groove does not run through this flexible base plate.
Wherein, the method that forms this at least one groove in this base material shape comprises: a flexible base plate is provided; On this flexible base plate, form a resin bed; And this resin bed is carried out to a patterning program, to form this at least one groove in this resin bed, this at least one groove is positioned at this resin bed and exposed this flexible base plate or not exposed this flexible base plate.
Wherein, this patterning program comprises a press mold program.
Wherein, in this at least one groove, insert this electrode material and comprise a rubbing method.
Wherein, more comprise and form at least one projected electrode, this at least one projected electrode is positioned on the surface of this base material at this at least one groove place.
Wherein, the formation method of this at least one projected electrode comprises screen printing process and ink-jet application technique.
Based on above-mentioned, chemical sensor of the present invention has uniform electrode live width, high signal noise ratio and high accuracy and the repeatability of measuring.In addition, chemical sensor manufacture method provided by the present invention can effectively reduce manufacturing cost and shorten and manufacture the required time.
For above-mentioned feature and advantage of the present invention can be become apparent, special embodiment below, and coordinate appended graphic being described in detail below.
Brief description of the drawings
Fig. 1 illustrates the exploded view of the chemical sensor of first embodiment of the invention.
Fig. 2 A to Fig. 2 E illustrates the manufacture sectional view of the chemical sensor of first embodiment of the invention, the sectional view that wherein Fig. 2 E intercepts along profile line I-I' for Fig. 1.
Fig. 3 A to Fig. 3 C illustrates the manufacture sectional view of the sensing area of the chemical sensor of second embodiment of the invention.
Fig. 4 illustrates the exploded view of the chemical sensor of third embodiment of the invention.
Fig. 5 A to Fig. 5 C illustrates the manufacture sectional view of the sensing area of the chemical sensor of third embodiment of the invention, the sectional view that wherein Fig. 5 C intercepts along profile line II-II' for Fig. 4.
Fig. 6 illustrates the exploded view of the chemical sensor of fourth embodiment of the invention.
Fig. 7 A to Fig. 7 F illustrates the manufacture sectional view of the chemical sensor of fourth embodiment of the invention, the sectional view that wherein Fig. 7 F intercepts along profile line III-III' for Fig. 6.
Fig. 8 illustrates the exploded view of the chemical sensor of fifth embodiment of the invention.
Fig. 9 A to Fig. 9 C illustrates the manufacture sectional view of the chemical sensor of fifth embodiment of the invention, the sectional view that wherein Fig. 9 C intercepts along profile line IV-IV' for Fig. 8.
Figure 10 is the current-voltage figure of the ultramicroelectrode process testing electrical property gained of the chemical sensor of example of the present invention.
Figure 11 is that the general wire mark electrode of existing chemical sensor is through the current-voltage figure of testing electrical property gained.
100,200,300,400,500: chemical sensor
105,505: sensing area
107,507: external circuit bonding pad
110,510: base material
112: flexible base plate
113: sidewall
115,315,515: groove
120: electrode material
121,122,123,422: electrode
130,230,330,430: reaction material
140,440: stilt
150: cover plate
160,560: mould
421,423: projected electrode
514: resin bed
570: ultraviolet light
I-I', II-II', III-III', IV-IV': profile line
Embodiment
Below enumerate various embodiment so that structure and the manufacture method thereof of chemical sensor of the present invention to be described.
The first embodiment
Fig. 1 illustrates the exploded view of the chemical sensor of first embodiment of the invention.Fig. 2 A to Fig. 2 E illustrates the manufacture sectional view of the chemical sensor of first embodiment of the invention, the sectional view that wherein Fig. 2 E intercepts along profile line I-I' for Fig. 1.Referring to Fig. 1 and Fig. 2 A, provide flexible base plate 112, with the base material 110 as chemical sensor 100.The material of substrate 112 can be for example Polyvinylchloride (PVC), polypropylene (PP), polyimide (PI), polycarbonate (PC), polyethersulfone (PES), the sub-benzene of polyoxygenated (PPO), acrylonitrile butadiene styrene resin (ABS), poly terephthalic acid butenylidene ester (PBT), polyethylene terephthalate (PET), PEN (PEN), polyamide (Polyamide, PA), poly-to benzene imines (pernigraniline, PNB), polyetheretherketone (PEEK) or polyimide (PEI), or its combination.Then, on flexible base plate 112, define sensing area 105 and the external circuit bonding pad 107 of chemical sensor 100.
Referring to Fig. 1 and Fig. 2 B, flexible base plate 112 is carried out to patterning program, with at least one groove 115 of the interior formation of flexible base plate 112.One end of groove 115 extends in sensing area 105, and the other end extends in external circuit bonding pad 107.Groove 115 does not run through flexible base plate 112, and the width of groove 115 can be less than 25 microns.For example, in the present embodiment, patterning program can comprise mould 160 is directly pressed on to the press mold program on flexible base plate 112, and wherein mould 160 has picture on surface, and can be according to the jut on picture on surface at groove 115 corresponding to the interior formation of flexible base plate 112.In addition, although in the present embodiment, for convenience of description groove 115 is illustrated be three parallel to each other linear, but the present invention is not as limit.In other words, the present invention can comprise the groove 115 of arbitrary number, and the purposes of the visual chemical sensor 100 of groove 115 and form other shape, for example, be spirality, pectination, so that the area of sensing area 105 is done to more efficient use.
Referring to Fig. 1 and Fig. 2 C, after mould 160 is removed, in each groove 115, insert electrode material 120 to form respectively electrode 121,122 and 123.Can use rubbing method that electrode material 120 is inserted in groove 115, and rubbing method can be for example the known coating processes such as scraper for coating method, spin-coating method, rolling method, ink-jet application method.In the present embodiment, the thickness of inserting the electrode material 120 in groove 115 is less than the degree of depth of groove 115, but the present invention is not as limit.In other embodiments, also can insert more electrode material 120 and make the thickness of electrode material 120 equal the degree of depth of groove 115.One end of electrode 121,122 and 123 each persons extends in sensing area 105 for subsequent chemistry amount of substance cls analysis, and electrode 121,122 and 123 each persons' the other end is positioned at external circuit bonding pad 107 to connect external circuit, wherein external circuit is for example computing machine or other electronic analysis device.
Because groove 115 is to form by press mold program, therefore electrode 121,122 and 123 can have uniform live width and have high measurement repeatability.In addition, in the time that the width of groove 115 is less than 25 microns, because the live width of electrode 121,122 and 123 also can be less than 25 microns, therefore electrode 121,122 and 123 can be as ultramicroelectrode.By chemical sensor 100 for measuring the process of content of chemical substances, electrode 121,122 and 123 as ultramicroelectrode can produce less electric double layer effect, thereby has high diffuser efficiency, high signal noise ratio, high measurement accuracy and low voltage fading rate (IR drop).
In the present invention, electrode material 120 can comprise multiple conductive material, for example graphitic carbon (graphite), Graphene (graphene), hard carbon (hard carbon), soft carbon (soft carbon), Single Walled Carbon Nanotube (SWCNT), multiple-wall carbon nanotube (MWCNT), carbon fiber (carbon fiber), copper (Cu), silver (Ag), platinum (Pt), gold (Au), palladium (Pd), nickel (Ni), titanium (Ti), molybdenum (Mo) or their combination etc., and the conductive material 120 being filled in each groove 115 can be incomplete same.It is in other words, visual that with needs, just in each groove 115, inserting different conductive material 120 does not form needed electrode.In addition, in other embodiments, the electrode material 120 in each groove 115 also can be the conductive material of individual layer or the conductive material of multilayer.
Electrode 121,122 and 123 can be respectively working electrode (work electrode), reference electrode (reference electrode) and auxiliary electrode (auxiliary electrode).In addition, although in the present embodiment, for convenience of description and each electrode 121,122 and 123 is illustrated as parallel to each other linear, but in other embodiments, each electrode 121,122 and 123 also can respective grooves 115 formation and form the shape such as spirality or pectination, to make chemical sensing district 100 there is diversified purposes.
Referring to Fig. 1 and Fig. 2 D, on base material 110, form stilt 140, and in the interior formation reaction material 130 of sensing area 105, wherein partial reaction material 130 is inserted in groove 115 with coated electrode 121,122 and 123, and the height of stilt 440 is greater than the height of reaction material 130.In sensing area 105, stilt 140 can be for example the edge that is positioned at base material 110 by the technique of contraposition laminating.Reaction material 130 can only be disposed in sensing area 105 and the part of coated electrode 121,122 and 123 in sensing area 105, thereby can reduce the use cost of reaction material 130.In the present embodiment, reaction material 130 covers the surface of base material 110, and the reaction material 130 that is positioned at two adjacent grooves 115 is not separated.Reaction material 130 is for example various ferment, for measuring the content of various materials.For example, reaction material 130 can be glucose oxidase ferment (glucose oxidase, GOD), cholesterol oxidation ferment (cholesterol oxidase), urea decomposition ferment (urease) or acetylcholine ester ferment (acetylcholinesterase), in order to measure respectively content, content, urea content or the organophosphorus of Blood Cholesterol and the residual quantity of carbamate agricultural chemicals of glucose in blood.
Referring to Fig. 1 and Fig. 2 E, on base material 110, configure cover plate 150, so that being configured between base material 110 and cover plate 150 and with cover plate 150, stilt 140 contacts.Cover plate 150 is for example the translucent rete that hydrophilic material forms, and therefore cover plate 150 can expose the sensing area 105 with reaction material 130.In addition, because stilt 140 can be separated out a gap between base material 110 and cover plate 150, and in this gap, dispose reaction material 130, therefore in the time carrying out the measure analysis of chemical substance, chemical substance can be utilized capillarity to enter to have in the groove 115 of reaction material 130, so chemical substance can with groove 115 in reaction material 130 react.In addition,, because cover plate 150 is configured on base material 110, therefore can protecting all elements between cover plate 150 and base material 110 not to be subject to the infringement of external environment, cover plate 150 affects the measurement accuracy of chemical sensor 100.Then the technology that, recycles existing chemical sensor completes the manufacturing step of chemical sensor 100.
In the present embodiment, because the groove in chemical sensor is to use press mold program to form, the groove of the chemical sensor therefore forming compared to existing micro-shadow technology, the present embodiment has preferably cost advantage.In addition, because the present embodiment is to utilize press mold program to form groove structure, and use rubbing method in groove, to insert electrode material to form electrode, therefore compared to existing screen painting, the electrode of the present embodiment has more uniform live width, and therefore has higher measurement accuracy and repeatability.
The second embodiment
Fig. 3 A to Fig. 3 C illustrates the manufacture sectional view of the sensing area of the chemical sensor of second embodiment of the invention.Please refer to Fig. 3 A, use manufacture method and the material similar to the first embodiment, the base material 110 of flexible base plate 112 as chemical sensor 200 is provided, and at least one groove 115 of the interior formation of base material 110, wherein groove 115 does not run through flexible base plate 112.Then, insert electrode material 120 to form respectively electrode 121,122 and 123 in each groove 115, wherein the thickness of electrode material 120 is less than the degree of depth of groove 115.
Please refer to Fig. 3 B, on base material 110, form stilt 140, and on electrode material 120, forming reaction material 230, wherein reaction material 230 coated electrodes 121,122 and 123, and reaction material 230 sum up with the thickness of electrode material 120 degree of depth that equals in fact groove 115.In the present embodiment, because reaction material 230 and the thickness of electrode material 120 are summed up the degree of depth that equals in fact groove 115, therefore both surfaces of reaction material 230 and base material 110 are copline in fact, and it is separated from one another to be positioned at the reaction material 230 of two adjacent flutes 115.
Please refer to Fig. 3 C, on base material 110, configure cover plate 150.Then the technology that, recycles existing chemical sensor completes the manufacturing step of the chemical sensor 200 of the present embodiment.
In the present embodiment, because the thickness sum total of reaction material and electrode material equals in fact the degree of depth of groove, and reaction material in each flute is separated from one another, therefore can save the consumption of reaction material to reduce manufacturing cost.In addition, because the surface of reaction material and base material is copline in fact, therefore can be easy to control the amount of inserting of reaction material.
The 3rd embodiment
Fig. 4 illustrates the exploded view of the chemical sensor of third embodiment of the invention.Fig. 5 A to Fig. 5 C illustrates the manufacture sectional view of the sensing area of the chemical sensor of third embodiment of the invention, the sectional view that wherein Fig. 5 C intercepts along profile line II-II' for Fig. 4.Referring to Fig. 4 and Fig. 5 A, use manufacture method and the material similar to the first embodiment, the base material 110 of flexible base plate 112 as chemical sensor 300 is provided.Then,, at least one groove 315 of the interior formation of base material 110, wherein groove 315 does not run through flexible base plate 112.In the present embodiment, groove 315 can be from the external circuit bonding pad 107 of base material 110 and extends to the open groove the sidewall 113 of sensing area 105.Then, insert electrode material 120 to form respectively electrode 121,122 and 123 in each groove 115, wherein the thickness of electrode material 120 is less than the degree of depth of groove 115.
Referring to Fig. 4 and Fig. 5 B, on electrode material 120, form reaction material 330, wherein reaction material 330 is inserted in groove 115 and coated electrode 121,122 and 123.Reaction material 330 is less than in fact the degree of depth of groove 115 with the thickness sum total of electrode material 120, and it is separated from one another to be positioned at the reaction material 330 of two adjacent flutes 115.In addition, in the present embodiment, be open groove owing to thering is the groove 315 of reaction material 330, therefore in the time of measure analysis chemical substance, can directly chemical substance to be measured be coated with and/or be dropped on sidewall 113 with groove 315 in reaction material 330 react.
Referring to Fig. 4 and Fig. 5 C, on base material 110, configure cover plate 150.Then the technology that, recycles existing chemical sensor completes the manufacturing step of the chemical sensor 300 of the present embodiment.In the present embodiment, because reaction material 330 and the thickness sum total of electrode material 120 are less than in fact the degree of depth of groove 315, therefore can directly cover plate be configured on base material 110.In other words, the present embodiment can omit using of stilt and by the processing step of its contraposition laminating, therefore can further reduce material cost and the required time cost of technique of making.
In the present embodiment, because the thickness of reaction material and electrode material is summed up the degree of depth that is less than in fact groove, therefore the sidewall sections that can directly base material be exposed, as supporting the required supporting member of cover plate, further reduces the material cost of stilt and its contraposition is fitted the required process time.
The 4th embodiment
Fig. 6 illustrates the exploded view of the chemical sensor of fourth embodiment of the invention.Fig. 7 A to Fig. 7 F illustrates the manufacture sectional view of the chemical sensor of fourth embodiment of the invention, the sectional view that wherein Fig. 7 F intercepts along profile line III-III' for Fig. 6.Referring to Fig. 6 and Fig. 7 A, the base material 110 of flexible base plate 112 as chemical sensor 400 is provided, and on base material 110, defines sensing area 105 and external circuit bonding pad 107.
Referring to Fig. 6 and Fig. 7 B, by mould (not illustrating), flexible base plate 112 is carried out to press mold program with by flexible base plate 112 patternings, thereby at least one groove 115 of the interior formation of flexible base plate 112.One end of groove 115 extends in sensing area 105, and the other end extends in external circuit bonding pad 107, and groove 115 does not run through flexible base plate 112.
Then, referring to Fig. 6 and Fig. 7 C, in groove 115, insert electrode material, to form electrode 422, wherein the thickness of the electrode material in groove 115 is less than the degree of depth of groove 115.The material of electrode 422 can comprise multiple conductive material, for example, be graphitic carbon, Graphene, hard carbon, soft carbon, Single Walled Carbon Nanotube, multiple-wall carbon nanotube, carbon fiber, copper, silver, platinum, gold, palladium, nickel, titanium, molybdenum or their combination etc.In addition, although only illustrate in the present embodiment an electrode 422, the present invention can not comprise more than one electrode 422 as limit.In addition,, in the time the present invention includes multiple electrode 422, the electrode material in each electrode 422 can be incomplete same.
Then,, referring to Fig. 6 and Fig. 7 D, on flexible base plate 112, form projected electrode 421 and 423.Although in the present embodiment, illustrated for convenience of description two projected electrodes 421 and 423, the present invention is not limited to this and can comprises the projected electrode of arbitrary number.Projected electrode 421 and 423 is positioned on the surface of base material 110 (flexible base plate 112) at groove 115 places.One end of projected electrode 421 and 423 each persons extends in sensing area 105, and the other end is positioned at external circuit bonding pad 107.The formation method of projected electrode 421 and 423 comprises printed/coated technique, and it is for example screen printing process or ink-jet application technique.In addition, the material of projected electrode 421 and 423 can comprise multiple conductive material, be for example graphitic carbon, Graphene, hard carbon, soft carbon, Single Walled Carbon Nanotube, multiple-wall carbon nanotube, carbon fiber, copper, silver, platinum, gold, palladium, nickel, titanium, molybdenum or their combination etc., and projected electrode 421 and 423 material and projected electrode 421 and 423 each other can be identical or not identical with the material of electrode 422.
Then, referring to Fig. 6 and Fig. 7 E, on base material 110, form stilt 440, and form reaction material 430 in sensing area 105, wherein reaction material 430 covers electrode 422 and the projected electrode 421 and 423 in sensing area 105, and wherein the height of stilt 440 is greater than the height of reaction material 430 and projected electrode 421,423.
Finally, referring to Fig. 6 and Fig. 7 F, on base material 110, configure cover plate 150, contact so that stilt 440 is configured between base material 110 and cover plate 150 and with cover plate 150.Then the technology that, recycles existing chemical sensor completes the manufacturing step of the chemical sensor 400 of the present embodiment.
The 5th embodiment
Fig. 8 illustrates the exploded view of the chemical sensor of fifth embodiment of the invention.Fig. 9 A to Fig. 9 C illustrates the manufacture sectional view of the chemical sensor of fifth embodiment of the invention, the sectional view that wherein Fig. 9 C intercepts along profile line IV-IV' for Fig. 8.Referring to Fig. 8 and Fig. 9 A, flexible base plate 112 is provided, and forms resin bed 514 on flexible base plate 112, to make the base material 510 of chemical sensor 500 comprise flexible base plate 112 and resin bed 514.The material of flexible base plate 112 is identical with the first embodiment, therefore do not repeat them here.The material of resin bed 514 comprises sensing optical activity organic material, and is to be for example subject to hardenable resin material after UV-irradiation.Then, on base material 510, define sensing area 505 and external circuit bonding pad 507.
Then, referring to Fig. 8 and Fig. 9 B, resin bed 514 is carried out to patterning program, with at least one groove 515 of the interior formation of resin bed 514, wherein one end of groove 515 extends in sensing area 505, and the other end extends in external circuit bonding pad 507.Groove 515 is positioned at resin bed 514 and can exposed flexible base plate 512 or not exposed flexible base plate 512.For example, in the present embodiment, patterning program can comprise mould 560 being directly pressed on to the press mold program on resin bed 514 and after press mold program, re-using ultraviolet light 570 irradiates the photo-hardening program with hard resin-layer 514 below flexible substrate 112.Although in the present embodiment, for convenience of description groove 515 is illustrated be three parallel to each other linear, but the present invention is not as limit.In other words, scope of the present invention comprises the groove 515 of arbitrary number, and needs in the visual use of groove 515 and form other shape, for example, be spirality, pectination, so that the area of sensing area 505 is done to more efficient use.
Then, referring to Fig. 8 and Fig. 9 C, after mould 560 is removed, insert electrode material 120 to form electrode 121,122 and 123 in groove 515, wherein the thickness of electrode material 120 is less than the degree of depth of flute 515.Then, form reaction material 130 at sensing area 505, wherein partial reaction material 130 is inserted in groove 515 and coated electrode 121,122 and 123, and the height of stilt 440 is greater than the height of reaction material 130.Finally, on base material 510, form stilt 140 and cover plate 150, and utilize the technology of existing chemical sensor to complete the manufacturing step of the chemical sensor 500 of the present embodiment.
The structure of the structure of the chemical sensor 500 of the present embodiment and the chemical sensor 100 of the first embodiment is roughly the same, only discrepancy is between the two: the base material 110 of the chemical sensor 500 of the present embodiment more comprises resin bed 514, and groove 515 is to be formed in resin bed 514 but not in flexible base plate 112, wherein groove 515 can exposed flexible base plate 112 or not exposed flexible base plate 112.Be with being worth mentioning, except above-mentioned discrepancy, because the structure of the chemical sensor 500 of the present embodiment and the chemical sensor 100 of the first embodiment is roughly the same, therefore also can be by the variation of the second embodiment to the four embodiment and improved application in the present embodiment.That is, the reaction material of inserting in the chemical sensor 500 of capable of regulating the present embodiment and the amount of electrode material, or the use that can omit in the present embodiment stilt.
Example
The character of chemical sensor of the present invention will be further illustrated by example and comparative example below.
< example >
Produce example 1 chemical sensor with the method for above-mentioned the first embodiment, it has ultramicroelectrode, and wherein electrode live width is 21 microns, is less than 25 microns.
< comparative example >
An existing chemical sensor is provided, and it has general wire mark electrode, and wherein wire mark electrode live width is 60 microns, is greater than 25 microns.
< electrically assesses >
Use following condition, the chemical sensor to the invention described above example and existing chemical sensor are electrically assessed respectively, and the electric current being measured is noted down, respectively as shown in Figures 10 and 11.
Solution: the potassium chloride (KCl) of 100 millimolar concentrations (mM)
Amalyzing substances: the ferricyanide (ferricyanide) of 3 millimolar concentrations (mM)
Working electrode: graphite
Voltage range: 1 volt to-0.4 volt
Scan speed: 10 millivolts per second (10mV/s)
Figure 10 is the current-voltage figure of the above-mentioned testing electrical property gained of ultramicroelectrode process of the chemical sensor of example of the present invention.Please refer to Fig. 9, the chemical sensor manufacturing according to embodiments of the invention, in the time that the live width of its electrode is less than 25 microns, can have the electrical and good measurement repeatability of ultramicroelectrode.
Figure 11 is the current-voltage figure of the above-mentioned testing electrical property gained of general wire mark electrode process of existing chemical sensor, and wherein the live width of electrode is greater than 25 microns.Please refer to Figure 11, in the time that the live width of general wire mark electrode is greater than 25 microns, only there is the electrochemical properties of general electrode.
In sum, because the electrode of chemical sensor of the present invention has more uniform live width, therefore, chemical sensor of the present invention has higher measurement accuracy and repeatability.In addition, in the time that the electrode in chemical sensor of the present invention is ultramicroelectrode, in the process that chemical sensor is used for measuring content of chemical substances, can produce less electric double layer effect, thereby there is high diffuser efficiency, high signal noise ratio, high measurement accuracy and low voltage fading rate.
In addition, because the manufacture method of chemical sensor of the present invention is to form groove by press mold program, therefore, compared to existing micro-shadow technology or screen printing technology, the present invention can have preferably cost advantage, can produce the electrode due to even live width with high accuracy and repeatability simultaneously.Again, because the manufacture method of chemical sensor of the present invention can freely be allocated the electrode material inserted in groove and the amount of reaction material, therefore can further reduce manufacturing cost and required time of technique.
Although the present invention discloses as above with preferred embodiments; so it is not in order to limit the present invention; any those skilled in the art; without departing from the spirit and scope of the present invention; when being used for a variety of modifications and variations, the scope that therefore protection scope of the present invention ought define depending on accompanying claims is as the criterion.
Claims (17)
1. a chemical sensor, it has a sensing area, it is characterized in that, and this chemical sensor comprises:
One base material, this base material has at least one groove, and one end of this at least one groove extends in this sensing area;
One electrode material, inserts in this at least one groove, and to form at least one electrode, wherein the thickness of this electrode material is less than or equal to the degree of depth of this at least one groove, and one end of this at least one electrode extends in this sensing area;
One reaction material, covers this at least one electrode that is positioned at this sensing area; And
One cover plate, is positioned on this base material.
2. chemical sensor according to claim 1, is characterized in that, this at least one groove is multiple grooves, and this electrode material inserts in those grooves to form multiple electrodes, and this reaction material covers those electrodes that are positioned at this sensing area.
3. chemical sensor according to claim 2, it is characterized in that, the thickness of this electrode material is less than the degree of depth of this at least one groove, and this reaction material of part inserts in this at least one groove to cover this at least one electrode, and it is separated from one another to be positioned at this reaction materials of two adjacent grooves.
4. chemical sensor according to claim 2, is characterized in that, this reaction material being positioned on those adjacent electrodes is not separated.
5. chemical sensor according to claim 2, is characterized in that, this electrode material comprises multiple conductive material, and it is incomplete same to be positioned at those conductive materials of those grooves.
6. chemical sensor according to claim 1, it is characterized in that, more comprise at least one projected electrode, be positioned on a surface of this base material at this at least one groove place, one end of this at least one projected electrode extends in this sensing area, and this reaction material covers this at least one projected electrode that is positioned at this sensing area.
7. chemical sensor according to claim 1, is characterized in that, this base material is a flexible base plate, and this at least one groove is positioned at this flexible base plate and does not run through this flexible base plate.
8. chemical sensor according to claim 1, is characterized in that, this base material comprises:
One flexible base plate; And
One resin bed, is positioned on this flexible base plate, and wherein those grooves are positioned at this resin bed and exposed this flexible base plate or not exposed this flexible base plate.
9. chemical sensor according to claim 1, is characterized in that, more comprises a stilt, be configured between this base material and this cover plate and with this cover plate and contact, and in sensing area, this stilt is positioned at the edge of this base material.
10. chemical sensor according to claim 1, is characterized in that, the width of this at least one groove is less than 25 microns.
The manufacture method of 11. 1 kinds of chemical sensors, this chemical sensor has a sensing area, it is characterized in that, and the method comprises:
One base material is provided;
In this base material, form at least one groove, and one end of this at least one groove extends in this sensing area;
In this at least one groove, insert an electrode material, to form at least one electrode, wherein the thickness of this electrode material is less than or equal to the degree of depth of this at least one groove, and one end of this at least one electrode extends in this sensing area;
In this sensing area, form a reaction material, to cover this at least one electrode; And
On this base material, configure a cover plate.
The manufacture method of 12. chemical sensors according to claim 11, is characterized in that, the method that forms this at least one groove in this base material shape comprises:
One flexible base plate is provided; And
This flexible base plate is carried out to a patterning program, and to form this at least one groove in this flexible base plate, and this at least one groove does not run through this flexible base plate.
The manufacture method of 13. chemical sensors according to claim 11, is characterized in that, the method that forms this at least one groove in this base material shape comprises:
One flexible base plate is provided;
On this flexible base plate, form a resin bed; And
This resin bed is carried out to a patterning program, and to form this at least one groove in this resin bed, this at least one groove is positioned at this resin bed and exposed this flexible base plate or not exposed this flexible base plate.
14. according to the manufacture method of the chemical sensor described in claim 12 or 13, it is characterized in that, this patterning program comprises a press mold program.
The manufacture method of 15. chemical sensors according to claim 11, is characterized in that, inserts this electrode material and comprise a rubbing method in this at least one groove.
The manufacture method of 16. chemical sensors according to claim 11, is characterized in that, more comprises and forms at least one projected electrode, and this at least one projected electrode is positioned on the surface of this base material at this at least one groove place.
The manufacture method of 17. chemical sensors according to claim 16, is characterized in that, the formation method of this at least one projected electrode comprises screen printing process and ink-jet application technique.
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| Application Number | Priority Date | Filing Date | Title |
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| TW103108683 | 2014-03-12 | ||
| TW103108683A TWI515429B (en) | 2014-03-12 | 2014-03-12 | Chemical sensor and method for fabricating the same |
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| CN103983671A true CN103983671A (en) | 2014-08-13 |
| CN103983671B CN103983671B (en) | 2017-04-12 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106645341A (en) * | 2016-11-30 | 2017-05-10 | 友达光电股份有限公司 | Chemical sensor and method for manufacturing the same |
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| US6325979B1 (en) * | 1996-10-15 | 2001-12-04 | Robert Bosch Gmbh | Device for gas-sensoring electrodes |
| JP3462418B2 (en) * | 1999-02-12 | 2003-11-05 | 日本電信電話株式会社 | Integrated biosensor and method for manufacturing the same |
| CN101310175A (en) * | 2005-11-17 | 2008-11-19 | Nxp股份有限公司 | Moisture sensor |
| CN202916234U (en) * | 2012-11-28 | 2013-05-01 | 清华大学 | Flexible multi-ion concentration detection sensor |
| WO2013171144A1 (en) * | 2012-05-15 | 2013-11-21 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method for producing a capacitive sensor |
-
2014
- 2014-03-12 TW TW103108683A patent/TWI515429B/en not_active IP Right Cessation
- 2014-05-12 CN CN201410199052.6A patent/CN103983671B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6325979B1 (en) * | 1996-10-15 | 2001-12-04 | Robert Bosch Gmbh | Device for gas-sensoring electrodes |
| JP3462418B2 (en) * | 1999-02-12 | 2003-11-05 | 日本電信電話株式会社 | Integrated biosensor and method for manufacturing the same |
| CN101310175A (en) * | 2005-11-17 | 2008-11-19 | Nxp股份有限公司 | Moisture sensor |
| WO2013171144A1 (en) * | 2012-05-15 | 2013-11-21 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method for producing a capacitive sensor |
| CN202916234U (en) * | 2012-11-28 | 2013-05-01 | 清华大学 | Flexible multi-ion concentration detection sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106645341A (en) * | 2016-11-30 | 2017-05-10 | 友达光电股份有限公司 | Chemical sensor and method for manufacturing the same |
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| Publication number | Publication date |
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| TW201534913A (en) | 2015-09-16 |
| TWI515429B (en) | 2016-01-01 |
| CN103983671B (en) | 2017-04-12 |
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